B81C1/00912 - CPC Classification Index

ClassID:

84023 ⎘

B81C1/00912 - CPC Classification

Classification description:

Manufacture or treatment of devices or systems in or on a substrate Treatments or methods for avoiding stiction of flexible or moving parts of MEMS

Sub-classes:

Anti-Stiction Process for Mems Device

Anti-stiction process for MEMS device

Anti-stiction process for MEMS device

Systems and methods for uniform target erosion magnetic assemblies

Anti-stiction process for MEMS device

Semiconductor device

Method for cleaning and drying semiconductor substrate

Methods and apparatus for MEMS structure release