COATINGS FOR ENHANCEMENT OF PROPERTIES AND PERFORMANCE OF SUBSTRATE ARTICLES AND APPARATUS

DEPOSITION APPARATUS AND METHOD OF MANUFACTURING ELECTRONIC DEVICE USING THE SAME

Scanning Magnetron Device and Magnetron Sputtering Apparatus for PVD Planar Target

DEPOSITION APPARATUS

DEVICES AND METHODS FOR DEPOSITION

DEPOSITION METHOD, DEPOSITION APPARATUS, AND ELECTRONIC DEVICE MANUFACTURED BY USING THE DEPOSITION APPARATUS

WAFER MANUFACTURING APPARATUS

SPUTTERING APPARATUS

ELECTROSTATIC CHUCK HEATER AND MANUFACTURING METHOD THEREFOR

DEPOSITION RING FOR PHYSICAL VAPOR DEPOSITION CHAMBER

DEPOSITION METHOD, SPUTTERING APPARATUS, AND ROTARY TARGET

MECHANICAL LOCKING SPUTTERING TARGET BONDING METHOD AND TARGET ASSEMBLIES PRODUCED THEREBY

DEPOSITION DEVICE, ELECTRONIC DEVICE AND METHOD OF DEPOSITION FOR DISPLAY DEVICE

DEPOSITION DEVICE FOR DISPLAY DEVICE AND METHOD OF REPLACING MAGNET PLATE OF THE DEPOSITION DEVICE

Detachable Mid Temp Electrostatic Chuck (ESC) for Process Chamber

DEPOSITION APPARATUS AND METHOD FOR SEATING MASK OF DEPOSITION APPARATUS

DEPOSITION APPARATUS AND METHOD FOR SEATING MASK OF DEPOSITION APPARATUS

HOMOEPITAXIAL THIN FILM, MANUFACTURING METHOD AND MANUFACTURING APPARATUS THEREOF

SPUTTERING APPARATUS AND DEPOSITION METHOD OF TUNGSTEN FILM

FILM FORMATION APPARATUS AND FILM FORMATION METHOD OF GALLIUM NITRIDE FILM

MASK MODULE, SUBSTRATE CARRIER, SUBSTRATE PROCESSING SYSTEM, AND METHOD OF PROCESSING A SUBSTRATE

DEPOSITION SOURCE AND DEPOSITION APPARATUS INCLUDING THE SAME

GAS FLOW ACCELERATOR TO PREVENT BUILDUP OF PROCESSING BYPRODUCT IN A MAIN PUMPING LINE OF A SEMICONDUCTOR PROCESSING TOOL

DEPOSITION APPARATUS, METHOD OF DRIVING THE SAME, AND ELECTRONIC DEVICE

METHOD FOR PRODUCING A MIRROR ASSEMBLY, AND COATING SYSTEM

OVERLAP SUSCEPTOR AND PREHEAT RING

DISC SUPPORT FOR FLUID DISTRIBUTION

SPUTTERING APPARATUS AND EVALUATION METHOD OF SPUTTERING TARGET

Methods And Apparatus For Depositing Amorphous Indium Tin Oxide Film

GRAPHENE VAPOR DEPOSITION SYSTEM AND PROCESS

CARRIER FOR HOLDING A SUBSTRATE, APPARATUS FOR DEPOSITING A LAYER ON A SUBSTRATE, AND METHOD FOR SUPPORTING A SUBSTRATE

VAPOR DEPOSITION APPARATUS AND MANUFACTURING METHOD OF LIGHT EMITTING DEVICE

METHOD AND APPARATUS FOR ION BEAM DIRECTIONAL DEPOSITION

External Cooling Assembly for Substrate Support

ROUTING CHAMBER

MANUFACTURING OF MESAS USING DEPOSITED LAYER FOR SUBSTRATE SUPPORTS

DEPOSITION EQUIPMENT FOR DISPLAY DEVICES AND METHOD OF FABRICATING DISPLAY DEVICE USING THE SAME

STAGE

Dielectric Deposition Ring with Fins for Physical Vapor Deposition

DEPOSITION TOOL WITH DIELECTRIC COATED CHAMBER SIDEWALLS TO IMPROVE ELECTROMANGNETIC FIELD UNIFORMITY

METHODS AND SYSTEMS FOR HEATING A WIDE BANDGAP SUBSTRATE

METHOD FOR DEPOSITING FILM ON END FACES OF LASER DIODE BAR

VACUUM LAYER DEPOSITION APPARATUS AND METHOD OF DEPOSITING A LAYER ON A SUBSTRATE, ESPECIALLY ON A SUBSTRATE COMPRISING INDENTATIONS IN THE SURFACE TO BE COATED

