ClassID:

120083

C23C14/352 - CPC Classification

Classification description:

Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating; Sputtering by application of a magnetic field, e.g. magnetron sputtering using more than one target

Recent Application in this class:
#1
20260139358
2026-05-21

PVD Deposited Ternary and Quaternary NiTi Alloys and Methods of Making Same

#2
20260049390
2026-02-19

FILM FORMING APPARATUS AND FILM FORMING METHOD

#3
20260022450
2026-01-22

METHOD OF OPERATING A PLASMA PROCESS SYSTEM AND A PLASMA PROCESS SYSTEM

#4
20250327168
2025-10-23

Method for producing a coating of a base body and functional element having a base body with a coating

#5
20250324814
2025-10-16

METHOD OF FORMING TRANSPARENT LAYERS FOR A SOLAR CELL

#6
20250305114
2025-10-02

Magnetron Sputtering Apparatus and Control Method for Timely Detecting Target Shorting by Monitoring Electrical Resistance Between PVD Target Cathode and Electrical Ground in Real Time

#7
20250294715
2025-09-18

METHOD FOR PRODUCING TRANSPARENT CONDUCTIVE COATINGS FOR EMI PROTECTION USING HIPIMS

#8
20250282678
2025-09-11

TRANSPARENT SUBSTRATE PROVIDED WITH A FUNCTIONAL STACK OF THIN LAYERS

#9
20250233122
2025-07-17

SCALABLE FABRICATION OF AMORPHOUS SILICON ANODE ELECTRODES FOR BATTERY CELLS

#10
20250215548
2025-07-03

MULTI-METAL OXIDE COATINGS, RELATED DEVICES AND METHODS

#11
20250191900
2025-06-12

INSTALLATION, METHOD, AND CARRIER FOR COATING EYEGLASS LENSES

#12
20250109478
2025-04-03

Preparation method for tungsten sulfide solid lubricating film based on high power impulse magnetron sputtering

#13
20250101572
2025-03-27

MULTICATHODE PVD SYSTEM FOR HIGH ASPECT RATIO BARRIER SEED DEPOSITION

#14
20250092506
2025-03-20

PVD Deposited Ternary and Quaternary NiTi Alloys and Methods of Making Same

#15
20250084523
2025-03-13

PVD Deposited Ternary and Quaternary NiTi Alloys and Methods of Making Same

#16
20250059640
2025-02-20

FILM FORMING APPARATUS AND FILM FORMING METHOD

#17
20250029820
2025-01-23

ACTIVELY COOLED ANODE FOR SPUTTERING PROCESSES

#18
20250029819
2025-01-23

SPUTTERING APPARATUS AND METHOD FOR THIN FILM ELECTRODE DEPOSITION

#19
20240287669
2024-08-29

METHOD FOR COATING STAINLESS STEEL PRESS PLATES AND COATED PRESS PLATES PRODUCED THEREBY

#20
20240247365
2024-07-25

Multicathode PVD system for high aspect ratio barrier seed deposition

#21
20240201422
2024-06-20

LOW INDEX OF REFRACTION THIN FILM WITH HIGH HARDNESS COATING AND METHOD AND APPARATUS TO PRODUCE SAME

#22
20240194462
2024-06-13

SPUTTERING APPARATUS

#23
20240191341
2024-06-13

STABLE GROUND ANODE APERTURE FOR THIN FILM PROCESSING

#24
20240186064
2024-06-06

SOFT MAGNETIC MULTILAYER DESPOSITION APPARATUS, METHODS OF MANUFACTURING AND MAGNETIC MULTILAYER

#25
20240166555
2024-05-23

OPTICAL FILM, SPUTTERING TARGET, AND METHOD OF PRODUCING OPTICAL FILM

#26
20240120182
2024-04-11

PLACING TABLE AND SUBSTRATE PROCESSING APPARATUS

#27
20240093113
2024-03-21

SUBSTRATE COATED WITH A LUBRICANT COATING

#28
20240083807
2024-03-14

Reflective Coating

#29
20240063003
2024-02-22

SPUTTERING APPARATUS

#30
20240021423
2024-01-18

FILM FORMING APPARATUS AND METHOD OF CONTROLLING FILM FORMING APPARATUS

#31
20240011145
2024-01-11

MOLYBDENUM NITRIDE BASED MULTILAYER COATING FOR WEAR AND FRICTION REDUCTION

#32
20240006545
2024-01-04

METHOD OF FORMING TRANSPARENT LAYERS FOR A SOLAR CELL

#33
20230391965
2023-12-07

Methods and compositions for films, masterbatch, yarns, fabrics, and articles comprising same

