120083 ⎘
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating; Sputtering by application of a magnetic field, e.g. magnetron sputtering using more than one target
PVD Deposited Ternary and Quaternary NiTi Alloys and Methods of Making Same
#2FILM FORMING APPARATUS AND FILM FORMING METHOD
#3METHOD OF OPERATING A PLASMA PROCESS SYSTEM AND A PLASMA PROCESS SYSTEM
#4Method for producing a coating of a base body and functional element having a base body with a coating
#5METHOD OF FORMING TRANSPARENT LAYERS FOR A SOLAR CELL
#6Magnetron Sputtering Apparatus and Control Method for Timely Detecting Target Shorting by Monitoring Electrical Resistance Between PVD Target Cathode and Electrical Ground in Real Time
#7METHOD FOR PRODUCING TRANSPARENT CONDUCTIVE COATINGS FOR EMI PROTECTION USING HIPIMS
#8TRANSPARENT SUBSTRATE PROVIDED WITH A FUNCTIONAL STACK OF THIN LAYERS
#9SCALABLE FABRICATION OF AMORPHOUS SILICON ANODE ELECTRODES FOR BATTERY CELLS
#10MULTI-METAL OXIDE COATINGS, RELATED DEVICES AND METHODS
#11INSTALLATION, METHOD, AND CARRIER FOR COATING EYEGLASS LENSES
#12Preparation method for tungsten sulfide solid lubricating film based on high power impulse magnetron sputtering
#13MULTICATHODE PVD SYSTEM FOR HIGH ASPECT RATIO BARRIER SEED DEPOSITION
#14PVD Deposited Ternary and Quaternary NiTi Alloys and Methods of Making Same
#15PVD Deposited Ternary and Quaternary NiTi Alloys and Methods of Making Same
#16FILM FORMING APPARATUS AND FILM FORMING METHOD
#17ACTIVELY COOLED ANODE FOR SPUTTERING PROCESSES
#18SPUTTERING APPARATUS AND METHOD FOR THIN FILM ELECTRODE DEPOSITION
#19METHOD FOR COATING STAINLESS STEEL PRESS PLATES AND COATED PRESS PLATES PRODUCED THEREBY
#20Multicathode PVD system for high aspect ratio barrier seed deposition
#21LOW INDEX OF REFRACTION THIN FILM WITH HIGH HARDNESS COATING AND METHOD AND APPARATUS TO PRODUCE SAME
#22SPUTTERING APPARATUS
#23STABLE GROUND ANODE APERTURE FOR THIN FILM PROCESSING
#24SOFT MAGNETIC MULTILAYER DESPOSITION APPARATUS, METHODS OF MANUFACTURING AND MAGNETIC MULTILAYER
#25OPTICAL FILM, SPUTTERING TARGET, AND METHOD OF PRODUCING OPTICAL FILM
#26PLACING TABLE AND SUBSTRATE PROCESSING APPARATUS
#27SUBSTRATE COATED WITH A LUBRICANT COATING
#28Reflective Coating
#29SPUTTERING APPARATUS
#30FILM FORMING APPARATUS AND METHOD OF CONTROLLING FILM FORMING APPARATUS
#31MOLYBDENUM NITRIDE BASED MULTILAYER COATING FOR WEAR AND FRICTION REDUCTION
#32METHOD OF FORMING TRANSPARENT LAYERS FOR A SOLAR CELL
#33Methods and compositions for films, masterbatch, yarns, fabrics, and articles comprising same
#34IN SITU AND TUNABLE DEPOSITION OF A FILM
#35ELECTRODES FOR BIOSENSORS
#36Cu-doped Sb-Te system phase change material, phase change memory and preparation method thereof
#37COATED SUBSTRATES AND METHODS FOR THE PREPARATION THEREOF
#38METHOD FOR PRODUCING AN OPTICAL ELEMENT, OPTICAL ELEMENT, DEVICE FOR PRODUCING AN OPTICAL ELEMENT, SECONDARY GAS AND PROJECTION EXPOSURE SYSTEM
#39Preparation method and application of an Er doped Ga2O3 film
#40Preparation method of niobium diselenide film with ultra-low friction and low electrical noise under sliding electrical contact in vacuum
#41COATINGS OF NON-PLANAR SUBSTRATES AND METHODS FOR THE PRODUCTION THEREOF
#42LOW-E MATERIAL COMPRISING A THICK LAYER BASED ON SILICON OXIDE
#43Coated articles with optical coatings having residual compressive stress
#44METHOD FOR DEPOSITING A COATING ON A SUBSTRATE
#45Bismuth ferrite film material, method for integrally preparing bismuth ferrite film on silicon substrate at low temperature and application
#46SPUTTERING APPARATUS AND CONTROL METHOD