SUBSTRATE-CARRIER STRUCTURE

SET COMPRISING A PHYSICAL VAPOR DEPOSITION MACHINE AND AN OBSTRUCTION DEVICE, METHOD FOR COATING AND OBSTRUCTION DEVICE

FILM FORMATION APPARATUS AND FILM FORMATION METHOD OF GALLIUM NITRIDE FILM

FILM FORMATION APPARATUS

SHUTTER DISC FOR A SEMICONDUCTOR PROCESSING TOOL

COATINGS FOR ENHANCEMENT OF PROPERTIES AND PERFORMANCE OF SUBSTRATE ARTICLES AND APPARATUS

CERAMIC SUSCEPTOR AND METHOD OF MANUFACTURING SAME

CERAMIC SUSCEPTOR

FORMATION APPARATUS AND METHOD OF HYDROXYAPATITE-CONTAINING THIN FILM

Support Structure for Thermal Processing Systems

SUBSTRATE HOLDER FOR MASS PRODUCTION OF SURFACE-ENHANCED RAMAN SCATTERING SUBSTRATES

DEPOSITION APPARATUS AND METHOD OF OPERATING THE SAME

REMOTE LASER-BASED SAMPLE HEATER WITH SAMPLE EXCHANGE TURRET

METHOD OF PHYSICAL VAPOR DEPOSITION WITH INTERMIXING REDUCTION

GAS MIXING METHOD TO ENHANCE PLASMA

Method for Producing a Substoichiometric Layer of Titanium, Vanadium, Tungsten or Molybdenum Oxide

APPARATUS AND METHODS OF SUBLIMATION FOR REPEATABLE UNIFORM OR PATTERNED DEPOSITION OF MATRIX CRYSTALS ON SOLID SUBSTRATES

Methods for Perovskite Device Processing by Vapor Transport Deposition

CARRIER WITH VERTICAL GRID FOR SUPPORTING SUBSTRATES IN COATER

AUTOMATED THIN FILM DEPOSITION SYSTEM AND THIN FILM DEPOSITION METHOD TO WHICH MACHINE LEARNING IS APPLIED

PHYSICAL VAPOR DEPOSITION MACHINE WITH A THERMAL EVAPORATOR HAVING A CUP HEATED-UP BY ELECTRIC CURRENT

SYSTEM AND METHOD FOR CONTROLLING FILM THICKNESS, AND FILM DEPOSITION SYSTEM AND METHOD USING SAME

Method for Solvent Free Perovskite Deposition

COOLING DEVICE, METHOD FOR COOLING A COOLING ELEMENT AND LAYER DEPOSITION APPARATUS

SYSTEMS FOR DEPOSITING COATINGS ON SURFACES AND ASSOCIATED METHODS

SYSTEMS FOR DEPOSITING COATINGS ON SURFACES AND ASSOCIATED METHODS

PROCESS CHAMBERS HAVING MULTIPLE COOLING PLATES

IN-SITU FILM GROWTH RATE MONITORING APPARATUS, SYSTEMS, AND METHODS FOR SUBSTRATE PROCESSING

SUSCEPTOR MANUFACTURING METHOD AND SUSCEPTOR MANUFACTURED BY THE SAME

STAGE STRUCTURE, SUBSTRATE PROCESSING APPARATUS, AND TEMPERATURE CONTROL METHOD

SUSCEPTOR MANUFACTURING METHOD AND SUSCEPTOR MANUFACTURED BY THE SAME

SYSTEM AND METHOD FOR CONTROLLING FILM THICKNESS, AND FILM DEPOSITION SYSTEM AND METHOD USING SAME

WAFER PROCESSING APPARATUS AND WAFER PROCESSING METHOD

DEPOSITION SYSTEM AND METHOD

SEMICONDUCTOR PROCESSING TOOL

WAFER CHUCK STRUCTURE WITH HOLES IN UPPER SURFACE TO IMPROVE TEMPERATURE UNIFORMITY

ADJUSTABLE CLAMP FOR PHYSICAL VAPOR DEPOSITION

FILM-FORMING APPARATUS, AND METHOD FOR CLEANING FILM-FORMING APPARATUS

SPUTTERING MACHINES, SUBSTRATE HOLDERS, AND SPUTTERING PROCESSES WITH MAGNETIC BIASING

Isolated volume seals and method of forming an isolated volume within a processing chamber

