Pedestal lift for semiconductor processing chambers

Wafer holder

Multi-chamber deposition equipment for solid free form fabrication

Gas flow system

Method for solvent-free perovskite deposition

SUBSTRATE SUPPORT PEDESTAL

Fixture for coating of double-ended tools

Temperature control roller, transporting arrangement and vacuum arrangement

Sputtering processing and apparatus

Method for making an eyeglass lens coated by means of physical vapor deposition PVD

Method of controlling substrate treatment apparatus, substrate treatment apparatus, and cluster system

Fixing apparatus and evaporation method

VAPOR DEPOSITION STRUCTURE OF DISPLAY PANEL

SUBSTRATE PROCESSING DEVICE AND PROCESSING SYSTEM

APPARATUS AND SYSTEM FOR VACUUM DEPOSITION ON A SUBSTRATE AND METHOD FOR VACUUM DEPOSITION ON A SUBSTRATE

Film formation device, vapor-deposited film formation method, and organic EL display device production method

Deposition system with integrated cooling on a rotating drum

Process kit having tall deposition ring for PVD chamber

In-line system for mass production of organic optoelectronic device and manufacturing method using the same system

Apparatus and methods of sublimation for repeatable uniform or patterned deposition of matrix crystals on solid substrates

Method of manufacturing substrate with a transparent conductive film, manufacturing apparatus of substrate with transparent conductive film, substrate with transparent conductive film, and solar cell

Vapor deposition apparatus, vapor deposition method and method of manufacturing organic EL display apparatus

Apparatus for physical vapor deposition and method for forming a layer

Loading apparatus and physical vapor deposition apparatus

APPARATUS FOR PROCESSING SUBSTRATE

Reactor system for sublimation of pre-clean byproducts and method thereof

Carrying device and semiconductor processing apparatus

Apparatus and a method of controlling thickness variation in a material layer formed using physical vapour deposition

SUBSTRATE SUPPORTING DEVICE FOR VACUUM SPUTTERING EQUIPMENT

CARRIER PLATE FOR EVAPORATING DEVICE AND EVAPORATING DEVICE THEREOF

SYSTEMS, DEVICES AND METHODS RELATED TO SHIELDED MODULES

Shutter disk for physical vapor deposition chamber

Film-forming device

Porous tools and methods of making the same

LENS COATING FIXTURE

VACUUM SYSTEM AND METHOD FOR DEPOSITING A PLURALITY OF MATERIALS ON A SUBSTRATE

Stage mechanism, processing apparatus, and method of operating the stage mechanism

Optically transparent pedestal for fluidly supporting a substrate

CARRIER, VACUUM SYSTEM AND METHOD OF OPERATING A VACUUM SYSTEM

Sputtering device

Pre-conditioned chamber components

Method of forming wiring on side portion of substrate

SUBSTRATE-CARRIER STRUCTURE

Coating arrangement and method

ELECTROSTATIC CHUCK UNIT AND THIN FILM DEPOSITION APPARATUS INCLUDING THE SAME

DEPOSITION APPARATUS AND METHOD OF ALIGNING MAGNET PLATE OF DEPOSITION APPARATUS

VACUUM PROCESSING APPARATUS

Apparatus to reduce contamination in a plasma etching chamber

Substrate supporting unit and film forming device having the substrate supporting unit

POSITIONING ARRANGEMENT FOR A SUBSTRATE CARRIER AND A MASK CARRIER, TRANSPORTATION SYSTEM FOR A SUBSTRATE CARRIER AND A MASK CARRIER, AND METHODS THEREFOR

HOUSING OF ELECTRONIC DEVICE AND METHOD FOR MANUFACTURING HOUSING

Holding devices for receiving a plurality of substrates for the treatment thereof, treatment systems, and treatment methods

Vapor deposition apparatus, vapor deposition method and method of manufacturing organic EL display apparatus

Physical vapor deposition with isotropic neutral and non-isotropic ion velocity distribution at the wafer surface

Two piece shutter disk assembly with self-centering feature

DOUBLE-SIDED COATING APPARATUS AND CARRIER PLATE PROCESSING UNIT THEREOF

Methods to improve front-side process uniformity by back-side metallization

Plasma etch chamber and method of plasma etching

THERMALLY OPTIMIZED RINGS

Integrated 3D metallizer

Particle reduction during sputtering deposition

TURNOVER MECHANISM AND COATING PRODUCTION LINE

Vapor deposition apparatus with electromagnets generating magnetic field in reverse orientation

