84166 ⎘
Forming microstructural systems; Aligning components to be assembled Active alignment, e.g. using internal or external actuators, magnets, sensors, marks or marks detectors
FORMING METHODS OF PACKAGE STRUCTURE AND APPARATUS
#2LENSLESS NEAR-CONTACT IMAGING SYSTEM FOR MICRO ASSEMBLY
#3LENSLESS NEAR-CONTACT IMAGING SYSTEM FOR MICRO ASSEMBLY
#4WAFER-LEVEL FABRICATION PROCESSES FOR FERRIMAGNETIC RESONATORS AND RESONATOR DEVICES
#5Membrane Device Fabrication
#6Sound producing cell
#7PACKAGE STRUCTURE, APPARATUS AND FORMING METHODS THEREOF
#8Sound producing cell and manufacturing method thereof
#9A PROCESS AND APPARATUS FOR THE PREPARATION OF A BONDED SUBSTRATE
#10METHOD AND ARRANGEMENT FOR ASSEMBLY OF MICROCHIPS INTO A SEPARATE SUBSTRATE
#11Device and method for monitoring surface condition of contact surface of detected object
#12System and methods for microfabrication
#13Micro-electromechanical (MEM) power relay
#14Micro Devices Formed by Flex Circuit Substrates
#15Micro devices formed by flex circuit substrates
#16Method of manufacturing a semiconductor device, and a semiconductor substrate
#17Method for producing MEMS transducer, MEMS transducer, ultrasound probe, and ultrasound diagnostic apparatus
#18Method for manufacturing an electromechanical device and corresponding device
#19Micro-transfer-printed compound sensor device
#20Externally induced charge patterning using rectifying devices
#21Microphone and method to position a membrane between two backplates
#22Electronic device, electronic apparatus, and method of manufacturing electronic device
#23Eutectic bonding of thin chips on a carrier substrate
#24Alignment methods in fluid-filled MEMS displays
#25Joining method and joint for microfluidic components
#26METHODS FOR ALIGNED TRANSFER OF THIN MEMBRANES TO SUBSTRATES
#27CONTAINERS ASSEMBLED IN FLUID AND CORRESPONDING PRODUCTION
#28Device for grasping and active release of micro and nano objects
#29Device for self-aligning and affixing of a microchannel plate in a micro-system and method the same
#30Assembling substrates that can form 3-D structures
#31Wafer arrangement and a method for manufacturing the wafer arrangement
#32MEMS devices and methods of assembling micro electromechanical systems (MEMS)
#33Assembling stacked substrates that can form 3-D structures
#34Bonded wafer assembly system and method
#35Acceleration sensor and method of manufacturing acceleration sensor
#36Method of manufacturing multi-level, silicon, micromechanical parts and parts thereby obtained
#37Device for measuring alignment of adjoining structures
#38MEMS BUMP PATTERN DIE ALIGNMENT SYSTEMS AND METHODS
#39Method for packing a display device and the device obtained thereof
#40Alignment method of two substrates by microcoils
#41Placing a MEMS part on an application platform using a guide mask
#42Assembling stacked substrates that can form cylindrical inductors and adjustable transformers
#43Method of manufacturing vibrating micromechanical structures
#44Method of manufacturing vibrating micromechanical structures
#45Vacuum packaged single crystal silicon device
#46Vacuum packaged single crystal silicon device
#47Method and device for wafer backside alignment overlay accuracy
#48Triple alignment substrate method and structure for packaging devices
#49Monolithic structures including alignment and/or retention fixtures for accepting components
#50Alignment methods in fluid-filled MEMS displays
#51Method for packaging semiconductor device and package structure thereof
#52Wafer and method of cutting the same
#53Triple alignment substrate method and structure for packaging devices
#54Bonding interface for micro-device packaging
#55Re-assembly process for MEMS structures
#56Vacuum packaged single crystal silicon device
#57Method of manufacturing vibrating micromechanical structures
#58Re-assembly process for MEMS structures
#59Alignment method of using alignment marks on wafer edge
#60Methods and systems for aligning and coupling devices
#61Method and structure for aligning mechanical based device to integrated circuits
#62Method and structure for fabricating mechanical mirror structures using backside alignment techniques
#63Vibrating beam accelerometer
#64Vibrating beam accelerometer two-wafer fabrication process