120106 ⎘
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating; Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks Transferring the substrates through a series of coating stations
PVD COATING SYSTEM WITH CONTINUOUS MULTI-LAYER CONVEYING MODE AND COATING PROCESS THEREOF
#2Method, control device, computer program and storage medium
#3SYSTEM AND METHOD FOR PROCESSING SUBSTRATE
#4MAGNETIC RECORDING MEDIUM PRODUCTION APPARATUS, MAGNETIC RECORDING MEDIUM PRODUCTION METHOD, AND VARNISHING DEVICE
#5PHYSICAL VAPOR DEPOSITION MODULE AND SYSTEM INCLUDING SAME
#6DYNAMIC FILM COATING DEVICE AND DYNAMIC FILM COATING METHOD USING SAME
#7FILM FORMING APPARATUS
#8INSTALLATION, METHOD, AND CARRIER FOR COATING EYEGLASS LENSES
#9APPARATUS, SYSTEM AND METHOD TO REDUCE CRAZING
#10MANUFACTURING APPARATUS FOR SOLID-STATE SECONDARY BATTERY AND METHOD FOR MANUFACTURING SOLID-STATE SECONDARY BATTERY
#11INLINE SYSTEM FOR COATING INDIVIDUAL SUBSTRATES OR GROUPS OF SUBSTRATES AND METHOD FOR COATING INDIVIDUAL SUBSTRATES OR SUBSTRATE GROUPS IN AN INLINE COATING SYSTEM
#12CARRIER WITH VERTICAL GRID FOR SUPPORTING SUBSTRATES IN COATER
#13PROCESSING LINE FOR DEPOSITING THIN-FILM COATINGS
#14FILM FORMING APPARATUS
#15SURFACE TREATMENT APPARATUS
#16STABLE GROUND ANODE APERTURE FOR THIN FILM PROCESSING
#17MANUFACTURING EQUIPMENT FOR LIGHT-EMITTING DEVICE
#18SOFT MAGNETIC MULTILAYER DESPOSITION APPARATUS, METHODS OF MANUFACTURING AND MAGNETIC MULTILAYER
#19DEPOSITION APPARATUS AND DEPOSITION METHOD USING THE SAME
#20MANUFACTURING EQUIPMENT FOR LIGHT-EMITTING DEVICE
#21SUBSTRATE HOLDER, SUBSTRATE HOLDING METHOD, AND FILM FORMATION APPARATUS
#22SEMICONDUCTOR PROCESS EQUIPMENT
#23In-line monitoring of OLED layer thickness and dopant concentration
#24MANUFACTURING DEVICE OF DISPLAY DEVICE
#25METHOD AND DEVICE FOR CHANGING TEST SUBSTRATES IN A CONTINUOUS-FLOW VACUUM SYSTEM, TREATMENT METHOD, AND CONTINUOUS-FLOW VACUUM SYSTEM
#26APPLYING A TRANSPARENT CONDUCTIVE FILM TO FLUORINE-DOPED TIN OXIDE
#27Multi-chamber Configuration
#28MAGNETRON SPUTTERING APPARATUS
#29FILM DEPOSITION APPARATUS AND FILM DEPOSITION METHOD
#30DEPOSITION APPARATUS
#31TUNGSTEN GAP FILL WITH HYDROGEN PLASMA TREATMENT
#32SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
#33MULTI-CHAMBER SEMICONDUCTOR PROCESSING SYSTEM WITH TRANSFER ROBOT TEMPERATURE ADJUSTMENT
#34MODULAR MULTI-CHAMBER PROCESSING TOOL HAVING LINK CHAMBER FOR ULTRA HIGH VACCUM PROCESSES
#35ELECTROCHROMIC CATHODE MATERIALS
#36Carrier with vertical grid for supporting substrates in coater
#37COATING INSTALLATION, CLAMPING RING AND MAGAZINE FOR SPECTACLE LENSES AND METHOD OF COATING SPECTACLE LENSES
#38SYSTEM FOR DEPOSITING PIEZOELECTRIC MATERIALS, METHODS FOR USING THE SAME, AND MATERIALS DEPOSITED WITH THE SAME
#39SUBSTRATE PROCESSING SYSTEM
#40COUNTER ELECTRODE MATERIAL FOR ELECTROCHROMIC DEVICES
#41ELECTROCHROMIC CATHODE MATERIALS
#42PROCESSING SYSTEM FOR PROCESSING A FLEXIBLE SUBSTRATE AND METHOD OF MEASURING AT LEAST ONE OF A PROPERTY OF A FLEXIBLE SUBSTRATE AND A PROPERTY OF ONE OR MORE COATINGS ON THE FLEXIBLE SUBSTRATE
#43APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR TREATING SUBSTRATE
#44Transfer apparatus and film deposition apparatus using transfer apparatus
#45DIELECTRIC COATED LITHIUM METAL ANODE
#46PVD APPARATUS
#47EVAPORATOR FOR EFFECTIVE SURFACE AREA EVAPORATION
#48Counter electrode for electrochromic devices
#49SPUTTER DEPOSITION APPARATUS AND METHOD
#50Fabrication of low defectivity electrochromic devices
#51INCLUSION OF SPECIAL ROLLER TO AVOID CREASING, WRINKLING AND DISTORTION OF FLEXIBLE SUBSTRATE IN ROLL TO ROLL PROCESS
