ClassID:

120106

C23C14/568 - CPC Classification

Classification description:

Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating; Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks Transferring the substrates through a series of coating stations

Recent Application in this class:
#1
20260125788
2026-05-07

PVD COATING SYSTEM WITH CONTINUOUS MULTI-LAYER CONVEYING MODE AND COATING PROCESS THEREOF

#2
20260117367
2026-04-30

Method, control device, computer program and storage medium

#3
20260103791
2026-04-16

SYSTEM AND METHOD FOR PROCESSING SUBSTRATE

#4
20260078482
2026-03-19

MAGNETIC RECORDING MEDIUM PRODUCTION APPARATUS, MAGNETIC RECORDING MEDIUM PRODUCTION METHOD, AND VARNISHING DEVICE

#5
20260049393
2026-02-19

PHYSICAL VAPOR DEPOSITION MODULE AND SYSTEM INCLUDING SAME

#6
20250320599
2025-10-16

DYNAMIC FILM COATING DEVICE AND DYNAMIC FILM COATING METHOD USING SAME

#7
20250277304
2025-09-04

FILM FORMING APPARATUS

#8
20250191900
2025-06-12

INSTALLATION, METHOD, AND CARRIER FOR COATING EYEGLASS LENSES

#9
20250166979
2025-05-22

APPARATUS, SYSTEM AND METHOD TO REDUCE CRAZING

#10
20250125329
2025-04-17

MANUFACTURING APPARATUS FOR SOLID-STATE SECONDARY BATTERY AND METHOD FOR MANUFACTURING SOLID-STATE SECONDARY BATTERY

#11
20250059641
2025-02-20

INLINE SYSTEM FOR COATING INDIVIDUAL SUBSTRATES OR GROUPS OF SUBSTRATES AND METHOD FOR COATING INDIVIDUAL SUBSTRATES OR SUBSTRATE GROUPS IN AN INLINE COATING SYSTEM

#12
20250014873
2025-01-09

CARRIER WITH VERTICAL GRID FOR SUPPORTING SUBSTRATES IN COATER

#13
20250011919
2025-01-09

PROCESSING LINE FOR DEPOSITING THIN-FILM COATINGS

#14
20240321563
2024-09-26

FILM FORMING APPARATUS

#15
20240318303
2024-09-26

SURFACE TREATMENT APPARATUS

#16
20240191341
2024-06-13

STABLE GROUND ANODE APERTURE FOR THIN FILM PROCESSING

#17
20240186160
2024-06-06

MANUFACTURING EQUIPMENT FOR LIGHT-EMITTING DEVICE

#18
20240186064
2024-06-06

SOFT MAGNETIC MULTILAYER DESPOSITION APPARATUS, METHODS OF MANUFACTURING AND MAGNETIC MULTILAYER

#19
20240183029
2024-06-06

DEPOSITION APPARATUS AND DEPOSITION METHOD USING THE SAME

#20
20240155870
2024-05-09

MANUFACTURING EQUIPMENT FOR LIGHT-EMITTING DEVICE

#21
20240150889
2024-05-09

SUBSTRATE HOLDER, SUBSTRATE HOLDING METHOD, AND FILM FORMATION APPARATUS

#22
20240150888
2024-05-09

SEMICONDUCTOR PROCESS EQUIPMENT

#23
20240130210
2024-04-18

In-line monitoring of OLED layer thickness and dopant concentration

#24
20240112932
2024-04-04

MANUFACTURING DEVICE OF DISPLAY DEVICE

#25
20240102155
2024-03-28

METHOD AND DEVICE FOR CHANGING TEST SUBSTRATES IN A CONTINUOUS-FLOW VACUUM SYSTEM, TREATMENT METHOD, AND CONTINUOUS-FLOW VACUUM SYSTEM

