ClassID:

120096

C23C14/543 - CPC Classification

Classification description:

Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating; Controlling or regulating the coating process; Controlling the film thickness or evaporation rate using measurement on the vapor source

Recent Application in this class:
#1
20240102147
2024-03-28

APPLYING A TRANSPARENT CONDUCTIVE FILM TO FLUORINE-DOPED TIN OXIDE

#2
20230357920
2023-11-09

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY TANGIBLE MEDIUM

#3
20230313363
2023-10-05

Thermal evaporation sources for wide-area deposition

#4
20230287556
2023-09-14

METHOD FOR CONTROLLING A FLUX DISTRIBUTION OF EVAPORATED SOURCE MATERIAL, DETECTOR FOR MEASURING ELECTROMAGNETIC RADIATION REFLECTED ON A SOURCE SURFACE AND SYSTEM FOR THERMAL EVAPORATION WITH ELECTROMAGNETIC RADIATION

#5
20230220553
2023-07-13

DEVICE AND METHOD FOR EVAPORATING AN ORGANIC POWDER

#6
20230175892
2023-06-08

METHOD FOR CONTROLLING AN EVAPORATION RATE OF SOURCE MATERIAL, DETECTOR FOR MEASURING ELECTROMAGNETIC RADIATION REFLECTED ON A SOURCE SURFACE AND SYSTEM FOR THERMAL EVAPORATION WITH ELECTROMAGNETIC RADIATION

#7
20230151476
2023-05-18

Method for monitoring process conditions of, and method for controlling, a plasma PVD process

#8
20230052627
2023-02-16

Irradiation-resistant and anti-wear hydrogen-free carbon film on polymer surface and preparation method and use thereof

#9
20220411916
2022-12-29

Apparatus for and method of manufacturing semiconductor device

#10
20220219438
2022-07-14

PROCESS FOR MAKING MULTILAYER STRUCTURE WITH BARRIER PROPERTIES

#11
20220090258
2022-03-24

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY TANGIBLE MEDIUM

#12
20210388486
2021-12-16

EVAPORATOR BOAT CONTROL SYSTEM, PVD MACHINE AND METHOD OF OPERATING THE PVD MACHINE

#13
20210388481
2021-12-16

PVD coatings with a HEA ceramic matrix with controlled precipitate structure

#14
20210246542
2021-08-12

COATING APPARATUS AND METHOD FOR USE THEREOF

#15
20210172053
2021-06-10

Enhanced cathodic ARC source for ARC plasma deposition

#16
20210147975
2021-05-20

EVAPORATION SOURCE FOR DEPOSITION OF EVAPORATED MATERIAL ON A SUBSTRATE, DEPOSITION APPARATUS, METHOD FOR MEASURING A VAPOR PRESSURE OF EVAPORATED MATERIAL, AND METHOD FOR DETERMINING AN EVAPORATION RATE OF AN EVAPORATED MATERIAL

#17
20200357669
2020-11-12

Processing tool having a monitoring device

#18
20200299829
2020-09-24

Apparatus for and method of manufacturing semiconductor device

#19
20200292234
2020-09-17

Thermal evaporation sources for wide-area deposition

#20
20200048758
2020-02-13

Electron beam evaporator, coating apparatus and coating method

#21
20200033294
2020-01-30

Device and method for determining the concentration of a vapor

#22
20190338412
2019-11-07

MATERIAL DEPOSITION ARRANGEMENT, VACUUM DEPOSITION SYSTEM AND METHOD THEREFOR

#23
20190203339
2019-07-04

Evaporation device and evaporation method

#24
20190185990
2019-06-20

EVAPORATOR, EVAPORATION COATING APPARATUS AND EVAPORATION COATING METHOD

#25
20190178798
2019-06-13

Nanoscale surface with nanoscale features formed using diffusion at a liner-semiconductor interface

#26
20190136370
2019-05-09

Vaporization system and vaporization system program

#27
20190071772
2019-03-07

Evaporator, deposition arrangement, deposition apparatus and methods of operation thereof