#52Carrier with vertical grid for supporting substrates in coater
#53FILM FORMATION APPARATUS
#54SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD
#55Organic layer deposition apparatus and method of manufacturing organic light-emitting display apparatus using the same
#56System and method to evaporate an OLED layer stack in a vertical orientation
#57COMMON VACUUM SHUTTER AND PASTING MECHANISM FOR A MULTISTATION CLUSTER PLATFORM
#58METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
#59Magnetic levitation system, base and carrier of a magnetic levitation system, and method of levitating a carrier
#60COUNTER ELECTRODE FOR ELECTROCHROMIC DEVICES
#61Semiconductor component with oxidized aluminum nitride film and manufacturing method thereof
#62Multi-chamber substrate processing platform
#63EVAPORATION SYSTEM AND EVAPORATION METHOD
#64System for forming nano-laminate optical coating
#65COATED-SUBSTRATE SENSING AND CRAZING MITIGATION
#66FILM FORMATION APPARATUS
#67Apparatus for manufacturing semiconductor device
#68ELECTROCHROMIC CATHODE MATERIALS
#69Fabrication of low defectivity electrochromic devices
#70IRON NITRIDE MAGNETIC MATERIAL INCLUDING COATED NANOPARTICLES
#71GLASS PALLET FOR SPUTTERING SYSTEMS
#72CONTINUOUS FLOW SYSTEM AND METHOD FOR COATING SUBSTRATES
#73Sputtering apparatus
#74EVAPORATION SOURCE FOR ORGANIC MATERIAL, DEPOSITION APPARATUS FOR DEPOSITING ORGANIC MATERIALS IN A VACUUM CHAMBER HAVING AN EVAPORATION SOURCE FOR ORGANIC MATERIAL, AND METHOD FOR EVAPORATING ORGANIC MATERIAL
#75Transport system
#76In-line monitoring of OLED layer thickness and dopant concentration
#77Apparatus and method for contactless transportation of a device in a vacuum processing system
#78VACUUM-COATING SYSTEM AND METHOD FOR COATING A BAND-TYPE MATERIAL
#79PROCEDURE FOR COATING COMPONENT SURFACES UNDER VACUUM AND THE VACUUM COATING SYSTEM USED FOR THIS PURPOSE
#80ELECTROCHROMIC DEVICES
#81DIELECTRIC COATED LITHIUM METAL ANODE
#82System with dual-motion substrate carriers
#83Counter electrode material for electrochromic devices
#84DEPOSITION METHODS FOR HIGH QUALITY REFLECTANCE COATINGS
#85Carrier with vertical grid for supporting substrates in coater
#86Film formation device for cutting tool provided with coating film, and film formation method for cutting tool provided with coating film
#87Film formation apparatus and film formation method
#88Sputter deposition apparatus including roller assembly and method
#89Fabrication of low defectivity electrochromic devices
#90Deposition apparatus
#91METHODS OF OPERATING A VACUUM PROCESSING SYSTEM
#92APPARATUS AND SYSTEM FOR VACUUM DEPOSITION ON A SUBSTRATE AND METHOD FOR VACUUM DEPOSITION ON A SUBSTRATE
#93PERMEATION-BARRIER
#94PERMEATION-BARRIER
#95SOFT MAGNETIC MULTILAYER DESPOSITION APPARATUS, METHODS OF MANUFACTURING AND MAGNETIC MULTILAYER
#96DEPOSITION APPARATUS, ELECTRONIC DEVICE MANUFACTURING APPARATUS, AND DEPOSITION METHOD
#97Organic layer deposition apparatus and method of manufacturing organic light-emitting display apparatus using the same
#98System, method and support for coating eyeglass lenses
#99Device, method and use for the coating of lenses
#100Counter electrode for electrochromic devices
#101FABRICATION OF LOW DEFECTIVITY ELECTROCHROMIC DEVICES
#102Batch processing system with vacuum isolation
#103High infrared reflection coatings, thin film coating deposition methods and associated technologies
#104FABRICATION OF LOW DEFECTIVITY ELECTROCHROMIC DEVICES
#105VACUUM SYSTEM AND METHOD FOR DEPOSITING A PLURALITY OF MATERIALS ON A SUBSTRATE