SURFACE TREATMENT APPARATUS

APPARATUS FOR A THERMAL EVAPORATION SYSTEM AND METHOD OF COATING A COATING REGION ON A FRONT SURFACE OF A SUBSTRATE

DLC FILM DEPOSITION APPARATUS, SEMICONDUCTOR MANUFACTURING SYSTEM INCLUDING THE DLC FILM DEPOSITION APPARATUS, AND SEMICONDUCOR MANUFACTURING METHOD USING THE DLC FILM DEPOSITION APPARATUS

EVAPORATION COATING APPARATUS

GAS FLOW ACCELERATOR TO PREVENT BUILDUP OF PROCESSING BYPRODUCT IN A MAIN PUMPING LINE OF A SEMICONDUCTOR PROCESSING TOOL

CYLINDRICAL CATHODE AND CHAMBER USING SAME FOR SPUTTERING

CERAMIC SUSCEPTOR

PROCESS KIT HAVING TALL DEPOSITION RING FOR PVD CHAMBER

PVD SYSTEM AND COLLIMATOR

SUBSTRATE PROCESSING DEVICE AND METHOD FOR MANUFACTURING SAME

Programmable electrostatic chuck to enhance aluminum film morphology

Programmable ESC to enhance aluminum film morphology

CONSUMABLE COMPONENT TREATING APPARATUS AND SEMICONDUCTOR MANUFACTURING EQUIPMENT

SUBSTRATE CARRIER FOR THIN FILM PROCESSING

STABLE GROUND ANODE APERTURE FOR THIN FILM PROCESSING

DEPOSITION APPARATUS AND DEPOSITION METHOD USING THE SAME

FILM FORMATION METHOD AND FILM FORMATION APPARATUS

Cooling Device and Process for Cooling Double-Sided SiP Devices During Sputtering

FILM FORMING APPARATUS AND METHOD FOR REDUCING ARCING

APPARATUS AND METHODS FOR DEPOSITING MATERIAL WITHIN A THROUGH VIA

COATING SYSTEM FOR COATING A STRIP AND METHOD FOR COATING A STRIP

Organic vapor jet printing system

SEMICONDUCTOR PROCESS EQUIPMENT

SYSTEM AND METHOD OF PRODUCING MONOCRYSTALLINE LAYERS ON A SUBSTRATE

SEMICONDUCTOR PROCESS EQUIPMENT

ELECTROSTATIC CHUCK UNIT AND DEPOSITING APPARATUS INCLUDING THE SAME

DEPOSITION SOURCE AND DEPOSITION APPARATUS INCLUDING THE SAME

SUBSTRATE RESTRAINING SYSTEM

Substrate processing device and method for manufacturing same

In-line monitoring of OLED layer thickness and dopant concentration

COATER CONDITIONING MODE

PLACING TABLE AND SUBSTRATE PROCESSING APPARATUS

ELECTROSTATIC CHUCK HEATER AND MANUFACTURING METHOD THEREFOR

LOADLOCK ASSEMBLY INCLUDING CHILLER UNIT

PROTECTIVE GAS FLOW DURING WAFER DECHUCKING IN PVD CHAMBER

Glassy Carbon Shutter Disk For Physical Vapor Deposition (PVD) Chamber

DEPOSITION DEVICE

Semiconductor processing tool

System and Method for Direct Patterning Using a Compensated Shadow Mask

METHOD FOR MANUFACTURING AT LEAST ONE PHOTOVOLTAIC CELL USING A PLATE BEARING ON AT LEAST ONE WIRE

Deposition Apparatus and Methods for Sequential Coating

MAGNETRON SPUTTERING APPARATUS

WAFER CARRIER WITH ADJUSTABLE ALIGNMENT DEVICES AND DEPOSITION EQUIPMENT USING THE SAME

DEPOSITION APPARATUS

SYSTEM AND METHOD OF PRODUCING MONOCRYSTALLINE LAYERS ON A SUBSTRATE

DEPOSITION APPARATUS AND DRIVING METHOD THEREOF

OVERLAP SUSCEPTOR AND PREHEAT RING

ELECTROSTATIC CHUCK COVER PIECE TO ENABLE PROCESSING OF DIELECTRIC SUBSTRATES

FILM FORMATION APPARATUS

HOLDING ARRANGEMENT FOR HOLDING A SUBSTRATE, CARRIER FOR SUPPORTING A SUBSTRATE, VACUUM PROCESSING SYSTEM, METHOD FOR HOLDING A SUBSTRATE, AND METHOD FOR RELEASING A SUBSTRATE

