DEVICES AND METHODS FOR DEPOSITION

TEMPERATURE-TUNED SUBSTRATE SUPPORT FOR SUBSTRATE PROCESSING SYSTEMS

CONDUCTION COOLING PLATE USING FRICTION WELDING

DEPOSITION APPARATUS

Detachable Mid Temp Electrostatic Chuck (ESC) for Process Chamber

PALLADIUM COBALT OXIDE THIN FILM, DELAFOSSITE-TYPE OXIDE THIN FILM, SCHOTTKY ELECTRODE HAVING DELAFOSSITE-TYPE OXIDE THIN FILM, METHOD FOR PRODUCING PALLADIUM COBALT OXIDE THIN FILM, AND METHOD FOR PRODUCING DELAFOSSITE-TYPE OXIDE THIN FILM

SELECTIVE ETCHING OF SILICON NITRIDE DIELECTRICS WITH MICROWAVE OXIDATION

FILM FORMATION APPARATUS AND FILM FORMATION METHOD OF GALLIUM NITRIDE FILM

FILM FORMATION PROCESSING SYSTEM AND METHOD OF CONTROLLING FILM FORMATION PROCESSING SYSTEM

SYSTEM AND METHOD FOR APPLICATION OF ELECTRO-OPTICAL FILM STACKS ON SUBSTRATES WITHOUT BREAKING VACUUM

MULTIZONE HEATER FOR MAGNETIC MEDIA

Method for producing a coating of a base body and functional element having a base body with a coating

