120106 ⎘
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating; Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks Transferring the substrates through a series of coating stations
Protective layer for a body, and process and arrangement for producing protective layers
#602Vacuum treatment installation for flat rectangular or square substrates
#603Plasma processing apparatus, protecting layer therefor and installation of protecting layer
#604Thin-film deposition system
#605Optical information recording medium and method of manufacturing thereof, manufacturing apparatus, recording/reproducing method, and recording/reproducing apparatus
#606Concentration-modulated coatings
#607Soil-resistant coating for glass surfaces
#608Evaporation container and vapor deposition apparatus
#609Methods and apparatuses for depositing film on both sides of a pane
#610Method of forming film by sputtering, optical member, and sputtering apparatus
#611Dual substrate loadlock process equipment
#612Self-ionized and inductively-coupled plasma for sputtering and resputtering
#613Method of fabricating an EL display device, and apparatus for forming a thin film
#614Method for producing a uv-absorbing transparent wear protection layer
#615Multi-chamber installation for treating objects under vacuum, method for evacuating said installation and evacuation system therefor
#616Metal nanoparticle fabrication on TCO for plasmonic interaction of photons
#617System and method for vapor deposition of substrates with circular substrate frame that rotates in a planetary motion and curved lens support arms
#618Vapor deposition system and method
#619Vapor deposition system
#620Continuous web apparatus and method using an air to vacuum seal and accumulator
#621Photovoltaic cell with copper poor CIGS absorber layer and method of making thereof