120095 ⎘
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating; Controlling or regulating the coating process Controlling the film thickness or evaporation rate
Sub-classes:LASER SYSTEM AND EVAPORATION SYSTEM
#2DEVICES AND METHODS FOR DEPOSITION
#3SEMICONDUCTOR CONTAINING AMORPHOUS TELLURIUM OXIDE, THIN FILM TRANSISTOR INCLUDING SAME, AND FABRICATION METHOD THEREFOR
#4VARIABLE THICKNESS COATING CONTROL
#5METHOD OF COATING A SUBSTRATE INCLUDING A MULTI-LAYER COATING
#6ENGINEERED MULTI-DIMENSIONAL METALLURGICAL PROPERTIES IN PVD MATERIALS
#7Magnetron Sputtering Apparatus and Control Method for Timely Detecting Target Shorting by Monitoring Electrical Resistance Between PVD Target Cathode and Electrical Ground in Real Time
#8PREPARATION METHOD FOR GRADIENT NEAR-EQUIAXED CRYSTAL CR COATING ON THE SURFACE OF ZIRCONIUM ALLOY CLADDING
#9HOUSING, MOBILE TERMINAL, AND SPUTTER COATING APPARATUS
#10FORMATION APPARATUS AND METHOD OF HYDROXYAPATITE-CONTAINING THIN FILM
#11CUTTING TOOL
#12INDIUM TIN OXIDE FILM COATED UPSTANDING SILICON NANOWIRES (ITO/USNWs) AND THE USE THEREOF IN SENSITIVE NANOELECTRONIC DEVICE (NED)
#13SOLAR HEATING FOR THIN FILM EVAPORATION AND DIRECTIONAL SOLIDIFICATION
#14SYSTEM AND METHOD FOR CONTROLLING FILM THICKNESS, AND FILM DEPOSITION SYSTEM AND METHOD USING SAME
#15PLATED STEEL MATERIAL HAVING EXCELLENT ADHESION TO PLATING AND CORROSION RESISTANCE, AND MANUFACTURING METHOD FOR SAME
#16SYSTEM AND METHOD FOR CONTROLLING FILM THICKNESS, AND FILM DEPOSITION SYSTEM AND METHOD USING SAME
#17TEMPERATURE-CONTROLLED SHIELD, MATERIAL DEPOSITION APPARATUS AND METHOD FOR DEPOSITING A MATERIAL ONTO A SUBSTRATE
#18CLADDING TUBES COATING APPARATUS
#19FLAT STEEL PRODUCT HAVING AN IMPROVED ZINC COATING
#20PULSED LASER DEPOSITION METHOD
#21METHOD FOR DEPOSITING A LAYER OPTICAL ELEMENT, AND OPTICAL ASSEMBLY FOR THE DUV WAVELENGTH RANGE
#22VACUUM PROCESSING APPARATUS, VACUUM SYSTEM, GAS PARTIAL PRESSURE CONTROL ASSEMBLY, AND METHOD OF CONTROLLING PARTIAL PRESSURE OF A GAS IN A VACUUM PROCESSING CHAMBER
#23METHOD OF DEPOSITING SILICON NITRIDE FILM, APPARATUS FOR DEPOSITING FILM, AND SILICON NITRIDE FILM
#24Processing method and apparatus for ultrafast laser deposition of multilayer film including diamond-like carbon film, anti-reflection film and anti-fingerprint film
#25Nanotwinned nickel films with high strength and ductility
#26Apparatus and a Method of Controlling Thickness Variation in a Material Layer Formed Using Physical Vapour Deposition
#27MEMS PROCESS POWER
#28SUBLIMATION CONTROL USING DOWNSTREAM PRESSURE SENSING
#29BLADE FOR A TURBOMACHINE INCLUDING BLADE TIP ARMOR AND AN EROSION PROTECTION LAYER, AND METHOD FOR MANUFACTURING SAME
#30METHOD FOR MANUFACTURING PATTERNED SURFACE COATING AND AUTOMOBILE HEAT DISSIPATION DEVICE HAVING PATTERNED SURFACE COATING
#31METHOD AND DEVICE FOR APPLYING A COATING, AND COATED BODY
#32Method, system and apparatus for cooling a substrate
#33OVERHANG REDUCTION USING PULSED BIAS
#34Deposition method for tuning magnetic field distribution of deposition equipment
#35APPROACHES TO MODIFYING A COLOR OF AN ELECTROCHROMIC STACK IN A TINTED STATE
#36FILM STACK COMPOSITION, RELATED METHOD, AND APPLICATIONS
#37SYSTEMS AND METHODS FOR FILM DEPOSITION
#38FILM FORMING APPARATUS AND FILM FORMING METHOD
#39NORMAL PULSE PROFILE MODIFICATION IN A FILM DEPOSITION PROCESS
#40Engineered multi-dimensional metallurgical properties in PVD materials
#41Packaging Material And Methods Of Manufacture
#42DEVICE AND METHOD FOR COATING SUBSTRATES HAVING PLANAR OR SHAPED SURFACES BY MEANS OF MAGNETRON SPUTTERING
#43DEVICE AND METHOD FOR MANUFACTURING THIN FILM
#44MEMS process power
#45APPARATUS AND METHOD FOR DEPOSITING THIN SPUTTERED FILM
