Sputtering apparatus

Tablet for plasma coating system, method of manufacturing the same, and method of manufacturing a thin film using the method of manufacturing the tablet

Cutting tool

Low-e panels and methods for forming the same

Laminated coating having excellent abrasion resistance

Piezoelectric thin film and method for manufacturing the same, and piezoelectric element

Combinatorial screening of metallic diffusion barriers

Film formation method and film formation apparatus

SPUTTERING TARGET, OXIDE SEMICONDUCTOR THIN FILM, AND METHODS FOR PRODUCING THESE

Process for the production of an optically selective coating of a substrate for high temperature receiver solar devices and relative material obtained

ROOM-TEMPERATURE BONDING APPARATUS AND ROOM-TEMPERATURE BONDING METHOD

ABS PLASTIC SURFACE METAL LAYER AND METHOD OF MANUFACTURING THE SAME

In-line coating device, in-line coating method, and separator

Magnetron sputtering coating device, a nano-multilayer film, and the preparation method thereof

Low-e panels with ternary metal oxide dielectric layer and method for forming the same

Thin film transistor array panel and manufacturing method thereof

SPUTTER COATING A WORK PIECE

TiAlN-coated tool

Antimony-Rich High-speed Phase-change Material Used In Phase-Change Memory, Preparing Method, And Application Thereof

Titanium nickel niobium alloy barrier for low-emissivity coatings

Vacuum-processing apparatus, vacuum-processing method, and storage medium

Ternary metal nitride formation by annealing constituent layers

High-power pulse coating method

SPUTTER DEPOSITION METHOD, SPUTTERING SYSTEM, MANUFACTURE OF PHOTOMASK BLANK, AND PHOTOMASK BLANK

Transparent conductive thin film

Recording layer, information recording medium, and target

METHOD FOR USING SPUTTERING TARGET AND METHOD FOR MANUFACTURING OXIDE FILM

High-power pulse coating method

Plasmonic nano-color coating layer and method for fabricating the same

Transparent body for a touch panel manufacturing method and system for manufacturing a transparent body for a touch screen panel

Intaglio printing plate coating apparatus

Dual-target sputter deposition with controlled phase difference between target powers

Copper indium gallium selenide (CIGS) thin films with composition controlled by co-sputtering

Coating material for aluminum die casting and method for coating the same

High performance tools exhibiting reduced crater wear in particular by dry machining operations

Sputtering apparatus and method

Coated cutting tool

System and method for balancing consumption of targets in pulsed dual magnetron sputtering (DMS) processes

TITANIUM-NICKEL ALLOY THIN FILM, AND PREPARATION METHOD OF TITANIUM-NICKEL ALLOY THIN FILM USING MULTIPLE SPUTTERING METHOD

Homogeneous HiPIMS coating method

Negative electrode active material for electric device, negative electrode for electric device and electric device

Sputtering apparatus

Semiconductor device, method for manufacturing the same, and apparatus for manufacturing semiconductor device

Fitting for a vehicle seat, and vehicle seat

Method of forming nanocrystals and method of manufacturing an organic light-emitting display apparatus including a thin film having nanocrystals

Method of making, and, analyte sensor

Glow Discharge Apparatus and Method with Lateral Rotating Arc Cathodes

Nanostructure lithium ion battery

Sputtering target

Negative electrode active material for secondary battery and method for producing the same

Hard film, hard film formed body, and rolling bearing

Method and system for manufacturing a transparent body for use in a touch panel

Method for depositing silicon carbide film

Apparatus and method for forming thin films in solar cells

Solar selective absorber based on double nitride composite material and process for its preparation

VACUUM COATING APPARATUS

Film-forming apparatus

Method of manufacturing variable resistance element and apparatus for manufacturing the same

MULTI-LAYER COATING AND METHOD FOR FORMING THE SAME

Film-forming apparatus

Method for producing a thin film made of lead zirconate titanate

Ternary nickel oxide materials for electrochromic devices

Film-forming apparatus

Sputtering and aligning multiple layers having different boundaries

Method to produce highly transparent hydrogenated carbon protective coating for transparent substrates

Method of manufacturing thin-film transistor, thin-film transistor, display apparatus, sensor, and digital X-ray image-capturing apparatus

Photomask blank manufacturing method, photomask blank, photomask, and pattern transfer method

Magnetron sputtering coating device, a nano-multilayer film, and the preparation method thereof

Combinatorial methods for making CIGS solar cells

Manufacturing apparatus

Dielectric film forming apparatus and method for forming dielectric film

Sputtering apparatus including target mounting and control

Apparatus and method for producing solar cells

Method for manufacturing magnetic recording medium

Combinatorial processing using high deposition rate sputtering

Low-E panels with ternary metal oxide dielectric layer and method for forming the same