DEPOSITION SYSTEM AND METHOD

STRUCTURES AND METHODS FOR PROCESSING A SEMICONDUCTOR SUBSTRATE

Shutter disc for a semiconductor processing tool

ORGANIC VAPOR JET PRINTING SYSTEM

MANUFACTURING METHOD OF DISPLAY DEVICE AND EVAPORATION DEVICE

WAFER HOLDER

DEPOSITION DEVICE HAVING CONTACT STRUCTURE AND DEPOSITION SYSTEM HAVING SAME

MULTI-CHAMBER DEPOSITION EQUIPMENT FOR SOLID FREE FORM FABRICATION

SUBSTRATE PROCESSING APPARATUS AND COVER RING ASSEMBLY

SUBSTRATE HOLDER

Electromagnet pulsing effect on PVD step coverage

Carrier with vertical grid for supporting substrates in coater

SUBSTRATE CARRIER TO CONTROL TEMPERATURE OF SUBSTRATE

SYSTEM FOR DEPOSITING PIEZOELECTRIC MATERIALS, METHODS FOR USING THE SAME, AND MATERIALS DEPOSITED WITH THE SAME

ORGANIC VAPOR JET PRINTING SYSTEM

Systems for depositing coatings on surfaces and associated methods

SAMPLE HOLDER

COMPOSITE PVD TARGETS

Dummy bar configured to align laser diode bar during deposition of film on end faces of laser diode bar and method for depositing film on end faces of laser diode bar

SUBSTRATE PROCESSING SYSTEM

ENCAPSULATED MICROMIRRORS FOR LIGHT REDIRECTION

Methods and systems for heating a wide bandgap substrate

LOADED BODY, APPARATUS FOR PRODUCINGLOADED BODY AND METHOD FOR PRODUCING LOADED BODY

SUBSTRATE SUPPORT PLATE FOR DEPOSITING MATERIAL ON EDGES OF A SUBSTRATE FACE

Film forming apparatus and method for reducing arcing

FILM FORMING METHOD AND FILM FORMING APPARATUS

FILM FORMING APPARATUS

Apparatus for the Temperature Control of a Substrate and Corresponding Production Method

Customized Thin Film Optical Element Fabrication System and Method

PROCESSING SYSTEM FOR PROCESSING A FLEXIBLE SUBSTRATE AND METHOD OF MEASURING AT LEAST ONE OF A PROPERTY OF A FLEXIBLE SUBSTRATE AND A PROPERTY OF ONE OR MORE COATINGS ON THE FLEXIBLE SUBSTRATE

Method, system and apparatus for cooling a substrate

Method for heating a wide bandgap substrate by providing a resistive heating element which emits radiative heat in a mid-infrared band

Apparatus for temperature control in a substrate processing chamber

Methods and apparatus for processing a substrate

Method and apparatus for controlling stress variation in a material layer formed via pulsed DC physical vapor deposition

Methods for perovskite device processing by vapor transport deposition

SPUTTERING DEVICE

System and method for performing semiconductor processes with coated bell jar

PVD system and collimator

Sputtering reaction chamber and process assembly of sputtering reaction chamber

PVD APPARATUS

Holding system for holding substrates during a processing of the surfaces of the substrates

Shutter disc for a semiconductor processing tool

Deposition system and method

METHOD AND SYSTEM FOR CONTROLLING DEPOSITION DEVICE

CLOSE COUPLE DIFFUSER FOR PHYSICAL VAPOR DEPOSITION WEB COATING

Holder for Holding a Substrate, in Particular a Spectacle Lens, During Vacuum Coating Thereof in a Box Coating Apparatus and Device for Loading/Unloading the Substrate into/from such Holder

SUBSTRATE SUPPORTS WITH INTEGRATED RF FILTERS

Process kit having tall deposition ring and smaller diameter electrostatic chuck (ESC) for PVD chamber

