Recording film for optical information recording medium, optical information recording medium, and sputtering target used to form said recording film

TARGET CENTER POSITIONAL CONSTRAINT FOR PHYSICAL VAPOR DEPOSITION (PVD) PROCESSING SYSTEMS

TARGET COOLING FOR PHYSICAL VAPOR DEPOSITION (PVD) PROCESSING SYSTEMS

Apparatus for cylindrical magnetron sputtering

Film-forming apparatus

Sputtering target and method for producing same

SPUTTERING TARGET AND METHOD FOR USING THE SPUTTERING TARGET

Diffusion-bonded sputter target assembly and method of manufacturing

Titanium target for sputtering

Tubular target having a protective device

ADAPTER OF SPUTTERING CHAMBER

Three dimensional metal deposition technique

Elastomer Bonded Rotary Sputtering Target

SPUTTERING TARGET, METHOD FOR USING THE SAME, AND METHOD FOR FORMING OXIDE FILM

Thin-film transistor and zinc oxide-based sputtering target for the same

Sputtering target including a feature to reduce chalcogen build up and arcing on a backing tube

OXIDE SINTERED BODY AND SPUTTERING TARGET

Method for Manufacturing Target Material for Copper Lead of TFT-LCD Array Substrate and Target Material

Photomask blank manufacturing method, photomask blank, photomask, and pattern transfer method

Sputtering target for magnetic recording film

Al-based alloy sputtering target and Cu-based alloy sputtering target

Monolithic aluminum alloy target and method of manufacturing

TARGET FOR SPUTTERING AND APPARATUS INCLUDING THE SAME

SPUTTERING TARGET AND SPUTTERING APPARATUS AND SPUTTERING METHOD USING THE SAME

Oxide sintered body and tablets obtained by processing same

Multi-block sputtering target with interface portions and associated methods and articles

SPUTTERING DEVICE WITH A TUBULAR TARGET

FE-PT-Based Ferromagnetic Sputtering Target and Method for Producing Same

Reactive sputter deposition of silicon films

Narrow source for physical vapor deposition processing

Method of Storing Metal Lanthanum Target, Vacuum-sealed Metal Lanthanum Target, and Thin Film Formed by Sputtering the Metal Lanthanum Target

Vapour deposition

Sintered oxide material, method for manufacturing same, sputtering target, oxide transparent electrically conductive film, method for manufacturing same, and solar cell

Hard film, plastic working die, plastic working method, and target for hard film

Substrate processing system having symmetric RF distribution and return paths

Substrate processing system with mechanically floating target assembly

Electrodes and their fabrication methods as well as applications

Oxide for semiconductor layer of thin-film transistor, sputtering target, and thin-film transistor

Dual hexagonal shaped plasma source

Coating substrates with an alloy by means of cathode sputtering

Method of making molybdenum containing targets comprising molybdenum, titanium, and tantalum or chromium

Soft magnetic alloy for magnetic recording medium, sputtering target material, and magnetic recording medium

Sputtering target-backing plate assembly and method for producing same

HIGH TARGET UTILIZATION MOVING MAGNET PLANAR MAGNETRON SCANNING METHOD

Zinc oxide sintered compact, sputtering target, and zinc oxide thin film

FERROMAGNETIC MATERIAL SPUTTERING TARGET

Fe-Pt-based sputtering target with dispersed C grains

Sintered Compact Sputtering Target

THERMAL DIFFUSION CONTROL FILM FOR USE IN MAGNETIC RECORDING MEDIUM, FOR HEAT-ASSISTED MAGNETIC RECORDING, MAGNETIC RECORDING MEDIUM, AND SPUTTERING TARGET

Sputtering Target Having Alarm Function

Oxide sintered body and production method therefor, target, and transparent conductive film and transparent conductive substrate obtained by using the same

Direct cooled rotary sputtering target

Titanium target for sputtering

Target device, sputtering apparatus and method for manufacturing a target device

Pinned target design for RF capacitive coupled plasma

Sintered composite oxide, manufacturing method therefor, sputtering target, transparent conductive oxide film, and manufacturing method therefor

Oxide sintered body, target, transparent conductive film obtained by using the same, and transparent conductive substrate

Magnetron sputtering target and process for producing the same

MAGNETIC CORE FOR CYLINDRICAL MAGNETRON SPUTTERING TARGET

Method for Bonding Components of a Sputtering Target, a Bonded Assembly of Sputtering Target Components and the Use Thereof

