ClassID:

120032

C23C14/0676 - CPC Classification

Classification description:

Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material Oxynitrides

Recent Application in this class:
#1
20260085397
2026-03-26

Substrates with Hard Coats

#2
20260002251
2026-01-01

CONDUCTIVE SPUTTERING TARGET AND METHOD FOR DEPOSITING A LAYER THEREWITH

#3
20250361598
2025-11-27

SOLAR-CONTROL COATING WITH IMPROVED BENDABILITY

#4
20250327166
2025-10-23

COATING FOR A SUBSTRATE; SUBSTRATE; AND ARTICLE

#5
20250313940
2025-10-09

MIXED GAS METHOD FOR MAKING MIXED CHROMIUM NITRIDE FILM

#6
20250277299
2025-09-04

METHOD FOR FORMING A CHROMIUM NITRIDE/OXIDE FILM

#7
20250250664
2025-08-07

LOW PRESSURE CLOSED CHAMBER METHOD FOR FORMING CHROMIUM NITRIDE THIN FILM

#8
20250236944
2025-07-24

SYSTEMS, COMPOSITIONS AND METHODS FOR METAL OXYNITRIDE DEPOSITION USING HIGH-BASE PRESSURE REACTIVE SPUTTERING

#9
20250158011
2025-05-15

LITHIUM SECONDARY BATTERY AND PREPARATION METHOD THEREFOR

#10
20250155793
2025-05-15

REFLECTIVE MASK BLANK FOR EUV LITHOGRAPHY, METHOD FOR MANUFACTURING SAME, REFLECTIVE MASK FOR EUV LITHOGRAPHY, AND METHOD FOR MANUFACTURING SAME

#11
20240376615
2024-11-14

ELECTROLYSER SYSTEM AND METHOD OF ELECTRODE MANUFACTURE

#12
20240360048
2024-10-31

EXTERNAL PART MADE OF CERAMIC MATERIAL COMPRISING A PROTECTIVE LAYER AND METHOD FOR PRODUCING SUCH AN EXTERNAL PART

#13
20240337835
2024-10-10

WINDSHIELD AND WINDSHIELD ASSEMBLY

#14
20240282571
2024-08-22

METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE

#15
20240229227
2024-07-11

Ultraviolet radiation and atomic oxygen barrier films and methods of making and using the same

#16
20240201422
2024-06-20

LOW INDEX OF REFRACTION THIN FILM WITH HIGH HARDNESS COATING AND METHOD AND APPARATUS TO PRODUCE SAME

#17
20240198431
2024-06-20

CUTTING TOOL

#18
20240052475
2024-02-15

Metal nitride thin film and methods of preparation thereof

#19
20240027654
2024-01-25

GLASS LAMINATE WITH AN OUTER GRADIENT LAYER

#20
20230399734
2023-12-14

OXIDE FILM PREPARATION METHOD

#21
20230386795
2023-11-30

SURFACE COATING FOR CHAMBER COMPONENTS USED IN PLASMA SYSTEMS

#22
20230324754
2023-10-12

FABRICATION OF ELECTROCHROMIC DEVICES

#23
20230314892
2023-10-05

FABRICATION OF ELECTROCHROMIC DEVICES

#24
20230313362
2023-10-05

Free-standing lithium phosphorus oxynitride think films and methods of their manufacture

