ClassID:

120095

C23C14/542 - CPC Classification

Classification description:

Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating; Controlling or regulating the coating process Controlling the film thickness or evaporation rate

Sub-classes:
Recent Application in this class:
#1
20260152843
2026-06-04

LASER SYSTEM AND EVAPORATION SYSTEM

#2
20260085399
2026-03-26

DEVICES AND METHODS FOR DEPOSITION

#3
20260040600
2026-02-05

SEMICONDUCTOR CONTAINING AMORPHOUS TELLURIUM OXIDE, THIN FILM TRANSISTOR INCLUDING SAME, AND FABRICATION METHOD THEREFOR

#4
20250389193
2025-12-25

VARIABLE THICKNESS COATING CONTROL

#5
20250361594
2025-11-27

METHOD OF COATING A SUBSTRATE INCLUDING A MULTI-LAYER COATING

#6
20250354249
2025-11-20

ENGINEERED MULTI-DIMENSIONAL METALLURGICAL PROPERTIES IN PVD MATERIALS

#7
20250305114
2025-10-02

Magnetron Sputtering Apparatus and Control Method for Timely Detecting Target Shorting by Monitoring Electrical Resistance Between PVD Target Cathode and Electrical Ground in Real Time

#8
20250277300
2025-09-04

PREPARATION METHOD FOR GRADIENT NEAR-EQUIAXED CRYSTAL CR COATING ON THE SURFACE OF ZIRCONIUM ALLOY CLADDING

#9
20250155622
2025-05-15

HOUSING, MOBILE TERMINAL, AND SPUTTER COATING APPARATUS

#10
20250109482
2025-04-03

FORMATION APPARATUS AND METHOD OF HYDROXYAPATITE-CONTAINING THIN FILM

#11
20250041947
2025-02-06

CUTTING TOOL

#12
20250012791
2025-01-09

INDIUM TIN OXIDE FILM COATED UPSTANDING SILICON NANOWIRES (ITO/USNWs) AND THE USE THEREOF IN SENSITIVE NANOELECTRONIC DEVICE (NED)

#13
20250003054
2025-01-02

SOLAR HEATING FOR THIN FILM EVAPORATION AND DIRECTIONAL SOLIDIFICATION

#14
20240425971
2024-12-26

SYSTEM AND METHOD FOR CONTROLLING FILM THICKNESS, AND FILM DEPOSITION SYSTEM AND METHOD USING SAME

#15
20240417844
2024-12-19

PLATED STEEL MATERIAL HAVING EXCELLENT ADHESION TO PLATING AND CORROSION RESISTANCE, AND MANUFACTURING METHOD FOR SAME

#16
20240401186
2024-12-05

SYSTEM AND METHOD FOR CONTROLLING FILM THICKNESS, AND FILM DEPOSITION SYSTEM AND METHOD USING SAME

#17
20240360546
2024-10-31

TEMPERATURE-CONTROLLED SHIELD, MATERIAL DEPOSITION APPARATUS AND METHOD FOR DEPOSITING A MATERIAL ONTO A SUBSTRATE

#18
20240254615
2024-08-01

CLADDING TUBES COATING APPARATUS

#19
20240200184
2024-06-20

FLAT STEEL PRODUCT HAVING AN IMPROVED ZINC COATING

#20
20240175118
2024-05-30

PULSED LASER DEPOSITION METHOD

#21
20240167145
2024-05-23

METHOD FOR DEPOSITING A LAYER OPTICAL ELEMENT, AND OPTICAL ASSEMBLY FOR THE DUV WAVELENGTH RANGE

#22
20240102154
2024-03-28

VACUUM PROCESSING APPARATUS, VACUUM SYSTEM, GAS PARTIAL PRESSURE CONTROL ASSEMBLY, AND METHOD OF CONTROLLING PARTIAL PRESSURE OF A GAS IN A VACUUM PROCESSING CHAMBER

#23
20240055239
2024-02-15

METHOD OF DEPOSITING SILICON NITRIDE FILM, APPARATUS FOR DEPOSITING FILM, AND SILICON NITRIDE FILM

#24
20240026524
2024-01-25

Processing method and apparatus for ultrafast laser deposition of multilayer film including diamond-like carbon film, anti-reflection film and anti-fingerprint film