Shield for a substrate processing chamber

DEPOSITION RING FOR PROCESSING REDUCED SIZE SUBSTRATES

METHODS AND APPARATUS FOR MAINTAINING LOW NON-UNIFORMITY OVER TARGET LIFE

Holding arrangement for holding a substrate, carrier including the holding arrangement, processing system employing the carrier, and method for releasing a substrate from a holding arrangement

CARRIER FOR HOLDING A SUBSTRATE, USE OF THE CARRIER IN A PROCESSING SYSTEM, PROCESSING SYSTEM EMPLOYING THE CARRIER, AND METHOD FOR CONTROLLING A TEMPERATURE OF A SUBSTRATE

Vapor deposition apparatus, vapor deposition method and method of manufacturing organic el display apparatus

Vapor deposition apparatus, vapor deposition method and method of manufacturing organic EL display apparatus

Evaporation deposition equipment and evaporation deposition method

FILM FORMATION APPARATUS

Loading jig and evaporator

Vacuum processing apparatus

SEMICONDUCTOR MANUFACTURING APPARATUS AND FILM FORMATION METHOD FOR A SEMICONDUCTOR DEVICE

SUBSTRATE-PLACING STAGE AND MANUFACTURING METHOD THEREOF

SUBSTRATE SUPPORTING APPARATUS AND MANUFACTURING METHOD THEREOF

Substrate fixing carrier, evaporation device and evaporation method

Enhanced selenium supply in copper indium gallium selenide processes

Carrying apparatus and carrying method

DEPOSITION SYSTEM WITH INTEGRATED COOLING ON A ROTATING DRUM

Substrate carrier having hard mask

Flexible substrate deposition system

SUBSTRATE TREATMENT APPARATUS

ELECTROSTATIC CHUCKING OF COVER GLASS WITH IRREGULAR SURFACE FLATNESS

Deposition apparatus including upper shower head and lower shower head

Method for manufacturing deposition mask and deposition mask

Transparent halo for reduced particle generation

Coatings for enhancement of properties and performance of substrate articles and apparatus

Vapor deposition device, vapor deposition method, and method for manufacturing organic electroluminescence element

Substrate processing chamber having improved process volume sealing

Vacuum treatment apparatus

Apparatus and method to coat glass substrates with electrostatic chuck and Van der Waals forces

Vapor deposition method with electromagnets generating magnetic field in reverse orientation

Deposition mask, vapor deposition apparatus, vapor deposition method, and method for manufacturing organic EL display apparatus

ESC substrate support with chucking force control

Evaporation equipment

Semiconductor memory device and semiconductor memory manufacturing apparatus

Film thickness test apparatus and method and vapor deposition device

METHODS AND APPARATUSES TO CLAMP COVER SUBSTRATES IN A VACUUM COATING PROCESS WITH VAN DER WAALS FORCES

Apparatus for transportation of a substrate carrier in a vacuum chamber, system for vacuum processing of a substrate, and method for transportation of a substrate carrier in a vacuum chamber

Vacuum processing device

Systems for depositing coatings on surfaces and associated methods

DEVICE FOR HOLDING, POSITIONING AND MOVING AN OBJECT

Film formation apparatus, film formation method, and manufacturing method of solar battery

SYSTEM AND METHOD FOR REDUCING ATTRACTIVE FORCES BETWEEN A DEPOSITION MASK AND SUBSTRATE AND A DEPOSITION SYSTEM AND METHOD UTILIZING THE SAME

Vacuum processing system with holding arrangement

VACUUM CHAMBER ARRANGEMENT

Reactor system for sublimation of pre-clean byproducts and method thereof

Substrate bearing assembly and magnetron sputtering device

Method and apparatus for controlling stress variation in a material layer formed via pulsed DC physical vapor deposition

Impregnation method

Aligner apparatus and methods

Substrate processing system and control device

HOLDING ARRANGEMENT FOR HOLDING A SUBSTRATE DURING SUBSTRATE PROCESSING IN A VACUUM PROCESSING CHAMBER, CARRIER FOR SUPPORTING A SUBSTRATE IN A VACUUM PROCESSING CHAMBER, AND METHOD FOR HOLDING A SUBSTRATE

WORKPIECE HOLDING BODY AND FILM-FORMING APPARATUS

Methods and supports for holding substrates

BEARING TABLE AND FABRICATION METHOD THEREOF AND PROCESSING DEVICE AND OPERATION METHOD THEREOF

Reactors for plasma-assisted processes and associated methods

Box coating apparatus for vacuum coating of substrates, in particular spectacle lenses, and heating device for it