#25
20230212063
2023-07-06

Coated articles with optical coatings having residual compressive stress

#26
20230152495
2023-05-18

WINDOW, AND DISPLAY DEVICE INCLUDING THE SAME

#27
20230013303
2023-01-19

Oxide semiconductor and transistor

#28
20230010894
2023-01-12

MICROELECTRODE OF GENE SEQUENCING CHIP, MANUFACTURING METHOD THEREFOR, AND GENE SEQUENCING CHIP

#29
20230010446
2023-01-12

METHOD OF MANUFACTURING HIGH CAPACITANCE ANODE AND CATHODE FILMS OF CAPACITOR

#30
20220407043
2022-12-22

METHOD OF MANUFACTURING CRYSTALLINE MATERIAL FROM DIFFERENT MATERIALS

#31
20220339816
2022-10-27

METHOD FOR PRODUCING A CERAMIC PART WITH A MOTHER-OF-PEARL EFFECT, PARTICULARLY FOR WATCHMAKING

#32
20220242781
2022-08-04

Coated articles with optical coatings having residual compressive stress

#33
20220220601
2022-07-14

PVD COATINGS COMPRISING MULTI-ANION HIGH ENTROPY ALLOY OXY-NITRIDES

#34
20220170146
2022-06-02

TM-Al—O—N coating layers with increased thermal stability

#35
20220162741
2022-05-26

EVAPORATOR AND DEPOSITION APPARATUS

#36
20220154346
2022-05-19

METHOD FOR DEPOSITING A COATING ON AN ITEM, SUCH AS A CLOCKWORK COMPONENT AND ITEM COATED BY SUCH A METHOD

#37
20220119934
2022-04-21

Heat-Treatable Coating with Blocking Layer Having Reduced Color Shift

#38
20220066072
2022-03-03

ELEMENT COMPRISING A TRANSPARENT SUBSTRATE AND A MULTI-LAYER WEAR PROTECTION COATING WITH ADJUSTED REFLECTANCE, AND METHOD FOR PRODUCING SAME

#39
20220055235
2022-02-24

Coating for cutting implement

#40
20220002880
2022-01-06

Coating for enhanced performance and lifetime in plastic processing applications

#41
20210336159
2021-10-28

Display substrate, manufacturing method thereof, and display apparatus

#42
20210333444
2021-10-28

LIGHT ABSORPTION FILM, PREPARATION METHOD AND APPLICATION

#43
20210317561
2021-10-14

METHOD OF MAKING COATED ARTICLE HAVING ANTIBACTERIAL AND/OR ANTIFUNGAL COATING AND RESULTING PRODUCT

#44
20210313446
2021-10-07

Method of manufacturing a HEMT device with reduced gate leakage current, and HEMT device

#45
20210285109
2021-09-16

COATED BODY AND METHOD FOR COATING

#46
20210238037
2021-08-05

Dielectric thin film, capacitor element, and electronic circuit board

#47
20210206196
2021-07-08

Decoration member

#48
20210170785
2021-06-10

Decoration member and method for producing same

#49
20210124252
2021-04-29

Extreme ultraviolet mask blank defect reduction methods

#50
20210080622
2021-03-18

Decorative member

#51
20210072441
2021-03-11

Decoration member

#52
20210053869
2021-02-25

Solar Glass And Method For Its Production

#53
20200405036
2020-12-31

Decorative member

#54
20200392629
2020-12-17

Corrosion- and erosion-resistant coating for turbine blades of gas turbines

#55
20200392616
2020-12-17

THIN FILMS OF NICKEL-COPPER BINARY OXYNITRIDE (NICUOxNy) AND THE CONDITIONS FOR THE PRODUCTION THEREOF

#56
20200386924
2020-12-10

Decorative member

#57
20200379310
2020-12-03

Fabrication of electrochromic devices

#58
20200363577
2020-11-19

Wire grid polarizer with silane protective coating

#59
20200357634
2020-11-12

Method for Manufacturing a Semiconductor Device

#60
20200299823
2020-09-24

Al—Cr-based ceramic coatings with increased thermal stability

#61
20200290311
2020-09-17

DECORATIVE MEMBER

#62
20200264487
2020-08-20

PARTICLE REMOVAL DURING FABRICATION OF ELECTROCHROMIC DEVICES

#63
20200233278
2020-07-23

Fabrication of electrochromic devices

#64
20200232087
2020-07-23

AESTHETIC COATINGS FOR DENTAL APPLICATIONS

#65
20200224319
2020-07-16

FLEXIBLE HARD COMPOSITE COATING, PREPARATION METHOD THEREOF, AND COATED CUTTER

#66
20200201132
2020-06-25

Fabrication of electrochromic devices

#67
20200181975
2020-06-11

Durable low emissivity window film constructions

#68
20200181757
2020-06-11

COATED CUTTING TOOL AND A PROCESS FOR ITS MANUFACTURE

#69
20200117077
2020-04-16

Mask blanks, phase shift mask, method for manufacturing phase shift mask, and method for manufacturing semiconductor device

#70
20200063268
2020-02-27

Grain-oriented electromagnetic steel sheet and method of producing grain-oriented electromagnetic steel sheet

#71
20200062027
2020-02-27

Decoration member and manufacturing method therefor

#72
20200051823
2020-02-13

Method of manufacturing a HEMT device with reduced gate leakage current, and HEMT device

