Patents-Review.com
ClassID:

84174 ⎘

B81C2203/0714 - CPC Classification

Classification description:

Forming microstructural systems; Integrating an electronic processing unit with a micromechanical structure; Monolithic integration, i.e. the electronic processing unit is formed on or in the same substrate as the micromechanical structure Forming the micromechanical structure with a CMOS process

Recent Application in this class:
#1
20260076269
2026-03-12

SEMICONDUCTOR DEVICE AND OPERATING METHOD THEREOF

 #2
20250329594
2025-10-23

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURE

 #3
20230386948
2023-11-30

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURE

 #4
20230278856
2023-09-07

Method and structure for CMOS-MEMS thin film encapsulation

 #5
20220268648
2022-08-25

Integrated digital force sensors and related methods of manufacture

 #6
20220185660
2022-06-16

Monolithic post complementary metal-oxide-semiconductor integration of thermoelectric-based infrared detector

 #7
20220162062
2022-05-26

Heterogenous integration of complementary metal-oxide-semiconductor and MEMS sensors

 #8
20220130899
2022-04-28

INTEGRATED MEMS-CMOS ULTRASONIC SENSOR

 #9
20210087056
2021-03-25

MEMS structure and manufacturing method thereof

 #10
20200339412
2020-10-29

MEMS devices including MEMS dies and connectors thereto

 #11
20200317506
2020-10-08

Method and structure for CMOS-MEMS thin film encapsulation

 #12
20200290867
2020-09-17

Microelectromechanical device, method for manufacturing a microelectromechanical device, and method for manufacturing a system on chip using a CMOS process

 #13
20200254487
2020-08-13

Bi-layer metal electrode for micromachined ultrasonic transducer devices

 #14
20200207613
2020-07-02

Complementary metal-oxide-semiconductor (CMOS) micro electro-mechanical (MEMS) microphone and method for fabricating the same

 #15
20200024129
2020-01-23

MEMS devices including MEMS dies and connectors thereto

 #16
20190383676
2019-12-19

Integrated digital force sensors and related methods of manufacture

 #17
20190360924
2019-11-28

Gas sensor MEMS structures and methods of fabrication thereof

 #18
20190345029
2019-11-14

Method for fabricating MEMS device integrated with a semiconductor integrated circuit

 #19
20180297838
2018-10-18

Microelectromechanical device, method for manufacturing a microelectromechanical device, and method for manufacturing a system on chip using a CMOS process

 #20
20180201503
2018-07-19

Micro-electro-mechanical system (MEMS) structures and design structures

 #21
20180201502
2018-07-19

Micro-electro-mechanical system (MEMS) structures and design structures

 #22
20180194613
2018-07-12

MEMS devices including MEMS dies and connectors thereto

 #23
20180179052
2018-06-28

Micro-electro-mechanical system (MEMS) structures and design structures

 #24
20180170747
2018-06-21

Group III-N MEMS structures on a group IV substrate

 #25
20180162725
2018-06-14

MEMS device integrated with a semiconductor integrated circuit and manufacturing method thereof

 #26
20180118560
2018-05-03

Method and structure for CMOS-MEMS thin film encapsulation

 #27
20180086627
2018-03-29

Integrating MEMS structures with interconnects and vias

 #28
20170355592
2017-12-14

Support pillar

 #29
20170313576
2017-11-02

Support pillar

 #30
20170313575
2017-11-02

Support pillar

 #31
20170297904
2017-10-19

Getter electrode to improve vacuum level in a microelectromechanical systems (MEMS) device

 #32
20170260042
2017-09-14

Method and structure for CMOS-MEMS thin film encapsulation

 #33
20170088417
2017-03-30

ELECTRONIC DEVICE AND MANUFACTURING METHOD THEREOF

 #34
20170055085
2017-02-23

Silicon microphone with suspended diaphragm and system with the same

 #35
20170036905
2017-02-09

MEMS structure with an etch stop layer buried within inter-dielectric layer

 #36
20170005045
2017-01-05

Semiconductor device and method including an intertial mass element

 #37
20160368762
2016-12-22

MEMS devices including MEMS dies and connectors thereto

 #38
20160332871
2016-11-17

Process for manufacturing a microelectromechanical interaction system for a storage medium