MASK FRAME ASSEMBLY AND METHOD OF MANUFACTURING THE SAME

Apparatus with concentric pumping for multiple pressure regimes

High Throughput Vacuum Deposition Sources and System

Extension of PVD chamber with multiple reaction gases, high bias power, and high power impulse source for deposition, implantation, and treatment

MASK FOR SPUTTERING FILM FORMATION AND SPUTTERING DEVICE

CHAMBER FOR PATTERNING NON-VOLATILE METALS

Physical vapor deposition method using backside gas cooling of workpieces

Method of processing a substrate using an ion beam and apparatus for performing the same

Apparatus and method for coating workpieces

Wafer holding unit

Sputtering apparatus and sputtering method

CARRIER FOR SUPPORTING AT LEAST ONE SUBSTRATE DURING A SPUTTER DEPOSITION PROCESS, APPARATUS FOR SPUTTER DEPOSITION ON AT LEAST ONE SUBSTRATE, AND METHOD FOR SPUTTER DEPOSITION ON AT LEAST ONE SUBSTRATE

System architecture for combined static and pass-by processing

Film-forming method

EVAPORATION CARRIER PLATE AND EVAPORATION APPARATUS

Film forming apparatus

Apparatus and Method for the Evaporation and Deposition of Materials Using a Rope Filament

Vacuum heating device

FILM FORMATION APPARATUS AND FILM FORMATION METHOD

Coated glass articles and processes for producing the same

Physical vapor deposition system with a source of isotropic ion velocity distribution at the wafer surface

SUBSTRATE HOLDER

LOADING WORKPIECES IN A COATING SYSTEM

Magnetron sputtering device

Methods and devices using PVD ruthenium

METHOD OF MANUFACTURING PRESSURE SENSOR, DEPOSITION SYSTEM, AND ANNEALING SYSTEM

SPUTTERING APPARATUS

COATINGS FOR ENHANCEMENT OF PROPERTIES AND PERFORMANCE OF SUBSTRATE ARTICLES AND APPARATUS

Apparatus and method to coat glass substrates with electrostatic chuck and van der waals forces

Thermally optimized rings

Gas cooled substrate support for stabilized high temperature deposition

SPUTTERING DEVICE

LINEAR EVAPORATION SOURCE AND DEPOSITION APPARATUS INCLUDING THE SAME

Evaporation method and evaporation device for organic light-emitting diode substrate

Holding arrangement for supporting a substrate carrier and a mask carrier during layer deposition in a processing chamber, apparatus for depositing a layer on a substrate, and method for aligning a substrate carrier supporting a substrate and a mask carrier

DEPOSITION APPARATUS AND METHOD FOR MANUFACTURING COATED CUTTING TOOL

DEPOSITION RING AND ELECTROSTATIC CHUCK FOR PHYSICAL VAPOR DEPOSITION CHAMBER

Multi-chamber deposition equipment for solid free form fabrication

Film forming apparatus

Semiconductor manufacturing apparatus and method of manufacturing semiconductor device

HDD PATTERN IMPLANT SYSTEM

CHUCKING DEVICE AND VACUUM PROCESSING APPARATUS

EVAPORATION SOURCE FOR ORGANIC MATERIAL, DEPOSITION APPARATUS FOR DEPOSITING ORGANIC MATERIALS IN A VACUUM CHAMBER HAVING AN EVAPORATION SOURCE FOR ORGANIC MATERIAL, AND METHOD FOR EVAPORATING ORGANIC MATERIAL

Shadow-mask-deposition system and method therefor

High-precision shadow-mask-deposition system and method therefor

System and method for manufacturing photovoltaic structures with a metal seed layer

DEVICE FOR MAKING CARBON FIBER FILM

Carbon fiber film and method for making the same

Fixing apparatus and evaporation method

Substrate holding device, substrate transport device, processing arrangement and method for processing a substrate

Heating chamber and semiconductor processing apparatus

Interfaces and die packages, and appartuses including the same

Vapor deposition system

Energy storage device having an interlayer between electrode and electrolyte layer

SYSTEM AND METHOD FOR MASKLESS THIN FILM BATTERY FABRICATION

Holding device for the surface treatment of bar cutters

DC magnetron sputtering

Substrate mounting member, wafer plate, and SiC epitaxial substrate manufacturing method