#26
20240102147
2024-03-28

APPLYING A TRANSPARENT CONDUCTIVE FILM TO FLUORINE-DOPED TIN OXIDE

#27
20240087924
2024-03-14

Multi-chamber Configuration

#28
20240068087
2024-02-29

MAGNETRON SPUTTERING APPARATUS

#29
20240060170
2024-02-22

FILM DEPOSITION APPARATUS AND FILM DEPOSITION METHOD

#30
20240052477
2024-02-15

DEPOSITION APPARATUS

#31
20240047267
2024-02-08

TUNGSTEN GAP FILL WITH HYDROGEN PLASMA TREATMENT

#32
20230349036
2023-11-02

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

#33
20230335423
2023-10-19

MULTI-CHAMBER SEMICONDUCTOR PROCESSING SYSTEM WITH TRANSFER ROBOT TEMPERATURE ADJUSTMENT

#34
20230317478
2023-10-05

MODULAR MULTI-CHAMBER PROCESSING TOOL HAVING LINK CHAMBER FOR ULTRA HIGH VACCUM PROCESSES

#35
20230296953
2023-09-21

ELECTROCHROMIC CATHODE MATERIALS

#36
20230282458
2023-09-07

Carrier with vertical grid for supporting substrates in coater

#37
20230279537
2023-09-07

COATING INSTALLATION, CLAMPING RING AND MAGAZINE FOR SPECTACLE LENSES AND METHOD OF COATING SPECTACLE LENSES

#38
20230257869
2023-08-17

SYSTEM FOR DEPOSITING PIEZOELECTRIC MATERIALS, METHODS FOR USING THE SAME, AND MATERIALS DEPOSITED WITH THE SAME

#39
20230212735
2023-07-06

SUBSTRATE PROCESSING SYSTEM

#40
20230205032
2023-06-29

COUNTER ELECTRODE MATERIAL FOR ELECTROCHROMIC DEVICES

#41
20230148443
2023-05-11

ELECTROCHROMIC CATHODE MATERIALS

#42
20230137506
2023-05-04

PROCESSING SYSTEM FOR PROCESSING A FLEXIBLE SUBSTRATE AND METHOD OF MEASURING AT LEAST ONE OF A PROPERTY OF A FLEXIBLE SUBSTRATE AND A PROPERTY OF ONE OR MORE COATINGS ON THE FLEXIBLE SUBSTRATE

#43
20230133714
2023-05-04

APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR TREATING SUBSTRATE

#44
20230123586
2023-04-20

Transfer apparatus and film deposition apparatus using transfer apparatus

#45
20230056566
2023-02-23

DIELECTRIC COATED LITHIUM METAL ANODE

#46
20230051865
2023-02-16

PVD APPARATUS

#47
20230048728
2023-02-16

EVAPORATOR FOR EFFECTIVE SURFACE AREA EVAPORATION

#48
20230008603
2023-01-12

Counter electrode for electrochromic devices

#49
20220389564
2022-12-08

SPUTTER DEPOSITION APPARATUS AND METHOD

#50
20220388900
2022-12-08

Fabrication of low defectivity electrochromic devices

#51
20220372614
2022-11-24

INCLUSION OF SPECIAL ROLLER TO AVOID CREASING, WRINKLING AND DISTORTION OF FLEXIBLE SUBSTRATE IN ROLL TO ROLL PROCESS

#52
20220351950
2022-11-03

Carrier with vertical grid for supporting substrates in coater

#53
20220319820
2022-10-06

FILM FORMATION APPARATUS

#54
20220319819
2022-10-06

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD

#55
20220255050
2022-08-11

Organic layer deposition apparatus and method of manufacturing organic light-emitting display apparatus using the same

#56
20220254669
2022-08-11

System and method to evaporate an OLED layer stack in a vertical orientation

#57
20220235453
2022-07-28

COMMON VACUUM SHUTTER AND PASTING MECHANISM FOR A MULTISTATION CLUSTER PLATFORM

#58
20220223721
2022-07-14

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

#59
20220208426
2022-06-30

Magnetic levitation system, base and carrier of a magnetic levitation system, and method of levitating a carrier

#60
20220204398
2022-06-30

COUNTER ELECTRODE FOR ELECTROCHROMIC DEVICES

#61
20220199860
2022-06-23

Semiconductor component with oxidized aluminum nitride film and manufacturing method thereof