#28
20190057889
2019-02-21

Processing tool having a monitoring device

#29
20190048457
2019-02-14

EVAPORATION SOURCE

#30
20190025045
2019-01-24

Film thickness test apparatus and method and vapor deposition device

#31
20180291502
2018-10-11

Storage device, vaporizer and substrate processing apparatus

#32
20180237904
2018-08-23

Heating device for evaporation, evaporation device and evaporation method

#33
20180073129
2018-03-15

EBPVD columnated vapor stream

#34
20170314859
2017-11-02

Thermal evaporation sources for wide-area deposition

#35
20160376698
2016-12-29

Monomer vaporizing device and method of controlling the same

#36
20160298227
2016-10-13

A CRUCIBLE DEVICE USED IN COATING SYSTEM

#37
20160273097
2016-09-22

METHOD FOR MONITORING SE VAPOR IN VACUUM REACTOR APPARATUS

#38
20160013032
2016-01-14

Cathode assembly, physical vapor deposition system, and method for physical vapor deposition

#39
20150218691
2015-08-06

Vacuum vapor deposition method

#40
20150203958
2015-07-23

Method for supplying deposition material, method for producing substrate, control device and deposition device

#41
20150079274
2015-03-19

CRUCIBLE FOR VAPOR DEPOSITION, VAPOR DEPOSITION APPARATUS AND VAPOR DEPOSITION METHOD

#42
20140186974
2014-07-03

Measurement device and method for vapour deposition applications

#43
20140127833
2014-05-08

Deposition amount measuring apparatus, depositing apparatus including the same, and method for manufacturing light emitting display

#44
20130124124
2013-05-16

Atomic flux measurement device

#45
20130011804
2013-01-10

Vaporization Apparatus and Method for Controlling the Same

#46
20120258239
2012-10-11

EVAPORATION SYSTEM WITH MEASUREMENT UNIT

#47
20120193219
2012-08-02

METHOD FOR DETERMINING PROCESS-SPECIFIC DATA OF A VACUUM DEPOSITION PROCESS

#48
20120180719
2012-07-19

Film forming apparatus

#49
20120012056
2012-01-19

Crucible having a monitor system and a cover with a slot which receives light for illuminating coating material

#50
20110212256
2011-09-01

DEPOSITION RATE CONTROL

#51
20110005462
2011-01-13

VACUUM VAPOR DEPOSITION APPARATUS

#52
20110005460
2011-01-13

VACUUM VAPOR DEPOSITION APPARATUS

#53
20100233353
2010-09-16

EVAPORATOR, COATING INSTALLATION, AND METHOD FOR USE THEREOF

#54
20090173279
2009-07-09

VACUUM VAPOR DEPOSITION APPARATUS

#55
20090169720
2009-07-02

VACUUM VAPOR DESPOSITION APPARATUS

#56
20090095213
2009-04-16

Thermal evaporation sources for wide-area deposition

#57
20080241366
2008-10-02

APPARATUS FOR AND METHOD OF APPLYING LUBRICANT COATINGS TO MAGNETIC DISKS VIA A VAPOR FLOW PATH INCLUDING A SELECTIVELY OPENED AND CLOSED SHUTTER

#58
20080236481
2008-10-02

METHOD OF AND APPARATUS FOR MONITORING MASS FLOW RATE OF LUBRICANT VAPOR FORMING LUBRICANT COATINGS OF MAGNETIC DISKS

#59
20080171132
2008-07-17

EVAPORATION APPARATUS AND METHOD OF MAKING AN ORGANIC LAYER

#60
20080160171
2008-07-03

Electron beam physical vapor deposition apparatus and processes for adjusting the feed rate of a target and manufacturing a multi-component condensate free of lamination

#61
20070243313
2007-10-18

Method of manufacturing radiographic image conversion panel

#62
20070231460
2007-10-04

Film formation method with deposition source position control

#63
20060162662
2006-07-27

Vacuum vapor deposition apparatus

#64
20060141169
2006-06-29

Method and apparatus for vacuum deposition

#65
20060070576
2006-04-06

Source for thermal physical vapor deposition of organic electroluminescent layers

#66
20060054497
2006-03-16

Apparatus, method and system for monitoring chamber parameters associated with a deposition process

#67
20060054089
2006-03-16

Source for thermal physical vapor deposition of organic electroluminescent layers

#68
20050175770
2005-08-11

Fabricating an electrode for use in organic electronic devices

#69
20050023132
2005-02-03

Device for measuring the profile of a metal film sputter deposition target, and system and method employing same