#46Base conducting layer beneath graphite layer of ceramic cathode for use with cathodic arc deposition
#47APPARATUS AND METHOD FOR VACUUM COATING SURFACES OF OBJECTS
#48WEAR AND/OR FRICTION REDUCTION BY USING MOLYBDENUM NITRIDE BASED COATINGS
#49APPARATUS AND METHOD FOR CONTROLLING COATING LAYER IN PVD PLATING PROCESS
#50Plated steel material having excellent adhesion to plating and corrosion resistance
#51Deposition-condition output device, method for outputting deposition condition, recording medium and depositon apparatus
#52Method for vacuum deposition of a coating on the front face of a support, support and corresponding security document
#53Temperature-controlled shield, material deposition apparatus and method for depositing a material onto a substrate
#54Continuous thin film of a metal chalcogenide
#55Methods of fabricating thin films comprising lithium-containing materials
#56Al2O3 Sputtering Target and Production Method Thereof
#57Limitation Device, Limitation Structure, Adjustment Method Thereof and Evaporation System
#58Direct-deposition system including standoffs for controlling substrate-mask separation
#59Method for regulating color of hard coating, hard coating, and method for preparing the same
#60Method and device for homogeneously coating 3D substrates
#61DEVICE AND METHOD FOR MANUFACTURING THIN FILM
#62FLUID-ASSISTED THERMAL MANAGEMENT OF EVAPORATION SOURCES
#63Enhanced cathodic ARC source for ARC plasma deposition
#64Process for film deposition on a substrate with non-uniform overlapping subpulses of a precursor
#65ARRAY SUBSTRATE AND FABRICATING METHOD THEREOF
#66Silicon film forming method and substrate processing apparatus
#67Base conducting layer beneath graphite layer of ceramic cathode for use with cathodic arc deposition
#68Housing, mobile terminal, and sputter coating apparatus
#69Solar Glass And Method For Its Production
#70FILM FORMING APPARATUS AND FILM FORMING METHOD
#71Sputtering method
#72Binary Ag—Cu amorphous thin-films for electronic applications
#73Surface treatment facility
#74Moth-eye transfer mold, method of manufacturing moth-eye transfer mold, and method of transferring moth-eye structure
#75Controlled variable thickness film deposition on a non-flat substrate for high volume manufacturing
#76Ion depth profile control method, ion implantation method and semiconductor device manufacturing method based on the control method, and ion implantation system adapting the control method
#77Method for preparing super-lubricative multi-layer composite fullerene-like carbon layer/graphene-like boron nitride thin film
#78Method for making an eyeglass lens coated by means of physical vapor deposition PVD
#79Electron device stack structure
#80Direct-deposition system including standoffs for controlling substrate-mask separation
#81Apparatus and a method of controlling thickness variation in a material layer formed using physical vapour deposition
#82Piston ring for internal combustion engines
#83Reactive sputtering apparatus and film formation method for composite metal compound film or mixture film using the same
#84FILM FORMATION DEVICE AND FILM FORMATION METHOD
#85Method of forming nickel silicide materials
#86Apparatus and methods for depositing variable interference filters
#87FILM-FORMATION METHOD
#88Physical vapor deposition with isotropic neutral and non-isotropic ion velocity distribution at the wafer surface
#89Installation with distribution mask for vapor deposition of a coating on optical articles on a rotary support
#90Silicon film forming method and substrate processing apparatus
#91METHODS AND APPARATUS FOR MAINTAINING LOW NON-UNIFORMITY OVER TARGET LIFE
#92Tool and method of fabricating a self-aligned solid state thin film battery
#93Inorganic TFEL display element and manufacturing