#47Solar reflecting film and preparation method thereof
#48TiCN having reduced growth defects by means of HiPIMS
#49Tilted PVD source with rotating pedestal
#50Method for producing a coating of a base body and functional element having a base body with a coating
#51APPARATUS AND PROCESS WITH A DC-PULSED CATHODE ARRAY
#52SPUTTERING APPARATUS AND METHOD FOR THIN FILM ELECTRODE DEPOSITION
#53Sputtering Target
#54METHOD OF ION-PLASMA APPLICATION OF CORROSION-RESISTANT FILM COATINGS ON ARTICLES MADE FROM ZIRCONIUM ALLOYS
#55IN SITU AND TUNABLE DEPOSITION OF A FILM
#56Coated cutting tool
#57Electrically and Magnetically Enhanced Ionized Physical Vapor Deposition Unbalanced Sputtering Source
#58CUV2O6-BASED PHOTOELECTRIC SENSOR AND APPLICATION THEREOF IN DETECTION OF ARGININE
#59STRUCTURAL COATING AND PREPARATION METHOD AND USE THEREOF
#60METHOD OF DEPOSITING MATERIAL ON A SUBSTRATE
#61SPUTTER DEPOSITION
#62Method for coating stainless steel press plates and coated press plates produced thereby
#63SPUTTER DEPOSITION APPARATUS AND METHOD
#64PVD deposited ternary and quaternary NiTi alloys and methods of making same
#65METHOD FOR PROTECTING LOW-E GLASS PLATE, METHOD FOR PRODUCING GLASS UNIT, LAMINATE AND PROTECTIVE SHEET FOR LOW-E GLASS PLATE
#66Method for protecting Low-E glass plate, method for producing glass unit, laminate and protective sheet for Low-E glass plate
#67Electrodes for biosensors
#68Tantalum-doped molybdenum disulfide/tungsten disulfide multi-layer film as well as preparation method and use thereof
#69Optical film, sputtering target, and method of producing optical film
#70Multi-layer coating
#71METHOD OF DEPOSITING A MATERIAL ON A SUBSTRATE
#72Coated articles with optical coatings having residual compressive stress
#73Sputtering apparatus and method for fabricating semiconductor device using the same
#74DEVICE AND METHOD FOR COATING SUBSTRATES HAVING PLANAR OR SHAPED SURFACES BY MEANS OF MAGNETRON SPUTTERING
#75Mo doped AlCrSiN/Mo self-lubricating films and preparation method thereof
#76Flexible transparent conductive composite film and manufacturing method thereof
#77MAGNETRON PLASMA APPARATUS
#78Film forming apparatus and film forming method
#79Target structure of physical vapor deposition
#80Device for sputtering
#81Film forming method, film forming apparatus, and program
#82Systems and methods for an improved magnetron electromagnetic assembly
#83SYSTEMS AND METHODS FOR A MAGNETRON WITH A SEGMENTED TARGET CONFIGURATION
#84Method for preparing ammonium thiomolybdate-porous amorphous carbon composite superlubricity film
#85Deposition system with multi-cathode and method of manufacture thereof
#86Coated member, electronic device, and method for manufacturing the coated member
#87ANTIMICROBIAL CU-BASED TOPCOAT
#88Sputtering cathode, sputtering cathode assembly, and sputtering apparatus
#89Thin film of metal oxide, organic electroluminescent device including thin film, photovoltaic cell including thin film, and manufacturing method of thin film
#90LIGHT ABSORPTION FILM, PREPARATION METHOD AND APPLICATION
#91SILICON-GERMANIUM BASED OPTICAL FILTER
#92METHOD OF MAKING COATED ARTICLE HAVING ANTIBACTERIAL AND/OR ANTIFUNGAL COATING AND RESULTING PRODUCT
#93Substrate processing method and apparatus
#94COLORED GLASS AND PREPARATION METHOD THEREOF
#95Dual reverse pulse sputtering system
#96Sputtering apparatus
#97Convertible magnetics for rotary cathode
#98Electrochromic material and method of manufacturing thereof
#99Cathode unit and film forming apparatus
#1003D IDENTIFICATION FILTER
#101Component for fuel injector and method for coating the same
#102Electrodes for biosensors
