Narrow source for physical vapor deposition processing

SYSTEMS AND METHODS FOR FORMING A LAYER OF SPUTTERED MATERIAL

Production of Nanoparticles

COMBINATORIAL PROCESSING USING MOSAIC SPUTTERING TARGETS

Production method for forming an antibacterial film on the surface of an object

Hard film sliding part and method of manufacturing the sliding part

Holographic image reproduction mechanism using ultraviolet light

Soft sputtering magnetron system

Sputtering apparatus including target mounting and control

Substrate processing apparatus

VEHICLE PISTON RING HAVING MULTI-LAYER COATING

PVD hybrid method for depositing mixed crystal layers

Method and Apparatus for Producing Controlled Stresses and Stress Gradients in Sputtered Films

Method of switching magnetic flux distribution

MAGNETRON SPUTTERING APPARATUS

Method For Sputter Deposition And RF Plasma Sputter Etch Combinatorial Processing

Sputtering lithium-containing material with multiple targets

COATED ARTICLE AND METHOD FOR MAKING SAME

System and Method for Aligning Sputter Sources

Sputter gun having variable magnetic strength

SPUTTER GUN SHUTTER

Masking method and apparatus

Magnetic Confinement and Directionally Driven Ionized Sputtered Films For Combinatorial Processing

METHOD FOR ELECTROMAGNETIC SHIELDING AND PRODUCT MADE BY SAME

Light-emitting panel, manufacturing method of light-emitting panel, and film forming system

PVD apparatus and method with deposition chamber having multiple targets and magnets

Equipment for Making IC Shielding Coating Layer and Metal Shielding Layer of IC

High metal ionization sputter gun

Method and Apparatus for Enhanced Film Uniformity

SPUTTERING DEPOSITION APPARATUS AND ADHESION PREVENTING MEMBER

SPUTTER DEPOSITION APPARATUS

MEDIUM FREQUENCY MAGNETRON SPUTTERING DEVICE

VACUUM COATING APPARATUS AND METHOD FOR DEPOSITING NANOCOMPOSITE COATINGS

ROTARY CATHODES FOR MAGNETRON SPUTTERING SYSTEM

Sputter device

Vacuum deposition apparatus

Method of manufacturing semiconductor device

Separated target apparatus for sputtering and sputtering method using the same

METHOD AND APPARATUS FOR THE MULTI-LAYER AND MULTI-COMPONENT COATING OF THIN FILMS ON SUBSTRATES, AND MULTI-LAYER AND MULTI-COMPONENT COATINGS

ANTI-CORROSION TREATMENT PROCESS FOR ALUMINUM OR ALUMINUM ALLOY AND ALUMINUM OR ALUMINUM ALLOY ARTICLE THEREOF

FILM FORMING METHOD BY SPUTTERING APPARATUS AND SPUTTERING APPARATUS

Sleep aid composition and method

METHOD OF COATING METAL SHELL WITH PURE WHITE FILM

Film-Forming apparatus and Film-Forming method

Coated article and method for making the same

Coated article and method for making same

PHOTOCATALYTIC MULTILAYER METAL COMPOUND THIN FILM AND METHOD FOR PRODUCING SAME

Coated article

Coated article and method for manufacturing coated article

Coated article and method for making the same

SPUTTERING APPARATUS AND MANUFACTURING METHOD OF ELECTRONIC DEVICE

SPUTTERING DEVICE

PROCESS FOR APPLYING AMORPHOUS METAL

METHOD AND APPARATUS TO PRODUCE HIGH DENSITY OVERCOATS

Coated article and method for making the same

Magnetron with non-equipotential cathode

PLASMA PROCESSING APPARATUS AND PRINTED WIRING BOARD MANUFACTURING METHOD

Method of making coated article having antibacterial and/or antifungal coating and resulting product

PLASMA PROCESSING CHAMBER HAVING ENHANCED DEPOSITION UNIFORMITY

MAGNETRON COATING MODULE AND MAGNETRON COATING METHOD

METHOD AND APPARATUS TO CONTROL IONIC DEPOSITION

Coated article and method for making the same

Coated article

Magnetron sputtering apparatus

Multi-Station Sputtering and Cleaning System

SYSTEMS AND METHODS FOR FORMING A LAYER OF SPUTTERED MATERIAL

Method of co-sputtering alloys and compounds using a dual C-MAG cathode arrangement and corresponding apparatus

FILM FORMATION APPARATUS AND FILM FORMATION METHOD

Coated article and method for manufacturing same

REACTIVE SPUTTERING WITH MULTIPLE SPUTTER SOURCES

MULTILAYER COATING

Triangular Scanning Magnet in Sputtering Tool Moving Over Larger Triangular Target

