Semiconductor manufacturing device and semiconductor manufacturing method

Semiconductor manufacturing device and semiconductor manufacturing method

Movable evaporation source

Substrate spreading device for vacuum processing apparatus, vacuum processing apparatus with substrate spreading device and method for operating same

Apparatus for vapor deposition of dielectric wire coating

Modular tubular susceptor

FILM DEPOSITION SYSTEM

SYSTEMS TO IMPROVE FRONT-SIDE PROCESS UNIFORMITY BY BACK-SIDE METALLIZATION

Shielding design for metal gap fill

VAPOR DEPOSITION DEVICE

LOW PRESSURE VAPOR PHASE DEPOSITION OF ORGANIC THIN FILMS

Thin-film depositing apparatus

Epitaxial growth method

Epitaxial growth method

CRUCIBLE FOR VAPOR DEPOSITION, VAPOR DEPOSITION APPARATUS AND VAPOR DEPOSITION METHOD

Intaglio printing plate coating apparatus

Method of processing a substrate support assembly

ANNULAR MEMBER AND FILM-FORMING DEVICE IN WHICH SAME IS USED

In situ plasma clean for removal of residue from pedestal surface without breaking vacuum

WAFER CLAMP ASSEMBLY FOR HOLDING A WAFER DURING A DEPOSITION PROCESS

Deposition apparatus and method for manufacturing organic light emitting display apparatus by using the same

Support including an electrostatic substrate carrier

Deposition apparatus and method of manufacturing organic light emitting diode display

Thin film deposition apparatus with mask roll including multiple mask patterns and method of making organic light emitting device using the apparatus

Deposition apparatus, method of manufacturing organic light-emitting display apparatus by using same, and organic light-emitting display apparatus manufactured by using deposition apparatus

Apparatus and method for sputter-deposited coatings on fluidized particle beds

Processing apparatus and shield

EXTREME ULTRAVIOLET LITHOGRAPHY MASK BLANK MANUFACTURING SYSTEM AND METHOD OF OPERATION THEREFOR

Methods for processing a substrate using multiple substrate support positions

Selectively groundable cover ring for substrate process chambers

SUBSTRATE HOLDER APPARATUS AND VACUUM PROCESSING APPARATUS

Sputtering apparatus

Life enhancement of ring assembly in semiconductor manufacturing chambers

APPARATUS FOR TRANSPORTING SUBSTRATES INTO SUBSTRATE-TREATMENT APPARATUS

METHODS FOR ADDRESSING INBOARD-OUTBOARD ASYMMETRY IN SUBSTRATE PROCESSING

Self-centering magnetic masking system

Wafer processing system using multi-zone chuck

Method and apparatus to apply material to a surface

Wafer processing deposition shielding components

Method for recycling a substrate holder

Organic layer deposition apparatus, method of manufacturing organic light-emitting display apparatus by using the same, and organic light-emitting display apparatus manufactured by the method

PLASMA SPRAYED DEPOSITION RING ISOLATOR

Plasma processing method and plasma processing apparatus

System and method for deposition of a material on a substrate

Vapor deposition system

Organic layer deposition apparatus, organic light-emitting display apparatus, and method of manufacturing the organic light-emitting display apparatus

System and method for 2D workpiece alignment

Method of manufacturing organic light-emitting display device using an organic layer deposition apparatus

Heating plate with heating zones for substrate processing and method of use thereof

Deposition system with electrically isolated pallet and anode assemblies

Susceptor and vapor-phase growth apparatus

Organic layer deposition apparatus, method of manufacturing organic light-emitting display apparatus using the same, and organic light-emitting display apparatus manufactured using the method

