Target material and its use in a sputter process

Halftone phase shift mask blank, and method of manufacture

Method and apparatus for integrated-circuit battery devices

Hard film and hard film-coated tool

Coated article with low-E coating including zirconium silicon oxynitride and methods of making same

Hard-coated member

Coated article with low-E coating including zirconium silicon oxynitride and methods of making same

Electro-optical device, method of manufacturing the same, and electronic apparatus

Thin-film battery having ultra-thin electrolyte

Arrangement and method for the production of gas-impermeable layers

Methods for making device enclosures and devices with an integrated battery

Thin-film battery devices and apparatus for making the same

Method for manufacturing of a mask blank for EUV photolithography and mask blank

Preparation of photomask blank and photomask

Effects of methods of manufacturing sputtering targets on characteristics of coatings

Method for manufacturing mask blank, method for manufacturing transfer mask, sputtering target for manufacturing mask blank

Barrier film and laminated material, container for wrapping and image display medium using the same, and manufacturing method for barrier film

Article coated with zirconium compound film, method for preparing the article and sputtering target for use in coating with the film

Preparation of halftone phase shift mask blank

Article coated with zirconium compound film, method for preparing the article and sputtering target for use in coating with the film

Hard laminated film, method of manufacturing the same and film-forming device

Photomask blank, photomask, methods of manufacturing the same and methods of forming micropattern

Integrated capacitor-like battery and associated method

Protective coat and method for manufacturing thereof

Hard material layer

Method for forming a chromium nitride/oxide film

Low pressure closed chamber method for forming chromium nitride thin film

Cutting tool

Film-forming method, production method for product with ceramic film, and product with ceramic film