84136 ⎘
Manufacture or treatment of microstructural devices or systems; Processes for manufacturing substrate-free structures Hot embossing
GENERATING A MEMS DEVICE WITH GLASS COVER AND MEMS DEVICE
#2MICRO-NANO CHANNEL STRUCTURE, SENSOR AND MANUFACTURING METHOD THEREOF, AND MICROFLUIDIC DEVICE
#3Micro-nano channel structure, sensor and manufacturing method thereof, and microfluidic device
#4Antimicrobial bandage with nanostructures
#5GENERATING A MEMS DEVICE WITH GLASS COVER AND MEMS DEVICE
#6Antimicrobial bandage with nanostructures
#7ELECTROSTATIC ACOUSTIC TRANSDUCER
#8Method for manufacturing doubly re-entrant microstructures
#9Thin capping for MEMS devices
#10Apparatus for nano structure fabrication
#11Process and system for fabrication of patterns on a surface
#12Nano structure fabrication
#13METHODS FOR FORMING COMPOSITIONS CONTAINING GLASS
#14Production of microfluidic polymeric devices by photo-assisted and/or thermally assisted printing
#15Device and Method for Obtaining a Substrate Structured on Micrometric or Nanometric Scale
#16Methods for making microfluidic devices and devices produced thereof
#17Plastic microchip for microparticle analysis and method for manufacturing the same
#18MICROSTRUCTURED TOOL AND METHOD OF MAKING SAME USING LASER ABLATION
#19Nano impression lithographic process which involves the use of a die having a region able to generate heat
#20Pattern transferring mold, pattern transferring apparatus and device manufacturing method using the same
#21Stamper, lithographic method of using the stamper and method of forming a structure by a lithographic pattern