#25
20240018643
2024-01-18

Nanotwinned nickel films with high strength and ductility

#26
20240014018
2024-01-11

Apparatus and a Method of Controlling Thickness Variation in a Material Layer Formed Using Physical Vapour Deposition

#27
20230422623
2023-12-28

MEMS PROCESS POWER

#28
20230399741
2023-12-14

SUBLIMATION CONTROL USING DOWNSTREAM PRESSURE SENSING

#29
20230340884
2023-10-26

BLADE FOR A TURBOMACHINE INCLUDING BLADE TIP ARMOR AND AN EROSION PROTECTION LAYER, AND METHOD FOR MANUFACTURING SAME

#30
20230227959
2023-07-20

METHOD FOR MANUFACTURING PATTERNED SURFACE COATING AND AUTOMOBILE HEAT DISSIPATION DEVICE HAVING PATTERNED SURFACE COATING

#31
20230220540
2023-07-13

METHOD AND DEVICE FOR APPLYING A COATING, AND COATED BODY

#32
20230137182
2023-05-04

Method, system and apparatus for cooling a substrate

#33
20230113961
2023-04-13

OVERHANG REDUCTION USING PULSED BIAS

#34
20230091273
2023-03-23

Deposition method for tuning magnetic field distribution of deposition equipment

#35
20230077782
2023-03-16

APPROACHES TO MODIFYING A COLOR OF AN ELECTROCHROMIC STACK IN A TINTED STATE

#36
20230032284
2023-02-02

FILM STACK COMPOSITION, RELATED METHOD, AND APPLICATIONS

#37
20230002884
2023-01-05

SYSTEMS AND METHODS FOR FILM DEPOSITION

#38
20220403503
2022-12-22

FILM FORMING APPARATUS AND FILM FORMING METHOD

#39
20220403497
2022-12-22

NORMAL PULSE PROFILE MODIFICATION IN A FILM DEPOSITION PROCESS

#40
20220372610
2022-11-24

Engineered multi-dimensional metallurgical properties in PVD materials

#41
20220363947
2022-11-17

Packaging Material And Methods Of Manufacture

#42
20220213591
2022-07-07

DEVICE AND METHOD FOR COATING SUBSTRATES HAVING PLANAR OR SHAPED SURFACES BY MEANS OF MAGNETRON SPUTTERING

#43
20220213586
2022-07-07

DEVICE AND METHOD FOR MANUFACTURING THIN FILM

#44
20220199893
2022-06-23

MEMS process power

#45
20220186357
2022-06-16

APPARATUS AND METHOD FOR DEPOSITING THIN SPUTTERED FILM

#46
20220157571
2022-05-19

Base conducting layer beneath graphite layer of ceramic cathode for use with cathodic arc deposition

#47
20220154340
2022-05-19

APPARATUS AND METHOD FOR VACUUM COATING SURFACES OF OBJECTS

#48
20220145442
2022-05-12

WEAR AND/OR FRICTION REDUCTION BY USING MOLYBDENUM NITRIDE BASED COATINGS

#49
20220074042
2022-03-10

APPARATUS AND METHOD FOR CONTROLLING COATING LAYER IN PVD PLATING PROCESS

#50
20220074039
2022-03-10

Plated steel material having excellent adhesion to plating and corrosion resistance

#51
20220037134
2022-02-03

Deposition-condition output device, method for outputting deposition condition, recording medium and depositon apparatus

#52
20220009269
2022-01-13

Method for vacuum deposition of a coating on the front face of a support, support and corresponding security document

#53
20210381102
2021-12-09

Temperature-controlled shield, material deposition apparatus and method for depositing a material onto a substrate

#54
20210358533
2021-11-18

Continuous thin film of a metal chalcogenide

#55
20210332473
2021-10-28

Methods of fabricating thin films comprising lithium-containing materials

#56
20210292887
2021-09-23

Al2O3 Sputtering Target and Production Method Thereof

#57
20210285095
2021-09-16

Limitation Device, Limitation Structure, Adjustment Method Thereof and Evaporation System

#58
20210285087
2021-09-16

Direct-deposition system including standoffs for controlling substrate-mask separation

#59
20210222279
2021-07-22

Method for regulating color of hard coating, hard coating, and method for preparing the same

