84176 ⎘
Forming microstructural systems; Integrating an electronic processing unit with a micromechanical structure; Monolithic integration, i.e. the electronic processing unit is formed on or in the same substrate as the micromechanical structure Pre-CMOS, i.e. forming the micromechanical structure before the CMOS circuit
FOUNDRY-COMPATIBLE THROUGH SILICON VIA PROCESS FOR INTEGRATED MICRO-SPEAKER AND MICROPHONE
#2FOUNDRY-COMPATIBLE PROCESS FOR INTEGRATED MICRO-SPEAKER AND MICROPHONE
#3Integrated digital force sensors and related methods of manufacture
#4Microfabricated ultrasonic transducer having individual cells with electrically isolated electrode sections
#5Microfabricated ultrasonic transducer having individual cells with electrically isolated electrode sections
#6Integrated digital force sensors and related methods of manufacture
#7Microfabricated ultrasonic transducer having individual cells with electrically isolated electrode sections
#8Microfabricated ultrasonic transducer having individual cells with electrically isolated electrode sections
#9Forming a microelectromechanical systems (MEMS) device using silicon-on-nothing and epitaxy
#10Semiconductor structure and manufacturing method thereof
#11Pressure sensor, manufacturing method of pressure sensor, altimeter, electronic apparatus, and moving object
#12Pressure sensor having a bossed diaphragm
#13Semiconductor Structure with Multiple Active Layers in an SOI Wafer
#14Method of forming a suspended structure and a transistor co-integrated on a same substrate
#15Method of forming monolithic CMOS-MEMS hybrid integrated, packaged structures
#16Manufacturing method of micro-electro-mechanical device
#17Method for releasing the suspended structure of a NEMS and/or NEMS component
#18Device with integrated circuit and encapsulated N/MEMS and method for production
#19Integrated microphone
#20Method of fabricating an integrated CMOS-MEMS device
#21MICROELECTROMECHANICAL SYSTEM
#22Semiconductor device and manufacturing method thereof
#23CMOS-compatible bulk-micromachining process for single-crystal MEMS/NEMS devices
#24INTEGRATED MEMS DEVICE AND CONTROL CIRCUIT
#25Method and structures for fabricating MEMS devices on compliant layers
#26Devices for fabricating tri-layer beams
#27Semiconductor device with integrated circuit electrically connected to a MEMS sensor by a through-electrode
#28Microelectromechanical system and process of making the same
#29INTEGRATED ARRANGEMENT AND METHOD FOR PRODUCTION
#30Integrated microphone
#31Method for manufacturing a micro-electro-mechanical device
#32Method of forming an integrated MEMS resonator
#33Manufacturing method of micro-electro-mechanical device
#34Semiconductor device and manufacturing method thereof
#35Integrated monolithic tri-axial micromachined accelerometer
#36Production of microelectromechanical systems (mems) using the high-temperature silicon fusion bonding of wafers
#37Silicon carbide MEMS structures and methods of forming the same
#38Method for fabricating high aspect ratio MEMS device with integrated circuit on the same substrate using post-CMOS process