Ceramic heater with enhanced RF power delivery

Susceptor support

DEVICE EQUIPPED WITH AN ION BEAM SOURCE FOR COATING A SUBSTRATE IN A VACUUM CHAMBER

Substrate holding device

Apparatus and method for processing sputtered IC units

Deposition apparatus for organic light-emitting diodes

Vacuum device

Substrate support chuck cooling for deposition chamber

Substrate supports with multi-layer structure including independent operated heater zones

Chamber for patterning non-volatile metals

Sputtering systems and methods for packaging applications

PLASMA PROCESSING APPARATUS

RF sputtering apparatus and sputtering method

Deposition apparatus

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

Manufacturing method of electrode and display device including the electrode

Processing system for small substrates

VAPOR DISPOSITION SYSTEM

Apparatus and method for reducing substrate sliding in process chambers

SUBSTRATE CARRIER THAT CARRIES A SUBSTRATE ON EACH OF TWO BROAD SIDES OF THE SUBSTRATE CARRIER THAT FACE AWAY FROM EACH OTHER

Method of processing a substrate support assembly

Thin-film fabrication system employing mechanical stress measurement

Film formation method, vacuum processing apparatus, method of manufacturing semiconductor light emitting element, semiconductor light emitting element, method of manufacturing semiconductor electronic element, semiconductor electronic element, and illuminating apparatus

Film formation device for cutting tool provided with with coating film, and film formation method for cutting tool provided with coating film

VACUUM EVAPORATION DEVICE

System and method for manufacturing photovoltaic structures with a metal seed layer

Deposition system with integrated cooling on a rotating drum

Extreme ultraviolet lithography mask blank manufacturing system and method of operation therefor

Physical vapor deposition system using backside gas cooling of workpieces

Back plate clamping device, alignment device and evaporation equipment

Method of fixing substrate using electrostatic chuck and substrate processing apparatus including the same

Substrate processing apparatus

Heating Device for Evaporation Machine and Evaporation Machine

Wafer plate and mask arrangement for substrate fabrication

FILM FORMATION DEVICE AND FILM FORMATION METHOD

APPARTUS AND METHOD FOR PRODUCING SPUTTER-DEPOSITED COATINGS ON FLUIDIZED PARTICLE BEDS

MAGNETRON SPUTTERING DEVICE AND METHOD USING THE SAME

Roll-to-roll hybrid plasma modular coating system

Sputtering apparatus

DOUBLE-VALVE DEVICE FOR A FILM DEPOSITION APPARATUS

Apparatus for depositing a layer on a substrate in a processing gas

Bearing device and plasma processing apparatus

EVAPORATION SOURCE FOR ORGANIC MATERIAL, APPARATUS HAVING AN EVAPORATION SOURCE FOR ORGANIC MATERIAL, SYSTEM HAVING AN EVAPORATION DEPOSITION APPARATUS WITH AN EVAPORATION SOURCE FOR ORGANIC MATERIALS, AND METHOD FOR OPERATING AN EVAPORATION SOURCE FOR ORGANIC MATERIAL

Evaporation carrier plate and evaporation device

Thin substrate processing device

Reactor system for sublimation of pre-clean byproducts and method thereof

Substrate carrying apparatus and sputtering device comprising the same

Shutter disk for physical vapor deposition chamber

VACUUM EVAPORATION DEVICE AND VACUUM EVAPORATION METHOD

Clamp and carrier used in a coating apparatus

Deposition ring and electrostatic chuck for physical vapor deposition chamber

Substrate carrier unit for a film deposition apparatus

Deposition apparatus and manufacturing process including film forming step by deposition apparatus

Substrate support with thermal zones for semiconductor processing

Fabrication of integrated computational elements using cylindrical substrate support shaped to match a cross-section of a spatial profile of a deposition plume

Organic layer deposition apparatus and method of manufacturing organic light-emitting display device by using the same

Substrate fixing apparatus

Method for manufacturing deposition mask and deposition mask

SUBSTRATE CARRIER FOR A REDUCED TRANSMISSION OF THERMAL ENERGY

Plate hanging device and alignment film coating system

Determining temperature dependence of complex refractive indices of layer materials during fabrication of integrated computational elements

SHUTTER SYSTEM

Mechanical stress measurement during thin-film fabrication

Vacuum treatment apparatus

Semiconductor manufacturing apparatus and method of manufacturing semiconductor device