SPRAY REJUVENATION OF SPUTTERING TARGETS

System and Method for Aligning Sputter Sources

Substrate carrier and applications thereof

Interchangeable magnet pack

SPUTTER TARGET STRUCTURE OF TRANSPARENT CONDUCTIVE LAYER

Non-continuous bonding of sputtering target to backing material

Sputtering target of ferromagnetic material with low generation of particles

DEPOSITION RING AND ELECTROSTATIC CHUCK FOR PHYSICAL VAPOR DEPOSITION CHAMBER

Fabrication of low defectivity electrochromic devices

Tantalum sputtering target

Magnetic Material Sputtering Target Provided with Groove in Rear Face of Target

Method for forming sputter target assemblies having a controlled solder thickness

Methods of manufacturing large-area sputtering targets using interlocking joints

Large-area sputtering targets

Methods of manufacturing large-area sputtering targets

Methods of manufacturing high-strength large-area sputtering targets

Cooling ring for physical vapor deposition chamber target

Electronic device manufacturing method and sputtering method

Impermeable PVD Target Coating for Porous Target Materials

SPUTTERING SYSTEM

Sputtering target with reverse erosion profile surface and sputtering system and method using the same

Method for manufacturing acoustic wave device

Heterojunction photovoltaic device and fabrication method

Heterojunction photovoltaic device and fabrication method

SPUTTER GUN

DEPOSITION SYSTEM HAVING IMPROVED TARGET COOLING

Sputtering target and method for producing same

Non-adhesive sputtering structure including a sputtering target and backing plate

SPUTTER TARGET

SEPARATED TARGET APPARATUS FOR SPUTTERING AND SPUTTERING METHOD USING THE SAME

Multi-block sputtering target and associated methods and articles

Elastomer Bonded Item and Method for Debonding

Method of fabricating high-resolution features

SPUTTERING TARGET WITH REDUCED PARTICLE GENERATION AND METHOD OF PRODUCING SAID TARGET

SPUTTERING TARGETS, SPUTTER REACTORS, METHODS OF FORMING CAST INGOTS, AND METHODS OF FORMING METALLIC ARTICLES

MULTI-LAYERED STRUCTURE AND MANUFACTURING METHOD THEREOF

SYSTEMS AND METHODS FOR A TARGET AND BACKING PLATE ASSEMBLY

Rotary magnetron magnet bar and apparatus containing the same for high target utilization

FILM FORMING METHOD BY SPUTTERING APPARATUS AND SPUTTERING APPARATUS

Sputtering target-backing plate assembly, and its production method

SPUTTERING APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD

METHOD AND APPARATUS FOR FORMING A CYLINDRICAL TARGET ASSEMBLY

Sleep aid composition and method

Tube-shaped sputtering target

Film-Forming apparatus and Film-Forming method

PVD sputtering target with a protected backing plate

Film formation method, film formation device, piezoelectric film, piezoelectric device, liquid discharge device and piezoelectric ultrasonic transducer

Method and apparatus for production of rotatable sputtering targets

Target cooling through gun drilled holes

Sputtering apparatus

Alkali Metal Deposition System

Encapsulated sputtering target

SILICON TARGET FOR SPUTTERING FILM FORMATION AND METHOD FOR FORMING SILICON-CONTAINING THIN FILM

PVD target with end of service life detection capability

Magnetron with non-equipotential cathode

MAGNETRON SPUTTERING APPARATUS

Method of making coated article having antibacterial and/or antifungal coating and resulting product

PLASMA PROCESSING CHAMBER HAVING ENHANCED DEPOSITION UNIFORMITY

Tube target

METHOD OF COATING AN RF DEVICE AND SPUTTERING APPARATUS USED IN THE SAME

Deposition ring and electrostatic chuck for physical vapor deposition chamber

MAGNETRON SPUTTERING CATHODE AND FILM FORMATION APPARATUS

ROTARY MAGNETRON

Method for manufacturing a sputtering target structure

PHYSICAL VAPOR DEPOSITION DEVICE FOR COATING WORKPIECE

PLUME STEERING

CREATION OF MAGNETIC FIELD (VECTOR POTENTIAL) WELL FOR IMPROVED PLASMA DEPOSITION AND RESPUTTERING UNIFORMITY

TARGET ASSEMBLY

PHOTOVOLTAIC DEVICE BARRIER LAYER

NON-BONDED ROTARY SEMICONDUCTING TARGETS AND METHODS OF THEIR SPUTTERING

Method of storing lanthanum oxide target, and vacuum-sealed lanthanum oxide target

