Barrier film and laminated material, container for wrapping and image display medium using the saw, and manufacturing method for barrier film

Metal Double-Layer Structure and Method For Manufacturing the Same and Regeneration Method of Sputtering Target Employing That Method

Supply end block for rotary magnetron

Plasma sputtering target assembly and manufacturing method therefor

Method and apparatus for treating sputtering target to reduce burn-in time and sputtering targets made thereby

Method and apparatus for automation of PTF measurement in sputter targets

Sputtering target, sputtering target-backing plate assembly and deposition system

Flat end-block for carrying a rotatable sputtering target

SYSTEM AND METHOD OF MANUFACTURING SPUTTERING TARGETS

Film-forming system, film-forming method, insulating film, dielectric film, piezoelectric film, ferroelectric film, piezoelectric element and liquid discharge system

SPUTTERING TARGET AND METHOD FOR PREPARATION THEREOF

MONOLITHIC TARGET FOR FLAT PANEL APPLICATION

Segmented/modular magnet bars for sputtering target

Novel manufacturing design and processing methods and apparatus for PVD targets

Barrier film and laminated material, container for wrapping and image display medium using the saw, and manufacturing method for barrier film

Device For Plasma-Treating And/Or Coating Work Pieces

Barrier film and laminated material, container for wrapping and image display medium using the saw, and manufacturing method for barrier film

Method and apparatus for trans-zone sputtering

Barrier film and laminated material, container for wrapping and image display medium using the saw, and manufacturing method for barrier film

COOLED DARK SPACE SHIELD FOR MULTI-CATHODE DESIGN

Magnetron for cylindrical targets

Dual hexagonal shaped plasma source

Method for forming sputter target assemblies having a controlled solder thickness

PVD cylindrical target

Vacuum elastomer bonding apparatus and method

Electrically Coupled Target Panels

Backing plate assembly

PVD target

Large Area Sputtering Target

Large Area Sputtering Target

Sputtering apparatus, method of operating the same, and method of manufacturing substrate using the same

Silicon alloy coating of insulated wire

Sputtering target as well as a joined type sputtering target assembly and a method of making such a joined type sputtering target assembly

Target for a sputtering source

Sputtering target and sputtering equipment

SUPPORT PLATE FOR SPUTTER TARGETS

Thermally conductive dielectric bonding of sputtering targets using diamond powder filler or thermally conductive ceramic fillers

Three-dimensional pvd targets, and methods of forming three-dimensional pvd targets

COOLABLE CARRIER PLATE FOR TARGETS IN VACUUM ATOMIZATION SYSTEMS

Process kit components for titanium sputtering chamber

Target for sputtering chamber

Cooling plate and manufacturing method thereof, and sputtering target and manufacturing method thereof

Cathode sputtering gas distribution apparatus

Flexible magnetron including partial rolling support and centering pins

Target arrangement for mounting / dismounting and method of manufacturing

Sputter apparatus with a pipe cathode and method for operating this sputter apparatus

Target designs and related methods for enhanced cooling and reduced deflection and deformation

SPUTTERING TARGET FOR TITANIUM SPUTTERING CHAMBER

Sputtering target with few surface defects, and surface processing method thereof

Sputtering target assembly having low conductivity backing plate and method of making same

Process kit and target for substrate processing chamber

Inertial bonding method of forming a sputtering target assembly and assembly made therefrom

Method for the production of a substrate

Method and apparatus for cylindrical magnetron sputtering using multiple electron drift paths

Very long cylindrical sputtering target and method for manufacturing

PVD target with end of service life detection capability

PVD target with end of service life detection capability

METHOD OF USING A TARGET HAVING END OF SERVICE LIFE DETECTION CAPABILITY

Method of manufacturing a rotary sputtering target using a mold

Sputtering target with bonding layer of varying thickness under target material

Large-area magnetron sputtering chamber with individually controlled sputtering zones

Multiple zone sputtering target created through conductive and insulation bonding

Coating machine and method for operating a coating machine

Method of processing a substrate using a large-area magnetron sputtering chamber with individually controlled sputtering zones

Methods of treating deposition process components to form particle traps, and deposition process components having particle traps thereon

Monolithic sputter target backing plate with integrated cooling passages

Copper-containing pvd targets and methods for their manufacture

Tube cathode for use in sputter processes

Controllable target cooling

Variable thickness plate for forming variable wall thickness physical vapor deposition target