Vapor deposition method and method for producing an organic electroluminescence display device

Vapor deposition system and method

System for glass sheet semiconductor coating and resultant product

CHAMBERS FOR PARTICLE REDUCTION IN SUBSTRATE PROCESSING SYSTEMS

TEMPERATURE-DEPENDENT FABRICATION OF INTEGRATED COMPUTATIONAL ELEMENTS

RADIALLY OUTWARD PAD DESIGN FOR ELECTROSTATIC CHUCK SURFACE

Substrate carrier with integrated electrostatic chuck

Substrate carrier with integrated electrostatic chuck

Apparatus for deposition and substrate alignment method in the same

Sputter tool

Gas cooled electrostatic chuck (ESC) having a gas channel formed therein and coupled to a gas box on both ends of the gas channel

PARTICLE REDUCTION IN A DEPOSITION CHAMBER USING THERMAL EXPANSION COEFFICIENT COMPATIBLE COATING

Processing system containing an isolation region separating a deposition chamber from a treatment chamber

Apparatus and method for coating of small Nd-Fe-B magnets

ORGANIC LAYER DEPOSITION APPARATUS, METHOD OF MANUFACTURING ORGANIC LIGHT EMITTING DISPLAY DEVICE USING THE APPARATUS, AND ORGANIC LIGHT EMITTING DISPLAY DEVICE MANUFACTURED USING THE METHOD

Glass pallet for sputtering systems

PHYSICAL VAPOR DEPOSITION APPARATUS AND METHOD OF DEPOSITING PHASE-CHANGE MATERIALS USING THE SAME

High throughput vacuum deposition sources and system

Versatile holder for treating the surface of rod-shaped substrates

Ion implantation machine presenting increased productivity

Methods and apparatus for maintaining low non-uniformity over target life

CARRIER FOR A SUBSTRATE AND METHOD FOR CARRYING A SUBSTRATE

SPUTTERING DEVICE

Sputtering apparatus

Ion beam sample preparation and coating apparatus and methods

Apparatus and method for reducing substrate sliding in process chambers

VAPOR DEPOSITION UNIT AND VAPOR DEPOSITION DEVICE

CARRIER FOR SUBSTRATES

APPARATUS WITH NEIGHBORING SPUTTER CATHODES AND METHOD OF OPERATION THEREOF

Dyeing method and apparatus for dyeing resin body by vaporization and deposition

Holding assembly for substrate processing chamber

Direct liquid deposition

METHOD FOR PROCESSING A SUBSTRATE AND PROCESSING ARRANGEMENT FOR PROCESSING A SUBSTRATE

METHOD AND ARRANGEMENT FOR PROVIDING CHALCOGENS

Mask frame assembly and method of manufacturing the same

Transporting device, processing arrangement and coating method

Electronic device manufacturing method and sputtering method

Deposition apparatus and use methods

Film deposition apparatus

Electromagnetic chuck for OLED mask chucking

Fabrication of integrated computational elements using substrate support shaped to match spatial profile of deposition plume

Platen with multiple shaped grounding structures

APPARATUSES AND SYSTEMS FOR SELECTIVELY APPLYING A PROTECTIVE COATING TO ELECTRONIC COMPONENTS AND METHODS RELATED THERETO

Method and system for maintaining an edge exclusion shield

Electrostatic chuck, glass substrate processing method, and said glass substrate

PLASMA ENHANCED DEPOSITION ARRANGEMENT FOR EVAPORATION OF DIELECTRIC MATERIALS, DEPOSITION APPARATUS AND METHODS OF OPERATING THEREOF

Method of manufacturing pressure sensor, deposition system, and annealing system

ROOM-TEMPERATURE BONDING APPARATUS AND ROOM-TEMPERATURE BONDING METHOD

Plasma apparatus, magnetic-field controlling method, and semiconductor manufacturing method

Gas cooled substrate support for stabilized high temperature deposition

PROCESSING ARRANGEMENT WITH TEMPERATURE CONDITIONING ARRANGEMENT AND METHOD OF PROCESSING A SUBSTRATE

METHOD OF PROCESSING A SUBSTRATE

Transport arrangement for manipulating lenses

Support unit and apparatus for treating substrate

Target retaining apparatus

SYSTEMS, DEVICES AND METHODS RELATED TO SOURCE LEVEL COMPENSATION FOR ELECTRON-BEAM EVAPORATORS

Organic material deposition apparatus, and organic material deposition method using same