ROTATABLE SPUTTER TARGET BASE, ROTATABLE SPUTTER TARGET, COATING INSTALLATION, METHOD OF PRODUCING A ROTATABLE SPUTTER TARGET, TARGET BASE CONNECTION MEANS, AND METHOD OF CONNECTING A ROTATABLE TARGET BASE DEVICE FOR SPUTTERING INSTALLATIONS TO A TARGET BASE SUPPORT

HOLLOW TARGET ASSEMBLY

Magnet transportation system, sputtering apparatus including the same and sputtering method

Triangular Scanning Magnet in Sputtering Tool Moving Over Larger Triangular Target

Rotary target backing tube bonding assembly

Sputtering apparatus, method of operating the same, and method of manufacturing substrate using the same

Molybdenum-containing targets comprising three metal elements

Sputtering target assembly and method of making same

COOLED DARK SPACE SHIELD FOR MULTI-CATHODE DESIGN

Forming memory using high power impulse magnetron sputtering

SPUTTERING TARGETS AND METHODS OF FORMING THE SAME

Ion beam sputter target and method of manufacture

Chamber for physical vapour deposition and door for a physical vapour deposition chamber

PHOTOVOLTAIC DEVICE CONDUCTING LAYER

TARGET BASE AND SPUTTERING APPARATUS USING SAME

Deposition method and method for manufacturing semiconductor device

Method of making coated article having anti-bacterial and/or anti-fungal coating and resulting product

Ring cathode for use in a magnetron sputtering device

Sputtering apparatus and sputtering method

Ferroelectric recording medium and method of manufacturing the same, information processing device, and method of processing information

Semiconductor film comprising an oxide containing in atoms, Sn atoms and Zn atoms

Target utilization improvement for rotatable magnetrons

Cylindrical sputtering target, and method for manufacturing same

END-BLOCK AND SPUTTERING INSTALLATION

Power storage device

DIELECTRIC DEPOSITION USING A REMOTE PLASMA SOURCE

ROTATABLE TARGET, BACKING TUBE, SPUTTERING INSTALLATION AND METHOD FOR PRODUCING A ROTATABLE TARGET

Apparatus and method for improved darkspace gap design in RF sputtering chamber

Circular groove pressing mechanism and method for sputtering target manufacturing

Method and device for applying or embedding particles onto or into a layer applied by plasma coating

Fabrication of low defectivity electrochromic devices

Physical vapor deposition with heat diffuser

Physical vapor deposition with multi-point clamp

Thin-film forming sputtering system

METHOD OF BONDING ROTATABLE CERAMIC TARGETS TO A BACKING STRUCTURE

Target shaping

METHOD FOR PRODUCING AN ITO LAYER AND SPUTTERING SYSTEM

Cylindrical magnetron having a shunt

TARGET ASSEMBLY FOR A MAGNETRON SPUTTERING APPARATUS, A MAGNETRON SPUTTERING APPARATUS AND A METHOD OF USING THE MAGNETRON SPUTTERING APPARATUS

SPUTTERING APPARATUS WITH ROTATABLE SPUTTERING TARGET

SUPPORT DEVICE AND COATING DEVICE USING SAME

ROTARY SPUTTERING TARGET AND APPARATUS FOR MANUFACTURE

Method for Storing Target Comprising Rare Earth Metal or Oxide Thereof

Supporting device for a magnetron assembly with a rotatable target

Sputtering apparatus

Sputtering target with few surface defects, and surface processing method thereof

IN-LINE SYSTEM FOR MANUFACTURING SOLAR CELL

Coating apparatus

PVD TARGET WITH END OF SERVICE LIFE DETECTION CAPABILITY

Sputtering apparatus

Photoelectric conversion device

Molybdenum containing targets

Method for packaging target material and method for mounting target

MAGNETRON SPUTTER

CYLINDRICAL SPUTTERING TARGET AND PROCESS FOR PRODUCING THE SAME

System and method for fabricating macroscopic objects, and nano-assembled objects obtained therewith

