Shielding design for metal gap fill

HEAT TREATMENT APPARATUS AND HEAT TREATMENT METHOD

VAPOR-DEPOSITION DEVICE FOR COATING TWO-DIMENSIONAL SUBSTRATES

MULTI-PLUME PULSED LASER DEPOSITION SYSTEM FOR HIGH-THROUGHPUT FABRICATION OF DIVERSE MATERIALS

Manufacturing method for glass with film

Method and system for manufacturing a target for the emission of photon radiation, particularly X rays, or of particles, particularly protons or electrons, by laser firing

High density solid state light source array

Semiconductor film deposition apparatus and method with improved heater cooling efficiency

Methods of producing large grain or single crystal films

Deposition substrate temperature and monitoring

Systems and methods for thermally managing high-temperature processes on temperature sensitive substrates

Reactor and method for growing carbon nanotube using the same

Apparatus and method for forming thin films in solar cells

Methods of forming a thin film resistor

Heating plate with planar heater zones for semiconductor processing

Heating plate with planar heater zones for semiconductor processing

Heating plate with heating zones for substrate processing and method of use thereof

Apparatus and method for depositing a layer onto a substrate

Cooled reflective adapter plate for a deposition chamber

Off-angled heating of the underside of a substrate using a lamp assembly

Edge ring for a deposition chamber

WEB COOLING DEVICE FOR A VACUUM PROCESSING SYSTEM

In-situ conditioning for vacuum processing of polymer substrates

Method and apparatus for clamping and cooling a substrate for ion implantation

Off-angled heating of the underside of a substrate using a lamp assembly

SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

Shielding design for metal gap fill

Low temperature deposition apparatus

In-line deposition system and process for deposition of a thin film layer

DEPOSITION SOURCE INTEGRATION INTO COATER

METHOD AND SYSTEM FOR FORMING CHALCOGENIDE SEMICONDUCTOR MATERIALS USING SPUTTERING AND EVAPORATION FUNCTIONS

Reflective deposition rings and substrate processing chambers incorporating same

COATING DEVICE AND METHOD FOR OPERATING A COATING DEVICE HAVING A SHIELDING PLATE

METHOD OF CONTROLLING LITHIUM UNIFORMITY

METHOD AND DEVICE FOR RAPIDLY HEATING AND COOLING A SUBSTRATE AND IMMEDIATELY SUBSEQUENTLY COATING THE SAME UNDER VACUUM

Method of supporting a workpiece during physical vapour deposition

Thin film-manufacturing apparatus,thin film-manufacturing method,and substrate-conveying roller

THIN-FILM FORMATION APPARATUS SYSTEM AND THIN-FILM FORMATION METHOD

Coating methods and apparatus

Support assembly

METHOD OF CONTROLLING LITHIUM UNIFORMITY

Method for removing oxides

SILICON FILM AND LITHIUM SECONDARY BATTERY

Deposition Substrate Temperature and Monitoring

Off-angled heating of the underside of a substrate using a lamp assembly

APPARATUS AND METHOD FOR COOLING OR HEATING WORK PIECE IN A VACUUM CHAMBER

Method of forming copper wiring and method and system for forming copper film

Coating methods and apparatus

SUBSTRATE COOLING DEVICE, SPUTTERING APPARATUS AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE

Method and device for coating substrates from the vapor phase

Sample Holder

MAGNETRON-SPUTTERING FILM-FORMING APPARATUS AND MANUFACTURING METHOD FOR A SEMICONDUCTOR DEVICE

Thin film deposition method

SUBSTRATE-SUPPORTING UNIT AND SUBSTRATE-PROCESSING APPARATUS COMPRISING SAME

Method and Apparatus for Super-High Rate Deposition

Substrate treatment installation with adjustable thermal insulation for controlling substrate temperature