#34
20230374654
2023-11-23

IN SITU AND TUNABLE DEPOSITION OF A FILM

#35
20230340641
2023-10-26

ELECTRODES FOR BIOSENSORS

#36
20230287253
2023-09-14

Cu-doped Sb-Te system phase change material, phase change memory and preparation method thereof

#37
20230257885
2023-08-17

COATED SUBSTRATES AND METHODS FOR THE PREPARATION THEREOF

#38
20230257866
2023-08-17

METHOD FOR PRODUCING AN OPTICAL ELEMENT, OPTICAL ELEMENT, DEVICE FOR PRODUCING AN OPTICAL ELEMENT, SECONDARY GAS AND PROJECTION EXPOSURE SYSTEM

#39
20230246115
2023-08-03

Preparation method and application of an Er doped Ga2O3 film

#40
20230227963
2023-07-20

Preparation method of niobium diselenide film with ultra-low friction and low electrical noise under sliding electrical contact in vacuum

#41
20230221467
2023-07-13

COATINGS OF NON-PLANAR SUBSTRATES AND METHODS FOR THE PRODUCTION THEREOF

#42
20230212065
2023-07-06

LOW-E MATERIAL COMPRISING A THICK LAYER BASED ON SILICON OXIDE

#43
20230212063
2023-07-06

Coated articles with optical coatings having residual compressive stress

#44
20230193454
2023-06-22

METHOD FOR DEPOSITING A COATING ON A SUBSTRATE

#45
20230183853
2023-06-15

Bismuth ferrite film material, method for integrally preparing bismuth ferrite film on silicon substrate at low temperature and application

#46
20230175114
2023-06-08

SPUTTERING APPARATUS AND CONTROL METHOD

#47
20230161085
2023-05-25

Solar reflecting film and preparation method thereof

#48
20230135238
2023-05-04

TiCN having reduced growth defects by means of HiPIMS

#49
20230130947
2023-04-27

Tilted PVD source with rotating pedestal

#50
20230100972
2023-03-30

Method for producing a coating of a base body and functional element having a base body with a coating

#51
20230097276
2023-03-30

APPARATUS AND PROCESS WITH A DC-PULSED CATHODE ARRAY

#52
20230085216
2023-03-16

SPUTTERING APPARATUS AND METHOD FOR THIN FILM ELECTRODE DEPOSITION

#53
20230044831
2023-02-09

Sputtering Target

#54
20230032964
2023-02-02

METHOD OF ION-PLASMA APPLICATION OF CORROSION-RESISTANT FILM COATINGS ON ARTICLES MADE FROM ZIRCONIUM ALLOYS

#55
20230032857
2023-02-02

IN SITU AND TUNABLE DEPOSITION OF A FILM

#56
20230028083
2023-01-26

Coated cutting tool

#57
20230005724
2023-01-05

Electrically and Magnetically Enhanced Ionized Physical Vapor Deposition Unbalanced Sputtering Source

#58
20230003680
2023-01-05

CUV2O6-BASED PHOTOELECTRIC SENSOR AND APPLICATION THEREOF IN DETECTION OF ARGININE

#59
20220403500
2022-12-22

STRUCTURAL COATING AND PREPARATION METHOD AND USE THEREOF

#60
20220403499
2022-12-22

METHOD OF DEPOSITING MATERIAL ON A SUBSTRATE

#61
20220399195
2022-12-15

SPUTTER DEPOSITION

#62
20220396868
2022-12-15

Method for coating stainless steel press plates and coated press plates produced thereby

#63
20220380885
2022-12-01

SPUTTER DEPOSITION APPARATUS AND METHOD

#64
20220372611
2022-11-24

PVD deposited ternary and quaternary NiTi alloys and methods of making same

#65
20220371304
2022-11-24

METHOD FOR PROTECTING LOW-E GLASS PLATE, METHOD FOR PRODUCING GLASS UNIT, LAMINATE AND PROTECTIVE SHEET FOR LOW-E GLASS PLATE

#66
20220363035
2022-11-17

Method for protecting Low-E glass plate, method for producing glass unit, laminate and protective sheet for Low-E glass plate