 #39
20160332865
2016-11-17

Support pillar

 #40
20160272487
2016-09-22

Semiconductor pressure sensor and method of fabricating same

 #41
20160264410
2016-09-15

Micro-electro-mechanical system (MEMS) structures and design structures

 #42
20160264406
2016-09-15

Micro-electro-mechanical system (MEMS) structures and design structures

 #43
20160264405
2016-09-15

Micro-Electro-Mechanical System (MEMS) structures and design structures

 #44
20160197047
2016-07-07

Integrated circuit with sensor and method of manufacturing such an integrated circuit

 #45
20160161957
2016-06-09

Integration of pressure sensors into integrated circuit fabrication and packaging

 #46
20160090300
2016-03-31

PIEZOELECTRIC MICROPHONE WITH INTEGRATED CMOS

 #47
20160060101
2016-03-03

Integrated CMOS/MEMS microphone die components

 #48
20160043108
2016-02-11

Semiconductor Structure with Multiple Active Layers in an SOI Wafer

 #49
20150368091
2015-12-24

MEMS devices utilizing a thick metal layer of an interconnect metal film stack

 #50
20150368090
2015-12-24

Micro-electro-mechanical system (MEMS) structures and design structures

 #51
20150353344
2015-12-10

Cavity structures for MEMS devices

 #52
20150315015
2015-11-05

Stacked semiconductor device and method of forming the same related cases

 #53
20150203349
2015-07-23

Process for producing a metal device housed in a closed housing within an integrated circuit, and corresponding integrated circuit

 #54
20150185247
2015-07-02

Magnet placement for integrated sensor packages

 #55
20150166331
2015-06-18

Semiconductor device

 #56
20150151961
2015-06-04

Lateral etch stop for NEMS release etch for high density NEMS/CMOS monolithic integration

 #57
20150035089
2015-02-05

MEMS device and method of forming the same

 #58
20150014794
2015-01-15

Integrated circuit provided with a device for detecting its spatial orientation and/or a modification of this orientation

 #59
20150004732
2015-01-01

Method of fabricating integrated structure for MEMS device and semiconductor device

 #60
20140367805
2014-12-18

Method for forming MEMS structure with an etch stop layer buried within inter-dielectric layer

 #61
20140339655
2014-11-20

MEMS package structure

 #62
20140339607
2014-11-20

Fabricating polysilicon MOS devices and passive ESD devices

 #63
20140319585
2014-10-30

Semiconductor pressure sensor and fabrication method thereof

 #64
20140308771
2014-10-16

Method for forming micro-electro-mechanical system (MEMS) beam structure

 #65
20140264649
2014-09-18

Micromechanical acceleration sensor having conductor tracks and cavities

 #66
20140264474
2014-09-18

Stacked semiconductor device and method of forming the same related cases

 #67
20140191385
2014-07-10

Process for producing a metal device housed in a closed housing within an integrated circuit, and corresponding integrated circuit

 #68
20130307095
2013-11-21

Composite wafer semiconductor

 #69
20130299926
2013-11-14

Method for MEMS device fabrication and device formed

 #70
20130161702
2013-06-27

INTEGRATED MEMS DEVICE

 #71
20130102100
2013-04-25

Method for making micro-electro-mechanical system device

 #72
20130087882
2013-04-11

Lateral etch stop for NEMS release etch for high density NEMS/CMOS monolithic integration

 #73
20130069177
2013-03-21

Micro electronic device having CMOS circuit and MEMS resonator formed on common silicon substrate