Optimum Surface Texture Geometry

Substrate processing apparatus capable of switching control mode of heater

Optimum Surface Texture Geometry

REACTOR DEVICE WITH REMOVABLE DEPOSITION MONITOR

Dynamic system for variable heating or cooling of linearly conveyed substrates

Optical thin-films and optical elements comprising same

Method of forming crystalline oxide semiconductor film

Manufacturing method and apparatus for semiconductor device

PROCESS FOR SURFACE TREATING ALUMINUM OR ALUMINUM ALLOY AND ARTICLE MADE WITH SAME

Deposition system with a rotating drum

Process for coating discrete articles with a zinc-based alloyed layer

FILM FORMATION APPARATUS AND FILM FORMATION METHOD

Thermal management of film deposition processes

OPTOELECTRONIC SEMICONDUCTOR COMPONENT AND METHOD FOR THE MANUFACTURE THEREOF

THIN FILM FORMING DEVICE AND THIN FILM FORMING METHOD

Method and device for measuring temperature during deposition of semiconductor

VAPOR DEPOSITION METHOD AND VAPOR DEPOSITION SYSTEM

Method of fabrication of programmable memory microelectric device

Coating method and apparatus, a permanent magnet, and manufacturing method thereof

Method for forming thin film while providing cooling gas to rear surface of substrate

VACUUM HEATING AND COOLING APPARATUS

DEPOSITION APPARATUS WITH PREHEATING CHAMBER HAVING THERMAL HOOD

METHOD FOR REMOVING OXIDES

Coating apparatus and method with indirect thermal stabilization

HIGH PRESSURE PRE-OXIDATION FOR DEPOSITION OF THERMAL BARRIER COATING

High pressure pre-oxidation for deposition of thermal barrier coating with hood

DIRECT THERMAL STABILIZATION FOR COATING APPLICATION

Physical vapor deposition with heat diffuser

ATMOSPHERIC PRESSURE CHEMICAL VAPOR DEPOSITION WITH SATURATION CONTROL

Extending the stability of UV curable adhesives in 193NM laser systems

MAGNETRON-SPUTTERING FILM-FORMING APPARATUS AND MANUFACTURING METHOD FOR A SEMICONDUCTOR DEVICE

Sputtering apparatus and manufacturing method of semiconductor light-emitting element

DEPOSITION APPARATUS, DEPOSITION METHOD, AND STORAGE MEDIUM HAVING PROGRAM STORED THEREIN

Cool-down system and method for a vapor deposition system

Method for depositing film and oil-repellent substrate

Methods for forming a transparent conductive oxide layer on a substrate

Vanadium oxide thin films

METHOD AND DEVICE FOR THE ABSORPTION OF HEAT IN A VACUUM COATING APPARATUS

THIN FILM FORMING METHOD AND FILM FORMING APPARATUS

Heating plate with planar heating zones for semiconductor processing

Method for depositing a thin-film polymer in a low-pressure gas phase

Apparatus And Method For Depositing A CIGS Layer

Low Temperature Deposition of Amorphous Thin Films

SPUTTER-COATING APPARATUS HAVING HEATING UNIT

Method for forming transparent conductive oxide

Method for producing at least one microcomponent with a single mask

Take-Up Type Vacuum Deposition Apparatus

Light-transmitting conductive film, display device, electronic device, and manufacturing method of light-transmitting conductive film

Web Substrate Deposition System

Electrostatic chuck

THIN FILM FORMING APPARATUS AND THIN FILM FORMING METHOD

THIN FILM FORMING APPARATUS AND THIN FILM FORMING METHOD

APPARATUS FOR AND METHOD OF CONTINUOUS HTS TAPE BUFFER LAYER DEPOSITION USING LARGE SCALE ION BEAM ASSISTED DEPOSITION

BIASABLE COOLING PEDESTAL

COMBINATORIAL DEPOSITION METHOD AND APPARATUS THEREOF

DEPOSITION APPARATUS WITH HIGH TEMPERATURE ROTATABLE TARGET AND METHOD OF OPERATING THEREOF

BIDIRECTIONAL SHAPE MEMORY ALLOY THIN FILM ACTUATOR AND METHOD FOR MANUFACTURING SHAPE MEMORY ALLOY THIN FILM USED THEREFOR