#67
20220349028
2022-11-03

Electrodes for biosensors

#68
20220341023
2022-10-27

Tantalum-doped molybdenum disulfide/tungsten disulfide multi-layer film as well as preparation method and use thereof

#69
20220316049
2022-10-06

Optical film, sputtering target, and method of producing optical film

#70
20220307123
2022-09-29

Multi-layer coating

#71
20220246411
2022-08-04

METHOD OF DEPOSITING A MATERIAL ON A SUBSTRATE

#72
20220242781
2022-08-04

Coated articles with optical coatings having residual compressive stress

#73
20220235450
2022-07-28

Sputtering apparatus and method for fabricating semiconductor device using the same

#74
20220213591
2022-07-07

DEVICE AND METHOD FOR COATING SUBSTRATES HAVING PLANAR OR SHAPED SURFACES BY MEANS OF MAGNETRON SPUTTERING

#75
20220213588
2022-07-07

Mo doped AlCrSiN/Mo self-lubricating films and preparation method thereof

#76
20220199282
2022-06-23

Flexible transparent conductive composite film and manufacturing method thereof

#77
20220181129
2022-06-09

MAGNETRON PLASMA APPARATUS

#78
20220178014
2022-06-09

Film forming apparatus and film forming method

#79
20220162744
2022-05-26

Target structure of physical vapor deposition

#80
20220106680
2022-04-07

Device for sputtering

#81
20220074044
2022-03-10

Film forming method, film forming apparatus, and program

#82
20220068620
2022-03-03

Systems and methods for an improved magnetron electromagnetic assembly

#83
20220068619
2022-03-03

SYSTEMS AND METHODS FOR A MAGNETRON WITH A SEGMENTED TARGET CONFIGURATION

#84
20220042167
2022-02-10

Method for preparing ammonium thiomolybdate-porous amorphous carbon composite superlubricity film

#85
20220037136
2022-02-03

Deposition system with multi-cathode and method of manufacture thereof

#86
20210395879
2021-12-23

Coated member, electronic device, and method for manufacturing the coated member

#87
20210352907
2021-11-18

ANTIMICROBIAL CU-BASED TOPCOAT

#88
20210351022
2021-11-11

Sputtering cathode, sputtering cathode assembly, and sputtering apparatus

#89
20210343961
2021-11-04

Thin film of metal oxide, organic electroluminescent device including thin film, photovoltaic cell including thin film, and manufacturing method of thin film

#90
20210333444
2021-10-28

LIGHT ABSORPTION FILM, PREPARATION METHOD AND APPLICATION

#91
20210325583
2021-10-21

SILICON-GERMANIUM BASED OPTICAL FILTER

#92
20210317561
2021-10-14

METHOD OF MAKING COATED ARTICLE HAVING ANTIBACTERIAL AND/OR ANTIFUNGAL COATING AND RESULTING PRODUCT

#93
20210305032
2021-09-30

Substrate processing method and apparatus

#94
20210292227
2021-09-23

COLORED GLASS AND PREPARATION METHOD THEREOF

#95
20210287888
2021-09-16

Dual reverse pulse sputtering system

#96
20210285092
2021-09-16

Sputtering apparatus

#97
20210285090
2021-09-16

Convertible magnetics for rotary cathode

#98
20210269706
2021-09-02

Electrochromic material and method of manufacturing thereof

#99
20210257198
2021-08-19

Cathode unit and film forming apparatus

#100
20210255377
2021-08-19

3D IDENTIFICATION FILTER

#101
20210190024
2021-06-24

Component for fuel injector and method for coating the same

#102
20210189523
2021-06-24

Electrodes for biosensors

#103
20210172054
2021-06-10

Multicathode deposition system and methods

#104
20210164099
2021-06-03

High throughput vacuum deposition sources and system

#105
20210164092
2021-06-03

DEVICE AND METHOD FOR PRODUCING LAYERS WITH IMPROVED UNIFORMITY IN COATING SYSTEMS WITH HORIZONTALLY ROTATING SUBSTRATE GUIDING

#106
20210119117
2021-04-22

Spin-orbit torque-based switching device and method of fabricating the same

#107
20210082674
2021-03-18

Sputtering cathode, sputtering cathode assembly, and sputtering apparatus

#108
20210053869
2021-02-25

Solar Glass And Method For Its Production

#109
20210048228
2021-02-18

Solar selective coating for mid-high temperature solar thermal applications

#110
20210010127
2021-01-14

Sputtering apparatus and method for fabricating semiconductor device using the same