Methods for manufacturing dielectric films

Sputtering apparatus, method of operating the same, and method of manufacturing substrate using the same

Substrate processing apparatus and apparatus and method of manufacturing magnetic device

SPUTTER DEVICE AND METHOD OF MANUFACTURING MAGNETIC STORAGE MEDIUM

SYSTEM AND METHODS FOR HIGH-RATE CO-SPUTTERING OF THIN FILM LAYERS ON PHOTOVOLTAIC MODULE SUBSTRATES

Manufacturing apparatus and method for large-scale production of thin-film solar cells

PROCESS FOR THE PREPARATION OF ORGANIC ELECTRONIC DEVICES

Sublayers for magnetically soft underlayer

Sputtering Apparatus, Thin-Film Forming Method, and Manufacturing Method for a Field Effect Transistor

MAGNETRON SPUTTERING DEVICE

Sputtering Apparatus, Thin-Film Forming Method, and Manufacturing Method for a Field Effect Transistor

SPUTTERING METHOD AND SPUTTERING APPARATUS

Apparatus and method for pretreating and coating bodies

Sputtering system

Dielectric film manufacturing method

Method for applying a diffusion barrier interlayer for high temperature components

Quantum well module with low K crystalline covered substrates

Sputtering System with Normal Target and Slant Targets on the Side

Sputtering system for depositing thin film and method for depositing thin film

METHOD FOR FORMING AN ORDERED ALLOY

Bipolar pulsed power supply and power supply apparatus having plurality of bipolar pulsed power supplies

Sputtering apparatus including cathode with rotatable targets, and related methods

FABRICATION PROCESS FOR A THICK FILM BY MAGNETRON SPUTTERING

METHOD FOR MAKING A THIN LAYER SOLID OXIDE FUEL CELL, A SO-CALLED SOFC

Low-maintenance coatings, and methods for producing low-maintenance coatings

Low-maintenance coating technology

SPUTTERING FILM FORMING METHOD AND SPUTTERING FILM FORMING APPARATUS

Annealable layer system

Manufacturing Apparatus and Method for Large-Scale Production of Thin-Film Solar Cells

Manufacturing Apparatus and Method for Large-Scale Production of Thin-Film Solar Cells

High Power Pulse Magnetron Sputtering For High Aspect-Ratio Features, Vias, and Trenches

SUBSTRATE STAGE, SPUTTERING APPARATUS PROVIDED WITH SAME, AND FILM FORMING METHOD

SPUTTERING APPARATUS AND FILM FORMING METHOD

Method of manufacturing a high density capacitor or other microscopic layered mechanical device

Film forming apparatus and film forming method

ADHESION BETWEEN AZO AND AG FOR THE BACK CONTACT IN TANDEM JUNCTION CELL BY METAL ALLOY

High-frequency sputtering device

METHOD AND APPARATUS FOR MANUFACTURING MAGNETIC RECORDING MEDIUM

Techniques for depositing transparent conductive oxide coatings using dual C-MAG sputter apparatuses

SPUTTERING APPARATUS

SPUTTERING APPARATUS AND METHOD OF MANUFACTURING ELECTRONIC DEVICE

Method of forming thin film and apparatus for forming thin film

AMORPHOUS METAL FILM AND PROCESS FOR APPLYING SAME

PROCESS FOR PRODUCING ELECTRIC CONDUCTOR LAYER

BENDING OF GLASS SHEETS

Confining Magnets In Sputtering Chamber

SPUTTERING APPARATUS AND METHOD OF THIN FILM FORMATION

Sputtering Chamber Having ICP Coil and Targets on Top Wall

SPUTTERING METHOD AND SPUTTERING APPARATUS

SPUTTERING APPARATUS FOR FORMING THIN FILM

REACTIVE MAGNETRON SPUTTERING FOR THE LARGE-SCALE DEPOSITION OF CHALCOPYRITE ABSORBER LAYERS FOR THIN LAYER SOLAR CELLS

SPUTTERING APPARATUS AND MANUFACTURING APPARATUS FOR LIQUID CRYSTAL DEVICE

Energy conversion device and method of reducing friction therein

Method of Hard Coating a Blade

METHOD FOR FABRICATING MULTILAYERED ENCAPSULATION THIN FILM HAVING OPTICAL FUNCTIONALITY AND MUTILAYERED ENCAPSULATION THIN FILM FABRICATED BY THE SAME

Process for depositing a thin film of metal alloy on a substrate and metal alloy in thin-film form