METHOD AND APPARATUS FOR THERMALLY CONVERTING METALLIC PRECURSOR LAYERS INTO SEMICONDUCTING LAYERS, AND ALSO SOLAR MODULE

FILM FORMING APPARATUS AND FILM FORMING METHOD USING THE SAME

SUBSTRATE TEMPERATURE MEASURING APPARATUS AND SUBSTRATE TEMPERATURE MEASURING METHOD

SUBSTRATE PROCESSING APPARATUS, DEPOSITION METHOD, AND ELECTRONIC DEVICE MANUFACTURING METHOD

Coating method and apparatus, a permanent magnet, and manufacturing method thereof

METHOD AND ARRANGEMENT FOR PROVIDING CHALCOGENS

Doped Gallium Nitride Annealing

METHOD AND APPARATUS FOR FORMING CONTACT LAYERS FOR CONTINUOUS WORKPIECES

Axial gradient transport growth process and apparatus utilizing resistive heating

SPUTTERING APPARATUS, THIN FILM FORMATION APPARATUS, AND MAGNETIC RECORDING MEDIUM MANUFACTURING METHOD

THIN FILM FORMATION APPARATUS AND MAGNETIC RECORDING MEDIUM MANUFACTURING METHOD

Method for use with a coating process

ELECTROSTATIC CHUCK

Microwave heating for semiconductor nanostructure fabrication

SPUTTER-COATING APPARATUS

Deposition apparatus having thermal hood

SUBSTRATE PROCESSING APPARATUS

Processing tubular surfaces using double glow discharge

INLINE INTERLAYER HEATER APPARATUS

Method for producing rare earth metal-based permanent magnet

Film Forming Apparatus and Method of Forming Film

Combinatorial Deposition Method and Apparatus Thereof

Substrate support device and plasma processing apparatus

FILM DEPOSITING APPARATUS

Method of Diffusion Zinc Coating

Oxygen ion implantation equipment

PIEZOELECTRIC FILM FORMING METHOD

Apparatus for simultaneous roll-to-roll wet processing of two workpieces disposed within a single chamber

Roll-to-roll processing method and tools for electroless deposition of thin layers

Surface preheating treatment of plastics substrate

SYSTEMS AND METHODS FOR DEPOSITION

Thin-Film Deposition System

Apparatus for continuous processing of buffer layers for group IBIIIAVIA solar cells

Sequential tantalum-nitride deposition

Lift-off patterning processes employing energetically-stimulated local removal of solid-condensed-gas layers

Method for the temperature measurement of substrates, and vacuum processing apparatus

Method and apparatus for producing photocatalyst

Sputtering Assembly

Workpiece support with fluid zones for temperature control

METHOD FOR REMOVING OXIDES

Method of forming micro metal bump

SUPPORT ASSEMBLY

Showerhead assembly

SUBSTRATE HEATER FOR MATERIAL DEPOSITION

Method of depositing a diffusion barrier layer which provides an improved interconnect

Vapor deposition method and apparatus

SUBSTRATE HOLDER AND VACUUM FILM DEPOSITION APPARATUS

METHOD AND PROCESS FOR DEPOSITION OF TEXTURED ZINC OXIDE THIN FILMS

Optical thin-film-forming methods and optical elements formed using same

Method And Device For Producing An Anti-Reflection Or Passivation Layer For Solar Cells

Optimum Surface Texture Geometry

Method for front end of line fabrication

Coating Method and Apparatus, a Permanent Magnet, and Manufacturing Method Thereof