#94MULTILAYER FILM FORMATION METHOD
#95Method based on multi-source deposition for fabricating perovskite film
#96Atomic layer deposition method of metal-containing thin film
#97AN INTERFERENCE COATING OR ITS PART CONSISTING LAYERS WITH DIFFERENT POROSITY
#98Method for manufacturing antenna and mobile device
#99Piston ring for an internal-combustion engine, a method for coating a piston ring, and an internal-combustion engine
#100Piston ring and method of manufacture
#101Multilayer electrochemical device
#102FILM-FORMING METHOD AND SPUTTERING APPARATUS
#103EVAPORATION SOURCE DEVICE
#104PHYSICAL VAPOR DEPOSITION USING ROTATIONAL SPEED SELECTED WITH RESPECT TO DEPOSITION RATE
#105Crucible, evaporation source and evaporation device
#106Surface acoustic wave device and method for manufacturing the same
#107VAPOR DEPOSITION DEVICE
#108Baffle device for evaporation apparatus and evaporation apparatus
#109DEPOSITION APPARATUS, METHOD FOR CONTROLLING SAME, DEPOSITION METHOD USING DEPOSITION APPARATUS, AND DEVICE MANUFACTURING METHOD
#110EVAPORATION SYSTEM
#111Apparatus and method of manufacturing display apparatus
#112Sputtering apparatus, film deposition method, and control device
#113FLUID-ASSISTED THERMAL MANAGEMENT OF EVAPORATION SOURCES
#114Evaporation source
#115Functionally graded material by in-situ gradient alloy sputter deposition management
#116Apparatus And Method For Processing Thin Substrates
#117Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus and Non-Transitory Computer-Readable Recording Medium
#118MEMS process power
#119Metallic structure
#120Physical vapor deposition system with a source of isotropic ion velocity distribution at the wafer surface
#121METHOD OF PRODUCING ORGANIC ELECTROLUMINESCENT DISPLAY DEVICE BY USING VAPOR DEPOSITION DEVICE
#122MEASUREMENT TOOL AND METHOD FOR MEASURING THICKNESS OF EVAPORATED FILM OF LARGE-SIZED SUBSTRATE
#123Ion assisted deposition top coat of rare-earth oxide
#124Thin-film deposition methods with fluid-assisted thermal management of evaporation sources
#125Apparatus for Evaporating a Material
#126High density, low stress amorphous carbon film, and process and equipment for its deposition
#127COATING DEVICE WITH MOVING TARGET AND COATING METHOD
#128Binary Ag—Cu amorphous thin-films for electronic applications
#129Evaporation method and evaporation device for organic light-emitting diode substrate
#130Ion assisted deposition top coat of rare-earth oxide
#131Mask assembly for testing a deposition process, deposition apparatus including the mask assembly, and testing method for a deposition process using the mask assembly
#132Film thickness measuring device, polishing apparatus, film thickness measuring method and polishing method
#133ENHANCED CATHODIC ARC SOURCE FOR ARC PLASMA DEPOSITION
#134LINEAR EVAPORATION SOURCE
#135Film Thickness Control System, Film Thickness Control Method, Evaporation Device and Evaporation Method
#136Durable 3D geometry conformal anti-reflection coating
#137Window film and preparation method thereof
#138Evaporation apparatus and evaporation method
#139Steel sheet coated with aluminum-magnesium
#140Apparatus and method for layer thickness measurement for a vapor deposition method
#141Three-dimensional (3D) photonic chip-to-fiber interposer
#142RF sputtering apparatus and sputtering method
#143Method of manufacturing a display apparatus having pixels areas with different thicknesses
#144Sputter device with moving target
#145Phase change material source for physical vapor deposition
#146Detection device for detecting thickness of vacuum-evaporated film and vacuum evaporation apparatus
#147FILM FORMING DEVICE AND METHOD
#148Film formation apparatus and film-formed workpiece manufacturing method