#106Physical vapor deposition in-chamber electro-magnet
#107Apparatus, system and method to reduce crazing
#108In-line coater for vacuum deposition of thin film coatings
#109Device for processing a component, carriage for the device, and method for operating the device
#110HIGH THROUGHPUT CONTINUOUS OPERATION REACTOR SYSTEM
#111MANUFACTURING DEVICE FOR LIGHT EMITTING ELEMENT
#112Electrochromic cathode materials
#113FILM FORMATION APPARATUS
#114Flexible substrate deposition system
#115METHODS AND APPARATUS FOR PHYSICAL VAPOR DEPOSITION
#116Fabrication of low defectivity electrochromic devices
#117Modulating the microstructure of metallic interconnect structures
#118Electrochromic devices
#119COATING APPARATUS
#120Device for manufacturing a multilayer stacked structure and method for manufacturing a thin film capacitor
#121Counter electrode material for electrochromic devices
#122SEAL-LESS AIRLOCK WAFER STAGE
#123Film formation apparatus
#124Manufacturing method of a light emitting device
#125Evaporation equipment
#126Apparatus for transportation of a substrate carrier in a vacuum chamber, system for vacuum processing of a substrate, and method for transportation of a substrate carrier in a vacuum chamber
#127Vacuum processing device
#128Evaporation device and evaporation method using the same
#129Film formation apparatus, film formation method, and manufacturing method of solar battery
#130Systems and methods for low resistivity physical vapor deposition of a tungsten film
#131DIFFUSED CENTER GAS INJECTION COOLING PLATE FOR MEDIA COOLING
#132SELF-IONIZED AND INDUCTIVELY-COUPLED PLASMA FOR SPUTTERING AND RESPUTTERING
#133Substrate processing apparatus
#134Device for coating extra-long sheet-type substrates, in particular glass panes, in a vacuum coating system
#135Plasma processing apparatus
#136APPARATUS AND METHOD FOR LOADING A SUBSTRATE INTO A VACUUM PROCESSING MODULE, APPARATUS AND METHOD FOR TREATMENT OF A SUBSTRATE FOR A VACUUM DEPOSITION PROCESS IN A VACUUM PROCESSING MODULE, AND SYSTEM FOR VACUUM PROCESSING OF A SUBSTRATE
#137APPARATUS FOR VACUUM DEPOSITION ON A SUBSTRATE AND METHOD FOR MASKING THE SUBSTRATE DURING VACUUM DEPOSITION
#138Coating methods and apparatus
#139Fabrication of low defectivity electrochromic devices
#140Process for making of glass articles with optical and easy-to-clean coatings
#141High Throughput Vacuum Deposition Sources and System
#142Fabrication of low defectivity electrochromic devices
#143Apparatus And Method For Processing Thin Substrates
#144System architecture for combined static and pass-by processing
#145Silver copper indium gallium selenide reactive sputtering method and apparatus, and photovoltaic cell containing same
#146Collimator for use in a physical vapor deposition chamber
#147EVAPORATION METHOD, EVAPORATION DEVICE AND METHOD OF FABRICATING LIGHT EMITTING DEVICE
#148Thin film encapsulation mask preheat and substrate buffer chamber
#149METHODS OF FORMING MGO BARRIER LAYER
#150FABRICATION OF LOW DEFECTIVITY ELECTROCHROMIC DEVICES
#151Single oxide metal deposition chamber
#152Apparatus for processing long base material by roll-to-roll method and film forming apparatus using the same
#153Vacuum arc deposition apparatus and deposition method
#154Manufacturing device and manufacturing method of light-emitting element
#155Coating methods and apparatus
#156Ion implantation for modification of thin film coatings on glass
#157Mask assembly for testing a deposition process, deposition apparatus including the mask assembly, and testing method for a deposition process using the mask assembly