Substrate support with radio frequency (RF) return path

Device and method for vacuum coating

GLASS SUBSTRATE STACKING STRUCTURE, DEVICE AND METHOD FOR FILM COATING PROCESS

Sputtering apparatus

Apparatus and method for depositing a layer onto a substrate

Dual-mask arrangement for solar cell fabrication

Holder for drill-head coating

Edge ring for a deposition chamber

Plasma processing apparatus

In-situ conditioning for vacuum processing of polymer substrates

Method and apparatus for clamping and cooling a substrate for ion implantation

Shielding design for metal gap fill

Wafer processing method and system using multi-zone chuck

Vacuum processing apparatus

System architecture for combined static and pass-by processing

Organic layer deposition apparatus, method of manufacturing organic light-emitting display apparatus using the same, and organic light-emitting display apparatus

Substrate carrier and applications thereof

Ion implanter and ion implant method thereof

SUPPORT MECHANISM AND VACUUMM COATING MACHINE USING THE SAME

Rotating type thin film deposition apparatus and thin film deposition method used by the same

Light-emitting diode and deposition apparatus for fabricating the same

Direct liquid deposition

Interfaces and die packages, and appartuses including the same

In-line deposition system and process for deposition of a thin film layer

Thin film forming apparatus

Method of deposition

DEVICE AND METHOD FOR SUBSTRATE PROCESSING

Electronic device manufacturing method and sputtering method

Vacuum processing apparatus, vacuum processing method, and electronic device manufacturing method

Organic layer deposition apparatus and method of manufacturing organic light-emitting display device by using the same

Physical vapor deposition chamber with capacitive tuning at wafer support

Mounting table structure and plasma film forming apparatus

Sputtering apparatus and sputtering method

Method of supporting a workpiece during physical vapour deposition

Organic layer deposition apparatus and method of manufacturing organic light-emitting display apparatus by using the same

ORGANIC LAYER DEPOSITION APPARATUS AND METHOD OF MANUFACTURING ORGANIC LIGHT EMITTING DISPLAY DEVICE USING THE ORGANIC LAYER DEPOSITION APPARATUS

Loading device for coating process

Electrostatic chuck, thin film deposition apparatus including the electrostatic chuck, and method of manufacturing organic light emitting display apparatus by using the thin film deposition apparatus

Coating methods and apparatus

Substrate support

Support assembly

SUBSTRATE HOLDERS AND METHODS OF SUBSTRATE MOUNTING

IN-LINE FILM-FORMING APPARATUS, METHOD OF MANUFACTURING MAGNETIC RECORDING MEDIUM, AND GATE VALVE

Method for removing oxides

Organic thin film deposition device, organic EL element manufacturing device, and organic thin film deposition method

In-line type film forming apparatus and method for manufacturing magnetic recording medium

Wafer processing deposition shielding components

FILM FORMING APPARATUS

Clamp

SUBSTRATE COOLING DEVICE, SPUTTERING APPARATUS AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE

Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using thin film deposition apparatus

Glass substrate-holding tool and method for producing an EUV mask blank by employing the same

Arrangement for holding a substrate in a material deposition apparatus

SYSTEM, METHOD AND APPARATUS FOR REDUCING PLASMA NOISE ON POWER PATH OF ELECTROSTATIC CHUCK

Combinatorial process system

Combinatorial process system

Cooled PVD shield

METHOD OF COATING AN RF DEVICE AND SPUTTERING APPARATUS USED IN THE SAME

Deposition ring and electrostatic chuck for physical vapor deposition chamber

Organic layer deposition apparatus, and method of manufacturing organic light-emitting display apparatus using the same

Conveying device having carrier with revolving frame and deposition device using same

Substrate depositing system and depositing method using the same

CARRIER FOR A SUBSTRATE AND A METHOD FOR ASSEMBLING THE SAME

Multi-environment coating device

SYSTEMS AND METHODS FOR HIGH-RATE DEPOSITION OF THIN FILM LAYERS ON PHOTOVOLTAIC MODULE SUBSTRATES

Thin film deposition apparatus, method of manufacturing organic light-emitting display device by using the apparatus, and organic light-emitting display device manufactured by using the method