#60
20210207260
2021-07-08

Method and device for homogeneously coating 3D substrates

#61
20210202288
2021-07-01

DEVICE AND METHOD FOR MANUFACTURING THIN FILM

#62
20210198783
2021-07-01

FLUID-ASSISTED THERMAL MANAGEMENT OF EVAPORATION SOURCES

#63
20210172053
2021-06-10

Enhanced cathodic ARC source for ARC plasma deposition

#64
20210123128
2021-04-29

Process for film deposition on a substrate with non-uniform overlapping subpulses of a precursor

#65
20210098497
2021-04-01

ARRAY SUBSTRATE AND FABRICATING METHOD THEREOF

#66
20210090887
2021-03-25

Silicon film forming method and substrate processing apparatus

#67
20210090862
2021-03-25

Base conducting layer beneath graphite layer of ceramic cathode for use with cathodic arc deposition

#68
20210072442
2021-03-11

Housing, mobile terminal, and sputter coating apparatus

#69
20210053869
2021-02-25

Solar Glass And Method For Its Production

#70
20210047724
2021-02-18

FILM FORMING APPARATUS AND FILM FORMING METHOD

#71
20210040605
2021-02-11

Sputtering method

#72
20210025051
2021-01-28

Binary Ag—Cu amorphous thin-films for electronic applications

#73
20210010129
2021-01-14

Surface treatment facility

#74
20200406509
2020-12-31

Moth-eye transfer mold, method of manufacturing moth-eye transfer mold, and method of transferring moth-eye structure

#75
20200308694
2020-10-01

Controlled variable thickness film deposition on a non-flat substrate for high volume manufacturing

#76
20200303266
2020-09-24

Ion depth profile control method, ion implantation method and semiconductor device manufacturing method based on the control method, and ion implantation system adapting the control method

#77
20200299828
2020-09-24

Method for preparing super-lubricative multi-layer composite fullerene-like carbon layer/graphene-like boron nitride thin film

#78
20200264448
2020-08-20

Method for making an eyeglass lens coated by means of physical vapor deposition PVD

#79
20200176821
2020-06-04

Electron device stack structure

#80
20200131617
2020-04-30

Direct-deposition system including standoffs for controlling substrate-mask separation

#81
20200090913
2020-03-19

Apparatus and a method of controlling thickness variation in a material layer formed using physical vapour deposition

#82
20200040996
2020-02-06

Piston ring for internal combustion engines

#83
20200040440
2020-02-06

Reactive sputtering apparatus and film formation method for composite metal compound film or mixture film using the same

#84
20200024723
2020-01-23

FILM FORMATION DEVICE AND FILM FORMATION METHOD

#85
20200024722
2020-01-23

Method of forming nickel silicide materials

#86
20190390324
2019-12-26

Apparatus and methods for depositing variable interference filters

#87
20190390321
2019-12-26

FILM-FORMATION METHOD

#88
20190338411
2019-11-07

Physical vapor deposition with isotropic neutral and non-isotropic ion velocity distribution at the wafer surface

#89
20190284679
2019-09-19

Installation with distribution mask for vapor deposition of a coating on optical articles on a rotary support

#90
20190272995
2019-09-05

Silicon film forming method and substrate processing apparatus

#91
20190259586
2019-08-22

METHODS AND APPARATUS FOR MAINTAINING LOW NON-UNIFORMITY OVER TARGET LIFE

#92
20190245246
2019-08-08

Tool and method of fabricating a self-aligned solid state thin film battery

#93
20190223268
2019-07-18

Inorganic TFEL display element and manufacturing

#94
20190218659
2019-07-18

MULTILAYER FILM FORMATION METHOD

#95
20190211453
2019-07-11

Method based on multi-source deposition for fabricating perovskite film

#96
20190203357
2019-07-04

Atomic layer deposition method of metal-containing thin film

#97
20190169739
2019-06-06

AN INTERFERENCE COATING OR ITS PART CONSISTING LAYERS WITH DIFFERENT POROSITY

#98
20190153583
2019-05-23

Method for manufacturing antenna and mobile device

#99
20190120379
2019-04-25

Piston ring for an internal-combustion engine, a method for coating a piston ring, and an internal-combustion engine