#103Multicathode deposition system and methods
#104High throughput vacuum deposition sources and system
#105DEVICE AND METHOD FOR PRODUCING LAYERS WITH IMPROVED UNIFORMITY IN COATING SYSTEMS WITH HORIZONTALLY ROTATING SUBSTRATE GUIDING
#106Spin-orbit torque-based switching device and method of fabricating the same
#107Sputtering cathode, sputtering cathode assembly, and sputtering apparatus
#108Solar Glass And Method For Its Production
#109Solar selective coating for mid-high temperature solar thermal applications
#110Sputtering apparatus and method for fabricating semiconductor device using the same
#111Sputtering cathode, sputtering cathode assembly, and sputtering apparatus
#112Coatings of non-planar substrates and methods for the production thereof
#113METAL SURFACE PROTECTIVE LAYER AND PREPARATION METHOD THEREOF
#114FILM FORMING APPARATUS, METHOD FOR MANUFACTURING FILM-FORMED PRODUCT, AND METHOD FOR MANUFACTURING ELECTRONIC COMPONENT
#115Fe—Co—Al alloy magnetic thin film
#116Target structure of physical vapor deposition
#117METAL SURFACE PROTECTIVE LAYER AND PREPARATION METHOD THEREOF
#118Ternary TM-diboride coating films
#119Graded coating of element diffusion inhibition and adhesion resistance on mold for glass molding
#120Coating on mold for glass molding and a preparation method and applications thereof
#121Ruthenium alloys for biosensors
#122Method for coating stainless steel press plates and coated press plates produced thereby
#123Physical vapor deposition system and processes
#124Patterned anode for lithium-ion batteries
#125Sputtering Cathode, Sputtering Cathode Assembly, and Sputtering Apparatus
#126Corrosion resistant and low embrittlement aluminum alloy coatings on steel by magnetron sputtering
#127Apparatus and methods for depositing durable optical coatings
#128Coloured glazing and method for obtaining same
#129Sputtering apparatus including cathode with rotatable targets, and related methods
#130Functional curtain fabric with anhydrous coating layer and method for manufacturing same
#131System, method and support for coating eyeglass lenses
#132Device, method and use for the coating of lenses
#133Asymmetric wafer bow compensation by physical vapor deposition
#134Film-forming device
#135Sputtering device
#136Process integration method to tune resistivity of nickel silicide
#137Coated articles with optical coatings having residual compressive stress
#138Sputtering Cathode, Sputtering Cathode Assembly, and Sputtering Apparatus
#139Sputtering cathode, sputtering cathode assembly, and sputtering apparatus
#140SUBSTRATE COATED WITH A LOW-EMISSIVITY COATING
#141Methods of forming metal silicide layers and metal silicide layers formed therefrom
#142Reflection preventing film and method for manufacturing same, and reflection preventing layer- attached polarization plate
#143Method and device for locating the origin of a defect affecting a stack of thin layers deposited on a substrate
#144High-ductility periodic variable alloy protective film and forming method thereof
#145Anti-aging periodic variable reaction black chromium coating film and forming method thereof
#146Aging resistance coating film for hub and method for forming protective film
#147THIN FILM FORMATION APPARATUS, SPUTTERING CATHODE, AND METHOD OF FORMING THIN FILM
#148METHODS AND APPARATUS FOR PHYSICAL VAPOR DEPOSITION VIA LINEAR SCANNING WITH AMBIENT CONTROL
#149Method of Forming a Coating on a Substrate and an Article Formed by Such a Method
#150SPUTTERING SOURCE
#151Electrode structure and method for manufacturing the same
#152Device and method for producing defined properties of gradient layers in a system of multilayered coatings in sputtering installations