#111
20210005438
2021-01-07

Sputtering cathode, sputtering cathode assembly, and sputtering apparatus

#112
20210003744
2021-01-07

Coatings of non-planar substrates and methods for the production thereof

#113
20200362453
2020-11-19

METAL SURFACE PROTECTIVE LAYER AND PREPARATION METHOD THEREOF

#114
20200362452
2020-11-19

FILM FORMING APPARATUS, METHOD FOR MANUFACTURING FILM-FORMED PRODUCT, AND METHOD FOR MANUFACTURING ELECTRONIC COMPONENT

#115
20200347516
2020-11-05

Fe—Co—Al alloy magnetic thin film

#116
20200347491
2020-11-05

Target structure of physical vapor deposition

#117
20200347490
2020-11-05

METAL SURFACE PROTECTIVE LAYER AND PREPARATION METHOD THEREOF

#118
20200332407
2020-10-22

Ternary TM-diboride coating films

#119
20200331798
2020-10-22

Graded coating of element diffusion inhibition and adhesion resistance on mold for glass molding

#120
20200331790
2020-10-22

Coating on mold for glass molding and a preparation method and applications thereof

#121
20200309724
2020-10-01

Ruthenium alloys for biosensors

#122
20200308690
2020-10-01

Method for coating stainless steel press plates and coated press plates produced thereby

#123
20200277698
2020-09-03

Physical vapor deposition system and processes

#124
20200251725
2020-08-06

Patterned anode for lithium-ion batteries

#125
20200243311
2020-07-30

Sputtering Cathode, Sputtering Cathode Assembly, and Sputtering Apparatus

#126
20200208255
2020-07-02

Corrosion resistant and low embrittlement aluminum alloy coatings on steel by magnetron sputtering

#127
20200190659
2020-06-18

Apparatus and methods for depositing durable optical coatings

#128
20200189959
2020-06-18

Coloured glazing and method for obtaining same

#129
20200185205
2020-06-11

Sputtering apparatus including cathode with rotatable targets, and related methods

#130
20200149150
2020-05-14

Functional curtain fabric with anhydrous coating layer and method for manufacturing same

#131
20200140994
2020-05-07

System, method and support for coating eyeglass lenses

#132
20200140992
2020-05-07

Device, method and use for the coating of lenses

#133
20200105531
2020-04-02

Asymmetric wafer bow compensation by physical vapor deposition

#134
20200071815
2020-03-05

Film-forming device

#135
20190390325
2019-12-26

Sputtering device

#136
20190371610
2019-12-05

Process integration method to tune resistivity of nickel silicide

#137
20190337841
2019-11-07

Coated articles with optical coatings having residual compressive stress

#138
20190333746
2019-10-31

Sputtering Cathode, Sputtering Cathode Assembly, and Sputtering Apparatus

#139
20190333745
2019-10-31

Sputtering cathode, sputtering cathode assembly, and sputtering apparatus

#140
20190322576
2019-10-24

SUBSTRATE COATED WITH A LOW-EMISSIVITY COATING

#141
20190311908
2019-10-10

Methods of forming metal silicide layers and metal silicide layers formed therefrom

#142
20190310394
2019-10-10

Reflection preventing film and method for manufacturing same, and reflection preventing layer- attached polarization plate

#143
20190309409
2019-10-10

Method and device for locating the origin of a defect affecting a stack of thin layers deposited on a substrate

#144
20190292655
2019-09-26

High-ductility periodic variable alloy protective film and forming method thereof

#145
20190292654
2019-09-26

Anti-aging periodic variable reaction black chromium coating film and forming method thereof

#146
20190284702
2019-09-19

Aging resistance coating film for hub and method for forming protective film

#147
20190284685
2019-09-19

THIN FILM FORMATION APPARATUS, SPUTTERING CATHODE, AND METHOD OF FORMING THIN FILM

#148
20190276929
2019-09-12

METHODS AND APPARATUS FOR PHYSICAL VAPOR DEPOSITION VIA LINEAR SCANNING WITH AMBIENT CONTROL

#149
20190256963
2019-08-22

Method of Forming a Coating on a Substrate and an Article Formed by Such a Method

#150
20190252166
2019-08-15

SPUTTERING SOURCE

#151
20190243482
2019-08-08

Electrode structure and method for manufacturing the same

#152
20190233936
2019-08-01

Device and method for producing defined properties of gradient layers in a system of multilayered coatings in sputtering installations