#62
20220197128
2022-06-23

Multi-chamber substrate processing platform

#63
20220190305
2022-06-16

EVAPORATION SYSTEM AND EVAPORATION METHOD

#64
20220185726
2022-06-16

System for forming nano-laminate optical coating

#65
20220145448
2022-05-12

COATED-SUBSTRATE SENSING AND CRAZING MITIGATION

#66
20220145441
2022-05-12

FILM FORMATION APPARATUS

#67
20220127716
2022-04-28

Apparatus for manufacturing semiconductor device

#68
20220066274
2022-03-03

ELECTROCHROMIC CATHODE MATERIALS

#69
20220055943
2022-02-24

Fabrication of low defectivity electrochromic devices

#70
20220051835
2022-02-17

IRON NITRIDE MAGNETIC MATERIAL INCLUDING COATED NANOPARTICLES

#71
20220037130
2022-02-03

GLASS PALLET FOR SPUTTERING SYSTEMS

#72
20210335585
2021-10-28

CONTINUOUS FLOW SYSTEM AND METHOD FOR COATING SUBSTRATES

#73
20210285092
2021-09-16

Sputtering apparatus

#74
20210269912
2021-09-02

EVAPORATION SOURCE FOR ORGANIC MATERIAL, DEPOSITION APPARATUS FOR DEPOSITING ORGANIC MATERIALS IN A VACUUM CHAMBER HAVING AN EVAPORATION SOURCE FOR ORGANIC MATERIAL, AND METHOD FOR EVAPORATING ORGANIC MATERIAL

#75
20210249943
2021-08-12

Transport system

#76
20210226182
2021-07-22

In-line monitoring of OLED layer thickness and dopant concentration

#77
20210225677
2021-07-22

Apparatus and method for contactless transportation of a device in a vacuum processing system

#78
20210207264
2021-07-08

VACUUM-COATING SYSTEM AND METHOD FOR COATING A BAND-TYPE MATERIAL

#79
20210207263
2021-07-08

PROCEDURE FOR COATING COMPONENT SURFACES UNDER VACUUM AND THE VACUUM COATING SYSTEM USED FOR THIS PURPOSE

#80
20210191215
2021-06-24

ELECTROCHROMIC DEVICES

#81
20210126247
2021-04-29

DIELECTRIC COATED LITHIUM METAL ANODE

#82
20210087674
2021-03-25

System with dual-motion substrate carriers

#83
20210055618
2021-02-25

Counter electrode material for electrochromic devices

#84
20210032159
2021-02-04

DEPOSITION METHODS FOR HIGH QUALITY REFLECTANCE COATINGS

#85
20200381223
2020-12-03

Carrier with vertical grid for supporting substrates in coater

#86
20200370166
2020-11-26

Film formation device for cutting tool provided with coating film, and film formation method for cutting tool provided with coating film

#87
20200340117
2020-10-29

Film formation apparatus and film formation method

#88
20200335654
2020-10-22

Sputter deposition apparatus including roller assembly and method

#89
20200257178
2020-08-13

Fabrication of low defectivity electrochromic devices

#90
20200255933
2020-08-13

Deposition apparatus

#91
20200243768
2020-07-30

METHODS OF OPERATING A VACUUM PROCESSING SYSTEM

#92
20200232088
2020-07-23

APPARATUS AND SYSTEM FOR VACUUM DEPOSITION ON A SUBSTRATE AND METHOD FOR VACUUM DEPOSITION ON A SUBSTRATE

#93
20200230643
2020-07-23

PERMEATION-BARRIER

#94
20200216955
2020-07-09

PERMEATION-BARRIER

#95
20200203071
2020-06-25

SOFT MAGNETIC MULTILAYER DESPOSITION APPARATUS, METHODS OF MANUFACTURING AND MAGNETIC MULTILAYER

#96
20200189054
2020-06-18

DEPOSITION APPARATUS, ELECTRONIC DEVICE MANUFACTURING APPARATUS, AND DEPOSITION METHOD

#97
20200144556
2020-05-07

Organic layer deposition apparatus and method of manufacturing organic light-emitting display apparatus using the same

#98
20200140994
2020-05-07

System, method and support for coating eyeglass lenses

#99
20200140992
2020-05-07

Device, method and use for the coating of lenses

#100
20200133088
2020-04-30

Counter electrode for electrochromic devices

#101
20200124933
2020-04-23

FABRICATION OF LOW DEFECTIVITY ELECTROCHROMIC DEVICES

#102
20200087774
2020-03-19

Batch processing system with vacuum isolation

#103
20200087197
2020-03-19

High infrared reflection coatings, thin film coating deposition methods and associated technologies