#158Material joining
#159Method of forming later insulating films for MTJ
#160Integrated 3D metallizer
#161Multisurface simultaneous sputtering and shuttering
#162UV light emitting devices and systems and methods for production
#163Temperable electrochromic devices
#164Vapor deposition system
#165INTEGRATION OF LASER PROCESSING WITH DEPOSITION OF ELECTROCHEMICAL DEVICE LAYERS
#166Fabrication of low defectivity electrochromic devices
#167High quality reflectance coatings
#168Deposition methods for high quality reflectance coatings
#169Deposition apparatus, method thereof and method for forming quantum-dot layer using the same
#170System for depositing one or more layers on a substrate supported by a carrier and method using the same
#171High infrared reflection coatings, thin film coating deposition methods and associated technologies
#172Deposition apparatus
#173Iron nitride magnetic material including coated nanoparticles
#174Electrochromic devices
#175Method of coating both sides of a substrate using a sacrificial coating
#176Film formation device for cutting tool provided with with coating film, and film formation method for cutting tool provided with coating film
#177METHOD OF MANUFACTURING MULTI-LAYERED FILM AND MULTI-LAYERED FILM
#178Systems and methods for low resistivity physical vapor deposition of a tungsten film
#179Acoustic resonator structure with inclined C-axis piezoelectric bulk and crystalline seed layers
#180EVAPORATION DEVICE AND METHOD
#181Manufacturing apparatus
#182Fabrication of low defectivity electrochromic devices
#183Method for producing transparent conductive film
#184Plasma excitation for spatial atomic layer deposition (ALD) reactors
#185System, method and apparatus for forming a thin film lithium ion battery
#186Organic light-emitting display apparatus, organic layer deposition apparatus, and method of manufacturing the organic light-emitting display apparatus by using the organic layer deposition apparatus
#187Roll-to-roll hybrid plasma modular coating system
#188UV light emitting devices and systems and methods for production
#189High quality reflectance coatings
#190Ion implantation for modification of thin film coatings on glass
#191Counter electrode for electrochromic devices
#192Thin substrate processing device
#193Method of using a multi-pass vacuum coating system
#194Mask for deposition system and method for using the mask
#195DEPOSITION APPARATUS, APPARATUS FOR SUCCESSIVE DEPOSITION, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
#196ROLLER FOR SPREADING OF A FLEXIBLE SUBSTRATE, APPARATUS FOR PROCESSING A FLEXIBLE SUBSTRATE AND METHOD OF OPERATING THEREOF
#197Fabrication of low defectivity electrochromic devices
#198Substrate carrier unit for a film deposition apparatus
#199Deposition apparatus
#200Methods of forming MgO barrier layer
#201Method of manufacturing semiconductor device and semiconductor manufacturing apparatus
#202Apparatus and method of manufacturing display device
#203Vapor deposition system and method
#204Solid-state batteries utilizing template layers for electrode formation and methods for forming the same
#205Vacuum process apparatus and vacuum process method
#206Deposition apparatus, method thereof and method for forming quantum-dot layer using the same
#207Deposition apparatus
#208METHOD OF MANUFACTURING MAGNETORESISTIVE MEMORY DEVICE AND MANUFACTURING APPARATUS OF THE SAME
#209Ferroelectric ceramics, electronic component and manufacturing method of ferroelectric ceramics
