C23C14/0078 - CPC Classification Index

ClassID:

120003 ⎘

C23C14/0078 - CPC Classification

Classification description:

Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material; Reactive sputtering or evaporation; Reactive sputtering by exposing the substrates to reactive gases intermittently by moving the substrates between spatially separate sputtering and reaction stations

Recent Application in this class:

20240321563

2024-09-26

FILM FORMING APPARATUS

20230221467

2023-07-13

COATINGS OF NON-PLANAR SUBSTRATES AND METHODS FOR THE PRODUCTION THEREOF

20210198782

2021-07-01

METHOD FOR PREPARING BACTERICIDAL FILM HAVING SILICON NITRIDE BINDING LAYER ON SILICONE

20210074957

2021-03-11

Manufacturing flexible organic electronic devices

20210040596

2021-02-11

METHOD OF TREATING A SUBSTRATE AND VACUUM DEPOSITION APPARATUS

20210003744

2021-01-07

Coatings of non-planar substrates and methods for the production thereof

20200219704

2020-07-09

Deposition system with integrated cooling on a rotating drum

20190352222

2019-11-21

High-refractive-index hydrogenated silicon film and methods for preparing the same

20190214234

2019-07-11

DEPOSITION SYSTEM WITH INTEGRATED COOLING ON A ROTATING DRUM

#10

20190103300

2019-04-04

Film formation apparatus

#11

20190074167

2019-03-07

Film formation apparatus

#12

20180155817

2018-06-07

Film forming apparatus

#13

20180087142

2018-03-29

Method for producing coated substrates

#14

20180011225

2018-01-11

Coatings of non-planar substrates

#15

20170187006

2017-06-29

Manufacturing flexible organic electronic devices

#16

20170117119

2017-04-27

Deposition system with integrated cooling on a rotating drum

#17

20160254127

2016-09-01

Method and device for producing uniform films on moving substrates and films produced in this way

#18

20150162173

2015-06-11

Method for producing a multilayer coating and device for carrying out said method

#19

20140356601

2014-12-04

Translucent hard thin film

#20

20140295104

2014-10-02

Film deposition apparatus and film deposition method

#21

20140205844

2014-07-24

Method for depositing silicon carbide film

#22

20140016139

2014-01-16

Optical film thickness measuring device and thin film forming apparatus using the optical film thickness measuring device

#23

20130157043

2013-06-20

COATED ARTICLE AND METHOD FOR MANUFACTURING SAME

#24

20120164051

2012-06-28

METHOD FOR THE PRODUCTION OF OXIDE AND NITRIDE COATINGS AND ITS USE

#25

20120045588

2012-02-23

Deposition system with a rotating drum

#26

20110232745

2011-09-29

ANTIREFLECTION COATING FOR MULTI-JUNCTION SOLAR CELLS

#27

20110168544

2011-07-14

Manufacturing Method of Optical Filter

#28

20110151138

2011-06-23

Method for depositing film

#29

20110091662

2011-04-21

COATING METHOD AND DEVICE USING A PLASMA-ENHANCED CHEMICAL REACTION

#30

20110014398

2011-01-20

FILM DEPOSITION APPARATUS AND FILM DEPOSITION METHOD

#31

20100264022

2010-10-21

Sputtering And Ion Beam Deposition

#32

20100001814

2010-01-07

THIN FILM ACOUSTIC REFLECTOR STACK

#33

20090145745

2009-06-11

Thin film coating system and method

#34

20090114942

2009-05-07

Apparatus for manufacturing group-III nitride semiconductor layer, method of manufacturing group-III nitride semiconductor layer, group-III nitride semiconductor light-emitting device, method of manufacturing group-III nitride semiconductor light-emitting device, and lamp

#35