Apparatus for forming gas blocking layer and method thereof

METHOD OF FORMING ATO WITH HIGH THROUGHPUT AND ELLIPSOMETRY DIAGNOSTIC METHOD FOR THE TCO PROCESS

COMBINATORIAL SPOT RASTERING FOR FILM UNIFORMITY AND FILM TUNING IN SPUTTERED FILMS

SURFACE COATING FILM FOR A FORMING MACHINE AND METHOD OF MANUFACTURING THE SAME

Thin film formation method and thin film formation apparatus

SPUTTERING SYSTEM

Cutting tool

TARGET SHIELD DESIGNS IN MULTI-TARGET DEPOSITION SYSTEM.

DIELECTRIC THIN FILM FOR LOW TEMPERATURE PROCESS AND METHOD FOR MANUFACTURING THE SAME

Combinatorial and Full Substrate Sputter Deposition Tool and Method

ANTI-CORROSION TREATMENT PROCESS FOR ALUMINUM OR ALUMINUM ALLOY AND ALUMINUM OR ALUMINUM ALLOY ARTICLE THEREOF

Electrochromic devices

IN-LINE FILM-FORMING APPARATUS, METHOD OF MANUFACTURING MAGNETIC RECORDING MEDIUM, AND GATE VALVE

Film-Forming apparatus and Film-Forming method

Underlying layer of alignment film for oxide superconducting conductor and method of forming same, and device for forming same

Protective coating, a coated member having a protective coating as well as method for producing a protective coating

METHODS OF PRODUCING COUNTERMEASURE DECOYS HAVING TAILORED EMISSION SIGNATURES

Physical Vapor Deposition Tool with Gas Separation

Article having hard film and method for making the article

Formation of Photoconductive and Photovoltaic Films

COLORED CASING AND METHOD FOR FABRICATING SAME AND ELECTRONIC DEVICE HAVING SAME

LOADING DEVICE AND SPUTTERING DEVICE USING SAME

Process for producing reflective mask blank for EUV lithography and process for producing substrate with functional film for the mask blank

Coated article and method for making same

Method of making coated article having antibacterial and/or antifungal coating and resulting product

SEMICONDUCTOR DEVICE HAVING ZINC OXIDE THIN FILM AND MANUFACTURING METHOD THEREOF

METHOD OF COATING AN RF DEVICE AND SPUTTERING APPARATUS USED IN THE SAME

Double-layer shutter sputtering apparatus

METHOD AND APPARATUS TO CONTROL IONIC DEPOSITION

PHYSICAL VAPOR DEPOSITION DEVICE FOR COATING WORKPIECE

PHYSICAL VAPOR DEPOSITION DEVICE FOR COATING WORKPIECE

HOUSING AND METHOD FOR MAKING THE SAME

Yttrium and titanium high-k dielectric films

MIXED SPUTTERING TARGET OF CADMIUM SULFIDE AND CADMIUM TELLURIDE AND METHODS OF THEIR USE

DEPOSITION SYSTEM CAPABLE OF PROCESSING MULTIPLE ROLL-FED SUBSTRATES

INTERMIXING OF CADMIUM SULFIDE LAYERS AND CADMIUM TELLURIDE LAYERS FOR THIN FILM PHOTOVOLTAIC DEVICES AND METHODS OF THEIR MANUFACTURE

Thin film transistor having semiconductor active layer

AC power supply for sputtering apparatus

Lanthanoid aluminate film fabrication method

TARGET BASE AND SPUTTERING APPARATUS USING SAME

SPUTTERING DEVICE WITH ROTATABLE TARGETS

Forming chalcogenide semiconductor absorbers

Method of making coated article having anti-bacterial and/or anti-fungal coating and resulting product

Photoelectronically active, chalcogen-based thin film structures incorporating tie layers

Chalcogenide-based materials and improved methods of making such materials

GRADIENT COMPOSITION BARRIER

Sputtering device and sputtering method

METHOD FOR MANUFACTURING DEVICE AND MANUFACTURING APPARATUS

Room-temperature bonding method and room-temperature bonding apparatus including sputtering

THIN FILM COATING OF BLADES

Sputtering apparatus, sputtering method, and electronic device manufacturing method

