84990 ⎘
Silicon; Compounds thereof; Compounds containing halogen; Halogenated silanes; Purification by adsorption
Sub-classes:PRODUCTION SYSTEM, PRODUCTION METHOD AND APPLICATION OF GENERAL-PURPOSE HIGH-PURITY CHEMICALS
#2PROCESS FOR REMOVING AN IMPURITY FROM A CHLOROSILANE MIXTURE
#3Method for purifying silane compound or chlorosilane compound, method for producing polycrystalline silicon, and method for regenerating weakly basic ion-exchange resin
#4METHOD FOR PRODUCING POLYCRYSTALLINE SILICON
#5Process and use of amino-functional resins for dismutating halosilanes and for removing extraneous metals
#6METHOD FOR PURIFYING CHLOROSILANE
#7Systems for purifying silane
#8Processes for purifying silane
#9Process for purifying silicon source material by high gravity rotating packed beds
#10METHOD FOR REMOVING BORON-CONTAINING IMPURITIES FROM HALOGEN SILANES AND APPARATUS FOR PERFORMING SAID METHOD
#11Method for purification of silicon tetrachloride
#12REMOVAL OF FOREIGN METALS FROM INORGANIC SILANES
#13CATALYSTS USEFUL IN THE PURIFICATION OF SILICON TETRAFLUORIDE
#14PROCESSES FOR PREPARING A CATALYST
#15Processes for purification of silicon tetrafluoride
#16Method for purification of disilicon hexachloride and high purity disilicon hexachloride
#17Method And Apparatus For Purifying Inorganic Halides And Oxyhalides Using Zeolites
#18Method for producing tetrafluorosilane
#19Process and apparatus for removing Bronsted acid impurities in binary halides
#20Purification of silicon-containing materials