#100
20190093768
2019-03-28

Piston ring and method of manufacture

#101
20190088924
2019-03-21

Multilayer electrochemical device

#102
20190078196
2019-03-14

FILM-FORMING METHOD AND SPUTTERING APPARATUS

#103
20190062902
2019-02-28

EVAPORATION SOURCE DEVICE

#104
20190040525
2019-02-07

PHYSICAL VAPOR DEPOSITION USING ROTATIONAL SPEED SELECTED WITH RESPECT TO DEPOSITION RATE

#105
20190003035
2019-01-03

Crucible, evaporation source and evaporation device

#106
20180375493
2018-12-27

Surface acoustic wave device and method for manufacturing the same

#107
20180312965
2018-11-01

VAPOR DEPOSITION DEVICE

#108
20180305804
2018-10-25

Baffle device for evaporation apparatus and evaporation apparatus

#109
20180298489
2018-10-18

DEPOSITION APPARATUS, METHOD FOR CONTROLLING SAME, DEPOSITION METHOD USING DEPOSITION APPARATUS, AND DEVICE MANUFACTURING METHOD

#110
20180298485
2018-10-18

EVAPORATION SYSTEM

#111
20180290168
2018-10-11

Apparatus and method of manufacturing display apparatus

#112
20180254172
2018-09-06

Sputtering apparatus, film deposition method, and control device

#113
20180245209
2018-08-30

FLUID-ASSISTED THERMAL MANAGEMENT OF EVAPORATION SOURCES

#114
20180245208
2018-08-30

Evaporation source

#115
20180187301
2018-07-05

Functionally graded material by in-situ gradient alloy sputter deposition management

#116
20180174873
2018-06-21

Apparatus And Method For Processing Thin Substrates

#117
20180171467
2018-06-21

Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus and Non-Transitory Computer-Readable Recording Medium

#118
20180159021
2018-06-07

MEMS process power

#119
20180127867
2018-05-10

Metallic structure

#120
20180119272
2018-05-03

Physical vapor deposition system with a source of isotropic ion velocity distribution at the wafer surface

#121
20180114953
2018-04-26

METHOD OF PRODUCING ORGANIC ELECTROLUMINESCENT DISPLAY DEVICE BY USING VAPOR DEPOSITION DEVICE

#122
20180080756
2018-03-22

MEASUREMENT TOOL AND METHOD FOR MEASURING THICKNESS OF EVAPORATED FILM OF LARGE-SIZED SUBSTRATE

#123
20180080116
2018-03-22

Ion assisted deposition top coat of rare-earth oxide

#124
20180073127
2018-03-15

Thin-film deposition methods with fluid-assisted thermal management of evaporation sources

#125
20180051369
2018-02-22

Apparatus for Evaporating a Material

#126
20180051368
2018-02-22

High density, low stress amorphous carbon film, and process and equipment for its deposition

#127
20180044785
2018-02-15

COATING DEVICE WITH MOVING TARGET AND COATING METHOD

#128
20180044782
2018-02-15

Binary Ag—Cu amorphous thin-films for electronic applications

#129
20180034005
2018-02-01

Evaporation method and evaporation device for organic light-emitting diode substrate

#130
20180030589
2018-02-01

Ion assisted deposition top coat of rare-earth oxide

#131
20180021802
2018-01-25

Mask assembly for testing a deposition process, deposition apparatus including the mask assembly, and testing method for a deposition process using the mask assembly

#132
20180016676
2018-01-18

Film thickness measuring device, polishing apparatus, film thickness measuring method and polishing method

#133
20170369984
2017-12-28

ENHANCED CATHODIC ARC SOURCE FOR ARC PLASMA DEPOSITION

#134
20170356079
2017-12-14

LINEAR EVAPORATION SOURCE

#135
20170298501
2017-10-19

Film Thickness Control System, Film Thickness Control Method, Evaporation Device and Evaporation Method

#136
20170271130
2017-09-21

Durable 3D geometry conformal anti-reflection coating

#137
20170268099
2017-09-21

Window film and preparation method thereof

#138
20170268096
2017-09-21

Evaporation apparatus and evaporation method

#139
20170253951
2017-09-07

Steel sheet coated with aluminum-magnesium

#140
20170241776
2017-08-24

Apparatus and method for layer thickness measurement for a vapor deposition method