#210APPARATUS FOR THE VACUUM TREATMENT OF SUBSTRATES
#211Glass pallet for sputtering systems
#212Fabrication of low defectivity electrochromic devices
#213High throughput vacuum deposition sources and system
#214Vacuum coating apparatus
#215Sputtering apparatus
#216Electrochromic devices
#217Multi-story substrate treating apparatus with flexible transport mechanisms and vertically divided treating units
#218APPARATUS WITH NEIGHBORING SPUTTER CATHODES AND METHOD OF OPERATION THEREOF
#219COMBINATION VAPOR DEPOSITION CHAMBER
#220Method and system for maintaining an edge exclusion shield
#221In-line coating device, in-line coating method, and separator
#222Processing apparatus having a first shield and a second shield arranged to sandwich a substrate
#223Thin film deposition apparatus
#224Systems and methods for forming semiconductor devices
#225Electronic device manufacturing apparatus
#226Multilayer thin film manufacturing method and electronic product
#227In-line type film forming apparatus and method of manufacturing magnetic recording medium using the same
#228Fabrication of low defectivity electrochromic devices
#229VAPOR-DEPOSITION DEVICE FOR COATING TWO-DIMENSIONAL SUBSTRATES
#230Thin film encapsulation layer manufacturing apparatus and method of manufacturing display apparatus using the same
#231Deposition apparatus, method of manufacturing organic light emitting display apparatus using the same, and organic light emitting display apparatus manufactured by using the method
#232Deposition apparatus, deposition method using the same, and manufacturing method of organic light-emitting display apparatus
#233Apparatus for monitoring deposition rate, apparatus provided with the same for depositing organic layer, method of monitoring deposition rate, and method of manufacturing organic light emitting display apparatus using the same
#234Organic layer deposition apparatus and method of manufacturing organic light-emitting display apparatus using the same
#235Deposition apparatus, method thereof and method for forming quantum-dot layer using the same
#236Method and apparatus for producing a reflection-reducing layer on a substrate
#237Deposition apparatus and method for manufacturing organic light emitting display apparatus by using the same
#238Deposition apparatus and method of manufacturing organic light emitting diode display
#239Self-ionized and inductively-coupled plasma for sputtering and resputtering
#240Film deposition apparatus and film deposition method
#241Method for fabricating Cu—In—Ga—Se film solar cell
#242Temperable electrochromic devices
#243ALD process window combinatorial screening tool
#244Plasma CVD apparatus and vacuum treatment apparatus
#245Organic layer deposition apparatus, method of manufacturing organic light-emitting display apparatus by using the same, and organic light-emitting display apparatus manufactured by the method
#246Apparatus and method for forming thin films in solar cells
#247Vapor deposition system
#248Organic layer deposition apparatus, organic light-emitting display apparatus, and method of manufacturing the organic light-emitting display apparatus
#249Method of manufacturing an organic light-emitting display apparatus using at least two deposition units
#250High quality reflectance coatings
#251Mask assembly for testing a deposition process, deposition apparatus including the mask assembly, and testing method for a deposition process using the mask assembly
#252Substrate processing apparatus
#253Method for manufacturing thermal absorber for solar thermal collector