 #74
20130023081
2013-01-24

Method for fabricating integrated circuit

 #75
20120319219
2012-12-20

Epitaxial silicon CMOS-MEMS microphones and method for manufacturing

 #76
20120319174
2012-12-20

CMOS compatible MEMS microphone and method for manufacturing the same

 #77
20120267732
2012-10-25

MEMS package structure

 #78
20120211845
2012-08-23

Integrated circuit with sensor and method of manufacturing such an integrated circuit

 #79
20120211805
2012-08-23

CAVITY STRUCTURES FOR MEMS DEVICES

 #80
20120205808
2012-08-16

MEMS and protection structure thereof

 #81
20120194286
2012-08-02

METHODS AND SYSTEMS FOR MEMS CMOS DEVICES HAVING ARRAYS OF ELEMENTS

 #82
20120181638
2012-07-19

Method for MEMS device fabrication and device formed

 #83
20120175778
2012-07-12

Semiconductor device and wafer structure

 #84
20120142135
2012-06-07

Method of fabricating sensors having functionalized resonating beams

 #85
20120126433
2012-05-24

METHODS AND SYSTEMS FOR FABRICATION OF MEMS CMOS DEVICES IN LOWER NODE DESIGNS

 #86
20120049299
2012-03-01

Composite wafer semiconductor

 #87
20110316054
2011-12-29

Method, apparatus, and system for micromechanical gas chemical sensing capacitor

 #88
20110300659
2011-12-08

Method for fabricating MEMS device

 #89
20110250760
2011-10-13

Method for manufacturing a micro-electromechanical structure

 #90
20110241137
2011-10-06

Integrated circuit and fabricating method thereof

 #91
20110227176
2011-09-22

MEMS chip and package method thereof

 #92
20110183456
2011-07-28

Method for fabricating MEMS device

 #93
20110183455
2011-07-28

Micro-electro-mechanical system (MEMS) sensor and method for making same

 #94
20110180943
2011-07-28

Thin film wafer level package

 #95
20110156106
2011-06-30

Hermetic MEMS device and method for fabricating hermetic MEMS device and package structure of MEMS device

 #96
20110140216
2011-06-16

Method of wafer-level fabrication of MEMS devices

 #97
20110133256
2011-06-09

CMOS-MEMS cantilever structure

 #98
20110127620
2011-06-02

MEMS integrated chip and method for making same

 #99
20110117747
2011-05-19

METHOD OF FABRICATING SINGLE CHIP FOR INTEGRATING FIELD-EFFECT TRANSISTOR INTO MEMS STRUCTURE

 #100
20110115035
2011-05-19

General strength and sensitivity enhancement method for micromachined device

 #101
20110104844
2011-05-05

Method for fabricating micro-electro-mechanical system (MEMS) device

 #102
20110089521
2011-04-21

Electronic device and method for manufacturing thereof

 #103
20110084394
2011-04-14

Semiconductor structure, pad structure and protection structure

 #104
20110062532
2011-03-17

Package method of micro-electro-mechanical system chip

 #105
20110037160
2011-02-17

Microelectronic device and fabricating method thereof and MEMS package structure and fabricating method thereof

 #106
20110037132
2011-02-17

MEMS package structure and method for fabricating the same

 #107
20110031624
2011-02-10

MEMS and a protection structure thereof

 #108
20110027929
2011-02-03

Method of fabricating micro-electromechanical system microphone structure

 #109
20110024851
2011-02-03

Micro-electromechanical system microphone structure

 #110
20110024850
2011-02-03

Micro electronic device and method for fabricating micro electromechanical system resonator thereof

 #111
20110012211
2011-01-20

SEMICONDUCTOR DEVICE AND METHOD

 #112
20110008962
2011-01-13

Method for fabricating a multilayer microstructure with balancing residual stress capability

 #113
20110006350
2011-01-13

Integrated structure of MEMS device and CMOS image sensor device

 #114
20100330722
2010-12-30

CMOS microelectromechanical system (MEMS) device and fabrication method thereof

 #115
20100320606
2010-12-23

Method for forming MEMS devices having low contact resistance and devices obtained thereof