#153Blue colored heat treatable coated article having low solar factor value
#154Thin film coating and method of fabrication thereof
#155Silicon-germanium based optical filter
#156SPUTTERING APPARATUS AND METHOD OF MANUFACTURING MAGNETIC MEMORY DEVICE USING THE SAME
#157TiCN having reduced growth defects by means of HiPIMS
#158Ion Source Device, Sputtering Apparatus and Method
#159Method of Forming a Coating on a Substrate and an Article Formed by Such a Method
#160Sputtering target, oxide semiconductor thin film, and method for producing these
#161Physical vapor deposition chamber with static magnet assembly and methods of sputtering
#162DEVELOPED INTRINSIC TWO-WAY SHAPE MEMORY THIN FILM
#163THIN FILM OF METAL OXIDE, ORGANIC ELECTROLUMINESCENT DEVICE INCLUDING THIN FILM, PHOTOVOLTAIC CELL INCLUDING THIN FILM, AND MANUFACTURING METHOD OF THIN FILM
#164Solid electrolyte, all-solid-state lithium-ion secondary battery, production method for solid electrolyte
#165Sputter devices and methods
#166Target structure of physical vapor deposition
#167Electrically and magnetically enhanced ionized physical vapor deposition unbalanced sputtering source
#168Process integration method to tune resistivity of nickel silicide
#169Corrosion resistant and low embrittlement aluminum alloy coatings on steel by magnetron sputtering
#170High mobility doped metal oxide thin films and reactive physical vapor deposition methods of fabricating the same
#171Method of forming a self-cleaning film system
#172APPARATUS AND METHOD FOR LOADING A SUBSTRATE INTO A VACUUM PROCESSING MODULE, APPARATUS AND METHOD FOR TREATMENT OF A SUBSTRATE FOR A VACUUM DEPOSITION PROCESS IN A VACUUM PROCESSING MODULE, AND SYSTEM FOR VACUUM PROCESSING OF A SUBSTRATE
#173Sputtering apparatus and substrate processing apparatus
#174High throughput vacuum deposition sources and system
#175CERAMIC METALLIC COATINGS
#176High performance coating for high-strength steel cold metal forming
#177Paste method to reduce defects in dielectric sputtering
#178Powder coating apparatus
#179APPARATUS FOR VACUUM SPUTTER DEPOSITION AND METHOD THEREFOR
#180Physical vapor deposition method using backside gas cooling of workpieces
#181Coating
#182Transparent conductive oxide film, photoelectric conversion element, and method for producing photoelectric conversion element
#183Systems and methods for integrated resputtering in a physical vapor deposition chamber
#184Ruthenium alloys for biosensors
#185Rate enhanced pulsed DC sputtering system
#186Single oxide metal deposition chamber
#187Method for depositing a layer using a magnetron sputtering device
#188MANUFACTURING METHOD OF TRANSPARENT ELECTRODE
#189MAGNETRON PLASMA APPARATUS
#190Coatings of non-planar substrates
#191METHOD FOR THE CO-EVAPORATION AND DEPOSITION OF MATERIALS WITH DIFFERING VAPOR PRESSURES
#192Sputtering apparatus and sputtering method using the same
#193SPUTTERING APPARATUS AND METHOD OF FORMING A LAYER USING THE SAME
#194Composite diamond body and composite diamond tool
#195PVD apparatus and method with deposition chamber having multiple targets and magnets
#196Method for producing a double-layer coated cutting tool with improved wear resistance
#197Window film and preparation method thereof
#198Blue colored heat treatable coated article having low solar factor value
#199Method for coating stainless steel press plates and coated press plates produced thereby
#200Laminate film and electrode substrate film, and method of manufacturing the same
#201Method of preparing platinum-based catalyst and platinum-based catalyst
