Film Formation Apparatus and Manufacturing Apparatus

Substrate conveyer and vacuum processing apparatus

RESIN PRODUCT MANUFACTURING SYSTEM

Vacuum processing apparatus and processing method using the same

Gallium nitride-based LED fabrication with PVD-formed aluminum nitride buffer layer

Organic layer deposition apparatus

Thin film deposition apparatus

PLASMA PROCESSING APPARATUS AND PRINTED WIRING BOARD MANUFACTURING METHOD

Substrate processing method

High infrared reflection coatings, thin film coating deposition methods and associated technologies

Method, holding means, apparatus and system for transporting a flat material to be treated and loading or unloading apparatus

THIN-FILM FORMATION SYSTEM AND ORGANIC EL DEVICE MANUFACTURING SYSTEM

Organic layer deposition apparatus, and method of manufacturing organic light-emitting display apparatus using the same

Thin film depositing apparatus

Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using the same

SPUTTERING APPARATUS HAVING SHIELDING DEVICE

Vacuum Processing Apparatus, Vacuum Processing Method, and Micro-Machining Apparatus

THIN FILM DEPOSITION APPARATUS AND METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY DEVICE BY USING THE SAME

Thin film deposition apparatus, method of manufacturing organic light-emitting display device by using the apparatus, and organic light-emitting display device manufactured by using the method

Substrate depositing system and depositing method using the same

DEPOSITION APPARATUS, APPARATUS FOR SUCCESSIVE DEPOSITION, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

Entrance and exit roll seal configuration for a vapor deposition system

Multi-environment coating device

SYSTEM AND METHOD FOR FABRICATING THIN-FILM PHOTOVOLTAIC DEVICES

DEPOSITION SYSTEM CAPABLE OF PROCESSING MULTIPLE ROLL-FED SUBSTRATES

SYSTEMS AND METHODS FOR HIGH-RATE DEPOSITION OF THIN FILM LAYERS ON PHOTOVOLTAIC MODULE SUBSTRATES

Conveyor Assembly with Releasable Drive Coupling

Substrate holder stocker device, substrate processing apparatus, and substrate holder moving method using the substrate holder stocker device

Atomic layer deposition apparatus and thin film forming method

Processes and device for the deposition of films on substrates

Device and method for fabricating thin films by reactive evaporation

VACUUM PROCESSING APPARATUS, SUBSTRATE ROTATION APPARATUS, AND DEPOSITION METHOD

Electrochromic devices

SPUTTERING SYSTEM

FILM FORMING APPARATUS AND METHOD OF PRODUCING SUBSTRATE USING SAME

MODULAR SYSTEM FOR HIGH-RATE DEPOSITION OF THIN FILM LAYERS ON PHOTOVOLTAIC MODULE SUBSTRATES

Method of manufacturing magnetoresistive device and apparatus for manufacturing the same

Coating system

RACK AND PINION MECHANISM, VACUUM PROCESSING APPARATUS, METHOD OF DRIVING AND CONTROLLING RACK AND PINION MECHANISM, DRIVE CONTROL PROGRAM, AND RECORDING MEDIUM

Composite coating apparatus

Vacuum Coating System and Method for Operating a Vacuum Coating System

DEVICE FOR SEALING A CHAMBER INLET OR A CHAMBER OUTLET FOR A FLEXIBLE SUBSTRATE, SUBSTRATE PROCESSING APPARATUS, AND METHOD FOR ASSEMBLING SUCH A DEVICE

Method and device for reversing the feeding of sputter coating systems in clean rooms

Sublayers for magnetically soft underlayer

Thin film deposition apparatus

Fabrication of low defectivity electrochromic devices

Sputtering Apparatus, Thin-Film Forming Method, and Manufacturing Method for a Field Effect Transistor

MAGNETRON SPUTTERING DEVICE

DIRECT LIQUID VAPORIZATION FOR OLEOPHOBIC COATINGS

Film forming apparatus

Isolation chamber and method of using the isolation chamber to make solar cell material

