B81C2201/00 - CPC Classification Index

ClassID:

84061 ⎘

B81C2201/00 - CPC Classification

Classification description:

Manufacture or treatment of microstructural devices or systems

Sub-classes:

B81C2201/01 » in or on a substrate 13
B81C2201/03 » Processes for manufacturing substrate-free structures 0
B81C2201/05 » Temporary protection of devices or parts of the devices during manufacturing 6
B81C2201/11 » Treatments for avoiding stiction of elastic or moving parts of MEMS 7

Recent Application in this class:

20200149889

Physical quantity detection device, manufacturing method for physical quantity detection device, electronic apparatus, and moving object