TRANSITION METAL DI-CHALCOGENIDES

METHOD FOR DEPOSITING TARGET MATERIAL IN DEPOSITION CHAMBER WITH TILTABLE WORKPIECE HOLDER

DEVICE FOR VACUUM DEPOSITION SYSTEM AND SYSTEM FOR VACUUM DEPOSITION

SYSTEM AND METHOD FOR ATOMIC-SCALE FABRICATION

METHODS AND SYSTEMS FOR HEATING A WIDE BANDGAP SUBSTRATE

ARRANGEMENT FOR ROTATABLE POSITIONING OF A SUBSTRATE

FILM FORMATION APPARATUS AND FILM FORMATION METHOD OF GALLIUM NITRIDE FILM

DEPOSITION SYSTEM AND METHOD

SPUTTERING OF HIGH-QUALITY SUPERCONDUCTING THIN FILMS

MATERIAL DEPOSITION APPARATUS, METHOD OF DEPOSITING MATERIAL ON A SUBSTRATE, AND MATERIAL DEPOSITION SYSTEM

HEAT TRANSFER MANAGEMENT IN SUBSTRATE SUPPORT SYSTEMS

HEAT TRANSFER MANAGEMENT IN SUBSTRATE SUPPORT SYSTEMS

REMOTE LASER-BASED SAMPLE HEATER WITH SAMPLE EXCHANGE TURRET

FILM FORMATION APPARATUS AND FILM FORMATION METHOD OF GALLIUM NITRIDE FILM

METHOD OF PHYSICAL VAPOR DEPOSITION WITH INTERMIXING REDUCTION

AUTOMATED THIN FILM DEPOSITION SYSTEM AND THIN FILM DEPOSITION METHOD TO WHICH MACHINE LEARNING IS APPLIED

COOLING DEVICE, METHOD FOR COOLING A COOLING ELEMENT AND LAYER DEPOSITION APPARATUS

PLATED STEEL MATERIAL HAVING EXCELLENT ADHESION TO PLATING AND CORROSION RESISTANCE, AND MANUFACTURING METHOD FOR SAME

PROCESS CHAMBERS HAVING MULTIPLE COOLING PLATES

IN-SITU FILM GROWTH RATE MONITORING APPARATUS, SYSTEMS, AND METHODS FOR SUBSTRATE PROCESSING

STAGE STRUCTURE, SUBSTRATE PROCESSING APPARATUS, AND TEMPERATURE CONTROL METHOD

COATING DRUM AND SYSTEM FOR VAPOR DEPOSITION

MULTI-CHAMBER PROCESSING TOOL WITH ENHANCED THROUGHPUT

WAFER CHUCK STRUCTURE WITH HOLES IN UPPER SURFACE TO IMPROVE TEMPERATURE UNIFORMITY

PHYSICAL VAPOR DEPOSITION (PVD) SYSTEM AND METHOD OF PROCESSING TARGET

FILM FORMING METHOD AND SUBSTRATE PROCESSING DEVICE

SUBSTRATE PROCESSING DEVICE AND METHOD FOR MANUFACTURING SAME

Programmable electrostatic chuck to enhance aluminum film morphology

Programmable ESC to enhance aluminum film morphology

SUBSTRATE PROCESSING APPARATUS

DEVICES AND METHODS FOR SPUTTERING AT LEAST TWO ELEMENTS

SYSTEMS AND METHODS FOR IN-SITU ETCHING PRIOR TO PHYSICAL VAPOR DEPOSITION IN THE SAME CHAMBER

Sputtering Apparatus

WEB COATING COOLING DRUM WITH TURBULATORS FOR HIGH FLUX METALLIC LITHIUM DEPOSITION

Substrate processing device and method for manufacturing same

METAL MATERIAL AND METHOD FOR PRODUCING THE SAME

METHOD, DEVICE, AND SYSTEM FOR MANUFACTURING COMPOSITE METAL FOIL

Al-RICH AlTiN-BASED FILMS

FILM FORMATION APPARATUS

TEMPERATURE-BASED METROLOGY CALIBRATION AT A MANUFACTURING SYSTEM

COATING INSTALLATION, CLAMPING RING AND MAGAZINE FOR SPECTACLE LENSES AND METHOD OF COATING SPECTACLE LENSES

SYSTEM FOR DEPOSITING PIEZOELECTRIC MATERIALS, METHODS FOR USING THE SAME, AND MATERIALS DEPOSITED WITH THE SAME

APPARATUS AND METHOD FOR FABRICATING PVD PEROVSKITE FILMS

SUBSTRATE PROCESSING SYSTEM

Methods and systems for heating a wide bandgap substrate

LOADED BODY, APPARATUS FOR PRODUCINGLOADED BODY AND METHOD FOR PRODUCING LOADED BODY

VACUUM CHAMBER, VACUUM SYSTEM AND METHOD FOR VACUUM PROCESSING

Bismuth ferrite film material, method for integrally preparing bismuth ferrite film on silicon substrate at low temperature and application

Apparatus for the Temperature Control of a Substrate and Corresponding Production Method

Method, system and apparatus for cooling a substrate

FILM DEPOSITION APPARATUS

Method for heating a wide bandgap substrate by providing a resistive heating element which emits radiative heat in a mid-infrared band

Laser Deposition with a Reactive Gas

Method for producing a coating of a base body and functional element having a base body with a coating

Methods for selective removal of contact oxides

ENERGY EFFICIENCY IMPROVEMENT WITH CONTINUOUS FLOW MODULATION IN CLUSTER TOOL

APPROACHES TO MODIFYING A COLOR OF AN ELECTROCHROMIC STACK IN A TINTED STATE

Deposition system and method

Sputtering reaction chamber and process assembly of sputtering reaction chamber

EVAPORATOR FOR EFFECTIVE SURFACE AREA EVAPORATION

SUBSTRATE TRANSFER SYSTEM WITH LAMP HEATER, CHAMBER PURGE METHOD

Sputtering apparatus and method of fabricating magnetic memory device using the same

METHOD AND APPARATUS FOR DEPOSITION OF PIEZO-ELECTRIC MATERIALS

FILM FORMING APPARATUS, CONTROL APPARATUS FOR FILM FORMING APPARTUS, AND FILM FORMING METHOD

Automated temperature controlled substrate support

SUBSTRATE FIXING DEVICE FOR SCINTILLATOR DEPOSITION, SUBSTRATE DEPOSITION APPARATUS INCLUDING THE SAME, AND METHOD OF DEPOSITING A SCINTILLATOR USING THE SAME

Roller for transporting a flexible substrate, vacuum processing apparatus, and method of cooling a roller

WAFER HOLDER FOR FILM DEPOSITION CHAMBER

Physical vapor deposition (PVD) system and method of processing target

Method to deposit thin film high quality absorber layer

In-situ film growth rate monitoring apparatus, systems, and methods for substrate processing

Wafer chuck structure with holes in upper surface to improve temperature uniformity

Material deposition apparatus, method of depositing material on a substrate, and material deposition system

FILM FORMATION APPARATUS

WAFER TEMPERATURE GRADIENT CONTROL TO SUPPRESS SLIP FORMATION IN HIGH-TEMPERATURE EPITAXIAL FILM GROWTH

Graded hydrogen-free carbon-based hard material layer coated onto a substrate

Deposition Processing Systems Having Active Temperature Control and Associated Methods

Mounting table structure, substrate processing apparatus, and method of controlling substrate processing apparatus