#73
20200044189
2020-02-06

GAS-BARRIER LAMINATED SHEET, PROCESS FOR PRODUCING GAS-BARRIER LAMINATED SHEET, AND ELECTRONIC MEMBER OR OPTICAL MEMBER

#74
20200023442
2020-01-23

METHOD FOR COATING SOLID DIAMOND MATERIALS

#75
20200013894
2020-01-09

Sputtering target, oxide semiconductor, oxynitride semiconductor, and transistor

#76
20200011572
2020-01-09

Multilayer material

#77
20190378938
2019-12-12

Solar energy absorbing device

#78
20190337841
2019-11-07

Coated articles with optical coatings having residual compressive stress

#79
20190331977
2019-10-31

Fabrication of electrochromic devices

#80
20190323115
2019-10-24

Color film and method of forming the same

#81
20190226075
2019-07-25

Coated body and method for production of the body

#82
20190112700
2019-04-18

METHOD FOR PARTICLE SURFACE TREATMENT OF A CERAMIC POWDER AND CERAMIC POWDER PARTICLES OBTAINED BY SAID METHOD

#83
20190107764
2019-04-11

FABRICATION OF ELECTROCHROMIC DEVICES

#84
20190103272
2019-04-04

Method for manufacturing a semiconductor device

#85
20190064651
2019-02-28

Mask blank, phase shift mask, method for manufacturing phase shift mask, and method for manufacturing semiconductor device

#86
20190051768
2019-02-14

METHOD FOR GRADED ANTI-REFLECTIVE COATINGS BY PHYSICAL VAPOR DEPOSITION

#87
20190024005
2019-01-24

Coating with enhanced sliding properties

#88
20190019622
2019-01-17

Polycrystalline dielectric thin film and capacitor element

#89
20190011797
2019-01-10

Fabrication of electrochromic devices

#90
20190006710
2019-01-03

Solid electrolyte, all-solid-state lithium-ion secondary battery, production method for solid electrolyte

#91
20180375978
2018-12-27

Film for applying compressive stress to ceramic materials

#92
20180371607
2018-12-27

Method of producing a PVD layer and a coated cutting tool

#93
20180355471
2018-12-13

HARD COATING, HARD-COATED MEMBER AND ITS PRODUCTION METHOD, AND TARGET FOR PRODUCING HARD COATING AND ITS PRODUCTION METHOD

#94
20180347390
2018-12-06

Turbine clearance control coatings and method

#95
20180282229
2018-10-04

Dielectric thin film, capacitor element, and electronic component

#96
20180281079
2018-10-04

Coated cutting tool

#97
20180259698
2018-09-13

Wire grid polarizer with protective coating

#98
20180245202
2018-08-30

Wear resistant vapor deposited coating, method of coating deposition and applications therefor

#99
20180237922
2018-08-23

High performance coating for high-strength steel cold metal forming

#100
20180181071
2018-06-28

Mother-of-pearl substrate coated with a yellow layer

#101
20180157162
2018-06-07

TRANSPARENT AND ELECTRICALLY CONDUCTIVE COATINGS CONTAINING NON-STOICHIOMETRIC METALLIC NITRIDES

#102
20180135159
2018-05-17

Hard thin films

#103
20180086024
2018-03-29

Durable low emissivity window film constructions

#104
20180076342
2018-03-15

Spectrally selective solar absorbing coating and a method for making it

#105
20180073130
2018-03-15

Methods for evaporating and depositing high vapor pressure materials

#106
20180067370
2018-03-08

FABRICATION OF ELECTROCHROMIC DEVICES

#107
20180066160
2018-03-08

GAS BARRIER LAMINATE, MEMBER FOR ELECTRONIC DEVICES, AND ELECTRONIC DEVICE

#108
20180058726
2018-03-01

Solar selective absorbing coating and preparation method thereof

#109
20180046053
2018-02-15

Fabrication of electrochromic devices

#110
20180046017
2018-02-15

Conductive structure, manufacturing method therefor, and electrode comprising conductive structure

#111
20180033893
2018-02-01

Thin-film transistor substrate having a light reflection reduction layer and display device comprising same

#112
20180030602
2018-02-01

FABRICATION METHOD OF STRONTIUM NIOBIUM OXYNITRIDE FILM HAVING SMALL CARRIER DENSITY AND ITS USE

#113
20180011331
2018-01-11

LIGHT WAVE SEPARATION LATTICES AND METHODS OF FORMING LIGHT WAVE SEPARATION LATTICES

#114
20170356078
2017-12-14

Thermal evaporation process for manufacture of solid state battery devices

#115
20170352763
2017-12-07

Sputtering target, oxide semiconductor, oxynitride semiconductor, and transistor

#116
20170349998
2017-12-07

Conductive laminate for touch panel and method for producing conductive laminate for touch panel

