84178 ⎘
Forming microstructural systems; Integrating an electronic processing unit with a micromechanical structure; Monolithic integration, i.e. the electronic processing unit is formed on or in the same substrate as the micromechanical structure Interleave, i.e. simultaneously forming the micromechanical structure and the CMOS circuit
Monolithic post complementary metal-oxide-semiconductor integration of thermoelectric-based infrared detector
#2CMOS cap for MEMS devices
#3CMOS thermal fluid flow sensing device employing a flow sensor and a pressure sensor on a single membrane
#4Method for manufacturing a thermoelectric-based infrared detector having a MEMS structure above a hybrid component
#5Systems and methods for genome mapping
#6Integrating MEMS structures with interconnects and vias
#7Two-port SRAM connection structure
#8MEMS device structure with a capping structure
#9Two-port SRAM connection structure
#10MEMS device with a capping substrate
#11Method for MEMS structure with dual-level structural layer and acoustic port
#12MEMS devices utilizing a thick metal layer of an interconnect metal film stack
#13Stress-controlled formation of TiN hard mask
#14Lateral etch stop for NEMS release etch for high density NEMS/CMOS monolithic integration
#15Thin-film transistors incorporated into three dimensional MEMS structures
#16Micromachine and method for manufacturing the same
#17Method of fabricating integrated structure for MEMS device and semiconductor device
#18Fabricating polysilicon MOS devices and passive ESD devices
#19Semiconductor pressure sensor and fabrication method thereof
#20Electronic device, method for producing the same, and oscillator
#21MEMS device with a capping substrate
#22Micro-electromechanical system devices
#23Micromachine and method for manufacturing the same
#24INTEGRATED MEMS DEVICE
#25Lateral etch stop for NEMS release etch for high density NEMS/CMOS monolithic integration
#26Embedded MEMS sensors and related methods
#27Method of forming a die having an IC region adjacent a MEMS region
#28Micro electronic mechanical system structure
#29Micromechanical component
#30Micro electro mechanical device and manufacturing method thereof
#31Micro-electromechanical system devices
#32Method of manufacturing micromachine having spatial portion within
#33Solid-state image pickup apparatus, method for manufacturing same, and electronic device
#34Integrated circuit and fabricating method thereof
#35Microelectromechanical system (MEMS) device and methods for fabricating the same
#36Manufacturing method of micro electronic mechanical system structure
#37Method of forming a die having an IC region adjacent a MEMS region
#38METHOD OF FABRICATING SINGLE CHIP FOR INTEGRATING FIELD-EFFECT TRANSISTOR INTO MEMS STRUCTURE
#39Monolithic IC and MEMS microfabrication process
#40Method of fabricating micro-electromechanical system microphone structure
#41Micro-electromechanical system microphone structure
#42Method for fabricating MEMS structure
#43Proof-mass with supporting structure on integrated circuit-MEMS platform and method of fabricating the same
#44Micro electro mechanical device and manufacturing method thereof
#45Semiconductor device
#46Method of fabricating micro-electromechanical system microphone structure
#47MEMS structure with metal protection rings
#48CMOS-compatible movable microstructure based devices
#49Method for fabricating a CMOS-compatible MEMS device
#50Micro-electromechanical system devices
#51MICROELECTROMECHANICAL SYSTEM MICROPHONE
#52Integrated Device
#53CMOS integrated process for fabricating monocrystalline silicon micromechanical elements by porous silicon micromachining
#54Integrated structure for MEMS device and semiconductor device and method of fabricating the same
#55Method for manufacturing a sensor array including a monolithically integrated circuit
#56Method for fabricating micromachined structures
#57Integrated micro electro-mechanical system and manufacturing method thereof
#58Integrated micro electro-mechanical system and manufacturing method thereof
#59Proof-mass with supporting structure on integrated circuit-MEMS platform
#60Monolithic IC and MEMS microfabrication process
#61Micro electro mechanical device and manufacturing method thereof
#62Micromachine device with a spatial portion formed within
#63Manufacturing process for integrated piezo elements
#64Integrated micro electro-mechanical system and manufacturing method thereof
#65Hybrid CMOS-MEMS devices adapted for high-temperature operation and method for their manufacture