Wafer support and thin-film deposition apparatus using the same

METHOD AND DEVICE FOR SUBSTRATE PROCESSING

METHODS FOR IMPLANTING SEMICONDUCTOR SUBSTRATES

Semiconductor component with oxidized aluminum nitride film and manufacturing method thereof

SUBSTRATE PROCESSING APPARATUS, TEMPERATURE CONTROL METHOD OF SUBSTRATE PROCESSING APPARATUS, AND PROGRAM OF CONTROL DEVICE FOR CONTROLLING SUBSTRATE PROCESSING APPARATUS

SOURCE ARRANGEMENT, DEPOSITION APPARATUS AND METHOD FOR DEPOSITING SOURCE MATERIAL

Heat treatment apparatus heating substrate

MULTI-ZONE HEATER TUNING IN SUBSTRATE HEATER

Supplemental energy for low temperature processes

Sputtering apparatus

Coated tool with coating comprising boride-containing diffusion barrier layer

Plasma processing apparatus and method of manufacturing semiconductor device using the same

Plated steel material having excellent adhesion to plating and corrosion resistance

Apparatus and a method for forming patterns on a surface of a substrate plate by a sputtering process

Material deposition apparatus having at least one heating assembly and method for pre- and/or post-heating a substrate

Method for manufacturing glass article and method for heating thin sheet glass

SUBSTRATE PROCESSING SYSTEM

VACUUM TREATMENT APPARATUS AND METHOD OF VACUUM TREATING SUBSTRATES

Continuous thin film of a metal chalcogenide

COATING APPARATUS, PROCESS CHAMBER, AND METHOD OF COATING A SUBSTRATE AND SUBSTRATE COATED WITH AT LEAST ONE MATERIAL LAYER

Substrate processing device and method of manufacturing substrate processing device

Optimum Surface Texture Geometry

Substrate processing apparatus and method

Physical vapor deposition processing systems target cooling

TEMPERATURE-TUNED SUBSTRATE SUPPORT FOR SUBSTRATE PROCESSING SYSTEMS

Method and device for decreasing generation of surface oxide of aluminum nitride

Vacuum processing apparatus

DC magnetron sputtering

Wafer temperature measurement in an ion implantation system

VACUUM PROCESSING APPARATUS

SUPPORT ASSEMBLY

INSULATION BOARD AND VACUUM EVAPORATION DEVICE ASSEMBLY

Vacuum processing apparatus

Methods and apparatus for depositing aluminum by physical vapor deposition (PVD) with controlled cooling

Gas distribution ceramic heater for deposition chamber

Solar Control Coatings and Methods of Forming Solar Control Coatings

Systems and methods for improved vapor deposition on complex geometry components

Top buffer layer for magnetic tunnel junction application

Movable wafer holder for film deposition chamber having six degrees of freedom

Al-rich AlTin-based films

ARRAY SUBSTRATE AND FABRICATING METHOD THEREOF

SUBSTRATE HEATING SYSTEM AND SUBSTRATE PROCESSING DEVICE

Processing System For Small Substrates

Sputtering apparatus and method of fabricating magnetic memory device using the same

Deposition apparatus for both lateral portions of substrate

Wafer holding body

SINGLE-CRYSTALLINE METAL FILMS

Sputtering method

Wafer processing apparatus and wafer processing method using the same apparatus

Negative ion irradiation device

Top buffer layer for magnetic tunnel junction application

Physical vapor deposition (PVD) chamber with in situ chamber cleaning capability

Film formation device for cutting tool provided with coating film, and film formation method for cutting tool provided with coating film

METHOD FOR PRODUCING SPUTTERED SILICON OXIDE ELECTROLYTE

Sputter deposition apparatus including roller assembly and method

COOLING DEVICE, SEMICONDUCTOR MANUFACTURING APPARATUS, AND SEMICONDUCTOR MANUFACTURING METHOD

Temperature control roller, transporting arrangement and vacuum arrangement

Physical vapor deposition processing systems target cooling

SUBSTRATE PROCESSING DEVICE AND PROCESSING SYSTEM

DEPOSITION SYSTEM, DEPOSITION APPARATUS, AND METHOD OF OPERATING A DEPOSITION SYSTEM

Deposition system with integrated cooling on a rotating drum

Coating device for conducting high efficient low temperature coating

Sputtering target and manufacturing method thereof

Substrate processing apparatus including top reflector above annular lamp assembly

