84981 ⎘
Silicon; Compounds thereof; Compounds containing halogen; Halogenated silanes; Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof prepared by reacting chlorine with silicon or a silicon-containing material with the preferential formation of trichlorosilane from silicon
Fluidized-bed-type reactor, and method for manufacturing trichlorosilane
#2Method for producing chlorosilane gas using continuous tubular reactor
#3Process for producing trichlorosilane
#4Reaction apparatus for producing trichlorosilane and method for producing trichlorosilane
#5Hybrid TCS-siemens process equipped with 'turbo charger' FBR; method of saving electricity and equipment cost from TCS-siemens process polysilicon plants of capacity over 10,000 MT/YR
#6Method of producing trichlorosilane (TCS) rich chlorosilane product stably from a fluidized gas phase reactor (FBR) and the structure of the reactor -II
#7Method of producing trichlorosilane (TCS) rich product stably from hydrogenation of silicon tetra chloride (STC) in fluidized gas phase reactor (FBR) and the structure of the reactor
#8Method of producing trichlorosilane (TCS) rich Chlorosilane product stably from a fluidized gas phase reactor (FBR) and the structure of the reactor
#9Method to convert waste silicon to high purity silicon
#10METHOD TO CONVERT SILICON POWDER TO HIGH PURITY POLYSILICON THROUGH INTERMEDIATE SiF4
#11Apparatus for producing trichlorosilane
#12Recovery of silicon from kerf silicon waste
#13Method of producing trichlorosilane (TCS) rich product stably from a fluidized gas phase reactor (FBR) and the structure of the reactor
#14Reaction apparatus for producing trichlorosilane and method for producing trichlorosilane
#15Method for producing chlorosilanes