#117
20170338082
2017-11-23

AlON coated substrate with optional yttria overlayer

#118
20170297118
2017-10-19

SINTERED MATERIAL, CUTTING TOOL USING SINTERED MATERIAL, AND METHOD OF PRODUCING SINTERED MATERIAL

#119
20170285458
2017-10-05

Mask blank, phase shift mask, method for manufacturing phase shift mask, and method for manufacturing semiconductor device

#120
20170263900
2017-09-14

Electrical storage system comprising a sheet-type discrete element, discrete sheet-type element, method for the production thereof, and use thereof

#121
20170231229
2017-08-17

Antimicrobial glass coating

#122
20170167014
2017-06-15

Method of coating both sides of a substrate using a sacrificial coating

#123
20170160438
2017-06-08

Antireflection film and optical member including antireflection film

#124
20170141313
2017-05-18

Mask frame assembly, display manufacturing apparatus including mask frame assembly, and method of manufacturing display apparatus using mask frame assembly

#125
20170095858
2017-04-06

METHOD FOR TREATMENT OF METALLIC POWDER FOR SELECTIVE LASER MELTING

#126
20170088937
2017-03-30

Hard coating, hard-coated member, their production methods, and target used for producing hard coating

#127
20170068155
2017-03-09

Mask blank, method of manufacturing phase shift mask, phase shift mask, and method of manufacturing semiconductor device

#128
20170059983
2017-03-02

Halftone phase shift photomask blank, making method, and halftone phase shift photomask

#129
20170037502
2017-02-09

Hard lubricating coating film and hard lubricating coating film-covered tool

#130
20170036258
2017-02-09

HARD COATING FILM HAVING ANTI-ADHESION PROPERTY TO SOFT METAL

#131
20170032942
2017-02-02

Surface coating for chamber components used in plasma systems

#132
20170029956
2017-02-02

Method and system for producing coated steel components

#133
20170005365
2017-01-05

OXYNITRIDE FILM CONTAINING METAL ELEMENT AND NETWORK FORMER

#134
20170003583
2017-01-05

Mask blank and transfer mask

#135
20160343552
2016-11-24

DEPOSITION OF SOLID STATE ELECTROLYTE ON ELECTRODE LAYERS IN ELECTROCHEMICAL DEVICES

#136
20160340784
2016-11-24

Vapour deposition method for preparing amorphous lithium-containing compounds

#137
20160336583
2016-11-17

Vapour deposition method for fabricating lithium-containing thin film layered structures

#138
20160329604
2016-11-10

Power storage device and manufacturing method thereof

#139
20160291227
2016-10-06

Wire Grid Polarizer with Water-Soluble Materials

#140
20160291209
2016-10-06

Wire grid polarizer with silane protective coating

#141
20160209723
2016-07-21

Defect-mitigation layers in electrochromic devices

#142
20160201218
2016-07-14

METHOD FOR FABRICATING SINGLE-CRYSTALLINE NIOBIUM OXYNITRIDE FILM AND METHOD FOR GENERATING HYDROGEN USING SINGLE-CRYSTALLINE NIOBIUM OXYNITRIDE FILM

#143
20160187205
2016-06-30

Metal nitride material for thermistor, method for producing same, and film-type thermistor sensor

#144
20160147125
2016-05-26

ELECTRONIC DEVICES WTH TRANSPARENT CONDUCTING ELECTRODES, AND METHODS OF MANUFACTURE THEREOF

#145
20160138153
2016-05-19

Hard material layers with selected thermal conductivity

#146
20160133363
2016-05-12

Metal nitride material for thermistor, method for producing same, and film type thermistor sensor

#147
20160125982
2016-05-05

Metal nitride material for thermistor, method for producing same, and film type thermistor sensor

#148
20160099155
2016-04-07

Methods of forming a hard mask layer and of fabricating a semiconductor device using the same

#149
20160076133
2016-03-17

Gas barrier laminate, member for electronic device, and electronic device

#150
20160060747
2016-03-03

Method of manufacturing compound film

#151
20160060746
2016-03-03

Chromium-based oxidation protection layer

#152
20160040912
2016-02-11

Multilayer solar selective coating for high temperature solar thermal applications