SPUTTER DEPOSITION APPARATUS AND METHOD

SPUTTER DEPOSITION APPARATUS AND METHOD

Automated temperature controlled substrate support

System, process and a jig for forming conformal EMI shield on package-level electronics or a portion thereof

Sputter deposition

Film forming apparatus and method for reducing arcing

SPUTTER DEPOSITION APPARATUS AND METHOD

Cooling device and process for cooling double-sided SiP devices during sputtering

APPARATUS FOR IMPROVED HIGH PRESSURE PLASMA PROCESSING

Carrier with vertical grid for supporting substrates in coater

In-situ film growth rate monitoring apparatus, systems, and methods for substrate processing

Wafer chuck structure with holes in upper surface to improve temperature uniformity

METHOD FOR FORMING LAYER

METHOD FOR MANUFACTURING RARE EARTH MAGNET

Semiconductor processing tool

Overlap susceptor and preheat ring

Internally divisible process chamber using a shutter disk assembly

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD

METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE

METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE

Electrostatic chuck heater and manufacturing method therefor

Structures and methods for processing a semiconductor substrate

WAFER-HOLDING DEVICE AND THIN-FILM-DEPOSITION EQUIPMENT USING THE SAME

Isolated volume seals and method of forming an isolated volume within a processing chamber

Sputtering device with microwave heating mechanism

Substrate temperature non-uniformity reduction over target life using spacing compensation

Movement systems for sputter coating of non-flat substrates

Method for holding and releasing a substrate

Device for conveying a sheet of substrate

Mounting table structure, substrate processing apparatus, and method of controlling substrate processing apparatus

Holding device

Wafer support and thin-film deposition apparatus using the same

METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE USING IMPROVED SHIELD CONFIGURATIONS

DEVICE AND METHOD FOR MANUFACTURING THIN FILM

Sputtering apparatus and method of controlling sputtering apparatus

Magnetic levitation system, base and carrier of a magnetic levitation system, and method of levitating a carrier

SUBSTRATE PROCESSING APPARATUS, TEMPERATURE CONTROL METHOD OF SUBSTRATE PROCESSING APPARATUS, AND PROGRAM OF CONTROL DEVICE FOR CONTROLLING SUBSTRATE PROCESSING APPARATUS

SUBSTRATE HOLDER FOR MASS PRODUCTION OF SURFACE-ENHANCED RAMAN SCATTERING SUBSTRATES

Organic vapor jet printing system

FIXTURE, TRAY AND SPUTTERING SYSTEM

APPARATUS AND METHOD FOR DEPOSITING THIN SPUTTERED FILM

DEPOSITION APPARATUS AND DISPLAY PANEL MANUFACTURING APPARATUS INCLUDING THE SAME

Heat treatment apparatus heating substrate

DEPOSITION APPARATUS, METHOD OF DEPOSITION ON A SUBSTRATE, SUBSTRATE STRUCTURE AND SUBSTRATE SUPPORT

STAGE, FILM-FORMING APPARATUS OR FILM-PROCESSING APPARATUS INCLUDING THE STAGE, AND METHOD FOR CONTROLLING TEMPERATURE OF SUBSTRATE

Deposition ring for thin substrate handling via edge clamping

Isolator ring clamp and physical vapor deposition chamber incorporating same

COATED-SUBSTRATE SENSING AND CRAZING MITIGATION

FILM FORMATION APPARATUS

Internally divisible process chamber using a shutter disk assembly

Method for adjusting contact position of lift pins, method for detecting contact position of lift pins, and substrate placement mechanism

Semiconductor substrate support power transmission components

Vacuum system and method to deposit a compound layer

Clamping device

METHODS AND APPARATUS FOR IN-SITU DEPOSITION MONITORING

DEPOSITION APPARATUS AND METHOD FOR SEATING MASK OF DEPOSITION APPARATUS

TRANSFER CHAMBER WITH INTEGRATED SUBSTRATE PRE-PROCESS CHAMBER

Sputtering equipment and operation method thereof

Gas flow accelerator to prevent buildup of processing byproduct in a main pumping line of a semiconductor processing tool

GLASS PALLET FOR SPUTTERING SYSTEMS

Methods and apparatus for extended chamber for through silicon via deposition

Vacuum processing apparatus

Coated glass articles and processes for producing the same

COATING APPARATUS, PROCESS CHAMBER, AND METHOD OF COATING A SUBSTRATE AND SUBSTRATE COATED WITH AT LEAST ONE MATERIAL LAYER

