84980 ⎘
Silicon; Compounds thereof; Compounds containing halogen; Halogenated silanes; Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof prepared by reacting chlorine with silicon or a silicon-containing material with the preferential formation of trichlorosilane
Sub-classes:Fouling reduction in hydrochlorosilane production
#2Hybrid TCS-siemens process equipped with 'turbo charger' FBR; method of saving electricity and equipment cost from TCS-siemens process polysilicon plants of capacity over 10,000 MT/YR
#3Method of producing trichlorosilane (TCS) rich chlorosilane product stably from a fluidized gas phase reactor (FBR) and the structure of the reactor -II
#4Apparatus for producing trichlorosilane and method for producing trichlorosilane
#5Method of producing trichlorosilane (TCS) rich product stably from hydrogenation of silicon tetra chloride (STC) in fluidized gas phase reactor (FBR) and the structure of the reactor
#6Method of producing trichlorosilane (TCS) rich Chlorosilane product stably from a fluidized gas phase reactor (FBR) and the structure of the reactor
#7ENHANCEMENTS FOR A CHLOROSILANE REDISTRIBUTION REACTOR
#8Apparatus for producing trichlorosilane
#9Apparatus for producing trichlorosilane, and method for producing trichlorosilane