#202SPUTTERING SOURCE ARRANGEMENT, SPUTTERING SYSTEM AND METHOD OF MANUFACTURING METAL-COATED PLATE-SHAPED SUBSTRATES
#203SPUTTERING DEVICE AND METHOD OF FORMING THIN FILM USING THE SAME
#204Preparation method for multi-layer metal oxide porous film nano gas-sensitive material
#205Physical vapor deposition system using rotating pallet with X and Y positioning
#206Physical vapor deposition system using backside gas cooling of workpieces
#207Physical vapor deposition system with target magnets controlled to only be above workpiece
#208Flexible Ti—In—Zn—O transparent electrode for dye-sensitized solar cell, and metal-inserted three-layer transparent electrode with high conductivity using same and manufacturing method therefor
#209Mo—Si—B layers and method for the production thereof
#210Touch panel, method of manufacturing touch panel, and optical thin film
#211Method for developing a coating having a high light transmission and/or a low light reflection
#212APPARTUS AND METHOD FOR PRODUCING SPUTTER-DEPOSITED COATINGS ON FLUIDIZED PARTICLE BEDS
#213METHOD FOR PRODUCING TOOL FOR MACHINING, AND TOOL FOR MACHINING
#214MAGNETRON SPUTTERING DEVICE AND METHOD USING THE SAME
#215Sputter System for Uniform Sputtering
#216Artificial joint cup, magnetic control sputtering coating film device and preparation method thereof
#217Method for depositing a piezoelectric film containing AIN, and a piezoelectric film containing AIN
#218Remote Arc Discharge Plasma Assisted Processes
#219Film deposition apparatus and film deposition method
#220Piston ring for internal combustion engines
#221Method of manufacturing tunnel magnetoresistive effect element and sputtering apparatus
#222Film forming apparatus
#223Deposition device and deposition method
#224MANUFACTURING METHOD OF OXIDE FILM AND SPUTTERING APPARATUS
#225Array substrate, method for producing the same and display apparatus
#226Semiconductor structure in which film including germanium oxide is provided on germanium layer, and method for manufacturing semiconductor structure
#227Multilayer thin film, method of manufacturing the same, and electronic product including the same
#228Semiconductor device, display device, display module, electronic device, oxide, and manufacturing method of oxide
#229Magnetron-sputtering coating system and method, and display substrate
#230TiSiN layers and their production
#231Apparatus for PVD dielectric deposition
#232Film deposition device
#233Deposition mask and method of fabricating the same
#234Grey cast iron-doped diamond-like carbon coatings and methods for depositing same
#235FILM FORMATION APPARATUS AND FILM FORMATION METHOD
#236Multilayer solar selective coating for high temperature solar thermal applications
#237Nickel-chromium-silicon based coatings
#238Vanadium oxide thermo-sensitive film material with high temperature coefficient of resistance and a preparing method thereof
#239Sputtering apparatus
#240Hybrid multilayer solar selective coating for high temperature solar thermal applications and a process for the preparation thereof
#241METHOD FOR CONTROLLING MAGNETRON SPUTTERING DEVICE, AND FILM FORMING METHOD
#242Sputtering apparatus and method thereof
#243Thin film transistor array panel having an oxide semiconductor including silicon
#244Deposition system with multi-cathode and method of manufacture thereof
#245Nanotwinned silver alloy film with controlled architecture
#246Sputtering apparatus and substrate processing apparatus
#247Sputtering apparatus and substrate processing apparatus
#248SPUTTERING APPARATUS AND MANUFACTURING METHOD OF MAGNETORESISTIVE ELEMENT
