84179 ⎘
Forming microstructural systems; Integrating an electronic processing unit with a micromechanical structure; Monolithic integration, i.e. the electronic processing unit is formed on or in the same substrate as the micromechanical structure the electronic processing unit being integrated into an element of the micromechanical structure
PRESSURE SENSING IMPLANT
#2MEMS package with roughend interface
#3Pressure sensing implant
#4MEMS package with roughend interface
#5Oscillation frequency measuring system and method for a MEMS sensor
#6Self-powered piezoelectric energy harvesting microsystem
#7Heating system and method for microfluidic and micromechanical applications
#8PIEZOELECTRIC MICROPHONE WITH INTEGRATED CMOS
#9MEMS device with constant capacitance
#10Self-powered piezoelectric energy harvesting microsystem
#11Oscillation frequency measuring system and method for a MEMS sensor
#12Transducer, and manufacturing method of the transducer
#13Hybrid integrated component
#14Structures and methods for electrically and mechanically linked monolithically integrated transistor and NEMS/MEMS device
#15Micromechanical component having a diaphragm
#16Epitaxial silicon CMOS-MEMS microphones and method for manufacturing
#17Configurable power supply using MEMS switch
#18Heating system and method for microfluidic and micromechanical applications
#19Heating system and method for microfluidic and micromechanical applications
#20Method of making micro-pixelated fluid-assay precursor structure
#21Piezo-TFT cantilever MEMS fabrication
#22Micromechanical device and method for manufacturing a micromechanical device
#23Piezo-TFT cantilever MEMS
#24Methods for maskless lithography