SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND HARD MASK

MIRROR LAYER AND MIRROR FOR A LITHOGRAPHIC APPARATUS

SPUTTERING APPARATUS AND SPUTTERING METHOD

DEPOSITION METHOD, SPUTTERING APPARATUS, AND ROTARY TARGET

LAMINATED BODY AND LAMINATED BODY MANUFACTURING METHOD

METHOD OF FORMING TRANSPARENT LAYERS FOR A SOLAR CELL

METHOD FOR PRODUCING TRANSPARENT CONDUCTIVE COATINGS FOR EMI PROTECTION USING HIPIMS

Two-Dimensional Materials, Their Composite Thin Films, and the Formation Thereof

PELLICLE MEMBRANE FOR A LITHOGRAPHIC APPARATUS

METHOD OF PREPARING TELLURIUM OXIDE THIN FILM AND THIN FILM TRANSISTOR USING SPUTTERING

PISTON RING WITH HARD PLATING, AND PREPARATION METHOD THEREFOR

INSTALLATION, METHOD, AND CARRIER FOR COATING EYEGLASS LENSES

REFLECTIVE MASK BLANK FOR EUV LITHOGRAPHY, METHOD FOR MANUFACTURING SAME, REFLECTIVE MASK FOR EUV LITHOGRAPHY, AND METHOD FOR MANUFACTURING SAME

HOUSING, MOBILE TERMINAL, AND SPUTTER COATING APPARATUS

Stacked Lithium-Sodium Electrochemical Battery and Fabrication Method Thereof

Method for Improved Heavy Metal Wetting on a Surface

PVD TARGET DESIGN AND SEMICONDUCTOR DEVICES FORMED USING THE SAME

FABRICATION OF ELECTROPLATED NICKEL-IRON LAYERS WITH TITANIUM-COPPER SEED LAYER

SUBSTRATE WITH HARD ANTIREFLECTIVE COATING

COATING SYSTEM, ELECTRODE PLATE WITH A COATING SYSTEM OF THIS TYPE, METHOD FOR THE PRODUCTION THEREOF, AND FUEL CELL, ELECTROLYZER OR REDOX FLOW CELL

Layered Substrate with Reduced Blue Dot Defect Density

METHOD FOR MANUFACTURING CRYSTALLIZED LAMINATED STRUCTURE

METHOD OF COATING SLIP RINGS

MULTIWALLED CARBON NANOTUBES BASED FLEXIBLE AND BINDER--FREE ANODE FOR LI-ION BATTERIES

METHOD FOR FORMING AN OHMIC CONTACT ON A GERMANIUM-TIN BASED LAYER

DEPOSITION APPARATUS AND DEPOSITION METHOD

POWER LIMITER WITH WAVEGUIDE HAVING AN LaCoO3 FILM

SOFT MAGNETIC MULTILAYER DESPOSITION APPARATUS, METHODS OF MANUFACTURING AND MAGNETIC MULTILAYER

TRANSPARENT CONDUCTIVE FILM, METHOD FOR PRODUCING TRANSPARENT CONDUCTIVE FILM, TRANSPARENT CONDUCTIVE MEMBER, ELECTRONIC DISPLAY DEVICE, AND SOLAR BATTERY

PIEZOELECTRIC BULK LAYERS WITH TILTED C-AXIS ORIENTATION AND METHODS FOR MAKING THE SAME

FILM FORMING APPARATUS AND FILM FORMING METHOD

METHOD OF DEPOSITING LAYERS OF A THIN-FILM TRANSISTOR ON A SUBSTRATE AND SPUTTER DEPOSITION APPARATUS

NITRIDE MATERIAL, PIEZOELECTRIC BODY FORMED OF SAME, AND MEMS DEVICE, TRANSISTOR, INVERTER, TRANSDUCER, SAW DEVICE, AND FERROELECTRIC MEMORY USING THE PIEZOELECTRIC BODY

PVD DIRECTIONAL DEPOSITION FOR ENCAPSULATION

CONDUCTIVE ELECTROLYTE LAYER AND METHOD OF MANUFACTURING METAL-SUPPORTED SOLID OXIDE FUEL CELL INCLUDING THE SAME

COATED CUTTING TOOL WITH AN ALTERNATING LAYER COMPOSITION

PARTICLE REMOVAL DURING FABRICATION OF ELECTROCHROMIC DEVICES

METHOD OF FORMING TRANSPARENT LAYERS FOR A SOLAR CELL

METHOD OF MAKING AN ELECTRODE HAVING MULTI-WALLED CARBON NANOTUBES

PVD target design and semiconductor devices formed using the same

Electromagnetic wave attenuator, electronic device, film formation apparatus, and film formation method

