84989 ⎘
Silicon; Compounds thereof; Compounds containing halogen; Halogenated silanes Purification
Sub-classes:METHOD FOR PREPARING DIIODOSILANE
#2METHOD AND SYSTEM FOR SELECTIVE RECOVERY OF MONOCHLOROSILANE AND DICHLOROSILANE IN POLYSILICON PRODUCTION PROCESS
#3METHOD FOR PRODUCING HYDROGENATED POLYSILANE COMPOUND
#4METHOD FOR FABRICATING TRIHALODISILANE AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICE USING THE SAME
#5METHOD FOR PURIFYING IODOSILANES
#6METHOD OF PREPARING PENTACHLORODISILANE PURIFIED REACTION PRODUCT COMPRISING SAME
#7Method for producing purified chlorosilanes
#8Transsilylation catalysis
#9Partially hydrogenated chlorosilanes and methods for preparing same by selective hydrogenation
#10Method of preparing pentachlorodisilane purified reaction product comprising same
#11Process and apparatus for removal of impurities from chlorosilanes
#12TRICHLOROSILANE MANUFACTURING APPARATUS, AND METHOD FOR MANUFACTURING TRICHLOROSILANE
#13Method for increasing the purity of oligosilanes and oligosilane compounds by means of fractional crystallization
#14Purification of chlorosilanes by means of distillation and adsorption
#15PROCESS FOR REMOVAL OF BROMINE, IODINE, BROMINE- AND/OR IODINE-CONTAINING COMPOUNDS FROM CHLOROSILANES
#16Process for separating aluminum chloride from silanes
#17Primary distillation boron reduction
#18Column and process for disproportionation of chlorosilanes into monosilane and tetrachlorosilane and plant for production of monosilane
#19Trichlorosilane purification system and method for producing polycrystalline silicon
#20METHOD FOR PRODUCING TRICHLOROSILANE
#21METHOD FOR PRODUCING CHLORINATED OLIGOSILANES
#22DISTILLATION PROCESS
#23Purification of chlorosilanes by means of distillation and adsorption
#24Pentachlorodisilane production method and pentachlorodisilane produced by same
#25Method for purifying halogenated oligosilanes
#26PROCESS FOR THE PREPARATION OF PURE OCTACHLOROTRISILANES AND DECACHLOROTETRASILANES
#27Method for purifying silane compound or chlorosilane compound, method for producing polycrystalline silicon, and method for regenerating weakly basic ion-exchange resin
#28Method and device for distillative separation of a three- or multi-component mixture
#29Apparatus and process for treating liquids containing chlorosilanes
#30Methods for separating halosilanes
#31Recovery of hydrohalosilanes from reaction residues
#32METHOD FOR PRODUCING TRICHLOROSILANE
#33Trihalosilane refining device having divided wall distillation column
#34Trihalosilane refining method
#35Trihalosilane refining method
#36Trihalosilane refining method
#37Methods for purifying halosilane-containing streams
#38Motion greeting cards
#39Polycrystalline silicon
#40Method for purifying chlorosilanes
#41PROCESS FOR PRODUCTION OF SILANE AND HYDROHALOSILANES
#42Purification of trichlorosilane
#43Fouling reduction in hydrochlorosilane production
#44Process for producing polysilicon
#45Method for producing trichlorosilane
#46Processes for the purification of trichlorosilane or silicon tetrachloride
#47Reactor and plant for the continuous preparation of high-purity silicon tetrachloride or high-purity germanium tetrachloride
#48Process for purifying chlorosilanes by distillation
#49METHOD FOR PURIFYING CHLOROSILANE
#50Method and apparatus for purification of trichlorosilane
#51Method for purifying chlorosilanes
#52Systems for purifying silane
#53Processes for purifying silane
#54TETRAHALOSILANE CONVERTER
#55Method Of Analyzing A Composition Containing Impurities
#56Method for producing trichlorosilane and method for utilizing trichlorosilane
#57METHOD FOR REMOVING BORON-CONTAINING IMPURITIES FROM HALOGEN SILANES AND APPARATUS FOR PERFORMING SAID METHOD
#58Method for purification of silicon tetrachloride
#59Process and system for the purification of trichlorosilane and silicon tetrachloride
#60INSTALLATION AND METHOD FOR REDUCING THE CONTENT IN ELEMENTS, SUCH AS BORON, OF HALOSILANES
#61Processing of chlorosilane flows containing boron
#62NANODIAMOND COMPOUNDS SYNTHESIZED BY SURFACE FUNCTIONALIZATION
#63Process for preparing high-purity hexachlorodisilane
#64Process for removing aluminum and other metal chlorides from chlorosilanes
#65Chlorosilanes purifying apparatus and chlorosilanes manufacturing method
#66Effluent gas recovery process for silicon production
#67EFFLUENT GAS RECOVERY PROCESS FOR SILICON PRODUCTION
#68METHOD FOR PURIFYING CHLOROSILANES
#69PROCESS FOR PRODUCING TRICHLOROSILANE
#70Method for producing trichlorosilane and method for producing polycrystalline silicon
#71Process and apparatus for purifying silicon tetrachloride or germanium tetrachloride containing hydrogen compounds
#72Processes for the purification of trichlorosilane and silicon tetrachloride
#73Reactor, plant and industrial process for the continuous preparation of high-purity silicon tetrachloride or high-purity germanium tetrachloride
#74Method And Apparatus For Purifying Inorganic Halides And Oxyhalides Using Zeolites
#75Set of processes for removing impurities from a silcon production facility