#104
20200050072
2020-02-13

FABRICATION OF LOW DEFECTIVITY ELECTROCHROMIC DEVICES

#105
20200040445
2020-02-06

VACUUM SYSTEM AND METHOD FOR DEPOSITING A PLURALITY OF MATERIALS ON A SUBSTRATE

#106
20190348259
2019-11-14

Physical vapor deposition in-chamber electro-magnet

#107
20190341235
2019-11-07

Apparatus, system and method to reduce crazing

#108
20190338413
2019-11-07

In-line coater for vacuum deposition of thin film coatings

#109
20190329279
2019-10-31

Device for processing a component, carriage for the device, and method for operating the device

#110
20190316252
2019-10-17

HIGH THROUGHPUT CONTINUOUS OPERATION REACTOR SYSTEM

#111
20190305259
2019-10-03

MANUFACTURING DEVICE FOR LIGHT EMITTING ELEMENT

#112
20190302561
2019-10-03

Electrochromic cathode materials

#113
20190233938
2019-08-01

FILM FORMATION APPARATUS

#114
20190203348
2019-07-04

Flexible substrate deposition system

#115
20190189465
2019-06-20

METHODS AND APPARATUS FOR PHYSICAL VAPOR DEPOSITION

#116
20190187531
2019-06-20

Fabrication of low defectivity electrochromic devices

#117
20190172747
2019-06-06

Modulating the microstructure of metallic interconnect structures

#118
20190171078
2019-06-06

Electrochromic devices

#119
20190168249
2019-06-06

COATING APPARATUS

#120
20190115157
2019-04-18

Device for manufacturing a multilayer stacked structure and method for manufacturing a thin film capacitor

#121
20190113819
2019-04-18

Counter electrode material for electrochromic devices

#122
20190105748
2019-04-11

SEAL-LESS AIRLOCK WAFER STAGE

#123
20190103300
2019-04-04

Film formation apparatus

#124
20190051867
2019-02-14

Manufacturing method of a light emitting device

#125
20190051865
2019-02-14

Evaporation equipment

#126
20190006216
2019-01-03

Apparatus for transportation of a substrate carrier in a vacuum chamber, system for vacuum processing of a substrate, and method for transportation of a substrate carrier in a vacuum chamber

#127
20180370733
2018-12-27

Vacuum processing device

#128
20180355476
2018-12-13

Evaporation device and evaporation method using the same

#129
20180347032
2018-12-06

Film formation apparatus, film formation method, and manufacturing method of solar battery

#130
20180337052
2018-11-22

Systems and methods for low resistivity physical vapor deposition of a tungsten film

#131
20180334743
2018-11-22

DIFFUSED CENTER GAS INJECTION COOLING PLATE FOR MEDIA COOLING

#132
20180327893
2018-11-15

SELF-IONIZED AND INDUCTIVELY-COUPLED PLASMA FOR SPUTTERING AND RESPUTTERING

#133
20180315585
2018-11-01

Substrate processing apparatus

#134
20180305808
2018-10-25

Device for coating extra-long sheet-type substrates, in particular glass panes, in a vacuum coating system

#135
20180286645
2018-10-04

Plasma processing apparatus

#136
20180265965
2018-09-20

APPARATUS AND METHOD FOR LOADING A SUBSTRATE INTO A VACUUM PROCESSING MODULE, APPARATUS AND METHOD FOR TREATMENT OF A SUBSTRATE FOR A VACUUM DEPOSITION PROCESS IN A VACUUM PROCESSING MODULE, AND SYSTEM FOR VACUUM PROCESSING OF A SUBSTRATE

#137
20180258519
2018-09-13

APPARATUS FOR VACUUM DEPOSITION ON A SUBSTRATE AND METHOD FOR MASKING THE SUBSTRATE DURING VACUUM DEPOSITION

#138
20180237910
2018-08-23

Coating methods and apparatus

#139
20180231858
2018-08-16

Fabrication of low defectivity electrochromic devices

#140
20180230589
2018-08-16

Process for making of glass articles with optical and easy-to-clean coatings

#141
20180226237
2018-08-09

High Throughput Vacuum Deposition Sources and System

#142
20180203320
2018-07-19

Fabrication of low defectivity electrochromic devices

#143
20180174873
2018-06-21

Apparatus And Method For Processing Thin Substrates

#144
20180171463
2018-06-21

System architecture for combined static and pass-by processing

#145
20180158973
2018-06-07

Silver copper indium gallium selenide reactive sputtering method and apparatus, and photovoltaic cell containing same