COLORED DEVICE CASING AND SURFACE-TREATING METHOD FOR FABRICATING SAME

COLORED DEVICE CASING AND SURFACE-TREATING METHOD FOR FABRICATING SAME

COLORED DEVICE CASING AND SURFACE-TREATING METHOD FOR FABRICATING SAME

COLORED DEVICE CASING AND SURFACE-TREATING METHOD FOR FABRICATING SAME

COLORED DEVICE CASING AND SURFACE-TREATING METHOD FOR FABRICATING SAME

Multilayer-film sputtering apparatus and method of forming multilayer film

HYDROPHILIC COATINGS, METHODS FOR DEPOSITING HYDROPHILIC COATINGS AND IMPROVED DEPOSITION TECHNOLOGY FOR THIN FILMS

Method for depositing film

Sputter device

Method of manufacturing magnetoresistive element, sputter deposition chamber, apparatus for manufacturing magnetoresistive element having sputter deposition chamber, program and storage medium

Multilayered coated cutting tool

SPUTTERING DEVICE

Method of fabricating resistance memory

CONDUCTIVE CONTACT LAYER FORMED ON A TRANSPARENT CONDUCTIVE LAYER BY A REACTIVE SPUTTER DEPOSITION

POWER SUPPLY APPARATUS

SPUTTERING DEPOSITION APPARATUS

Target Exchange Type Plasma Generating Apparatus

Power supply apparatus

MANUFACTURING METHOD OF SEMICONDUCTOR ELEMENT

Synthesis of high-purity bulk copper indium gallium selenide materials

Copper indium gallium selenide (CIGS) thin films with composition controlled by co-sputtering

Dielectric film with hafnium aluminum oxynitride film

Sputter-coating apparatus

SPUTTERING DEPOSITION APPARATUS

SPUTTERING DEVICE

Sputtering method

Sputtering target apparatus

Methods of making, and, analyte sensor

Apparatus And Method For Depositing A CIGS Layer

Sputtering apparatus including cathode with rotatable targets, and related methods

Low-maintenance coatings, and methods for producing low-maintenance coatings

Low-maintenance coating technology

Razor blade coating

Information recording medium and method for producing same, and sputtering target

APPARATUS FOR REACTIVE SPUTTERING DEPOSITION

Dynamic Film Thickness Control System/Method and its Utilization

Dynamic Film Thickness Control System/Method and its Utilization

Method of manufacturing dielectric film that has hafnium-containing and aluminum-containing oxynitride

High-frequency sputtering device

SPUTTERING APPARATUS, DOUBLE ROTARY SHUTTER UNIT, AND SPUTTERING METHOD

LOW-REFRACTIVE-INDEX FILM, METHOD OF DEPOSITING THE SAME, AND ANTIREFLECTION FILM

METHOD FOR MANUFACTURING A CIRCUMFERENTIALLY PATTERNED DISK FOR LONGITUDINAL AND PERPENDICULAR RECORDING

Dynamic Film Thickness Control System/Method and its Utilization

Dynamic Film Thickness Control System/Method and its Utilization

SUBSTRATE SUPPORT IN A REACTIVE SPUTTER CHAMBER

Dynamic Film Thickness Control System/Method and its Utilization

Dynamic Film Thickness Control System/Method and its Utilization

Method for manufacturing magnetoresistance effect element using simultaneous sputtering of Zn and ZnO

Method for alkali doping of thin film photovoltaic materials

ADHESION BETWEEN AZO AND AG FOR THE BACK CONTACT IN TANDEM JUNCTION CELL BY METAL ALLOY

FILM COATING APPARATUS

METHOD OF MANUFACTURING METAL OXIDE ELECTRODE AND ORGANIC LIGHT EMITTING DIODE DISPLAY USING THE SAME

Electrode for lithium secondary battery and lithium secondary battery using same

Light Emitting Device Manufacturing Apparatus and Method

INLINE CO-SPUTTER APPARATUS

SPUTTERING APPARATUS AND MANUFACTURING APPARATUS FOR LIQUID CRYSTAL DEVICE

Room temperature bonding using sputtering

Anode for lithium ion secondary battery, production method thereof, and lithium ion secondary battery using the same

Microwave-assisted rotatable PVD

Sputtering Method and Sputtering Apparatus, and Electronic Device Manufacturing Method

Apparatus

Cluster generator

Hard coating film

Coated article with nanolayered coating scheme

Resistive materials for microbolometer, method for preparation of resistive materials and microbolometer containing the resistive materials

DOUBLE-LAYER SHUTTER CONTROL METHOD OF MULTI-SPUTTERING SYSTEM

Formation of photoconductive and photovoltaic films

Endoprosthesis coating

ENDOPROSTHESIS COATING

Co-sputter deposition of metal-doped chalcogenides

Low-maintenance coatings, and methods for producing low-maintenance coatings

Low-maintenance coating technology

Plasma vapor deposition

FILM-DEPOSITING TARGET AND PREPARATION OF PHASE SHIFT MASK BLANK

Process of forming a razor blade

Method of manufacturing semiconductor active layer, method of manufacturing thin film transistor using the same and thin film transistor having semiconductor active layer