Stage device and processing apparatus

Stage device and processing apparatus

Methods and apparatus for controlling warpage in wafer level packaging processes

OXIDATION PROCESSING MODULE, SUBSTRATE PROCESSING SYSTEM, AND OXIDATION PROCESSING METHOD

VACUUM SPUTTERING APPARATUS AND ITS VACUUM ATMOSPHERE EXCHANGE DEVICE

Cooled reflective adapter plate for a deposition chamber

Carrying device and semiconductor processing apparatus

SUBSTRATE PLACEMENT MECHANISM, FILM FORMING APPARATUS, AND FILM FORMING METHOD

SiC single crystal manufacturing apparatus

Plated steel sheet having multilayer structure and manufacturing method therefor

Grain Size Tuning for Radiation Resistance

Apparatus and method for preparing multi-component alloy film

Substrate supporting unit and film forming device having the substrate supporting unit

Graphene synthesis chamber and method of synthesizing graphene by using the same

Zn-Mg alloy plated steel material having excellent corrosion resistance and plating adhesion

Plasma processing apparatus

METHOD FOR DEPOSITING FILM

CARRIER FOR HOLDING A SUBSTRATE, USE OF THE CARRIER IN A PROCESSING SYSTEM, PROCESSING SYSTEM EMPLOYING THE CARRIER, AND METHOD FOR CONTROLLING A TEMPERATURE OF A SUBSTRATE

SUBSTRATE SUPPORTING APPARATUS AND MANUFACTURING METHOD THEREOF

Substrate fixing carrier, evaporation device and evaporation method

DEPOSITION SYSTEM WITH INTEGRATED COOLING ON A ROTATING DRUM

Solar control coatings and methods of forming solar control coatings

Cooling Member and Vacuum Coating Device

Thin film deposition preparation device and method

Film formation apparatus

EVAPORATOR, EVAPORATION COATING APPARATUS AND EVAPORATION COATING METHOD

Deposition processing systems having active temperature control and associated methods

Evaporation plate for depositing deposition material on substrate, evaporation apparatus, and method of depositing deposition material on substrate

Substrate temperature monitoring

Coating film, method for manufacturing same, and PVD apparatus

Conductive films

Vacuum treatment apparatus

Physical vapor deposition processing systems target cooling

Processing arrangement and method for conditioning a processing arrangement

ELECTROSTATIC CHUCKING OF COVER GLASS SUBSTRATES IN A VACUUM COATING PROCESS

Solid-state image sensing device, manufacturing method, and electronic apparatus

Coating film, manufacturing method therefor, and PVD apparatus

Film formation apparatus, film formation method, and manufacturing method of solar battery

Manufacturing method of magneto-resistive effect device

Movable structure and film forming apparatus

Methods and apparatus for dynamically treating atomic layer deposition films in physical vapor deposition chambers

Apparatus and method of manufacturing display apparatus

Coated cutting tool

Temperature-controlled gas supply line with dilution gas flows supplied at multiple locations

COATING CHAMBER FOR IMPLEMENTING OF A VACUUM-ASSISTED COATING PROCESS, HEAT SHIELD, AND COATING PROCESS

Substrate heating apparatus with enhanced temperature uniformity characteristic

Evaporation source

Heating device for evaporation, evaporation device and evaporation method

Wafer cooling system and method

Method for manufacturing metallized film

Physical vapor deposition method using backside gas cooling of workpieces

Deposition method

Coating

Wafer holding unit

Film formation apparatus

Silver copper indium gallium selenide reactive sputtering method and apparatus, and photovoltaic cell containing same

APPARATUS AND METHOD FOR QUANTIFYING THE AMOUNT OF EVAPORATION DEPOSITION OF A SOLID SUBSTANCE

Method for formation of a transition metal dichalcogenide (TMDC) material layer

Metallic structure

Fabrication of a multi-layered magnetic element

Heating device

Sliding member and method for producing the same

Method for film deposition and apparatus for performing said method

Apparatus for Evaporating a Material

High density, low stress amorphous carbon film, and process and equipment for its deposition

COATING DEVICE WITH MOVING TARGET AND COATING METHOD

Chiller apparatus for plasma treatment device

Gas cooled substrate support for stabilized high temperature deposition

Apparatus for coating substrates

Physical vapor deposition (PVD) plasma energy control per dynamic magnetron control

Surface-coated cutting tool

VACUUM CHAMBER HAVING A SPECIAL DESIGN FOR INCREASING THE REMOVAL OF HEAT

REACTIVE HEAT TREATMENT APPARATUS

Heating device and heating chamber

Substrate temperature monitoring

Wafer cooling apparatus and method

Mounting table system, substrate processing apparatus, and temperature control method

Heating chamber and semiconductor processing apparatus

Method of self-aligning deposition equipment

DC magnetron sputtering

Device for forming coatings on surfaces of a component, band-shaped material, or tool