#141
20170219772
2017-08-03

Three-dimensional (3D) photonic chip-to-fiber interposer

#142
20170213706
2017-07-27

RF sputtering apparatus and sputtering method

#143
20170207283
2017-07-20

Method of manufacturing a display apparatus having pixels areas with different thicknesses

#144
20170207071
2017-07-20

Sputter device with moving target

#145
20170194624
2017-07-06

Phase change material source for physical vapor deposition

#146
20170191156
2017-07-06

Detection device for detecting thickness of vacuum-evaporated film and vacuum evaporation apparatus

#147
20170186949
2017-06-29

FILM FORMING DEVICE AND METHOD

#148
20170183769
2017-06-29

Film formation apparatus and film-formed workpiece manufacturing method

#149
20170175255
2017-06-22

METHOD OF SPUTTER DEPOSITION OF A FILM ON AN ESSENTIALLY PLANE EXTENDED SURFACE OF A SUBSTRATE

#150
20170170080
2017-06-15

MATERIAL THICKNESS DEVICE AND METHOD

#151
20170159171
2017-06-08

Evaporation method

#152
20170159168
2017-06-08

Thin Film Deposition Apparatus Having Plurality of Evaporation Sources

#153
20170159167
2017-06-08

Thin Film Deposition Apparatus Having Plurality of Crucibles

#154
20170137963
2017-05-18

Graphite crucible for sublimation growth of SiC crystal

#155
20170137932
2017-05-18

Sputtering apparatus

#156
20170137929
2017-05-18

VACUUM EVAPORATION DEVICE

#157
20170107609
2017-04-20

APPARATUS AND METHOD FOR MONITORING EVAPORATION OF A FILM AND APPARATUS AND METHOD FOR EVAPORATING A FILM

#158
20170088936
2017-03-30

Method and devices for controlling a vapour flow in vacuum evaporation

#159
20170051394
2017-02-23

Vapor deposition apparatus, vapor deposition method using vapor deposition apparatus, and device production method

#160
20170044661
2017-02-16

DYNAMIC APERTURE FOR THREE-DIMENSIONAL CONTROL OF THIN-FILM DEPOSITION AND ION-BEAM EROSION

#161
20170037507
2017-02-09

Film thickness regulator and manufacturing method thereof, film thickness regulating method and evaporation apparatus

#162
20170029936
2017-02-02

HIGH POWER PULSE IONIZED PHYSICAL VAPOR DEPOSITION

#163
20170022605
2017-01-26

DEPOSITION APPARATUS, METHOD FOR CONTROLLING SAME, DEPOSITION METHOD USING DEPOSITION APPARATUS, AND DEVICE MANUFACTURING METHOD

#164
20160362796
2016-12-15

Multi-material thermal barrier coating system

#165
20160333465
2016-11-17

Physical vapor deposition using rotational speed selected with respect to deposition rate

#166
20160329208
2016-11-10

Substrate processing apparatus for forming film including at least two different elements

#167
20160326638
2016-11-10

Functionally graded material by in-situ gradient alloy sputter deposition management

#168
20160326631
2016-11-10

Functionally graded material by in-situ gradient alloy sputter deposition management

#169
20160326629
2016-11-10

Method of fabricating composite PDMS microstructure

#170
20160298230
2016-10-13

Fabrication of integrated computational elements using cylindrical substrate support shaped to match a cross-section of a spatial profile of a deposition plume

#171
20160293680
2016-10-06

Display apparatus having pixels areas with different thicknesses

#172
20160289822
2016-10-06

Fluid-assisted thermal management of evaporation sources

#173
20160289817
2016-10-06

Thin-film deposition methods with fluid-assisted thermal management of evaporation sources

#174
20160282532
2016-09-29

OPHTHALMIC OPTICAL FILTERS FOR PREVENTION AND REDUCTION OF PHOTOPHOBIC EFFECTS AND RESPONSES

#175
20160222503
2016-08-04

Counter based time compensation to reduce process shifting in reactive magnetron sputtering reactor

#176
20160215386
2016-07-28

MODULATION OF REVERSE VOLTAGE LIMITED WAVEFORMS IN SPUTTERING DEPOSITION CHAMBERS

#177
20160211132
2016-07-21

Method of manufacturing semiconductor device for forming film including at least two different elements