#249Method of manufacturing organic EL element and organic EL element
#250Array substrate, method for producing the same and display apparatus
#251SPUTTER COATING A WORK PIECE
#252Systems and methods for integrated resputtering in a physical vapor deposition chamber
#253Magnetic stack including crystallized segregant induced columnar magnetic recording layer
#254Vacuum-processing apparatus, vacuum-processing method, and storage medium
#255SPUTTERING APPARATUS AND METHOD THEREOF
#256Ternary metal nitride formation by annealing constituent layers
#257Interchangeable sputter gun head
#258METHOD FOR SPUTTERING FOR PROCESSES WITH A PRE-STABILIZED PLASMA
#259Light-emitting panel, manufacturing method of light-emitting panel, and film forming system
#260Transparent body for use in a touch panel having structured transparent conductive film directly between first and second transparent layer stacks, method of making, and apparatus for making
#261FACING TARGETS SPUTTERING APPARATUS, ORGANIC LIGHT-EMITTING DISPLAY APPARATUS MANUFACTURED USING THE FACING TARGETS SPUTTERING APPARATUS, AND METHOD FOR MANUFACTURING THE ORGANIC LIGHT-EMITTING DISPLAY APPARATUS
#262Sputtering system and method of fabricating display device using the same
#263Device housing and method for making same
#264Method for providing sequential power pulses
#265Solar selective coating having high thermal stability and a process for the preparation thereof
#266Method of forming nanocrystals and method of manufacturing an organic light-emitting display apparatus including a thin film having nanocrystals
#267Magnetron plasma apparatus
#268Coating material for aluminum die casting mold and method for manufacturing the same
#269Thin film devices and methods for preparing thin film devices
#270Amorphous layer extreme ultraviolet lithography blank, and manufacturing and lithography systems therefor
#271Method and apparatus for producing low-particle layers on substrates
#272Sputtering devices and methods
#273Sputtering target
#274Drill having a coating
#275Coating of substrates using HIPIMS
#276Method for supplying sequential power impulses
#277SURFACE TREATMENT METHOD FOR STAINLESS STEEL AND HOUSING MADE FROM THE TREATED STAINLESS STEEL
#278COATED ARTICLE AND METHOD FOR MAKING SAME
#279Application of coating materials
#280Tool for the cutting machining of workpieces and process for coating substrate bodies
#281SPUTTERING APPARATUS
#282SPUTTERING APPARATUS
#283FILM STRUCTURE AND METHOD FOR PRODUCING SAME
#284Sputtering device for forming thin film and method for making thin film
#285Sliding component coated with metal-comprising carbon layer for improving wear and friction behavior by tribological applications under lubricated conditions
#286Coating material for parts of engine exhaust system and method for manufacturing the same
#287Method of manufacturing organic EL element and organic EL element
#288Low pressure arc plasma immersion coating vapor deposition and ion treatment
#289Sputtering device
#290High-power sputtering source
#291Apparatus for cylindrical magnetron sputtering
#292Sliding member
#293Thin film forming apparatus and thin film forming method
#294Ferroelectric thin film and method for producing same
#295MISALIGNED SPUTTERING SYSTEMS FOR THE DEPOSITION OF COMPLEX OXIDE THIN FILMS
#296SPUTTERING PROCESS
#297MAGNETRON SPUTTERING DEVICE, METHOD FOR CONTROLLING MAGNETRON SPUTTERING DEVICE, AND FILM FORMING METHOD
#298Photomask blank manufacturing method, photomask blank, photomask, and pattern transfer method
#299Magnetron sputtering coating device, a nano-multilayer film, and the preparation method thereof
#300Sputtering apparatus