Multilayer Film Forming Method and Multilayer Film Forming Apparatus

Microwave-assisted rotatable PVD

Sputtered metal film recording medium including texture promotion layer

Apparatus

Coated body

Stress adjustment in reactive sputtering

METHOD FOR MANUFACTURING MAGNETIC RECORDING MEDIUM

Stress adjustment in reactive sputtering

Method for depositing multilayer coatings

Erosion Resistant Coatings

Sputtering apparatus and method for controlling the same

Apparatus for treating a substrate

HIGH POWER IMPULSE MAGNETRON SPUTTERING VAPOUR DEPOSITION

MULTI-CATHODE IONIZED PHYSICAL VAPOR DEPOSITION SYSTEM

MULTI-CATHODE IONIZED PHYSICAL VAPOR DEPOSITION SYSTEM

MULTI-CATHODE IONIZED PHYSICAL VAPOR DEPOSITION SYSTEM

SPUTTER COATING DEVICE

METHOD OF SPUTTERING A HIGH-K DIELECTRIC MATERIAL

Double-coating device with one process chamber

Physical Vapor Deposited Nano-Composites for Solid Oxide Fuel Cell Electrodes

Process for fabrication of a sputter deposited fully dense electrolyte layer embedded in a high performance membrane electrolyte assembly of solid oxide fuel cell

Method for sputter targets for electrolyte films

Apparatus for Manufacturing Magnetic Recording Disk, and In-Line Type Substrate Processing Apparatus

Manufacturing apparatus and method for large-scale production of thin-film solar cells

Sputtering devices and methods

Multi-station sputtering and cleaning system

Sputtering apparatus of forming thin film

Endoprosthesis coating

PERPENDICULAR MAGNETIC RECORDING FILM MEDIUM AND METHOD OF MANUFACTURING THE SAME

Method and Apparatus for Producing Controlled Stresses and Stress Gradients in Sputtered Films

Method and apparatus for depositing a coating onto a substrate

Low-maintenance coatings, and methods for producing low-maintenance coatings

Low-maintenance coating technology

Method and Apparatus for Multi-Cathode PVD Coating and Substrate with PVD Coating

Apparatus and method for the application of a material layer to display devices

Manufacturing method for thin film battery

Method and Apparatus for Reactive Solid-Gas Plasma Deposition

HIGH-HARDNESS CARBON COATING

SPUTTER COATING DEVICE AND METHOD OF DEPOSITING A LAYER ON A SUBSTRATE

METHOD FOR THE PRODUCTION OF A TRANSPARENT CONDUCTIVE OXIDE COATING

Apparatus for manufacturing magnetic recording disk, and in-line type substrate processing apparatus

Method of Producing a Magnetic Recording Medium

Hard, wear-resistant aluminum nitride based coating

Sputtering Apparatus

MULTITARGET SPUTTER SOURCE AND METHOD FOR THE DEPOSITION OF MULTI-LAYERS

METHOD FOR PRODUCING A COATING WITH IMPROVED ADHESION

Vacuum Film Forming Apparatus

Sputtering device and film forming method

Surface-coated cutting tool made of hard metal and manufacturing method for same

Coating of optical substrates using closed field system

Apparatus for manufacturing magnetic recording disk, and in-line type substrate processing apparatus

Sputtering apparatus and film-forming processes

Sputtering apparatus, method for producing a transparent electroconductive film

Apparatus and method for manufacturing stress-free flexible printed circuit board

Plasma Sputtering Film Deposition Method and Equipment

Method of deposition of a layer on a razor blade edge and razor blade

SPUTTERING APPARATUS WITH ROTATABLE WORKPIECE CARRIER

Apparatus for Manufacturing Magnetic Recording Disk, and In-Line Type Substrate Processing Apparatus

Deposition system

PHYSICAL VAPOR DEPOSITION CHAMBER HAVING AN ADJUSTABLE TARGET

High-adhesive backside metallization

Nanostructured thin film optical coatings

Systems and methods for magnetron deposition

Layer system that can be annealed and method for producing the same

Method of fabricating conductive carbon thin-film of high-hardness and application of the carbon thin-film as electrode for thin-film electro-luminescent device

Ultra high vacuum deposition of PCMO material

Dual hexagonal shaped plasma source

Sputtering apparatus including novel target mounting and/or control

Backing plate assembly

Sputter deposition method for forming integrated circuit

PVD target

Sputtering apparatus, method of operating the same, and method of manufacturing substrate using the same

Cutting tool with wear resistant coating and method of making the same

Magnetron cathode and sputtering device installing it

Sputtering apparatus, method of driving the same, and method of manufacturing substrate using the same

Amorphous-carbon-based hard multilayer film and hard surface member having the film on surface

Apparatus for Manufacturing Magnetic Recording Disk, and In-Line Type Substrate Processing Apparatus