#178
20160186308
2016-06-30

Method and system for galvanizing by plasma evaporation

#179
20160122866
2016-05-05

EVAPORATION SYSTEM AND EVAPORATION METHOD

#180
20160102396
2016-04-14

PHYSICAL VAPOR DEPOSITION APPARATUS AND METHOD OF DEPOSITING PHASE-CHANGE MATERIALS USING THE SAME

#181
20160079045
2016-03-17

Sputtering apparatus, film deposition method, and control device

#182
20160063938
2016-03-03

Display device and method of manufacturing display device using a mask

#183
20160061998
2016-03-03

OPTICAL MEMBER, METHOD OF MANUFACTURING THE SAME, AND OPTICAL SYSTEM USING THE SAME

#184
20160056024
2016-02-25

Methods and apparatus for maintaining low non-uniformity over target life

#185
20160047035
2016-02-18

Electrically reconfigurable deposition masks

#186
20160024644
2016-01-28

Production method for transparent conductive film

#187
20160002770
2016-01-07

APPARATUS WITH NEIGHBORING SPUTTER CATHODES AND METHOD OF OPERATION THEREOF

#188
20160002768
2016-01-07

Dyeing method and apparatus for dyeing resin body by vaporization and deposition

#189
20150371882
2015-12-24

Semiconductor manufacturing apparatus

#190
20150371843
2015-12-24

Method of manufacturing semiconductor device and substrate processing apparatus

#191
20150337435
2015-11-26

Fabrication of integrated computational elements using substrate support shaped to match spatial profile of deposition plume

#192
20150235823
2015-08-20

Plasma apparatus, magnetic-field controlling method, and semiconductor manufacturing method

#193
20150221495
2015-08-06

Method of manufacturing semiconductor device by forming a film on a substrate

#194
20150214034
2015-07-30

Method of manufacturing semiconductor device by forming a film on a substrate

#195
20150214033
2015-07-30

Method of manufacturing semiconductor device by forming a film on a substrate

#196
20150214032
2015-07-30

Method of manufacturing semiconductor device by forming a film on a substrate

#197
20150214031
2015-07-30

Method of manufacturing a semiconductor device by forming a film on a substrate

#198
20150206742
2015-07-23

Method of manufacturing a semiconductor device by forming a film on a substrate

#199
20150206737
2015-07-23

Method of manufacturing a semiconductor device by forming a film on a substrate

#200
20150184279
2015-07-02

Apparatus and methods for manufacturing thin-film solar cells

#201
20150159265
2015-06-11

METAL CHALCOGENIDE THIN FILM AND PREPARING METHOD THEREOF

#202
20150136586
2015-05-21

Method for producing a polycrystalline ceramic film

#203
20150093519
2015-04-02

Stabilizing laser energy density on a target during pulsed laser deposition of thin films

#204
20150093518
2015-04-02

HEAT TREATMENT APPARATUS AND HEAT TREATMENT METHOD

#205
20150059646
2015-03-05

VAPOR-DEPOSITION DEVICE FOR COATING TWO-DIMENSIONAL SUBSTRATES

#206
20150001063
2015-01-01

Homogeneous HiPIMS coating method

#207
20140302238
2014-10-09

Apparatus and Method for the Evaporation and Deposition of Materials

#208
20140299464
2014-10-09

Antistatic coating

#209
20140262751
2014-09-18

Plasma emission monitor and process gas delivery system

#210
20140261183
2014-09-18

COATING APPARATUS

#211
20140251800
2014-09-11

Sputter source for use in a semiconductor process chamber

#212
20140251789
2014-09-11

Physical vapor deposition RF plasma shield deposit control

#213
20140235042
2014-08-21

Ion implantation method and ion implantation apparatus

#214
20140193591
2014-07-10

Method for producing a reflective optical element for EUV-lithography

#215
20140165747
2014-06-19

Deposition apparatus providing improved replacing apparatus for deposition rate measuring sensor, and replacing method using the same

#216
20140127833
2014-05-08

Deposition amount measuring apparatus, depositing apparatus including the same, and method for manufacturing light emitting display