#149METHOD OF SPUTTER DEPOSITION OF A FILM ON AN ESSENTIALLY PLANE EXTENDED SURFACE OF A SUBSTRATE
#150MATERIAL THICKNESS DEVICE AND METHOD
#151Evaporation method
#152Thin Film Deposition Apparatus Having Plurality of Evaporation Sources
#153Thin Film Deposition Apparatus Having Plurality of Crucibles
#154Graphite crucible for sublimation growth of SiC crystal
#155Sputtering apparatus
#156VACUUM EVAPORATION DEVICE
#157APPARATUS AND METHOD FOR MONITORING EVAPORATION OF A FILM AND APPARATUS AND METHOD FOR EVAPORATING A FILM
#158Method and devices for controlling a vapour flow in vacuum evaporation
#159Vapor deposition apparatus, vapor deposition method using vapor deposition apparatus, and device production method
#160DYNAMIC APERTURE FOR THREE-DIMENSIONAL CONTROL OF THIN-FILM DEPOSITION AND ION-BEAM EROSION
#161Film thickness regulator and manufacturing method thereof, film thickness regulating method and evaporation apparatus
#162HIGH POWER PULSE IONIZED PHYSICAL VAPOR DEPOSITION
#163DEPOSITION APPARATUS, METHOD FOR CONTROLLING SAME, DEPOSITION METHOD USING DEPOSITION APPARATUS, AND DEVICE MANUFACTURING METHOD
#164Multi-material thermal barrier coating system
#165Physical vapor deposition using rotational speed selected with respect to deposition rate
#166Substrate processing apparatus for forming film including at least two different elements
#167Functionally graded material by in-situ gradient alloy sputter deposition management
#168Functionally graded material by in-situ gradient alloy sputter deposition management
#169Method of fabricating composite PDMS microstructure
#170Fabrication of integrated computational elements using cylindrical substrate support shaped to match a cross-section of a spatial profile of a deposition plume
#171Display apparatus having pixels areas with different thicknesses
#172Fluid-assisted thermal management of evaporation sources
#173Thin-film deposition methods with fluid-assisted thermal management of evaporation sources
#174OPHTHALMIC OPTICAL FILTERS FOR PREVENTION AND REDUCTION OF PHOTOPHOBIC EFFECTS AND RESPONSES
#175Counter based time compensation to reduce process shifting in reactive magnetron sputtering reactor
#176MODULATION OF REVERSE VOLTAGE LIMITED WAVEFORMS IN SPUTTERING DEPOSITION CHAMBERS
#177Method of manufacturing semiconductor device for forming film including at least two different elements
#178Method and system for galvanizing by plasma evaporation
#179EVAPORATION SYSTEM AND EVAPORATION METHOD
#180PHYSICAL VAPOR DEPOSITION APPARATUS AND METHOD OF DEPOSITING PHASE-CHANGE MATERIALS USING THE SAME
#181Sputtering apparatus, film deposition method, and control device
#182Display device and method of manufacturing display device using a mask
#183OPTICAL MEMBER, METHOD OF MANUFACTURING THE SAME, AND OPTICAL SYSTEM USING THE SAME
#184Methods and apparatus for maintaining low non-uniformity over target life
#185Electrically reconfigurable deposition masks
#186Production method for transparent conductive film
#187APPARATUS WITH NEIGHBORING SPUTTER CATHODES AND METHOD OF OPERATION THEREOF
#188Dyeing method and apparatus for dyeing resin body by vaporization and deposition
#189Semiconductor manufacturing apparatus
#190Method of manufacturing semiconductor device and substrate processing apparatus
#191Fabrication of integrated computational elements using substrate support shaped to match spatial profile of deposition plume
#192Plasma apparatus, magnetic-field controlling method, and semiconductor manufacturing method
#193Method of manufacturing semiconductor device by forming a film on a substrate
#194Method of manufacturing semiconductor device by forming a film on a substrate
#195Method of manufacturing semiconductor device by forming a film on a substrate