Vacuum Processing Apparatus

Thin film deposition apparatus, method of manufacturing organic light-emitting display device by using the apparatus, and organic light-emitting display device manufactured by using the method

Automatic feed system and related process for introducing source material to a thin film vapor deposition system

RELIABILITY OF BACK END OF LINE PROCESS BY ADDING PVD OXIDE FILM

Method for depositing film

Modular system and process for continuous deposition of a thin film layer on a substrate

Modular system and process for continuous deposition of a thin film layer on a substrate

METHOD OF MANUFACTURING MAGNETORESISTANCE ELEMENT AND STORAGE MEDIUM USED IN THE MANUFACTURING METHOD

CONVEYOR ASSEMBLY FOR A VAPOR DEPOSITION APPARATUS

IN-LINE SYSTEM FOR MANUFACTURING SOLAR CELL

MANUFACTURING APPARATUS

High infrared reflection coatings, thin film coating deposition methods and associated technologies

SPUTTERING DEPOSITION APPARATUS

Method and system for isolated and discretized process sequence integration

VACUUM PROCESSING APPARATUS, VACUUM PROCESSING METHOD, AND ELECTRONIC DEVICE MANUFACTURING METHOD

SPUTTERING DEVICE

METHOD FOR PRODUCING MAGNETIC RECORDING MEDIUM AND PRODUCING APPARATUS THEREOF

SPUTTERING DEPOSITION APPARATUS

Thin film deposition apparatus and method of manufacturing organic light-emitting display apparatus using the same

COATING APPARATUS

Method and apparatus for inline deposition of materials on a non-planar surface

Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using the same

FAST DEPOSITION SYSTEM AND METHOD FOR MASS PRODUCTION OF LARGE-AREA THIN-FILM CIGS SOLAR CELLS

FILM DEPOSITION APPARATUS AND FILM DEPOSITION METHOD

Film coating apparatus

Method of manufacturing solar battery

SUBSTRATE PROCESSING SYSTEM AND METHODS THEREOF

DEPOSITION APPARATUS AND METHOD OF CONTROLLING THE SAME

Magnetic particle trapper for a disk sputtering system

High quality reflectance coatings

Multi-chamber workpiece processing

VACUUM PROCESSING APPARATUS, VACUUM PROCESSING METHOD, AND COMPUTER READABLE STORAGE MEDIUM

Coating apparatus

Transportable, miniature, chamberless, low power, micro metallizer

FILM FORMING DEVICE CONTROL METHOD, FILM FORMING METHOD, FILM FORMING DEVICE, ORGANIC EL ELECTRONIC DEVICE, AND RECORDING MEDIUM STORING ITS CONTROL PROGRAM

Method of manufacturing a high density capacitor or other microscopic layered mechanical device

CONTROLLED OXIDATION OF BOND COAT

ELECTRON BEAM VAPOR DEPOSITION APPARATUS FOR DEPOSITING MULTI-LAYER COATING

Film Deposition Apparatus, Method for Depositing Film, and Method for Manufacturing Lighting Device

Electrochromic devices

Fabrication of low defectivity electrochromic devices

Manufacturing apparatus and manufacturing method of lighting device

Method and apparatus for manufacturing magnetic recording medium

Gas flow set-up for multiple, interacting reactive sputter sources

Weight plate of vacuum evaporation apparatus and vacuum evaporation apparatus using the same