Hard film, plastic working die, plastic working method, and target for hard film

Rotary Target Assembly and Rotary Target

Cathode unit and sputtering apparatus provided with the same

Monolithic aluminum alloy target and method of manufacturing

SPUTTERING APPARATUS AND SPUTTERING METHOD

SPUTTERING APPARATUS AND RECORDING MEDIUM FOR RECORDING CONTROL PROGRAM THEREOF

Sputtering target apparatus

Use of DC magnetron sputtering systems

SEAMLESS MOLD MANUFACTURING METHOD

Sputtering apparatus including cathode with rotatable targets, and related methods

Chalcogenide-based photovoltaic devices and methods of manufacturing the same

Sputtering target temperature control utilizing layers having predetermined emissivity coefficients

Cylindrical sputtering target

COOLING PLATE AND MANUFACTURING METHOD THEREFOR

HIGH UTILIZATION ROTATABLE TARGET USING CERAMIC TITANIUM OXIDE RING

CERAMIC SPUTTERING TARGET ASSEMBLY AND A METHOD FOR PRODUCING THE SAME

MAGNETRON SPUTTERING TARGET AND MAGNETRON SPUTTERING SYSTEM

Hot tile sputtering system

Sputtering target for PVD chamber

Electrochromic devices

SPUTTERING TARGET AND METHOD FOR PREPARATION THEREOF

Rotary cathode for magnetron sputtering apparatus

Fabrication of low defectivity electrochromic devices

DEPOSITION APPARATUS WITH HIGH TEMPERATURE ROTATABLE TARGET AND METHOD OF OPERATING THEREOF

Film forming apparatus and film forming method

Method and arrangement for redundant anode sputtering having a dual anode arrangement

Film forming apparatus and film forming method

Method of Producing Sintered Compact, Sintered Compact, Sputtering Target Formed from the same, and Sputtering Target-Backing Plate Assembly

Sputter target and backing plate assembly

CHARGED PARTICLE BEAM PVD DEVICE, SHIELDING DEVICE, COATING CHAMBER FOR COATING SUBSTRATES, AND METHOD OF COATING

Apparatus and method for making sputtered films with reduced stress asymmetry

SPUTTERING APPARATUS AND METHOD OF MANUFACTURING ELECTRONIC DEVICE

Film forming method by sputtering and sputtering apparatus thereof

Oxide sintered body and production method therefor, target, and transparent conductive film and transparent conductive substrate obtained by using the same

SPUTTERING TARGET

Film formation method, film formation device, piezoelectric film, piezoelectric device, liquid discharge device and piezoelectric ultrasonic transducer

Encapsulated sputtering target

Connecting wire and method for manufacturing same

ROTATABLE SPUTTER TARGET BACKING CYLINDER, ROTATABLE SPUTTER TARGET, METHOD OF PRODUCING A ROTATABLE SPUTTER TARGET, AND COATING INSTALLATION

ROTATABLE SPUTTER TARGET BASE, ROTATABLE SPUTTER TARGET, COATING INSTALLATION, METHOD OF PRODUCING A ROTATABLE SPUTTER TARGET, TARGET BASE CONNECTION MEANS, AND METHOD OF CONNECTING A ROTATABLE TARGET BASE DEVICE FOR SPUTTERING INSTALLATIONS TO A TARGET BASE SUPPORT

ROTATABLE SPUTTER TARGET BACKING CYLINDER, ROTATABLE SPUTTER TARGET, METHODS OF PRODUCING AND RESTORING A ROTATABLE SPUTTER TARGET, AND COATING INSTALLATION

CONTROL OF EROSION PROFILE ON A DIELECTRIC RF SPUTTER TARGET

Method for assembling at least two plates and use of the method for preparing an ion beam sputtering assembly

SPUTTERING APPARATUS AND METHOD OF THIN FILM FORMATION

Magnetron sputtering electrode, and sputtering apparatus provided with magnetron sputtering electrode

Sputtering target assembly and method of making same

Sputtering target including magnetic field uniformity enhancing sputtering target backing tube

Systems and methods for a target and backing plate assembly

Powder-Fiber Adhesive

SPUTTER CATHODE APPARATUS ALLOWING THICK MAGNETIC TARGETS

Trim magnets to adjust erosion rate of cylindrical sputter targets

SPUTTER TARGET ASSEMBLY HAVING A LOW-TEMPERATURE HIGH-STRENGTH BOND

Sputtering deposition apparatus and backing plate for use in sputtering deposition apparatus