Centering mechanism for aligning sputtering target tiles

Sputtering target with slow-sputter layer under target material

Bonding of target tiles to backing plate with patterned bonding agent

Use of DC magnetron sputtering systems

Large area elastomer bonded sputtering target and method for manufacturing

Cooling plate

Elastomer bonding of large area sputtering target

Sputtering target tiles having structured edges separated by a gap

Multiple target tiles with complementary beveled edges forming a slanted gap therebetween

Systems and methods for non-contact measuring sputtering target thickness ultrasonics

Target assemblies, targets, backing plates, and methods of target cooling

System and method for processing nanowires with holographic optical tweezers

Apparatus and methods for ionized deposition of a film or thin layer

Cylindrical sputtering apparatus

Sputtering target and method for preparation thereof

Method of forming inorganic orientation film, inorganic orientation film, substrate for electronic devices, liquid crystal panel, and electronic equipment

Method of manufacturing a sputter target

Sputtering cathode, production method and corresponding cathode

Cylindrical sputtering target, ceramic sintered body, and process for producing sintered body

Tubular sputtering target

Method of manufacturing alloy sputtering targets

Target and manufacturing method thereof

Magnetron sputter cathode

Core insert for a glass molding machine, and an apparatus for making the same

Cooled backing plate for a sputtering target, and sputtering target comprising a plurality of backing plates

Contacting of an electrode with a substance in vacuum

Cooling plate and manufacturing method thereof, and sputtering target and manufacturing method thereof

Sputter coating system

Assembly for sputtering aluminum-neodymium alloys

Backing plates for sputtering targets

Non-planar sputter targets having crystallographic orientations promoting uniform deposition

Physical vapor deposition target constructions

Non-bonded rotatable targets for sputtering

Target and method of diffusion bonding target to backing plate

PVD target support members and methods of making

Apparatus, method and system for monitoring chamber parameters associated with a deposition process

Method of producing a substrate with a surface treated by a vacuum treatment process, use of said method for the production of coated workpieces and plasma treatment chamber

Sputtering cathode adapter assembly and method

Slotted thin-film sputter deposition targets for ferromagnetic materials

Coating system for coating a mold

Target tiles in a staggered array

Staggered target tiles

Systems and methods for a target and backing plate assembly

Sputtering cathode for coating processes

Method of forming metal blanks for sputtering targets

Methods of forming PVD target/backing plate constructions

Sputtering device

Controlled cooling of sputter targets

Power coupling for high-power sputtering

Target support assembly

Magnetron sputtering source and chamber therefor

Method and system for target lifetime

Mask blank manufacturing method and sputtering target for manufacturing the same

Hollow cathode target and methods of making same

Replaceable target sidewall insert with texturing

Thermography test method and apparatus for bonding evaluation in sputtering targets

Mechanism for varying the spacing between sputter magnetron and target

Compensation of spacing between magnetron and sputter target

High purity ferromagnetic sputter target, assembly and method of manufacturing same

Silver selenide film stoichiometry and morphology control in sputter deposition

Method of manufacturing sputter targets with internal cooling channels

Copper film containing tungsten carbide for improving electrical conductivity, thermal stability and hardness properties and a manufacturing method for the copper film

Methods of treating non-sputtered regions of PVD target constructions to form particle traps

Cathode structure for vacuum sputtering machine

Sputter target having modified surface texture

Method for centering a sputter target onto a backing plate and the assembly thereof

Method of manufacturing an extended life sputter target assembly and product thereof

Sputtering target assembly and sputtering apparatus using the same

Method of treating sputtering target to reduce burn-in time and sputtering target thereof and apparatus thereof

Cathodic sputtering apparatus

Device for measuring the profile of a metal film sputter deposition target, and system and method employing same

Method of forming film by sputtering, optical member, and sputtering apparatus

Plasma sprayed indium tin oxide target for sputtering

Sputtering target assemblies using resistance welding

Target for sputtering and a method for manufacturing a magnetic recording medium using the target

High-resistivity ruthenium oxide thin film fabrication and temperature sensor structure with high-resistivity ruthenium oxide thin film

Sputtering targets, and related apparatuses and methods

Wireless camera wafer for vacuum chamber diagnostics

Cathode assemblies and sputtering systems

Portable sputtering apparatus and method

Apparatus for enhanced physical vapor deposition

Single layer small grain size FePT:C film for heat assisted magnetic recording media

Portable sputtering apparatus and method

Cooling water jet pack for high power rotary cathodes