Vacuum Processing Device and Method of Manufacturing Optical Disk

Film-Forming Apparatus And Film-Forming Method

INLINE VACUUM PROCESSING APPARATUS AND METHOD FOR PROCESSING SUBSTRATES THEREIN

Unusually stable glasses and methods for forming same

Method and apparatus for continuous processing of buffer layers for group IBIIIAVIA solar cells

Substrate processing apparatus, substrate processing method, and computer-readable storage medium

Method for fabricating metal substrates with high-quality surfaces

Film forming apparatus

TECHNIQUES FOR LOW-TEMPERATURE ION IMPLANTATION

Sputtering of thermally resistive materials including metal chalcogenides

Piezoelectric film, process of manufacturing the same and piezoelectric element

Process for forming thin film and system for forming thin film

Method and apparatus to form thin layers of materials on a base

Metal / metal nitride barrier layer for semiconductor device applications

System for active array temperature sensing and cooling

Manufacturing method of a transparent conductive film, a manufacturing method of a transparent electrode of an organic electroluminescence device, an organic electroluminescence device and the manufacturing method

Magnetron-sputtering film-forming apparatus and manufacturing method for a semiconductor device

Versatile system for self-aligning deposition equipment

METHOD OF MONITORING DEPOSITION TEMPERATURE OF A COPPER SEED LAYER AND METHOD OF FORMING A COPPER LAYER

Lift-off patterning processing employing energetically-stimulated local removal of solid-condensed-gas layers

High-throughput deposition system for oxide thin film growth by reactive coevaportation

Method for sputtering a multilayer film on a sheet workpiece at a low temperature

Vacuum film deposition method and system, and filter manufactured by using the same

Apparatus and method for depositing thin films

Substrate susceptor for receiving semiconductor substrates to be deposited upon

Method and apparatus for a metallic dry-filling process

Method and apparatus for a metallic dry-filling process

Deposition device

Process of physical vapor depositing mirror layer with improved reflectivity

Tunable magnetic recording medium and its fabricating method

Substrate Holder

Substrate susceptors for receiving semiconductor substrates to be deposited upon

Substrate susceptors for receiving semiconductor substrates to be deposited upon

Temperature control of pallet in sputtering system

Methods of depositing materials over semiconductor substrates

Sputtering device

Method of producing electronic device

Vapor deposition apparatus

Chuck plate assembly with cooling means

Method and apparatus for forming combinatorial film

Semiconductor and semiconductor manufacturing arrangements having a chalcogenide layer formed of columnar crystal grains perpendicular to a main substrate surface

Continuous process for surface modification of cigarette filter materials

System and method for active array temperature sensing and cooling

Versatile system for self-aligning deposition equipment

Method and system for substrate temperature profile control

Co-extruded high refractive index coated embossable film

Method of depositing low resistivity barrier layers for copper interconnects

In-situ dry clean chamber for front end of line fabrication

Substrate susceptors for receiving semiconductor substrates to be deposited upon

Substrate support for in-situ dry clean chamber for front end of line fabrication

Lid assembly for front end of line fabrication

Method of depositing a tantalum nitride/tantalum diffusion barrier layer system

Method for front end of line fabrication

Method and apparatus for applying a polycrystalline film to a substrate

Inboard cooled nozzle doublet

Radiation image conversion panel and manufacturing method thereof

Heating in a vacuum atmosphere in the presence of a plasma

Plasma processing apparatus

Specimen cooling system of focused ion beam apparatus

Thin-film deposition system

Temperature optimization of a physical vapor deposition process to prevent extrusion into openings

Method and apparatus for producing photocatalyst

Reflective Ag alloy film for reflectors and reflector provided with the same

Vapor deposition apparatus

Crucible for evaporation of raw materials

Assembly for crucible used for evaporation of raw materials

System and method for vapor deposition of substrates with circular substrate frame that rotates in a planetary motion and curved lens support arms

Outgassing impact on process chamber reduction via chamber pump and purge

Fabrication of a multi-layered magnetic element

Containment structure for creating composite structures