METHOD OF FORMING A CATHODE LAYER, METHOD OF FORMING A BATTERY HALF CELL

ELECTROCHROMIC CATHODE MATERIALS

COATED SUBSTRATES AND METHODS FOR THE PREPARATION THEREOF

APPARATUS AND METHOD FOR FABRICATING PVD PEROVSKITE FILMS

PREPARING METHOD OF TWO-DIMENSIONAL MATERIALS WITH CONTROLLED NUMBER OF LAYERS

OPTICAL DEVICE AND MANUFACTURING METHOD THEREFOR

METHOD OF DEPOSITING A MATERIAL

Fluorinated coupling agents and fluorinated (co)polymer layers made using the same

LAMINATED BODY AND LAMINATED BODY MANUFACTURING METHOD

REFLECTIVE OPTICAL METASURFACE FILMS

HIGH-ENTROPY CARBIDE CERAMIC MATERIAL, CARBIDE CERAMIC COATING AND PREPARATION METHODS AND USE THEREOF

SELF-LUBRICATING FILM OVER WIDE TEMPERATURE RANGES IN VACUUM AND PREPARATION METHOD AND USE THEREOF

ELECTROCHROMIC CATHODE MATERIALS

Sputtering system with a plurality of cathode assemblies

Optical interference filter

COATED TOOL

APPROACHES TO MODIFYING A COLOR OF AN ELECTROCHROMIC STACK IN A TINTED STATE

Transparent electroconductive layer, transparent electroconductive sheet, touch sensor, light control element, photoelectric conversion element, heat ray control member, antenna, electromagnetic wave shield member, and image display device

LOW TEMPERATURE SYNTHESIS OF NiAl THIN FILMS

Forming Nanotwinned Regions in a Ceramic Coating at a Tunable Volume Fraction

Innovation In High Performance Electro-Chromic Device Manufacturing Method

FILM FORMING APPARATUS, CONTROL APPARATUS FOR FILM FORMING APPARTUS, AND FILM FORMING METHOD

METHOD OF MANUFACTURING CRYSTALLINE MATERIAL FROM DIFFERENT MATERIALS

SPUTTER DEPOSITION APPARATUS AND METHOD

SPUTTER DEPOSITION APPARATUS AND METHOD

Method and apparatus for deposition of multilayer device with superconductive film

Vacuum processing apparatus

Piezoelectric bulk layers with tilted c-axis orientation and methods for making the same

PIEZOELECTRIC COATING AND DEPOSITION PROCESS

Sputtering apparatus and method for fabricating semiconductor device using the same

Film formation apparatus and film formation method

High temperature thermal dual-barrier coating

System for forming nano-laminate optical coating

Target structure of physical vapor deposition

THIN FILM COATING

Coated tool with coating comprising boride-containing diffusion barrier layer

RAZOR BLADES WITH CHROMIUM BORIDE-BASED COATINGS

Sputtering system

Sputtering system with a plurality of cathode assemblies

Film forming method, film forming apparatus, and program

ELECTROCHROMIC CATHODE MATERIALS

IRON NITRIDE MAGNETIC MATERIAL INCLUDING COATED NANOPARTICLES

Sputtering apparatus and film forming method

STRUCTURED FILM AND ARTICLES THEREOF

Coated member, electronic device, and method for manufacturing the coated member

Method for preparing bactericidal film on fiber cloth

Vanadium aluminium nitride (VAlN) micro alloyed with Ti and/or Si

Substrate fixing device, deposition processing equipment including the same, and deposition processing method using the deposition processing equipment

STRUCTURE AND METHOD OF MANUFACTURING THE SAME

Sputtering cathode, sputtering cathode assembly, and sputtering apparatus

DEPOSITION APPARATUS AND DEPOSITION METHOD

LIGHT ABSORPTION FILM, PREPARATION METHOD AND APPLICATION

Methods of fabricating thin films comprising lithium-containing materials

Negative thermal expansion material, negative thermal expansion film and preparation method thereof

Multi-cathode processing chamber with dual rotatable shields

Coating machine and coating method

METHOD OF MAKING COATED ARTICLE HAVING ANTIBACTERIAL AND/OR ANTIFUNGAL COATING AND RESULTING PRODUCT

Inorganic solid-state electrochromic module containing inorganic transparent conductive film