#153
20190218141
2019-07-18

Blue colored heat treatable coated article having low solar factor value

#154
20190177834
2019-06-13

Thin film coating and method of fabrication thereof

#155
20190146131
2019-05-16

Silicon-germanium based optical filter

#156
20190136368
2019-05-09

SPUTTERING APPARATUS AND METHOD OF MANUFACTURING MAGNETIC MEMORY DEVICE USING THE SAME

#157
20190136363
2019-05-09

TiCN having reduced growth defects by means of HiPIMS

#158
20190122873
2019-04-25

Ion Source Device, Sputtering Apparatus and Method

#159
20190119806
2019-04-25

Method of Forming a Coating on a Substrate and an Article Formed by Such a Method

#160
20190109001
2019-04-11

Sputtering target, oxide semiconductor thin film, and method for producing these

#161
20190088456
2019-03-21

Physical vapor deposition chamber with static magnet assembly and methods of sputtering

#162
20190085436
2019-03-21

DEVELOPED INTRINSIC TWO-WAY SHAPE MEMORY THIN FILM

#163
20190058142
2019-02-21

THIN FILM OF METAL OXIDE, ORGANIC ELECTROLUMINESCENT DEVICE INCLUDING THIN FILM, PHOTOVOLTAIC CELL INCLUDING THIN FILM, AND MANUFACTURING METHOD OF THIN FILM

#164
20190006710
2019-01-03

Solid electrolyte, all-solid-state lithium-ion secondary battery, production method for solid electrolyte

#165
20190003039
2019-01-03

Sputter devices and methods

#166
20190003037
2019-01-03

Target structure of physical vapor deposition

#167
20180374689
2018-12-27

Electrically and magnetically enhanced ionized physical vapor deposition unbalanced sputtering source

#168
20180366328
2018-12-20

Process integration method to tune resistivity of nickel silicide

#169
20180355470
2018-12-13

Corrosion resistant and low embrittlement aluminum alloy coatings on steel by magnetron sputtering

#170
20180350922
2018-12-06

High mobility doped metal oxide thin films and reactive physical vapor deposition methods of fabricating the same

#171
20180334742
2018-11-22

Method of forming a self-cleaning film system

#172
20180265965
2018-09-20

APPARATUS AND METHOD FOR LOADING A SUBSTRATE INTO A VACUUM PROCESSING MODULE, APPARATUS AND METHOD FOR TREATMENT OF A SUBSTRATE FOR A VACUUM DEPOSITION PROCESS IN A VACUUM PROCESSING MODULE, AND SYSTEM FOR VACUUM PROCESSING OF A SUBSTRATE

#173
20180261440
2018-09-13

Sputtering apparatus and substrate processing apparatus

#174
20180245217
2018-08-30

High throughput vacuum deposition sources and system

#175
20180245197
2018-08-30

CERAMIC METALLIC COATINGS

#176
20180237922
2018-08-23

High performance coating for high-strength steel cold metal forming

#177
20180223421
2018-08-09

Paste method to reduce defects in dielectric sputtering

#178
20180223414
2018-08-09

Powder coating apparatus

#179
20180211823
2018-07-26

APPARATUS FOR VACUUM SPUTTER DEPOSITION AND METHOD THEREFOR

#180
20180202040
2018-07-19

Physical vapor deposition method using backside gas cooling of workpieces

#181
20180195161
2018-07-12

Coating

#182
20180175224
2018-06-21

Transparent conductive oxide film, photoelectric conversion element, and method for producing photoelectric conversion element

#183
20180158658
2018-06-07

Systems and methods for integrated resputtering in a physical vapor deposition chamber

#184
20180143154
2018-05-24

Ruthenium alloys for biosensors

#185
20180108520
2018-04-19

Rate enhanced pulsed DC sputtering system

#186
20180073150
2018-03-15

Single oxide metal deposition chamber

#187
20180066356
2018-03-08

Method for depositing a layer using a magnetron sputtering device

#188
20180057939
2018-03-01

MANUFACTURING METHOD OF TRANSPARENT ELECTRODE

#189
20180012738
2018-01-11

MAGNETRON PLASMA APPARATUS

#190
20180011225
2018-01-11

Coatings of non-planar substrates

#191
20170356080
2017-12-14

METHOD FOR THE CO-EVAPORATION AND DEPOSITION OF MATERIALS WITH DIFFERING VAPOR PRESSURES

#192
20170342547
2017-11-30

Sputtering apparatus and sputtering method using the same

#193
20170327941
2017-11-16

SPUTTERING APPARATUS AND METHOD OF FORMING A LAYER USING THE SAME

#194
20170320144
2017-11-09

Composite diamond body and composite diamond tool

#195
20170314121
2017-11-02

PVD apparatus and method with deposition chamber having multiple targets and magnets