#217
20140102879
2014-04-17

Method of manufacturing variable resistance element and apparatus for manufacturing the same

#218
20140065293
2014-03-06

Mask assembly for testing a deposition process, deposition apparatus including the mask assembly, and testing method for a deposition process using the mask assembly

#219
20140038313
2014-02-06

Semiconductor fabricating device and method for driving the same, and method for fabricating magnetic tunnel junction using the same

#220
20130260119
2013-10-03

Multi-material thermal barrier coating system

#221
20130230707
2013-09-05

Method of making durable articles

#222
20130206583
2013-08-15

Method and Apparatus for Surface Processing of a Substrate Using an Energetic Particle Beam

#223
20130202817
2013-08-08

ANTISTATIC COATING

#224
20130156936
2013-06-20

Sputter gun having variable magnetic strength

#225
20130153413
2013-06-20

SPUTTER GUN SHUTTER

#226
20130105843
2013-05-02

Light-emitting diode and deposition apparatus for fabricating the same

#227
20130105298
2013-05-02

SPUTTERING APPARATUS, FILM DEPOSITION METHOD, AND CONTROL DEVICE

#228
20130017625
2013-01-17

Semiconductor fabricating device and method for driving the same, and method for fabricating magnetic tunnel junction using the same

#229
20130008778
2013-01-10

Physical vapor deposition chamber with capacitive tuning at wafer support

#230
20130001075
2013-01-03

Sputtering apparatus and sputtering method

#231
20120298041
2012-11-29

Deflecting device for electron beams, magnetic deflecting unit for such a deflecting device, and device for vapor coating a planar substrate using such a deflecting device

#232
20120282478
2012-11-08

METHOD AND APPARATUS FOR THE MULTI-LAYER AND MULTI-COMPONENT COATING OF THIN FILMS ON SUBSTRATES, AND MULTI-LAYER AND MULTI-COMPONENT COATINGS

#233
20120276282
2012-11-01

Tooling carrier for inline coating machine, method of operating thereof and process of coating a substrate

#234
20120244691
2012-09-27

Ion implantation method and ion implantation apparatus

#235
20120207973
2012-08-16

OPTICAL MEMBER, METHOD OF MANUFACTURING THE SAME, AND OPTICAL SYSTEM USING THE SAME

#236
20120180719
2012-07-19

Film forming apparatus

#237
20120171390
2012-07-05

Methods and apparatus for sputtering using direct current

#238
20120148746
2012-06-14

Method of manufacturing thin film which suppresses unnecessary scattering and deposition of a source material

#239
20120107504
2012-05-03

EVAPORATION SYSTEM AND METHOD

#240
20120085283
2012-04-12

CORRECTION PLATE AND COATING DEVICE USING SAME

#241
20120052189
2012-03-01

VAPOR DEPOSITION SYSTEM

#242
20120000421
2012-01-05

CONTROL APPARATUS FOR PLASMA IMMERSION ION IMPLANTATION OF A DIELECTRIC SUBSTRATE

#243
20110248633
2011-10-13

Methods and apparatus for applying periodic voltage using direct current

#244
20110236714
2011-09-29

Metal foil with electric resistance film and method of producing the same

#245
20110236601
2011-09-29

Method for depositing a material

#246
20110226612
2011-09-22

Method and device for reversing the feeding of sputter coating systems in clean rooms

#247
20110223346
2011-09-15

Sputtering device and sputtering method

#248
20110165775
2011-07-07

Thin film forming method

#249
20110120861
2011-05-26

POWER SUPPLY APPARATUS

#250
20110100807
2011-05-05

Power supply apparatus

#251
20110003072
2011-01-06

BENDING FIXTURE FOR HOMOGENOUS AND SMOOTH OPERATION OF AN EVAPORATION SOURCE

#252
20100326815
2010-12-30

High Power Pulse Ionized Physical Vapor Deposition

#253
20100294649
2010-11-25

SPUTTERING FILM FORMING METHOD AND SPUTTERING FILM FORMING APPARATUS

#254
20100272921
2010-10-28

Method and devices for controlling a vapour flow in vacuum evaporation

#255
20100272918
2010-10-28

Method and system for galvanizing by plasma evaporation

#256
20100270144
2010-10-28

High Power Pulse Magnetron Sputtering For High Aspect-Ratio Features, Vias, and Trenches