Sputtering apparatus

COVER GLASS AND PROCESS FOR PRODUCING THE SAME

Method of manufacturing reflective mask blank, and reflective mask blank

PVD target design and semiconductor devices formed using the same

ELECTROCHROMIC DEVICES

RAZOR BLADE COATING

Thin film capacitor, and method of producing thin film capacitor

ULTRAFINE BUBBLE GENERATING APPARATUS AND METHOD OF MANUFACTURING ELEMENT SUBSTRATE

Extreme ultraviolet mask blank defect reduction methods

THIN FILM DEPOSITION SYSTEMS AND DEPOSITION METHODS FOR FORMING PHOTOVOLTAIC CELLS

Method of coating slip rings

Sputtering method and sputtering apparatus

Sputtering cathode, sputtering cathode assembly, and sputtering apparatus

Deposition apparatus for both lateral portions of substrate

Piezoelectric bulk layers with tilted c-axis orientation and methods for making the same

Housing, mobile terminal, and sputter coating apparatus

TARGET EXCHANGING DEVICE AND SURFACE TREATMENT FACILITY

Sputtering apparatus and method for fabricating semiconductor device using the same

Sputtering cathode, sputtering cathode assembly, and sputtering apparatus

Semiconductor memory device and semiconductor memory manufacturing apparatus

FILM FORMING APPARATUS, METHOD FOR MANUFACTURING FILM-FORMED PRODUCT, AND METHOD FOR MANUFACTURING ELECTRONIC COMPONENT

Target structure of physical vapor deposition

Thin film getter and manufacturing method therefor

Optical device and manufacturing method therefor

System and method to control PVD deposition uniformity

Method and apparatus for deposition of multilayer device with superconductive film

Coated cutting tool

Sputtering system and method

Low-E matchable coated articles having absorber film and corresponding methods

Sputtering Cathode, Sputtering Cathode Assembly, and Sputtering Apparatus

Physical Vapor Deposition Target Assembly

MICROMECHANIC STRUCTURE AND METHOD FOR MAKING THE MICROMECHANIC STRUCTURE

PVD directional deposition for encapsulation

Apparatus and methods for depositing durable optical coatings

ANTIMONATE ELECTROCATALYST FOR AN ELECTROCHEMICAL REACTION

Sputtering apparatus including cathode with rotatable targets, and related methods

Catalyst material and method for manufacturing the same

System, method and support for coating eyeglass lenses

Device, method and use for the coating of lenses

DEVICES INCLUDING A NEAR FIELD TRANSDUCER (NFT) WITH NANOPARTICLES

OPTICAL FILTER INCLUDING A HIGH REFRACTIVE INDEX MATERIAL

Low emissivity coatings, glass surfaces including the same, and methods for making the same

Film-forming device

Antireflection hard coating film and preparation method thereof

Antireflection hard coating film and preparation method thereof

Multicathode deposition system

PHYSICAL VAPOR DEPOSITION OF DOPED TRANSITION METAL OXIDE AND POST-DEPOSITION TREATMENT THEREOF FOR NON-VOLATILE MEMORY APPLICATIONS

Substrate side-deposition apparatus

Method for preparing halftone phase shift mask blank, halftone phase shift mask blank, halftone phase shift mask, and thin film forming apparatus

Method of forming wiring on side portion of substrate

Chromizing over cathodic arc coating

Methods and apparatus for co-sputtering multiple targets

METHODS AND APPARATUS FOR LINEAR SCAN PHYSICAL VAPOR DEPOSITION WITH REDUCED CHAMBER FOOTPRINT

Multilayer material

Structure and method of manufacturing the same

Deposition system with shield mount

Process integration method to tune resistivity of nickel silicide

Film forming apparatus and film forming method

Sputtering Cathode, Sputtering Cathode Assembly, and Sputtering Apparatus

Sputtering cathode, sputtering cathode assembly, and sputtering apparatus

SYNTHESIS OF HIGH-PURITY BULK COPPER INDIUM GALLIUM SELENIDE MATERIALS

Electrochromic cathode materials

Thin film capacitor, and method of producing thin film capacitor

Coated article with low-E coating having IR reflecting system with silver and zinc based barrier layer(s)

Method of Forming a Coating on a Substrate and an Article Formed by Such a Method

Sapphire coated substrate with a flexible, anti-scratch and multi-layer coating

Sapphire thin film coated substrate

Device and method for producing defined properties of gradient layers in a system of multilayered coatings in sputtering installations

SEMICONDUCTOR DEVICE

Electrochromic devices

PVD processing method and PVD processing apparatus

Carbon-based Nano-thin Film for Enhancing Surface Abrasion Resistance on Sapphire Thin Film

