120085 ⎘
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating; Sputtering by application of a magnetic field, e.g. magnetron sputtering; Introduction of auxiliary energy into the plasma using electrons, e.g. triode sputtering
ELECTRON-BEAM-ASSISTED SPUTTERING DEVICE AND METHOD THEREFOR
#2Multifocal magnetron design for physical vapor deposition processing on a single cathode
#3IMPROVEMENTS IN AND RELATING TO COATING PROCESSES
#4Electromagnetic module for physical vapor deposition
#5FILM FORMING METHOD AND FILM FORMING APPARATUS
#6Multifocal magnetron design for physical vapor deposition processing on a single cathode
#7Electromagnetic module for physical vapor deposition
#8Treatment method using a beam of singly- or multiply-charged gas ions in order to produce colored metals
#9Rotary cathode unit for magnetron sputtering apparatus
#10OFF-AXIS MAGNETRON SPUTTERING WITH REAL-TIME REFLECTION HIGH ENERGY ELECTRON DIFFRACTION ANALYSIS
#11Ti—Si—C—N piston ring coatings
#12Apparatus and a method for deposition of material to form a coating
#13Drill having a coating
#14Remote arc discharge plasma assisted processes
#15Low pressure arc plasma immersion coating vapor deposition and ion treatment
#16Low pressure arc plasma immersion coating vapor deposition and ion treatment
#17Method for producing an ionized vapor deposition coating
#18Electron-assisted deposition
#19Filtered cathodic arc deposition method and apparatus
#20Filtered cathodic arc deposition method and apparatus
#21Erosion Resistant Coatings
#22Filtered cathodic arc deposition method and apparatus
#23Sputter deposition method for forming integrated circuit
#24Magnetron based wafer processing
#25Small scanned magentron
#26Erosion resistant coatings
#27Device for improving plasma activity PVD-reactors
#28Method for magnetron sputter deposition
#29Direct ion beam deposition method and system
#30Titanium nitride thin film formation on metal substrate by chemical vapor deposition in a magnetized sheet plasma source
#31Method and apparatus for ionization film formation
#32Apparatus for enhanced physical vapor deposition