Substrate support chuck cooling for deposition chamber

Substrate supports with multi-layer structure including independent operated heater zones

Three-dimensional (3D) photonic chip-to-fiber interposer

HIGH RATE DEPOSITION SYSTEMS AND PROCESSES FOR FORMING HERMETIC BARRIER LAYERS

Deposition apparatus

Processing system for small substrates

Thin film deposition preparation device and method

System and method for deposition of integrated computational elements (ICE) using a translation stage

Amorphous Layer Extreme Ultraviolet Lithography Blank, And Manufacturing And Lithography Systems Therefor

Film formation method, vacuum processing apparatus, method of manufacturing semiconductor light emitting element, semiconductor light emitting element, method of manufacturing semiconductor electronic element, semiconductor electronic element, and illuminating apparatus

Film formation device for cutting tool provided with with coating film, and film formation method for cutting tool provided with coating film

Deposition system with integrated cooling on a rotating drum

Physical vapor deposition system using rotating pallet with X and Y positioning

Physical vapor deposition system using backside gas cooling of workpieces

Physical vapor deposition system with target magnets controlled to only be above workpiece

Iron bus bar having copper layer, and method for manufacturing the same

Hydrogen free amorphous silicon as insulating dielectric material for superconducting quantum bits

Method for growing carbon nanotubes

Apparatus and method for carbon film deposition profile control

Apparatus for depositing a layer on a substrate in a processing gas

Grain Size Tuning for Radiation Resistance

Thin substrate processing device

Decorative HIPIMS hard material layers

ROLLER FOR SPREADING OF A FLEXIBLE SUBSTRATE, APPARATUS FOR PROCESSING A FLEXIBLE SUBSTRATE AND METHOD OF OPERATING THEREOF

Device and method for tunable vapor condensed nanolenses

Substrate carrier unit for a film deposition apparatus

Film deposition system having a substrate carrier and a cooling device

Evaporation equipment and evaporating method

Substrate support with thermal zones for semiconductor processing

Determining temperature dependence of complex refractive indices of layer materials during fabrication of integrated computational elements

Vacuum treatment apparatus

TEMPERATURE-DEPENDENT FABRICATION OF INTEGRATED COMPUTATIONAL ELEMENTS

Substrate carrier with integrated electrostatic chuck

Substrate carrier with integrated electrostatic chuck

Method for forming oxide layer, laminated substrate for epitaxial growth, and method for producing the same

Heat treatment apparatus

METHOD OF MANUFACTURING MAGNETORESISTIVE MEMORY DEVICE AND MANUFACTURING APPARATUS OF THE SAME

METHOD AND APPARATUS FOR PRODUCING NANOSTRUCTURES, AND SUBSTRATE STRUCTURE INCLUDING NANOSTRUCTURES

PHYSICAL VAPOR DEPOSITION APPARATUS AND METHOD OF DEPOSITING PHASE-CHANGE MATERIALS USING THE SAME

System and method of manufacturing a thin film transistor substrate

Perpendicular recording media with enhanced anisotropy through energy assisted segregation

Axial Gradient Transport (AGT) Growth Process and Apparatus Utilizing Resistive Heating

Method for adjusting vapor-phase growth apparatus

Deposition device having cooler with lifting mechanism

Reactor device with removable deposition monitor

Vacuum processing device

FILM FORMATION APPARATUS AND FILM FORMATION METHOD

Film forming apparatus and film forming method

METHOD AND DEVICE OF MANUFACTURING COMPOUND-SEMICONDUCTOR THIN-FILM

Dyeing method and apparatus for dyeing resin body by vaporization and deposition

Processing apparatus and method of measuring temperature of workpiece in processing apparatus

VARIABLE-TEMPERATURE MATERIAL GROWTH STAGES AND THIN FILM GROWTH

METHOD AND ARRANGEMENT FOR PROVIDING CHALCOGENS

Vacuum processing apparatus

Process for coating discrete articles with a zinc-based alloyed layer and articles obtained therefrom

Nanotwinned silver alloy film with controlled architecture

Method of growing carbon nanotube using reactor

Substrate transport roller

Gas cooled substrate support for stabilized high temperature deposition

METHOD OF PROCESSING A SUBSTRATE

Method for controlling exhaust flow in wafer processing module

Method for depositing a group III nitride semiconductor film

Hydrogen-free amorphous dielectric insulating thin films with no tunneling states

Process roller for receiving and guiding substrates in strip form in vacuum coating installations

Shielding design for metal gap fill