84165 ⎘
Forming microstructural systems Aligning components to be assembled
Sub-classes:Capping plate for panel scale packaging of MEMS products
#2ASSEMBLY AND PACKAGING OF MEMS DEVICE
#3Self-cleaning liquid level sensor
#4Method for producing MEMS transducer, MEMS transducer, ultrasound probe, and ultrasound diagnostic apparatus
#5Assembly and packaging of MEMS device