Cooling apparatus for a web deposition system

TENSION APPARATUS FOR PATTERNING SLIT SHEET

Substrate holder stocker device, substrate processing apparatus, and substrate holder moving method using the substrate holder stocker device

COATING SYSTEM

Vapor deposition apparatus

Coating apparatus

Thin film deposition apparatus, method of manufacturing organic light-emitting display device by using the apparatus, and organic light-emitting display device manufactured by using the method

Test glass changing system

Sputtering apparatus

RACK AND PINION MECHANISM, VACUUM PROCESSING APPARATUS, METHOD OF DRIVING AND CONTROLLING RACK AND PINION MECHANISM, DRIVE CONTROL PROGRAM, AND RECORDING MEDIUM

Tray assembly

SPUTTERING APPARATUS AND METHOD

Angled sputtering physical vapor deposition apparatus with wafer holder and wafer holder for an angled sputtering physical vapor deposition apparatus

Clamping device and coating apparatus having same

Sputtering apparatus

Coating holder and coating device having same

Wafer Heating Apparatus, Electrostatic Chuck, and Method for Manufacturing Wafer Heating Apparatus

METHOD FOR REMOVING OXIDES

Biasing a pre-metalized non-conductive substrate

PHYSICAL VAPOR DEPOSITION WITH INSULATED CLAMP

Physical vapor deposition with heat diffuser

Physical vapor deposition with multi-point clamp

Organic thin film deposition device, organic EL element manufacturing device, and organic thin film deposition method

Life enhancement of ring assembly in semiconductor manufacturing chambers

SUPPORT DEVICE AND COATING DEVICE USING SAME

System for batch processing of magnetic media

Plasma processing apparatus

Substrate processing apparatus, and substrate processing method

Apparatus and method for vapor deposition of dielectric wire coating

Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using thin film deposition apparatus

Methods for forming a transparent conductive oxide layer on a substrate

Multilayered coated cutting tool

Holding assembly for a lens

Vacuum processing apparatus and optical component manufacturing method

SPUTTERING DEPOSITION APPARATUS

Heating plate with planar heating zones for semiconductor processing

Method for treating non-planar structures using gas cluster ion beam processing

Method and system for tilting a substrate during gas cluster ion beam processing

SUBSTRATE HOLDER AND SUBSTRATE TEMPERATURE CONTROL METHOD

VACUUM PROCESSING APPARATUS, VACUUM PROCESSING METHOD, AND ELECTRONIC DEVICE MANUFACTURING METHOD

Composite particulate preparing apparatus and method

INSULATED CONDUCTIVE ELEMENT HAVING A SUBSTANTIALLY CONTINUOUS BARRIER LAYER FORMED THROUGH CONTINUOUS VAPOR DEPOSITION

Insulated conductive element having a substantially continuous barrier layer formed through multiple coatings

THIN FILM DEPOSITION APPARATUS AND METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY DEVICE BY USING THE SAME

THIN FILM DEPOSITION APPARATUS AND METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY DEVICE BY USING THE SAME

ION IMPLANTER AND ION IMPLANT METHOD THEREOF

COATED MEDICAL IMPLANTS

SPUTTERING DEPOSITION METHOD AND APPARATUS

Method and device for fixing and transporting impact sensitive sheets in sputter feed systems

RECIRCULATING LINEAR ROLLING BUSHING

Sputtering apparatus and method of preventing damage thereof

VAPOR DEPOSITION APPARATUS AND VAPOR DEPOSITION METHOD

Magnetic particle trapper for a disk sputtering system

TRAY DEVICE FOR USE WITH LENS HOLDER

Electrostatic chuck

BIASABLE COOLING PEDESTAL

Mounting table structure and plasma film forming apparatus

Sputtering device with gas injection assembly

HDD pattern implant system

Vertical-offset coater and methods of use

In situ plasma clean for removal of residue from pedestal surface without breaking vacuum