#196Method of manufacturing semiconductor device by forming a film on a substrate
#197Method of manufacturing a semiconductor device by forming a film on a substrate
#198Method of manufacturing a semiconductor device by forming a film on a substrate
#199Method of manufacturing a semiconductor device by forming a film on a substrate
#200Apparatus and methods for manufacturing thin-film solar cells
#201METAL CHALCOGENIDE THIN FILM AND PREPARING METHOD THEREOF
#202Method for producing a polycrystalline ceramic film
#203Stabilizing laser energy density on a target during pulsed laser deposition of thin films
#204HEAT TREATMENT APPARATUS AND HEAT TREATMENT METHOD
#205VAPOR-DEPOSITION DEVICE FOR COATING TWO-DIMENSIONAL SUBSTRATES
#206Homogeneous HiPIMS coating method
#207Apparatus and Method for the Evaporation and Deposition of Materials
#208Antistatic coating
#209Plasma emission monitor and process gas delivery system
#210COATING APPARATUS
#211Sputter source for use in a semiconductor process chamber
#212Physical vapor deposition RF plasma shield deposit control
#213Ion implantation method and ion implantation apparatus
#214Method for producing a reflective optical element for EUV-lithography
#215Deposition apparatus providing improved replacing apparatus for deposition rate measuring sensor, and replacing method using the same
#216Deposition amount measuring apparatus, depositing apparatus including the same, and method for manufacturing light emitting display
#217Method of manufacturing variable resistance element and apparatus for manufacturing the same
#218Mask assembly for testing a deposition process, deposition apparatus including the mask assembly, and testing method for a deposition process using the mask assembly
#219Semiconductor fabricating device and method for driving the same, and method for fabricating magnetic tunnel junction using the same
#220Multi-material thermal barrier coating system
#221Method of making durable articles
#222Method and Apparatus for Surface Processing of a Substrate Using an Energetic Particle Beam
#223ANTISTATIC COATING
#224Sputter gun having variable magnetic strength
#225SPUTTER GUN SHUTTER
#226Light-emitting diode and deposition apparatus for fabricating the same
#227SPUTTERING APPARATUS, FILM DEPOSITION METHOD, AND CONTROL DEVICE
#228Semiconductor fabricating device and method for driving the same, and method for fabricating magnetic tunnel junction using the same
#229Physical vapor deposition chamber with capacitive tuning at wafer support
#230Sputtering apparatus and sputtering method
#231Deflecting device for electron beams, magnetic deflecting unit for such a deflecting device, and device for vapor coating a planar substrate using such a deflecting device
#232METHOD AND APPARATUS FOR THE MULTI-LAYER AND MULTI-COMPONENT COATING OF THIN FILMS ON SUBSTRATES, AND MULTI-LAYER AND MULTI-COMPONENT COATINGS
#233Tooling carrier for inline coating machine, method of operating thereof and process of coating a substrate
#234Ion implantation method and ion implantation apparatus
#235OPTICAL MEMBER, METHOD OF MANUFACTURING THE SAME, AND OPTICAL SYSTEM USING THE SAME
#236Film forming apparatus
#237Methods and apparatus for sputtering using direct current
#238Method of manufacturing thin film which suppresses unnecessary scattering and deposition of a source material
#239EVAPORATION SYSTEM AND METHOD
#240CORRECTION PLATE AND COATING DEVICE USING SAME
#241VAPOR DEPOSITION SYSTEM
#242CONTROL APPARATUS FOR PLASMA IMMERSION ION IMPLANTATION OF A DIELECTRIC SUBSTRATE
#243Methods and apparatus for applying periodic voltage using direct current
#244Metal foil with electric resistance film and method of producing the same