#257
20100233367
2010-09-16

Controlling the vaporization of organic material

#258
20100130024
2010-05-27

Method of manufacturing semiconductor device, method of processing substrate and substrate processing apparatus for forming thin film containing at least two different elements

#259
20100102450
2010-04-29

Zinc oxide based composites and methods for their fabrication

#260
20100087016
2010-04-08

Apparatus and methods for manufacturing thin-film solar cells

#261
20100043711
2010-02-25

Thin-film deposition evaporator

#262
20100032289
2010-02-11

Method for ultra-uniform sputter deposition using simultaneous RF and DC power on target

#263
20100022101
2010-01-28

METHOD FOR CHANGING PHYSICAL VAPOR DEPOSITION FILM FORM

#264
20090258476
2009-10-15

Apparatus and methods for manufacturing thin-film solar cells

#265
20090258444
2009-10-15

Apparatus and methods for manufacturing thin-film solar cells

#266
20090258151
2009-10-15

Method and Apparatus for Coating Curved Surfaces

#267
20090258141
2009-10-15

Method and apparatus for coating surfaces

#268
20090255469
2009-10-15

Apparatus and methods for manufacturing thin-film solar cells

#269
20090255467
2009-10-15

APPARATUS AND METHODS FOR MANUFACTURING THIN-FILM SOLAR CELLS

#270
20090229969
2009-09-17

Physical vapor deposition method with a source of isotropic ion velocity distribution at the wafer surface

#271
20090127101
2009-05-21

Methods and apparatus for sputtering deposition using direct current

#272
20090075024
2009-03-19

METHOD FOR PRODUCING A THERMAL BARRIER COATING AND THERMAL BARRIER COATING FOR A COMPONENT PART

#273
20090075023
2009-03-19

METHOD FOR PRODUCING THERMAL BARRIER COATING AND A THERMAL BARRIER COATING

#274
20080210549
2008-09-04

METHOD AND APPARATUS FOR MANUFACTURING A SUBSTRATE WITH A MAGNETRON SPUTTER COATING

#275
20080199609
2008-08-21

Apparatus and method for compensating uniformity of film thickness

#276
20080173241
2008-07-24

Vapor deposition sources and methods

#277
20080115729
2008-05-22

Evaporation source and vacuum evaporator using the same

#278
20080081474
2008-04-03

Integration of a variable thickness copper seed layer in copper metallization

#279
20080023318
2008-01-31

Sputtering apparatus and method, and sputtering control program

#280
20070158177
2007-07-12

Method and device for magnetron sputtering

#281
20070090091
2007-04-26

Method for controlling uniformity of thin films fabricated in processing systems

#282
20070084715
2007-04-19

Method for the production of a substrate

#283
20060278163
2006-12-14

High throughput deposition apparatus with magnetic support

#284
20060246211
2006-11-02

Method of forming film upon a substrate

#285
20060169920
2006-08-03

Rapid-response electron-beam deposition system having a controller utilizing leading and trailing deposition indicators

#286
20060147646
2006-07-06

Deposition system using noise canceller and its method of control

#287
20060124446
2006-06-15

Method for the production of a substrate with a magnetron sputter coating and unit for the same

#288
20060099345
2006-05-11

Method for controlling the deposition of vaporized organic material

#289
20060099344
2006-05-11

Controlling the vaporization of organic material

#290
20060054493
2006-03-16

Method of producing a substrate with a surface treated by a vacuum treatment process, use of said method for the production of coated workpieces and plasma treatment chamber

#291
20050255242
2005-11-17

Apparatus and method for high rate uniform coating, including non-line of sight

#292
20050252763
2005-11-17

High deposition rate sputtering

#293
20050236276
2005-10-27

Method for coating substrates in inline installations

#294
20050178654
2005-08-18

High deposition rate sputtering

#295
20050103620
2005-05-19

PLASMA SOURCE WITH SEGMENTED MAGNETRON CATHODE

#296
20050030882
2005-02-10

Optical information recording medium and method of manufacturing thereof, manufacturing apparatus, recording/reproducing method, and recording/reproducing apparatus

#297
20050023135
2005-02-03

Vacuum treatment system and process for manufacturing workpieces