High-frequency sputtering device

Weight plate of vacuum evaporation apparatus and vacuum evaporation apparatus using the same

APPARATUS FOR GROWING LARGE AREA VANADIUM DIOXIDE THIN FILM AND METHOD OF GROWING LARGE AREA OXIDE THIN FILM IN THE APPARATUS

METHOD AND APPARATUS FOR MANUFACTURING MAGNETIC RECORDING MEDIUM

METHOD AND APPARATUS FOR THERMALLY CONVERTING METALLIC PRECURSOR LAYERS INTO SEMICONDUCTING LAYERS, AND ALSO SOLAR MODULE

SUBSTRATE SUPPORT IN A REACTIVE SPUTTER CHAMBER

METHOD AND ARRANGEMENT FOR PROVIDING CHALCOGENS

VACUUM TREATMENT APPARATUS

Conveyor and deposition apparatus, and maintenance method thereof

Tray for vacuum deposition apparatus

LOW PRESSURE VAPOR PHASE DEPOSITION OF ORGANIC THIN FILMS

ELECTROSTATIC CHUCK

SHUTTER DISK FOR PHYSICAL VAPOR DEPOSITION CHAMBER

TRANSPORTING DEVICE FOR A VACUUM PROCESSING APPARATUS, DRIVE DEVICE FOR A COMPONENT OF A VACUUM PROCESSING APPARATUS, AND A VACUUM PROCESSING APPARATUS

Substrate holders for uniform reactive sputtering

COATING CHAMBER WITH A MOVEABLE SHIELD

SUBSTRATE HOLDER

Vacuum apparatus and method for conveying substrate

In-line film forming apparatus and manufacturing method of magnetic recording medium

Epitaxial growth susceptor

Substrate support device and plasma processing apparatus

CARRIER WITH DEPOSITION SHIELD

VAPOR DEPOSITION DEVICE

SUBSTRATE TREATMENT APPARATUS AND SUBSTRATE TREATMENT METHOD

SUBSTRATE TRAY AND FILM FORMING APPARATUS

Apparatus and method for fabricating organic light emitting diode display device

Method and apparatus for supporting workpieces in a coating apparatus

WAFER PROCESSING DEPOSITION SHIELDING COMPONENTS

Organic deposition apparatus and method of depositing organic substance using the same

DEVICE FOR MANUFACTURING LENSES

APPARATUS AND METHOD FOR RF GROUNDING OF IPVD TABLE

SYSTEMS AND METHODS FOR DEPOSITION

Thin-Film Deposition System

Physical vapor deposition method with a source of isotropic ion velocity distribution at the wafer surface

Film coating cover and film coating device using same

Coating apparatus with rotation module

MODULE FOR SUPPORTING A SUBSTRATE AND DEPOSITION APPARATUS HAVING THE SAME

Apparatus for Manufacturing Magnetic Recording Disk, and In-Line Type Substrate Processing Apparatus

PVD—vacuum coating unit

Vertical substrate transfer apparatus and film-forming apparatus

HOLDING DEVICE FOR HOLDING WORKPIECES AND VACUUM DEPOSITION APPARATUS USING SAME

METHOD TO DECREASE THIN FILM TENSILE STRESSES RESULTING FROM PHYSICAL VAPOR DEPOSITION

Workpiece support with fluid zones for temperature control

METHOD FOR REMOVING OXIDES

Method for manufacturing a lanthanum oxide compound

SPUTTERING SYSTEM CARRIER

SUPPORT ASSEMBLY

Showerhead assembly

Transport apparatus for elongate substrates

Compensation plate used in a film coating device

Evaporation apparatus

Combinatorial process system

Combinatorial process system

Combinatorial process system

DEPOSITION RING AND COVER RING TO EXTEND PROCESS COMPONENTS LIFE AND PERFORMANCE FOR PROCESS CHAMBERS

Method for directing plasma flow to coat internal passageways

Apparatus for manufacturing magnetic recording disk, and in-line type substrate processing apparatus