 #116
20100317138
2010-12-16

Method for fabricating MEMS structure

 #117
20100314669
2010-12-16

Capacitive MEMS switch and method of fabricating the same

 #118
20100308444
2010-12-09

Method of manufacturing an electronic device

 #119
20100295138
2010-11-25

METHODS AND SYSTEMS FOR FABRICATION OF MEMS CMOS DEVICES

 #120
20100273286
2010-10-28

Method of fabricating an integrated CMOS-MEMS device

 #121
20100230767
2010-09-16

MEMS SENSOR, MEMS SENSOR MANUFACTURING METHOD, AND ELECTRONIC DEVICE

 #122
20100213557
2010-08-26

Micro-electro-mechanical-system sensor and method for making same

 #123
20100148283
2010-06-17

Integrated structure of MEMS device and CMOS image sensor device and fabricating method thereof

 #124
20100140734
2010-06-10

Electronic device and method for manufacturing thereof

 #125
20100140669
2010-06-10

MICROFABRICATION METHODS FOR FORMING ROBUST ISOLATION AND PACKAGING

 #126
20100120257
2010-05-13

Method for making micro-electro-mechanical system device

 #127
20100116055
2010-05-13

Micro-electro-mechanical system device, out-of-plane sensor and method for making micro-electro-mechanical system device

 #128
20100084723
2010-04-08

MEMS structure with suspended microstructure that includes dielectric layer sandwiched by plural metal layers and the dielectric layer having an edge surrounded by peripheral metal wall

 #129
20100072561
2010-03-25

Method for fabricating micro-electro-mechanical system (MEMS) device

 #130
20100065931
2010-03-18

Method of fabricating micro-electromechanical system microphone structure

 #131
20100052179
2010-03-04

MEMS structure with metal protection rings

 #132
20100044807
2010-02-25

CMOS-compatible movable microstructure based devices

 #133
20100035387
2010-02-11

Method for fabricating a CMOS-compatible MEMS device

 #134
20090296307
2009-12-03

MEMS based RF components with vertical motion and parallel-plate structure and manufacture thereof using standard CMOS technologies

 #135
20090285419
2009-11-19

MICROELECTROMECHANICAL SYSTEM MICROPHONE

 #136
20090261387
2009-10-22

CMOS integrated process for fabricating monocrystalline silicon micromechanical elements by porous silicon micromachining

 #137
20090243004
2009-10-01

Integrated structure for MEMS device and semiconductor device and method of fabricating the same

 #138
20090179233
2009-07-16

Micro-electro-mechanical systems (MEMS) device

 #139
20090166772
2009-07-02

Micro-electro-mechanical systems (MEMS) device and process for fabricating the same

 #140
20090155948
2009-06-18

METHODS FOR MANUFACTURING CMOS COMPATIBLE BIO-SENSORS

 #141
20090115046
2009-05-07

Micro-electro-mechanical system device and method for making same

 #142
20090090693
2009-04-09

Method for fabricating micromachined structures

 #143
20090064785
2009-03-12

Integrated micro electro-mechanical system and manufacturing method thereof

 #144
20090049911
2009-02-26

Integrated micro electro-mechanical system and manufacturing method thereof

 #145
20080164576
2008-07-10

Process for manufacturing a microelectromechanical interaction system for a storage medium

 #146
20080105951
2008-05-08

Electronic device and method for manufacturing thereof

 #147
20060205106
2006-09-14

Integrated micro electro-mechanical system and manufacturing method thereof

 #148
15910531
2019-02-26

Hybrid CMOS-MEMS devices adapted for high-temperature operation and method for their manufacture

 #149
14814083
2016-11-29

Integration of electromechanical and CMOS devices in front-end-of-line using replacement metal gate process flow

 #150
14105253
2015-01-27

Semiconductor device