84033 ⎘
Manufacture or treatment of devices or systems in or on a substrate; Treatments or methods for avoiding stiction of flexible or moving parts of MEMS Treatments or methods for avoiding stiction of flexible or moving parts of MEMS not provided for in groups -
Anti-Stiction Process for Mems Device
#2METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE CAP
#3METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE
#4METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE
#5METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE CAP
#6Method and system for fabricating a MEMS device
#7Method and system for fabricating a MEMS device
#8Anti-stiction process for MEMS device
#9Anti-stiction process for MEMS device
#10Method and apparatus for reducing in-process and in-use stiction for MEMS devices
#11Systems and methods for uniform target erosion magnetic assemblies
#12Anti-stiction process for MEMS device
#13Method and apparatus for reducing in-process and in-use stiction for MEMS devices
#14Method and apparatus for reducing in-process and in-use stiction for MEMS devices
#15Method for manufacturing a micromechanical timepiece part and said micromechanical timepiece part
#16MEMS structure having rounded edge stopper and method of fabricating the same
#17METHOD FOR FORMING ANTI STICTION COATING AND ANTI STICTION COATING THEREOF
#18PACKAGING MICRO DEVICES
#19Method for preparing silicon wafer with rough surface and silicon wafer