Apparatus for manufacturing display device and method for manufacturing display device

APPARATUS FOR PROCESSING A SUBSTRATE, SYSTEM FOR PROCESSING A SUBSTRATE, AND METHODS THEREFOR

HOLDING DEVICE FOR HOLDING A CARRIER OR A COMPONENT IN A VACUUM CHAMBER, USE OF A HOLDING DEVICE FOR HOLDING A CARRIER OR A COMPONENT IN A VACUUM CHAMBER, APPARATUS FOR HANDLING A CARRIER IN A VACUUM CHAMBER, AND VACUUM DEPOSITION SYSTEM

CARRIER FOR SUPPORTING A SUBSTRATE OR A MASK

METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE

Crystal raw material loading device comprising a plurality of receptacles arranged relative to a seed crystal bearing device and semiconductor crystal growth device comprising the same

Cooling device and process for cooling double-sided SiP devices during sputtering

Electrostatic chuck, vacuum processing apparatus, and substrate processing method

SUBSTRATE SUPPORT PEDESTAL HAVING PLASMA CONFINEMENT FEATURES

Film formation apparatus

Heated shield for physical vapor deposition chamber

SUBSTRATE SUPPORT PLATE AND SEMICONDUCTOR MANUFACTURING APPARATUS

Substrate processing device and method of manufacturing substrate processing device

PARTICLE REDUCTION DURING SPUTTERING DEPOSITION

Substrate guide and carrier

Support structure for thermal processing systems

EVAPORATION SOURCE FOR ORGANIC MATERIAL, DEPOSITION APPARATUS FOR DEPOSITING ORGANIC MATERIALS IN A VACUUM CHAMBER HAVING AN EVAPORATION SOURCE FOR ORGANIC MATERIAL, AND METHOD FOR EVAPORATING ORGANIC MATERIAL

FILM FORMATION DEVICE, VAPOR-DEPOSITED FILM FORMATION METHOD, AND ORGANIC EL DISPLAY DEVICE PRODUCTION METHOD

Stage device, power supply mechanism, and processing apparatus

Vacuum processing apparatus

DC magnetron sputtering

Multi-chamber deposition equipment for solid free form fabrication

Heater and stage having the heater

In-line monitoring of OLED layer thickness and dopant concentration

VACUUM PROCESSING APPARATUS

Apparatus and method for contactless transportation of a device in a vacuum processing system

SUPPORT ASSEMBLY

Tensioning device, base, clamp and method for clamping mask plate

Coating processes for vacuum chamber arrangements and apparatus thereof

VACUUM-COATING SYSTEM AND METHOD FOR COATING A BAND-TYPE MATERIAL

Method and device for homogeneously coating 3D substrates

DEVICE AND METHOD FOR MANUFACTURING THIN FILM

VAPOR DEPOSITION CARRIER PLATE AND METHOD FOR PERFORMING VAPOR DEPOSITION ON SUBSTRATE BY USING VAPOR DEPOSITION CARRIER PLATE

OPTICAL MOUNT

Deposition apparatus methods for sequential workpiece coating

Method for preparing a SiC ingot and device for preparing a SiC ingot wherein electrical resistance of crucible body is 2.9 ohms or more

SUBSTRATE HEATING SYSTEM AND SUBSTRATE PROCESSING DEVICE

Processing System For Small Substrates

Film forming apparatus and film forming method

Customized Thin Film Optical Element Fabrication System and Method

Deposition apparatus for both lateral portions of substrate

Wafer holding body

SYSTEMS AND METHODS FOR A LIFT AND ROTATE WAFER HANDLING PROCESS

SUBSTRATE SUPPORT SYSTEM

Deposition Apparatus

Vacuum lock and method for transferring a substrate carrier

SUBSTRATE PROCESSING SYSTEM

Stage and electrode member

Single layer zinc alloy plated steel material exhibiting excellent spot weldability and corrosion resistance, and fabrication method therefor

Carrier with vertical grid for supporting substrates in coater

Coatings for enhancement of properties and performance of substrate articles and apparatus

Semiconductor memory device and semiconductor memory manufacturing apparatus

IMPROVED GUIDANCE OF IONS FROM A PLASMA TO A SUBSTRATE TO BE COATED

Film formation device for cutting tool provided with coating film, and film formation method for cutting tool provided with coating film