Density filter, method of forming the density filter and apparatus thereof

Apparatus for producing group-III nitride semiconductor layer, method of producing group-III nitride semiconductor layer, method of producing group-III nitride semiconductor light-emitting device, group-III nitride semiconductor light-emitting device thereof, and lamp thereof

Method for fabricating concentration-gradient high-frequency ferromagnetic films

Lanthanoid aluminate film fabrication method

Sputtering film forming method, electronic device manufacturing method, and sputtering system

Dynamic film thickness control system/method and its utilization

Plasma Sputtering Film Deposition Method and Equipment

Film forming apparatus

Electrochromic cell, its use in the realization of a glass pane or a rear-view mirror and its realization method

APPARATUS FOR MANUFACTURING GROUP III NITRIDE COMPOUND SEMICONDUCTOR LIGHT-EMITTING DEVICE, METHOD OF MANUFACTURING GROUP III NITRIDE COMPOUND SEMICONDUCTOR LIGHT-EMITTING DEVICE, GROUP III NITRIDE COMPOUND SEMICONDUCTOR LIGHT-EMITTING DEVICE, AND LAMP

PROCESSING CHAMBER

Photomask blank, photomask, and method of manufacture

Process for forming thin film and system for forming thin film

Metal multi-layered film structure and method of manufacturing and use of the same

Silicon object forming method and apparatus

Electrocatalyst for ethanol oxidation and direct ethanol fuel cell using the same

Sputtering apparatus including novel target mounting and/or control

Method of Manufacturing Perpendicular Magnetic Recording Medium and Perpendicular Magnetic Recording Medium

Dynamic film thickness control system/method and its utilization

SPUTTERING APPARATUS

Facing-targets type sputtering apparatus

Hard coating film

METHOD OF MANUFACTURING VERTICAL INORGANIC ALIGNMENT LAYER AND LIQUID CRYSTAL DISPLAY HAVING THE VERTICAL INORGANIC ALIGNMENT LAYER

Co-sputter deposition of metal-doped chalcogenides

Method and apparatus for improving symmetry of a layer deposited on a semiconductor substrate

Circumferentially patterned disk for longitudinal and perpendicular recording

Sputtering apparatus

Insert for milling of steel

Modular device for coating surfaces

Hybrid coating structure

Method of forming vertical inorganic alignment layer and liquid crystal display apparatus having the same

Method of making, and, analyte sensor

Multilayer reflective film coated substrate, manufacturing method thereof, reflective mask blank, and reflective mask

Plasma excitation system

Minute high-performance rare earth magnet for micromini product and process for producing the same

Coated insert

Multi-layer coating having excellent adhesion and sliding properties and production method thereof

Sputtering device

Hydrophilic coatings, methods for depositing hydrophilic coatings, and improved deposition technology for thin films

SPUTTERED TRANSPARENT CONDUCTIVE FILMS

Method of fabricating a capacitor

ITO thin film, method of producing the same, transparent conductive film, and touch panel

Soil-resistant coating for glass surfaces

Application of multi-layer antistatic/antireflective coating to video display screen by sputtering

Magnetic film forming method, magnetic pattern forming method and magnetic recording medium manufacturing method

Film-depositing target and preparation of phase shift mask blank

Sputtering apparatus

Reactive sputtering method and device

Sputtering device

Double-layer shutter control method of multi-sputtering system

Protective layer for optical coatings with enhanced corrosion and scratch resistance

Preparation of halftone phase shift mask blank

Formation of photoconductive and photovoltaic films

Method and device for manufacturing semiconductor or insulator-metallic laminar composite cluster

Graded photocatalytic coatings

Process for depositing composite coating on a surface

Apparatus

Use of oxygen-containing gases in fabrication of granular perpendicular magnetic recording media

Method of film-forming transparent electrode layer and device therefor

Method of forming thin-film electrodes

Surface-coated cutting tool member having hard coating layer and method for forming the hard coating layer on surface of cutting tool

Copper film containing tungsten carbide for improving electrical conductivity, thermal stability and hardness properties and a manufacturing method for the copper film

Nano-multilayered structures, components and associated methods of manufacture

Gas injection for uniform composition reactively sputter-deposited thin films

Method and apparatus for creating radial profiles on a substrate

Soil-resistant coating for glass surfaces

Methods and apparatuses for depositing film on both sides of a pane

Method for forming light-absorbing layer

Piston ring with hard plating, and preparation method therefor

Nanostructured vanadium oxide uncooled bolometers and method of fabrication

Apparatus for enhanced physical vapor deposition

Fabrication of a multi-layered magnetic element

Photovoltaic cell with copper poor CIGS absorber layer and method of making thereof