#153
20160040280
2016-02-11

Wear resistant vapor deposited coating, method of coating deposition and applications therefor

#154
20160033840
2016-02-04

Defect-mitigation layers in electrochromic devices

#155
20160017478
2016-01-21

Hard film for machining tools and hard film-coated metal machining tool

#156
20160010896
2016-01-14

Hybrid multilayer solar selective coating for high temperature solar thermal applications and a process for the preparation thereof

#157
20160007438
2016-01-07

Substrate structure and fabrication method thereof

#158
20150368783
2015-12-24

DEPOSITION APPARATUS WITH GAS SUPPLY AND METHOD FOR DEPOSITING MATERIAL

#159
20150355537
2015-12-10

Method for manufacturing mask blank substrate, method for manufacturing mask blank and method for manufacturing transfer mask

#160
20150352623
2015-12-10

Hard coating film having anti-adhesion property to soft metal

#161
20150349324
2015-12-03

Thermal evaporation process for manufacture of solid state battery devices

#162
20150337433
2015-11-26

Metal nitride material for thermistor, method for producing same, and film type thermistor sensor

#163
20150301442
2015-10-22

Reflective mask blank for EUV lithography, substrate with funtion film for the mask blank, and methods for their production

#164
20150293363
2015-10-15

Light wave separation lattices and methods of forming light wave separation lattices

#165
20150284837
2015-10-08

Coated cutting tool and method for the production thereof

#166
20150273724
2015-10-01

Cutting tool

#167
20150253899
2015-09-10

Touch screen and manufacturing method

#168
20150203777
2015-07-23

Arc PVD coating with enhanced reducing friction and reducing wear properties

#169
20150192849
2015-07-09

Photomask blank, process for production of photomask, and chromium-containing material film

#170
20150140231
2015-05-21

METHOD AND APPARATUS FOR DEPOSITION OF THIN FILM MATERIALS FOR ENERGY STORAGE DEVICES

#171
20150132551
2015-05-14

Method for graded anti-reflective coatings by physical vapor deposition

#172
20150107544
2015-04-23

Steel piston for an internal combustion engine and method for its production

#173
20150104735
2015-04-16

Mask blank, transfer mask, and methods of manufacturing the same

#174
20150050776
2015-02-19

Sputtering target, method for manufacturing the same, and method for manufacturing semiconductor device

#175
20150049788
2015-02-19

Metal nitride material for thermistor, method for producing same, and film type thermistor sensor

#176
20150044453
2015-02-12

Golden rigid decorative member

#177
20150011444
2015-01-08

Coating with enhanced sliding properties

#178
20140377522
2014-12-25

Scratch-resistant articles with retained optical properties

#179
20140342149
2014-11-20

Gas barrier film and method for producing gas barrier film

#180
20140329073
2014-11-06

Solar selective coating having high thermal stability and a process for the preparation thereof

#181
20140318948
2014-10-30

Silicon target for sputtering film formation and method for forming silicon-containing thin film

#182
20140287214
2014-09-25

Coating material for aluminum die casting mold and method for manufacturing the same

#183
20140272298
2014-09-18

Layered coatings for sapphire substrate

#184
20140178679
2014-06-26

AION coated substrate with optional yttria overlayer

#185
20140124712
2014-05-08

Thin film semiconductor material produced through reactive sputtering of zinc target using nitrogen gases

#186
20140048059
2014-02-20

Method for manufacturing thermal absorber for solar thermal collector

#187
20130309599
2013-11-21

Photomask blank manufacturing method, photomask blank, photomask, and pattern transfer method

#188
20130309467
2013-11-21

Hard laminar coating

#189
20130303414
2013-11-14

Molybdenum monoxide layers, and production thereof using PVD

#190
20130280521
2013-10-24

Gas barrier film and electronic device

#191
20130252002
2013-09-26

Gas barrier film, method of producing a gas barrier film, and electronic device

#192
20130230796
2013-09-05

Photomask blank, process for production of photomask, and chromium-containing material film