METHOD AND APPARATUS FOR MANUFACTURING MAGNETIC RECORDING MEDIUM

Photovoltaic devices including copper indium gallium selenide

DEPOSITION APPARATUS, DEPOSITION SYSTEM AND DEPOSITION METHOD

Substrate Processing Apparatus

Systems and methods for substrate processing

Integrated facility and process chamber for substrate processing

Method of forming thin film and apparatus for forming thin film

EVAPORATION CONTAINER AND VAPOR DEPOSITION APPARATUS

Vacuum processing apparatus

SPUTTERING METHOD AND SPUTTERING APPARATUS

FABRICATION SYSTEM AND FABRICATION METHOD

Method and structure of a thick metal layer using multiple deposition chambers

SPUTTERING APPARATUS, THIN FILM FORMATION APPARATUS, AND MAGNETIC RECORDING MEDIUM MANUFACTURING METHOD

THIN FILM FORMATION APPARATUS AND MAGNETIC RECORDING MEDIUM MANUFACTURING METHOD

Dual substrate loadlock process equipment

LOW PRESSURE VAPOR PHASE DEPOSITION OF ORGANIC THIN FILMS

Confining Magnets In Sputtering Chamber

TRANSPORTING DEVICE FOR A VACUUM PROCESSING APPARATUS, DRIVE DEVICE FOR A COMPONENT OF A VACUUM PROCESSING APPARATUS, AND A VACUUM PROCESSING APPARATUS

SPUTTERING METHOD AND SPUTTERING APPARATUS

EVAPORATING APPARATUS AND METHOD FOR OPERATING THE SAME

EQUIPMENT AND METHOD FOR PHYSICAL VAPOR DEPOSITION

Substrate processing apparatus

SUBSTRATE PROCESSING APPARATUS

Processing tool with combined sputter and evaporation deposition sources

IN-LINE FILM FORMING APPARATUS AND MANUFACTURING METHOD OF MAGNETIC RECORDING MEDIUM

In-line film forming apparatus and manufacturing method of magnetic recording medium

METHOD OF FABRICATING AND APPARATUS OF FABRICATING TUNNEL MAGNETIC RESISTIVE ELEMENT

ARRANGEMENT FOR COATING A CRYSTALLINE SILICON SOLAR CELL WITH AN ANTIREFLECTION/PASSIVATION LAYER

CARRIER WITH DEPOSITION SHIELD

COATING SYSTEM AND METHOD FOR COATING A SUBSTRATE

Multilayer Film Forming Method and Multilayer Film Forming Apparatus

Evaporation method, evaporation device and method of fabricating light emitting device

Apparatus

DEPOSITION APPARATUS, DEPOSITION SYSTEM AND DEPOSITION METHOD

Method for depositing multilayer coatings

SELF-IONIZED AND INDUCTIVELY-COUPLED PLASMA FOR SPUTTERING AND RESPUTTERING

Thin-Film Deposition System

Method of manufacturing plasma display panel

COATING APPARATUS WITH ROTATION MODULE

Coating apparatus with rotation module

Film forming apparatus, film forming system, film forming method, and method of manufacturing electronic device or organic electroluminescence element

Processes and device for the deposition of films on substrates

HIGHLY REFLECTIVE LAYER SYSTEM, METHOD FOR PRODUCING THE LAYER SYSTEM AND DEVICE FOR CARRYING OUT THE METHOD

Manufacturing Apparatus

COATING METHODS AND APPARATUS FOR MAKING A CIGS SOLAR CELL

Generation of multilayer structures in a single sputtering module of a multi-station magnetic recording media fabrication tool

VACUUM COATING TECHNIQUES

Method for manufacturing magnetic recording medium and connecting device used in manufacturing magnetic recording medium

Apparatus and methods for transporting and processing substrates

Method of manufacturing organic light emitting display

Vacuum coating system comprising a transport unit for transporting substrates

Multi-Pass Vacuum Coating Systems

SPUTTERING APPARATUS

PRINTER AND METHOD FOR CONTROLLING PRINTER

Apparatus for Manufacturing Magnetic Recording Disk, and In-Line Type Substrate Processing Apparatus

Method of manufacturing magnetoresistive device

Vertical substrate transfer apparatus and film-forming apparatus

Separating device for process chambers of vacuum coating installations and vacuum coating installation

Multi-story substrate treating apparatus with flexible transport mechanisms and vertically divided treating units

SPUTTERING APPARATUS AND SPUTTERING METHOD

SPUTTERING APPARATUS AND SPUTTERING METHOD

IN-LINE FILM-FORMATION APPARATUS

Evaporation donor substrate and method for manufacturing light-emitting device

Method of fabricating light emitting devices

Device and method for fabricating thin films by reactive evaporation

Light-emitting device

Film forming apparatus and method for manufacturing light emitting element

Apparatus for manufacturing magnetic recording disk, and in-line type substrate processing apparatus