#146
20180142342
2018-05-24

Collimator for use in a physical vapor deposition chamber

#147
20180135158
2018-05-17

EVAPORATION METHOD, EVAPORATION DEVICE AND METHOD OF FABRICATING LIGHT EMITTING DEVICE

#148
20180119285
2018-05-03

Thin film encapsulation mask preheat and substrate buffer chamber

#149
20180094346
2018-04-05

METHODS OF FORMING MGO BARRIER LAYER

#150
20180081250
2018-03-22

FABRICATION OF LOW DEFECTIVITY ELECTROCHROMIC DEVICES

#151
20180073150
2018-03-15

Single oxide metal deposition chamber

#152
20180066362
2018-03-08

Apparatus for processing long base material by roll-to-roll method and film forming apparatus using the same

#153
20180066353
2018-03-08

Vacuum arc deposition apparatus and deposition method

#154
20180040856
2018-02-08

Manufacturing device and manufacturing method of light-emitting element

#155
20180030597
2018-02-01

Coating methods and apparatus

#156
20180023190
2018-01-25

Ion implantation for modification of thin film coatings on glass

#157
20180021802
2018-01-25

Mask assembly for testing a deposition process, deposition apparatus including the mask assembly, and testing method for a deposition process using the mask assembly

#158
20180016671
2018-01-18

Material joining

#159
20180012756
2018-01-11

Method of forming later insulating films for MTJ

#160
20170356082
2017-12-14

Integrated 3D metallizer

#161
20170350003
2017-12-07

Multisurface simultaneous sputtering and shuttering

#162
20170317229
2017-11-02

UV light emitting devices and systems and methods for production

#163
20170307951
2017-10-26

Temperable electrochromic devices

#164
20170306487
2017-10-26

Vapor deposition system

#165
20170306474
2017-10-26

INTEGRATION OF LASER PROCESSING WITH DEPOSITION OF ELECTROCHEMICAL DEVICE LAYERS

#166
20170299933
2017-10-19

Fabrication of low defectivity electrochromic devices

#167
20170283315
2017-10-05

High quality reflectance coatings

#168
20170283314
2017-10-05

Deposition methods for high quality reflectance coatings

#169
20170263875
2017-09-14

Deposition apparatus, method thereof and method for forming quantum-dot layer using the same

#170
20170244070
2017-08-24

System for depositing one or more layers on a substrate supported by a carrier and method using the same

#171
20170226005
2017-08-10

High infrared reflection coatings, thin film coating deposition methods and associated technologies

#172
20170211179
2017-07-27

Deposition apparatus

#173
20170186518
2017-06-29

Iron nitride magnetic material including coated nanoparticles

#174
20170176832
2017-06-22

Electrochromic devices

#175
20170167014
2017-06-15

Method of coating both sides of a substrate using a sacrificial coating

#176
20170137931
2017-05-18

Film formation device for cutting tool provided with with coating film, and film formation method for cutting tool provided with coating film

#177
20170133581
2017-05-11

METHOD OF MANUFACTURING MULTI-LAYERED FILM AND MULTI-LAYERED FILM

#178
20170117153
2017-04-27

Systems and methods for low resistivity physical vapor deposition of a tungsten film

#179
20170111028
2017-04-20

Acoustic resonator structure with inclined C-axis piezoelectric bulk and crystalline seed layers

#180
20170107611
2017-04-20

EVAPORATION DEVICE AND METHOD

#181
20170101708
2017-04-13

Manufacturing apparatus

#182
20170097552
2017-04-06

Fabrication of low defectivity electrochromic devices

#183
20170088938
2017-03-30

Method for producing transparent conductive film

#184
20170067156
2017-03-09

Plasma excitation for spatial atomic layer deposition (ALD) reactors

#185
20170040595
2017-02-09

System, method and apparatus for forming a thin film lithium ion battery

#186
20170040537
2017-02-09

Organic light-emitting display apparatus, organic layer deposition apparatus, and method of manufacturing the organic light-emitting display apparatus by using the organic layer deposition apparatus