#245Method for depositing a material
#246Method and device for reversing the feeding of sputter coating systems in clean rooms
#247Sputtering device and sputtering method
#248Thin film forming method
#249POWER SUPPLY APPARATUS
#250Power supply apparatus
#251BENDING FIXTURE FOR HOMOGENOUS AND SMOOTH OPERATION OF AN EVAPORATION SOURCE
#252High Power Pulse Ionized Physical Vapor Deposition
#253SPUTTERING FILM FORMING METHOD AND SPUTTERING FILM FORMING APPARATUS
#254Method and devices for controlling a vapour flow in vacuum evaporation
#255Method and system for galvanizing by plasma evaporation
#256High Power Pulse Magnetron Sputtering For High Aspect-Ratio Features, Vias, and Trenches
#257Controlling the vaporization of organic material
#258Method of manufacturing semiconductor device, method of processing substrate and substrate processing apparatus for forming thin film containing at least two different elements
#259Zinc oxide based composites and methods for their fabrication
#260Apparatus and methods for manufacturing thin-film solar cells
#261Thin-film deposition evaporator
#262Method for ultra-uniform sputter deposition using simultaneous RF and DC power on target
#263METHOD FOR CHANGING PHYSICAL VAPOR DEPOSITION FILM FORM
#264Apparatus and methods for manufacturing thin-film solar cells
#265Apparatus and methods for manufacturing thin-film solar cells
#266Method and Apparatus for Coating Curved Surfaces
#267Method and apparatus for coating surfaces
#268Apparatus and methods for manufacturing thin-film solar cells
#269APPARATUS AND METHODS FOR MANUFACTURING THIN-FILM SOLAR CELLS
#270Physical vapor deposition method with a source of isotropic ion velocity distribution at the wafer surface
#271Methods and apparatus for sputtering deposition using direct current
#272METHOD FOR PRODUCING A THERMAL BARRIER COATING AND THERMAL BARRIER COATING FOR A COMPONENT PART
#273METHOD FOR PRODUCING THERMAL BARRIER COATING AND A THERMAL BARRIER COATING
#274METHOD AND APPARATUS FOR MANUFACTURING A SUBSTRATE WITH A MAGNETRON SPUTTER COATING
#275Apparatus and method for compensating uniformity of film thickness
#276Vapor deposition sources and methods
#277Evaporation source and vacuum evaporator using the same
#278Integration of a variable thickness copper seed layer in copper metallization
#279Sputtering apparatus and method, and sputtering control program
#280Method and device for magnetron sputtering
#281Method for controlling uniformity of thin films fabricated in processing systems
#282Method for the production of a substrate
#283High throughput deposition apparatus with magnetic support
#284Method of forming film upon a substrate
#285Rapid-response electron-beam deposition system having a controller utilizing leading and trailing deposition indicators
#286Deposition system using noise canceller and its method of control
#287Method for the production of a substrate with a magnetron sputter coating and unit for the same
#288Method for controlling the deposition of vaporized organic material
#289Controlling the vaporization of organic material
#290Method of producing a substrate with a surface treated by a vacuum treatment process, use of said method for the production of coated workpieces and plasma treatment chamber
#291Apparatus and method for high rate uniform coating, including non-line of sight
#292High deposition rate sputtering
#293Method for coating substrates in inline installations
#294High deposition rate sputtering
#295PLASMA SOURCE WITH SEGMENTED MAGNETRON CATHODE
#296Optical information recording medium and method of manufacturing thereof, manufacturing apparatus, recording/reproducing method, and recording/reproducing apparatus
#297Vacuum treatment system and process for manufacturing workpieces