MAGNETIC FIELD GENERATION CONTROL UNIT AND MAGNETRON SPUTTERING APPARATUS AND METHOD USING THE SAME

Sputtering composite target, method for manufacuturing transparent conductive film using the same and transparent conductive film-provided base material

Sputtering method and apparatus

SUBSTRATE PROCESSING MODULE EXCHANGE UNIT, VACUUM COATING INSTALLATION, METHOD OF EXCHANGING A SUBSTRATE PROCESSING MODULE FOR A VACUUM COATING INSTALLATION, AND USE OF A SUBSTRATE PROCESSING MODULE EXCHANGE UNIT

Sputtering target/backing plate bonded body

Rotatable sputter target comprising an end-block with a liquid coolant supply system

Cylindrical magnetron

Platinum-modified cathodic arc coating

TARGET FOR EFFICIENT USE OF PRECIOUS DEPOSITION MATERIAL

MAGNETRON SPUTTERING TARGET STRUCTURE AND APPARATUS HAVING THE SAME

Non-planar sputter targets having crystallographic orientations promoting uniform deposition

Magnet Structure and Cathode Electrode Unit for Magnetron Sputtering System, and Magnetron Sputtering System

Oxide target for laser vapor deposition and method of manufacturing the same

MULTIPLE GROOVED VACUUM COUPLING

METHOD OF MANUFACTURING A ROTATABLE SPUTTER TARGET

MODIFIED SPUTTERING TARGET AND DEPOSITION COMPONENTS, METHODS OF PRODUCTION AND USES THEREOF

CONCENTRIC HOLLOW CATHODE MAGNETRON SPUTTER SOURCE

Reactive Multilayer Joining With Improved Metallization Techniques

Method for forming conductive film, thin-film transistor, panel with thin-film transistor, and method for manufacturing thin-film transistor

SPUTTERING APPARATUS

Thin film electrolyte for thin film batteries

Method for sputter targets for electrolyte films

Target arrangement

Magnetic shunts in tubular targets

Cooled backing plate for a sputtering target, and sputtering target comprising a plurality of backing plates

Magnetron sputtering cathode mechanism

Sputter targets with expansion grooves for reduced separation

SPUTTER COATING DEVICE AND COATING METHOD

CHALCOGENIDE TARGET AND METHOD

Oxide sintered body, target, transparent conductive film obtained by using the same, and transparent conductive substrate

Sputtering target with grooves and intersecting channels

TARGET STRUCTURE AND TARGET HOLDING APPARATUS

SPUTTERING APPARATUS

Plasma vapor deposition

Method of arc ion plating and target for use therein

PROCESS FOR FORMING A FERROELECTRIC FILM, FERROELECTRIC FILM, FERROELECTRIC DEVICE, AND LIQUID DISCHARGE APPARATUS

Process for forming a ferroelectric film, ferroelectric film, ferroelectric device, and liquid discharge apparatus

Pot-shaped copper sputtering target and manufacturing method thereof

Target designs and related methods for coupled target assemblies, methods of production and uses thereof

SPUTTERING TARGET STRUCTURE

Method for connecting magnetic substance target to backing plate, and magnetic substance target

Reactive Multilayer Joining To Control Thermal Stress

Sputtering target having increased life and sputtering uniformity

BONDING METHOD FOR CYLINDRICAL TARGET

SWINGING MAGNETS TO IMPROVE TARGET UTILIZATION

High rate sputtering apparatus and method

MAGNETRON SPUTTERING TARGET

Component, an apparatus and a method for the manufacture of a layer system

Sputter target and backing plate assembly

Deposition system with improved material utilization

Bonded sputtering target and methods of manufacture

Vent groove modified sputter target assembly and apparatus containing same

Silver selenide film stoichiometry and morphology control in sputter deposition

Sputtering apparatus, method for producing a transparent electroconductive film

End Effector For Handling Sputter Targets

Single, Right-Angled End-Block

Target/Backing Plate Constructions, and Methods of Forming Them

Target designs and related methods for reduced eddy currents, increased resistance and resistivity, and enhanced cooling

Magnetron Sputtering Source, Sputter-Coating Installation, and Method for Coating a Substrate

Barrier film and laminated material, container for wrapping and image display medium using the saw, and manufacturing method for barrier film