#187
20170040150
2017-02-09

Roll-to-roll hybrid plasma modular coating system

#188
20170025565
2017-01-26

UV light emitting devices and systems and methods for production

#189
20170009516
2017-01-12

High quality reflectance coatings

#190
20170009337
2017-01-12

Ion implantation for modification of thin film coatings on glass

#191
20170003564
2017-01-05

Counter electrode for electrochromic devices

#192
20160376697
2016-12-29

Thin substrate processing device

#193
20160369403
2016-12-22

Method of using a multi-pass vacuum coating system

#194
20160355924
2016-12-08

Mask for deposition system and method for using the mask

#195
20160343589
2016-11-24

DEPOSITION APPARATUS, APPARATUS FOR SUCCESSIVE DEPOSITION, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

#196
20160340776
2016-11-24

ROLLER FOR SPREADING OF A FLEXIBLE SUBSTRATE, APPARATUS FOR PROCESSING A FLEXIBLE SUBSTRATE AND METHOD OF OPERATING THEREOF

#197
20160327846
2016-11-10

Fabrication of low defectivity electrochromic devices

#198
20160326637
2016-11-10

Substrate carrier unit for a film deposition apparatus

#199
20160326630
2016-11-10

Deposition apparatus

#200
20160319419
2016-11-03

Methods of forming MgO barrier layer

#201
20160276204
2016-09-22

Method of manufacturing semiconductor device and semiconductor manufacturing apparatus

#202
20160240403
2016-08-18

Apparatus and method of manufacturing display device

#203
20160237562
2016-08-18

Vapor deposition system and method

#204
20160233541
2016-08-11

Solid-state batteries utilizing template layers for electrode formation and methods for forming the same

#205
20160232932
2016-08-11

Vacuum process apparatus and vacuum process method

#206
20160172613
2016-06-16

Deposition apparatus, method thereof and method for forming quantum-dot layer using the same

#207
20160130700
2016-05-12

Deposition apparatus

#208
20160130693
2016-05-12

METHOD OF MANUFACTURING MAGNETORESISTIVE MEMORY DEVICE AND MANUFACTURING APPARATUS OF THE SAME

#209
20160118574
2016-04-28

Ferroelectric ceramics, electronic component and manufacturing method of ferroelectric ceramics

#210
20160111313
2016-04-21

APPARATUS FOR THE VACUUM TREATMENT OF SUBSTRATES

#211
20160111260
2016-04-21

Glass pallet for sputtering systems

#212
20160103379
2016-04-14

Fabrication of low defectivity electrochromic devices

#213
20160093478
2016-03-31

High throughput vacuum deposition sources and system

#214
20160076143
2016-03-17

Vacuum coating apparatus

#215
20160042928
2016-02-11

Sputtering apparatus

#216
20160011480
2016-01-14

Electrochromic devices

#217
20160008841
2016-01-14

Multi-story substrate treating apparatus with flexible transport mechanisms and vertically divided treating units

#218
20160002770
2016-01-07

APPARATUS WITH NEIGHBORING SPUTTER CATHODES AND METHOD OF OPERATION THEREOF

#219
20150345007
2015-12-03

COMBINATION VAPOR DEPOSITION CHAMBER

#220
20150303041
2015-10-22

Method and system for maintaining an edge exclusion shield

#221
20150240346
2015-08-27

In-line coating device, in-line coating method, and separator

#222
20150235822
2015-08-20

Processing apparatus having a first shield and a second shield arranged to sandwich a substrate

#223
20150176131
2015-06-25

Thin film deposition apparatus

#224
20150170912
2015-06-18

Systems and methods for forming semiconductor devices

#225
20150128855
2015-05-14

Electronic device manufacturing apparatus

#226
20150125640
2015-05-07

Multilayer thin film manufacturing method and electronic product

#227
20150125597
2015-05-07

In-line type film forming apparatus and method of manufacturing magnetic recording medium using the same

#228
20150060264
2015-03-05

Fabrication of low defectivity electrochromic devices

#229
20150059646
2015-03-05

VAPOR-DEPOSITION DEVICE FOR COATING TWO-DIMENSIONAL SUBSTRATES

#230
20150047969
2015-02-19

Thin film encapsulation layer manufacturing apparatus and method of manufacturing display apparatus using the same

#231
20150044803
2015-02-12

Deposition apparatus, method of manufacturing organic light emitting display apparatus using the same, and organic light emitting display apparatus manufactured by using the method

#232
20150044800
2015-02-12

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