Sapphire thin film coated substrate

Method of Forming a Coating on a Substrate and an Article Formed by Such a Method

VACUUM DEPOSITION COMPOSITE TARGET

METHOD FOR PRODUCING PVD ANTI-BACTERIAL FILM ON PLASTIC

Mask blank, phase shift mask, method for manufacturing phase shift mask, and method for manufacturing semiconductor device

Process for making composite product by plating alloy film on carbon fiber core

Method and system for fabrication of crystals using laser-accelerated particle beams or secondary sources

Semiconductor memory device and semiconductor memory manufacturing apparatus

Sputter devices and methods

Target structure of physical vapor deposition

Method of coating slip rings

Process integration method to tune resistivity of nickel silicide

Conductive structure, method for manufacturing same, and electrode comprising conductive structure

Process kit for multi-cathode processing chamber

Film formation apparatus, film formation method, and manufacturing method of solar battery

Manufacturing method of magneto-resistive effect device

Low emissivity coatings, glass surfaces including the same, and methods for making the same

METHOD FOR THE DEPOSITION OF FUNCTIONAL LAYERS SUITABLE FOR HEAT RECEIVER TUBES

Methods and apparatus for dynamically treating atomic layer deposition films in physical vapor deposition chambers

Plasma chamber target for reducing defects in workpiece during dielectric sputtering

SPUTTERING TARGET AND METHOD FOR PRODUCING THE SAME

WORKPIECE HOLDING BODY AND FILM-FORMING APPARATUS

Nanostructure Lithium Ion Battery

Coated article having low-E coating with IR reflecting layer(S) and yttrium inclusive high index nitrided dielectric layer

Sputtering apparatus, film deposition method, and control device

Ultrasound-assisted electrochemical distinction of normal and cancerous cells

In-situ microbubbles generation for ultrasonic biomedical applications

Coated article having low-E coating with IR reflecting layer(s) and niobium bismuth based high index layer and method of making same

Coated article with low-E coating having reflecting system with silver and zinc based barrier layer(s)

Paste method to reduce defects in dielectric sputtering

Processes for low pressure, cold bonding of solid lithium to metal substrates

Powder coating apparatus

APPARATUS FOR VACUUM SPUTTER DEPOSITION AND METHOD THEREFOR

Sapphire thin film coated substrate

Substrate provided with a stack having thermal properties

Substrate provided with a stack having thermal properties

Functionally graded material by in-situ gradient alloy sputter deposition management

Heat treatable coated article having titanium nitride based IR reflecting layer(s)

LAMINATED FILM AND METHOD FOR MANUFACTURING LAMINATED FILM

LAMINATED BODY

Alloy thin films exhibiting perpendicular magnetic anisotropy

Multilayer thin films exhibiting perpendicular magnetic anisotropy

Film formation apparatus

Hard thin films

METHOD FOR PREPARING HIGH-HARDNESS ANTI-BACTERIAL PVD FILM

Method for manufacturing barrier film with enhanced moisture resistance and barrier film manufactured by the same

Anti-reflective sputtering stack with low Rv and low Ruv

Fabrication of a multi-layered magnetic element

Single oxide metal deposition chamber

Method for preparing halftone phase shift mask blank, halftone phase shift mask blank, halftone phase shift mask, and thin film forming apparatus

Curved substrate with film, method for producing the same, and image display device

Optical recording medium

Semiconductor device, base, and method for manufacturing same

Method of forming later insulating films for MTJ

High rate sputter deposition of alkali metal-containing precursor films useful to fabricate chalcogenide semiconductors

FILM FORMING APPARATUS, METHOD FOR MANUFACTURING FILM-FORMED PRODUCT, AND METHOD FOR MANUFACTURING ELECTRONIC COMPONENT

SPUTTERING APPARATUS AND METHOD FOR FORMING SEMICONDUCTOR FILM USING SPUTTERING APPARATUS

Method for producing photocatalyst electrode for water decomposition

Multisurface simultaneous sputtering and shuttering

SPUTTERING APPARATUS AND METHOD OF FORMING A LAYER USING THE SAME

Metal oxide thin film, method for depositing metal oxide thin film and device comprising metal oxide thin film

MANUFACTURING METHOD FOR MAGNETIC RECORDING MEDIUM AND MAGNETIC RECORDING MEDIUM MANUFACTURED BY SAID MANUFACTURING METHOD

Mask blank, phase shift mask, method for manufacturing phase shift mask, and method for manufacturing semiconductor device