SUBSTRATE HOLDER AND VACUUM FILM DEPOSITION APPARATUS

SUBSTRATE HOLDER AND VACUUM FILM DEPOSITION APPARATUS

Wafer supporting device of a sputtering apparatus

VACUUM COATING INSTALLATION WITH TRANSPORT ROLLERS FOR THE TRANSPORT OF A PLANAR SUBSTRATE

Method for front end of line fabrication

MAGNETIC STONE DEVICE AND METHOD OF MANUFACTURING THE SAME, AND MAGNETIC BEADS AND METHOD OF MANUFACTURING THE SAME

MECHANICAL AND ACOUSTICAL SUSPENSION COATING OF MEDICAL IMPLANTS

VACUUM EVAPORATION APPARATUS

Susceptor for semiconductor manufacturing apparatus

STACKED-FILM-FORMING SYSTEM, SPUTTERING APPARATUS, AND METHOD FOR FORMING STACKED FILM

Deposition system with electrically isolated pallet and anode assemblies

Vacuum coater device and mechanism for supporting and manipulating workpieces in same

Apparatus for manufacturing magnetic recording disk, and in-line type substrate processing apparatus

PLASMA SPRAYED DEPOSITION RING ISOLATOR

Method for glass sheet semiconductor coating

CLAMPING DEVICE FOR HOLDING A SUBSTRATE

Apparatus for Manufacturing Magnetic Recording Disk, and In-Line Type Substrate Processing Apparatus

Position adjusting apparatus, sputtering system

TECHNIQUES FOR LOW-TEMPERATURE ION IMPLANTATION

Thin film producing method

System and method for deposition of a material on a substrate

Methods for producing photomask blanks, cluster tool apparatus for producing photomask blanks and the resulting photomask blanks from such methods and apparatus

Holding assembly and transport arrangement for handling lenses and method for finishing lenses

Radiation image conversion panel production process and radiation image conversion panel obtained thereby

Substrate holder assembly device

COOLED PVD SHIELD

Sputter deposition method for forming integrated circuit

COATING INSTALLATION WITH CARRIER FOR SUBSTRATE COATING

Apparatus for Manufacturing Magnetic Recording Disk, and In-Line Type Substrate Processing Apparatus

Substrate holder and sputtering apparatus having same

VACUUM FIXTURE

HEATER FOR DEPOSITING THIN FILM

Processing apparatus

Low pressure vapor phase deposition of organic thin films

Process kit and target for substrate processing chamber

Substrate carrier

Substrate carrier

Width adjustable substrate support for plasma processing

Deposition device

Deposition of perovskite and other compound ceramic films for dielectric applications

Film tray for fabricating flexible display

Carrier and manufacturing apparatus having the same

Holder for fabricating organic light emitting display

Magnetic disk, manufacturing method therefor and magnetic recording device

Wafer clamp assembly for holding a wafer during a deposition process

HEATER FOR HEATING A WAFER AND METHOD FOR PREVENTING CONTAMINATION OF THE HEATER

Inclined carrier transferring apparatus

Sputtering apparatus and method of preventing damage thereof

Wafer Holder And Method Of Holding A Wafer

Vapor Phase Deposition System and Method

Substrate Holder

Carrier device for magnetizable substrate

PVD equipment and electrode and deposition ring thereof

Device for fixing substrate for thin film sputter and method of fixing substrate using the same

Magnetic disk, manufacturing method therefor and magnetic recording device

Alignment system, vertical tray transporting assembly, and deposition apparatus with the same

HEATER FOR HEATING A WAFER AND METHOD FOR PREVENTING CONTAMINATION OF THE HEATER

Installation for processing a substrate

Support ring assembly

Method of manufacturing plasma display panels

Sputtering device with gas injection assembly

Vertical-offset coater

Apparatus for depositing a thin film on a substrate

Phosphor sheet manufacturing apparatus