#254Coating apparatus and method
#255IN-LINE DEPOSITION CHAMBER DESIGN FOR MULTI-STAGE PHYSICAL VAPOR DEPOSITION
#256Method of manufacturing organic light-emitting display apparatus and organic light-emitting display apparatus manufactured by using the method
#257Method of manufacturing organic layer on a substrate while fixed to electrostatic chuck and charging carrier using contactless power supply module
#258Plasma enhanced chemical vapor deposition apparatus and method for controlling the same
#259Modular coater separation
#260Process for making of glass articles with optical and easy-to-clean coatings
#261Magnetron sputtering coating device, a nano-multilayer film, and the preparation method thereof
#262Electrochromic devices
#263Method and system for manufacturing semiconductor device
#264Vapor deposition method and method for manufacturing organic electroluminescent display device
#265ORGANIC LAYER DEPOSITION APPARATUS, AND METHOD OF MANUFACTURING ORGANIC LIGHT EMITTING DISPLAY APPARATUS USING THE SAME
#266Method for manufacturing magnetic recording medium
#267System architecture for combined static and pass-by processing
#268Magnetron with gradually increasing magnetic field out of turnarounds
#269IN-LINE SPUTTERING APPARATUS
#270Modular-construction vacuum-coating system
#271Light-emitting device having mixed layer including hole transporting compound
#272Fabrication of low defectivity electrochromic devices
#273In-line deposition system and process for deposition of a thin film layer
#274Film formation apparatus, film formation method, manufacturing apparatus, and method for manufacturing light-emitting device
#275Method for transferring substrate using vacuum roll-to-roll device
#276Dynamic fluid valve and method for establishing the same
#277Vacuum processing apparatus, vacuum processing method, and electronic device manufacturing method
#278High quality reflectance coatings
#279FILM AND METHOD FOR MAKING FILM
#280Rolling bearing
#281Forming oriented film for magnetic recording material
#282Film formation apparatus and film formation method
#283Modular system and process for continuous deposition of a thin film layer on a substrate
#284Transfer chamber with vacuum extension for shutter disks
#285Method and system for isolated and discretized process sequence integration
#286Organic layer deposition apparatus and method of manufacturing organic light-emitting display apparatus by using the same
#287ORGANIC LAYER DEPOSITION APPARATUS AND METHOD OF MANUFACTURING ORGANIC LIGHT EMITTING DISPLAY DEVICE USING THE ORGANIC LAYER DEPOSITION APPARATUS
#288Vacuum film formation method and laminate obtained by the method
#289Vacuum film formation method and laminate obtained by the method
#290Electrochromic devices
#291IN-LINE FILM-FORMING APPARATUS, METHOD OF MANUFACTURING MAGNETIC RECORDING MEDIUM, AND GATE VALVE
#292Systems and methods for inhibiting oxide growth in substrate handler vacuum chambers
#293COATED ARTICLE HAVING ANTIBACTERIAL EFFECT AND METHOD FOR MAKING THE SAME
#294TRANSMISSION MECHANISM AND THE DEPOSITION APPARATUS USING THE SAME
#295MACHINE AND METHOD FOR METALLIZATION OF THREE-DIMENSIONAL OBJECTS OF SMALL SIZES
#296In-line type film forming apparatus and method for manufacturing magnetic recording medium
#297EVAPORATION METHOD, EVAPORATION DEVICE AND METHOD OF FABRICATING LIGHT EMITTING DEVICE
#298SYSTEM FOR UTILIZATION IMPROVEMENT OF PROCESS CHAMBERS AND METHOD OF OPERATING THEREOF
#299Methods of forming copper wiring and copper film, and film forming system
#300Method of manufacturing solar battery