Apparatus for producing group-III nitride semiconductor layer, method of producing group-III nitride semiconductor layer, method of producing group-III nitride semiconductor light-emitting device, group-III nitride semiconductor light-emitting device thereof, and lamp thereof

Successive vapour deposition system, vapour deposition system, and vapour deposition process

BATCH EQUIPMENT ROBOTS AND METHODS OF ARRAY TO ARRAY WORK-PIECE TRANSFER FOR PHOTOVOLTAIC FACTORY

Elongate vacuum system for coating one or both sides of a flat substrate

Magnetoresistive element, method of manufacturing the same, and magnetic multilayered film manufacturing apparatus

TRANSFER CHAMBER WITH VACUUM EXTENSION FOR SHUTTER DISKS

Method of and apparatus for inline deposition of materials on a non-planar surface

PROCESSING DEVICE AND METHOD FOR PROCESSING A SUBSTRATE

Film formation apparatus, film formation method, manufacturing apparatus, and method for manufacturing light-emitting device

Vacuum Processing Device and Method of Manufacturing Optical Disk

Glare free mirror pane as well as a rear view mirror with such a mirror pane

Fabrication system and fabrication method

Vacuum film deposition apparatus

Vacuum coater device and mechanism for supporting and manipulating workpieces in same

Apparatus for manufacturing magnetic recording disk, and in-line type substrate processing apparatus

INLINE VACUUM PROCESSING APPARATUS AND METHOD FOR PROCESSING SUBSTRATES THEREIN

Sputtering apparatus and film-forming processes

Sputtering apparatus, method for producing a transparent electroconductive film

Semiconductor substrate processing apparatus with horizontally clustered vertical stacks

Method of deposition of a layer on a razor blade edge and razor blade

Apparatus for Manufacturing Magnetic Recording Disk, and In-Line Type Substrate Processing Apparatus

Film forming apparatus

Vacuum Processing Apparatus, Method for Manufacturing Semiconductor Device, and System For Manufacturing Semiconductor Device

Thin film forming apparatus

PROCESSING CHAMBER

Self-ionized and inductively-coupled plasma for sputtering and resputtering

Deposition apparatus and method

Film formation apparatus and film formation method and cleaning method

Method of making first surface mirror with oxide graded reflecting layer structure

Apparatus for manufacturing semiconductor device and method for manufacturing semiconductor device using the same

Methods for producing photomask blanks, cluster tool apparatus for producing photomask blanks and the resulting photomask blanks from such methods and apparatus

Metal multi-layered film structure and method of manufacturing and use of the same

APPARATUS FOR VACUUM TREATING TWO DIMENSIONALLY EXTENDED SUBSTRATES AND METHOD FOR MANUFACTURING SUCH SUBSTRATES

Vacuum Coating System for Coating Elongate Substrates

Vacuum processing device

Method and system for isolated and discretized process sequence integration

Method and system for isolated and discretized process sequence integration

Highly pure film formation method for light emitting device using gas from evaporated electroluminescent source

Hard laminated film, method of manufacturing the same and film-forming device

Surface-coated cutting tool and method for producing same

Apparatus and Method for Coating Substrates With Approximate Process Isolation

Coater having substrate cleaning device and coating deposition methods employing such coater

Apparatus for Manufacturing Magnetic Recording Disk, and In-Line Type Substrate Processing Apparatus

Sputter deposition system and methods of use

Sputter Deposition System and Methods of Use

Solar selective coating having higher thermal stability useful for harnessing solar energy and a process for the preparation thereof

APPARATUS FOR REACTIVE SPUTTERING

Manufacturing apparatus

Machine for treating substrates and method

Concentration-modulated coatings

Processing apparatus

Systems and methods for back-biased face target sputtering

Low pressure vapor phase deposition of organic thin films

APPARATUS AND METHOD FOR MANUFACTURING A MULTILAYER FILM

DUAL SUBSTRATE LOADLOCK PROCESS EQUIPMENT

Back-biased face target sputtering based high density non-volatile caching data storage