Sputter deposition system and methods of use

Magnetron Sputtering Device In which Two Modes Of Magnetic Flux Distribution (Balanced Mode/Unbalanced Mode) Can Be Switched From One To The Other And Vice Versa, A Film Formation Method For Forming A Film From An Inorganic Film Formation Material Using The Device, And A Dual Mode Magnetron Sputtering Device And Film Formation Method For Forming A Film From An Inorganic Film Formation Material At A Low Temperature Using The Device

Sputter Deposition System and Methods of Use

Thermally conductive dielectric bonding of sputtering targets using diamond powder filler or thermally conductive ceramic fillers

Method and apparatus for producing a metal wire coated with a layer of metal alloy

Method of ionized physical vapor deposition sputter coating high aspect-ratio structures

Target material and its use in a sputter process

Method & apparatus for cathode sputtering with uniform process gas distribution

Magnetron sputtering method and magnetron sputtering apparatus

Method and device for magnetron sputtering

Concentration-modulated coatings

Systems and methods for back-biased face target sputtering

Back-biased face target sputtering based memory data sensing technique

Method and Apparatus for Producing Uniform, Isotropic Stresses in a Sputtered Film

Back-biased face target sputtering based high density non-volatile caching data storage

Back-biased face target sputtering based high density non-volatile data storage

Sputtering device

Organic light emitting display and a deposition method

Large-area magnetron sputtering chamber with individually controlled sputtering zones

Method of processing a substrate using a large-area magnetron sputtering chamber with individually controlled sputtering zones

Platinum-vanadium-iron fuel cell electrocatalyst

Method of sputter depositing an alloy on a substrate

System and method for film formation

Single-process-chamber deposition system

Back-biased face target sputtering based memory with low oxygen flow rate

Systems and methods for plasma etching

Thin film forming device and thin film forming method

Transparent titanium oxide-aluminum and/or aluminum oxide coating with rutile structure

Method for operating a sputter cathode with a target

Method for magnetron sputter deposition

Back-biased face target sputtering based liquid crystal display device

Multi-layer coating having excellent adhesion and sliding properties and production method thereof

Cross-contaminant shield in sputtering system

Top shield for sputtering system

Temperature control of pallet in sputtering system

Multi-station sputtering and cleaning system

Back-biased face target sputtering

Dual magnetron thin film deposition system

Sputtering devices and methods

PLASMA DEPOSITION APPARATUS AND METHOD

Method for depositing multilayer coatings

Reduced maintenance sputtering chambers

Method for the treatment of a web-type material in a plasma-assisted process

Multi-layered superhard nanocomposite coatings

Thin film forming device and thin film forming method

Method of manufacturing organic light emitting device by using mirror shaped target sputtering apparatus

Methods and equipment for depositing hydrophilic coatings, and deposition technologies for thin films

Physical vapor deposition chamber having a rotatable substrate pedestal

Physical vapor deposition chamber having an adjustable target

Apparatus for metal plasma vapor deposition and re-sputter with source and bias power frequencies applied through the workpiece

Method of forming CNT containing wiring material and sputtering target material used for the method

Physical vapor deposition apparatus for depositing thin multilayer films and methods of depositing such films

CO tolerant catalyst

Sputtering magnetron control devices

Method for manufacturing magnetic recording medium

Back-biased face target sputtering based programmable logic device

Coater with a large-area assembly of rotatable magnetrons

Sputtering device

MSVD coating process

Sputtering device for manufacturing thin films

Back-biased face target sputtering based memory

Method and apparatus for multi-stage sputter deposition of uniform thickness layers

Amorphous ferrosilicide film exhibiting semiconductor characteristics and method of for producing the same

Sputtering apparatus and sputter film deposition method

Energy device and method for producing the same

Multi-cathode ionized physical vapor deposition system

Apparatus

Sputtering cathode and device and method for coating a substrate with several layers

Sputtering apparatus

Manufacturing method for large-scale production of thin-film solar cells

PLASMA SOURCE WITH SEGMENTED MAGNETRON CATHODE

Apparatus for manufacturing magnetic recording disk, and in-line type substrate processing apparatus

Apparatus for low temperature semiconductor fabrication

Back-biased face target sputtering

Magnetron sputtering device

Concentration-modulated coatings

Box-shaped facing-targets sputtering apparatus and method for producing compound thin film

Sputtering apparatus

Method for producing a nonostructured functional coating and a coating that can be produced according to said method

Apparatus and method to deposit magnesium oxide film on a large area

Method and apparatus for producing uniform isotropic stresses in a sputtered film

Titanium aluminide coating capable of improving high-temperature oxidation resistance of titanium alloy and preparation method thereof

Cathode assemblies and sputtering systems

Apparatus for enhanced physical vapor deposition