#196
20170298497
2017-10-19

Method for producing a double-layer coated cutting tool with improved wear resistance

#197
20170268099
2017-09-21

Window film and preparation method thereof

#198
20170267578
2017-09-21

Blue colored heat treatable coated article having low solar factor value

#199
20170226630
2017-08-10

Method for coating stainless steel press plates and coated press plates produced thereby

#200
20170223826
2017-08-03

Laminate film and electrode substrate film, and method of manufacturing the same

#201
20170216831
2017-08-03

Method of preparing platinum-based catalyst and platinum-based catalyst

#202
20170175247
2017-06-22

SPUTTERING SOURCE ARRANGEMENT, SPUTTERING SYSTEM AND METHOD OF MANUFACTURING METAL-COATED PLATE-SHAPED SUBSTRATES

#203
20170152596
2017-06-01

SPUTTERING DEVICE AND METHOD OF FORMING THIN FILM USING THE SAME

#204
20170152595
2017-06-01

Preparation method for multi-layer metal oxide porous film nano gas-sensitive material

#205
20170114449
2017-04-27

Physical vapor deposition system using rotating pallet with X and Y positioning

#206
20170114448
2017-04-27

Physical vapor deposition system using backside gas cooling of workpieces

#207
20170114447
2017-04-27

Physical vapor deposition system with target magnets controlled to only be above workpiece

#208
20170110257
2017-04-20

Flexible Ti—In—Zn—O transparent electrode for dye-sensitized solar cell, and metal-inserted three-layer transparent electrode with high conductivity using same and manufacturing method therefor

#209
20170088939
2017-03-30

Mo—Si—B layers and method for the production thereof

#210
20170060284
2017-03-02

Touch panel, method of manufacturing touch panel, and optical thin film

#211
20170051397
2017-02-23

Method for developing a coating having a high light transmission and/or a low light reflection

#212
20170051392
2017-02-23

APPARTUS AND METHOD FOR PRODUCING SPUTTER-DEPOSITED COATINGS ON FLUIDIZED PARTICLE BEDS

#213
20170051391
2017-02-23

METHOD FOR PRODUCING TOOL FOR MACHINING, AND TOOL FOR MACHINING

#214
20170044659
2017-02-16

MAGNETRON SPUTTERING DEVICE AND METHOD USING THE SAME

#215
20170029940
2017-02-02

Sputter System for Uniform Sputtering

#216
20170029935
2017-02-02

Artificial joint cup, magnetic control sputtering coating film device and preparation method thereof

#217
20160369390
2016-12-22

Method for depositing a piezoelectric film containing AIN, and a piezoelectric film containing AIN

#218
20160326635
2016-11-10

Remote Arc Discharge Plasma Assisted Processes

#219
20160312353
2016-10-27

Film deposition apparatus and film deposition method

#220
20160305547
2016-10-20

Piston ring for internal combustion engines

#221
20160276583
2016-09-22

Method of manufacturing tunnel magnetoresistive effect element and sputtering apparatus

#222
20160260589
2016-09-08

Film forming apparatus

#223
20160251746
2016-09-01

Deposition device and deposition method

#224
20160247902
2016-08-25

MANUFACTURING METHOD OF OXIDE FILM AND SPUTTERING APPARATUS

#225
20160233255
2016-08-11

Array substrate, method for producing the same and display apparatus

#226
20160218182
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Hybrid multilayer solar selective coating for high temperature solar thermal applications and a process for the preparation thereof

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METHOD FOR CONTROLLING MAGNETRON SPUTTERING DEVICE, AND FILM FORMING METHOD

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Sputtering apparatus and substrate processing apparatus

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Method of manufacturing organic EL element and organic EL element

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Systems and methods for integrated resputtering in a physical vapor deposition chamber

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Interchangeable sputter gun head

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METHOD FOR SPUTTERING FOR PROCESSES WITH A PRE-STABILIZED PLASMA

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Apparatus for cylindrical magnetron sputtering

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Thin film forming apparatus and thin film forming method

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