Back-biased face target sputtering based high density non-volatile data storage

High infrared reflection coatings and associated technologies

High infrared reflection coatings

High infrared reflection coatings and thin film coating deposition methods

Methods and equipment for depositing high quality reflective coatings

Multiple cavity low-emissivity coatings

Low-emissivity coatings having high visible transmission and low solar heat gain coefficient

Substrate carrier

Deposition device

MOVABLE TRANSFER CHAMBER AND SUBSTRATE-TREATING APPARATUS INCLUDING THE SAME

Integrated PVD system using designated PVD chambers

Substrate movement and process chamber scheduling

Integrated metrology tools for monitoring and controlling large area substrate processing chambers

Self-adjustable and cross-chamber transmission system

Hybrid PVD-CVD system

Hybrid PVD-CVD system

Manufacturing apparatus for oriented film, liquid crystal device, and electronic device

Magnetic disk, manufacturing method therefor and magnetic recording device

Continuous OLED coating machine

Inclined carrier transferring apparatus

System and method for treating substrates

Linear vacuum deposition system

Dual gate isolating maintenance slit valve chamber with pumping option

Systems and methods for plasma etching

Method and apparatus for formation of oriented magnetic films for magnetic recording media

Thin film forming device and thin film forming method

Module for Coating System and Associated Technology

Back-biased face target sputtering based liquid crystal display device

Back-biased face target sputtering

System for coating a substrate, and an insert element

Thin film forming method and forming device therefor

Method for depositing multilayer coatings

Perpendicular magnetic recording medium for high density recording and manufacturing of the same

Vacuum device

Thin film forming device and thin film forming method

Methods and equipment for depositing hydrophilic coatings, and deposition technologies for thin films

Single-pass growth of multilayer patterned electronic and photonic devices using a scanning localized evaporation methodology (SLEM)

Fabrication system and fabrication method

Fabrication system and fabrication method

Methods and equipment for depositing coatings having sequenced structures

Thermal process for creation of an in-situ junction layer in CIGS

Pallet based system for forming thin-film solar cells

Method and apparatus for forming a thin-film solar cell using a continuous process

Pressure control system in a photovoltaic substrate deposition apparatus

High uniformity 1-D multiple magnet magnetron source

Magnetic recording medium and method for production thereof

Low-maintenance coatings

Low-maintenance coatings

Coater having interrupted conveyor system

Making a cathode structure for OLEDs

Low-E coated articles having zirconium inclusive dielectric layer

Multi-chamber processing with simultaneous workpiece transport and gas delivery

Sputtering magnetron control devices

Method of forming coated article using sputtering target(s) and ion source(s) and corresponding apparatus

Soil-resistant coating for glass surfaces

Apparatus for manufacturing a luminescent device using a buffer cassette

Deposition apparatus and method

Drive mechanism for a vacuum treatment apparatus

Self-ionized and inductively-coupled plasma for sputtering and resputtering

Cathode apparatus to selectively bias pallet during sputtering

Apparatus for depositing a multilayer coating on discrete sheets

Manufacturing method for organic electronic element and manufacturing apparatus therefor

Guide arrangement with at least on guide roller for the guidance of webs in webs treatment installations

Sputtering apparatus

Convertible maintenance valve

Method for operating an in-line coating installation

Method and apparatus for multi-stage sputter deposition of uniform thickness layers

Hard laminated film, method of manufacturing the same and film-forming device

Processes and device for the deposition of films on substrates

Film forming apparatus, substrate for forming oxide thin film and production method thereof

Device for targeted application of deposition material to a substrate

Installation for the vacuum treatment in particular of substrates

Temporary protective covers

Small volume environmental chamber and multi-chamber processing apparatus comprising same

Sputtering apparatus and sputter film deposition method

Growth of in-situ thin films by reactive evaporation

Film forming apparatus

Apparatus

Film formation apparatus and film formation method and cleaning method

Apparatus for manufacturing magnetic recording disk, and in-line type substrate processing apparatus