Ionized physical vapor deposition (IPVD) apparatus and method for an inductively coupled plasma sweeping source

POLYGON DEPOSITION SOURCES WITH HIGH MATERIALS UTILIZATION AND INCREASED TIME BETWEEN CHAMBER CLEANINGS

Method for balancing consumption of targets in pulsed dual magnetron sputtering (DMS) processes

Durable 3D geometry conformal anti-reflection coating

Chalcogenide-based materials and improved methods of making such materials

Reflective mask blank, method for manufacturing same, reflective mask, method for manufacturing same, and method for manufacturing semiconductor device

COATED ARTICLE INCLUDING METAL ISLAND LAYER(S) FORMED USING STOICHIOMETRY CONTROL, AND/OR METHOD OF MAKING THE SAME

Antimicrobial glass coating

Deposition apparatus

SURFACE TREATMENT METHOD WITH SUPERIOR MASS-PRODUCTIVITY AND LOW FRICTION CHARACTERISTICS

METHOD FOR FORMING FILM ON FLEXIBLE SUBSTRATE BY VAPOR DEPOSITION

SUBSTRATE PROCESSING DEVICE

Molds with coatings for high temperature use in shaping glass-based material

Ultra-thin doped noble metal films for optoelectronics and photonics applications

Surface-treated copper foil, method for producing same, copper-clad laminate for printed wiring board, and printed wiring board

Iron nitride magnetic material including coated nanoparticles

COVER GLASS AND PROCESS FOR PRODUCING THE SAME

Methods and apparatus for processing a substrate

Electrochromic devices

THIN FILM TRANSISTOR

OFF-AXIS MAGNETRON SPUTTERING WITH REAL-TIME REFLECTION HIGH ENERGY ELECTRON DIFFRACTION ANALYSIS

Antireflection film and optical member including antireflection film

Single layer smart window

Method to produce highly transparent hydrogenated carbon protective coating for transparent substrates

Electrochemically actuatable electronic component and process for producing the actuatable electronic component

Sputtering apparatus

Razor blade

Optical sensor for analyte detection

Sputtering apparatuses and methods of manufacturing a magnetic memory device using the same

SPUTTERING APPARATUS

SURFACE TREATMENT METHOD WITH SUPERIOR MASS-PRODUCTIVITY AND LOW FRICTION CHARACTERISTICS

PZT THIN FILM LAMINATE AND MANUFACTURING METHOD THEREOF

Multiple layer FePt structure

Iron bus bar having copper layer, and method for manufacturing the same

Halftone phase shift photomask blank, making method, and halftone phase shift photomask

Methods and apparatus for co-sputtering multiple targets

RAZOR BLADE COATING

Aluminum nitride piezoelectric thin film, piezoelectric material, piezoelectric component, and method for manufacturing aluminum nitride piezoelectric thin film

Method for depositing a piezoelectric film containing AIN, and a piezoelectric film containing AIN

Method of coating a substrate so as to provide a controlled in-plane compositional modulation

Apparatus and method for multilayer deposition

MULTI-LAYER COATING AND METHOD FOR FORMING THE SAME

Functionally graded material by in-situ gradient alloy sputter deposition management

Functionally graded material by in-situ gradient alloy sputter deposition management

Methods of forming MgO barrier layer

Chromizing over cathodic arc coating

Thin film encapsulation structure and organic light emitting device having the same

Methods for optimized production of multilayer metal/transparent conducting oxide (TCO) constructs

Piezoelectric thin film, manufacturing method therefor, and piezoelectric element

Sputtering device and maintenance method for sputtering device

Solid-state batteries utilizing template layers for electrode formation and methods for forming the same

TiBlayers and manufacture thereof

Sputter tool

METHOD FOR PRODUCING INFRARED RADIATION REFLECTING FILM

Devices including a near field transducer (NFT) with nanoparticles

TIN/TIC COATING AND METHOD FOR MANUFACTURING THE TIN/TIC COATING AND ARTICLES SO COATED

Biocompatible multilayer-thin-film-type coating as a surface treatment for biomedical substrates, and method for the production thereof

Low-E panels and methods for forming the same

Sputtering apparatus, film deposition method, and control device

Piezoelectric thin film and method for producing the same

ORGANIC EL ELEMENT AND METHOD FOR MANUFACTURING SAME

SPUTTERING DEVICE

Power distributor for defined sequential power distribution

Film forming apparatus and film forming method

Vanadium oxide thermo-sensitive film material with high temperature coefficient of resistance and a preparing method thereof

Deposition tool for combinatorial thin film material libraries