#193
20130153408
2013-06-20

Method for producing cubic zirconia layers

#194
20130143063
2013-06-06

DEVICE HOUSING AND METHOD FOR MAKING SAME

#195
20130125876
2013-05-23

Method for providing a thermal absorber

#196
20130065078
2013-03-14

Coated article and method for making said article

#197
20130056348
2013-03-07

VACUUM COATING APPARATUS AND METHOD FOR DEPOSITING NANOCOMPOSITE COATINGS

#198
20130029095
2013-01-31

Coated article and method for making same

#199
20130029094
2013-01-31

Coated article and method for making same

#200
20120325310
2012-12-27

Laminate, method for producing same, and functional element using same

#201
20120318664
2012-12-20

Pinhole-free dielectric thin film fabrication

#202
20120315501
2012-12-13

COATED ARTICLE AND METHOD FOR MAKING SAME

#203
20120315468
2012-12-13

COATED ARTICLE AND METHOD FOR MAKING SAME

#204
20120276413
2012-11-01

PROCESS FOR SURFACE TREATING IRON-BASED ALLOY AND ARTICLE

#205
20120276407
2012-11-01

PROCESS FOR SURFACE TREATING IRON-BASED ALLOY AND ARTICLE

#206
20120276353
2012-11-01

Gas barrier film, apparatus, and process for producing gas barrier film

#207
20120276349
2012-11-01

ANTI-CORROSION TREATMENT PROCESS FOR ALUMINUM OR ALUMINUM ALLOY AND ALUMINUM OR ALUMINUM ALLOY ARTICLE THEREOF

#208
20120274273
2012-11-01

Encapsulated integrated-circuit device with thin-film battery

#209
20120270113
2012-10-25

Solid Electrolyte, Fabrication Method Thereof and Thin Film Battery Comprising the Same

#210
20120270035
2012-10-25

Process for surface treating magnesium alloy and article made with same

#211
20120251746
2012-10-04

Device housing and method for making the same

#212
20120248975
2012-10-04

Moisture-proof film, method for manufacturing the same, and organic electronic device including the same

#213
20120244382
2012-09-27

Coated article and method of making the same

#214
20120241184
2012-09-27

DEVICE HOUSING AND METHOD FOR MAKING SAME

#215
20120237790
2012-09-20

Housing and method for making the same

#216
20120219822
2012-08-30

Housing and method for making the same

#217
20120196148
2012-08-02

Coated article and method of making the same

#218
20120183766
2012-07-19

Coated article and method for making same

#219
20120171502
2012-07-05

Process for surface treating magnesium alloy and article made with same

#220
20120171501
2012-07-05

PROCESS FOR SURFACE TREATING MAGNESIUM ALLOY AND ARTICLE MADE WITH SAME

#221
20120168034
2012-07-05

Process for surface treating aluminum or aluminum alloy and article made with same

#222
20120164461
2012-06-28

Heat treatable coated article with zinc-doped zirconium based layer(s) in coating

#223
20120164356
2012-06-28

PROCESS FOR SURFACE TREATING ALUMINUM OR ALUMINUM ALLOY AND ARTICLE MADE WITH SAME

#224
20120152728
2012-06-21

Sputtering target, method for manufacturing the same, manufacturing semiconductor device

#225
20120148869
2012-06-14

Coated article and method for making the same

#226
20120148865
2012-06-14

ARTICLE AND METHOD FOR MANUFACTURING ARTICLE

#227
20120141784
2012-06-07

Coated article and method for making same

#228
20120138453
2012-06-07

SILICON TARGET FOR SPUTTERING FILM FORMATION AND METHOD FOR FORMING SILICON-CONTAINING THIN FILM

#229
20120114878
2012-05-10

Method of making coated article having antibacterial and/or antifungal coating and resulting product

#230
20120107606
2012-05-03

ARTICLE MADE OF ALUMINUM OR ALUMINUM ALLOY AND METHOD FOR MANUFACTURING

#231
20120100467
2012-04-26

Sputtering target material, silicon-containing film forming method, and photomask blank

#232
20120077002
2012-03-29

COATED ARTICLE AND METHOD FOR MAKING THE SAME

#233
20120064366
2012-03-15

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Method of manufacturing power storage device

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Battery-operated wireless-communication apparatus and method

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Method for performing preventative maintenance in a substrate processing system

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Coating system, coated workpiece and method for manufacturing the same

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Method and apparatus for integrated-circuit battery devices

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Methods for stable process in a reactive sputtering process using zinc or doped zinc target

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Method and apparatus for deposition of thin film materials for energy storage devices

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Battery-operated wireless-communication apparatus and method

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Hard film and method of manufacturing the same

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Hard laminated film, method of manufacturing the same and film-forming device

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