AREA SELECTIVE ATOMIC LAYER THIN FILM DEPOSITION METHOD

METHOD OF FORMING A PATTERNED LAYER OF MATERIAL, APPARATUS FOR FORMING A PATTERNED LAYER OF MATERIAL

UNDERLAYER FOR PHOTORESIST ADHESION AND DOSE REDUCTION

SELECTIVE DEPOSITION USING DIFFERENTIAL SURFACE CHARGING

CARBON CONTAINING PRECURSORS FOR BEAM-INDUCED DEPOSITION

METHODS OF MODIFYING OPENINGS IN HARDMASKS AND PHOTORESISTS TO ACHIEVE DESIRED CRITICAL DIMENSIONS

UNDERLAYER FOR PHOTORESIST ADHESION AND DOSE REDUCTION

TECHNIQUES AND DEVICE STRUCTURE BASED UPON DIRECTIONAL SEEDING AND SELECTIVE DEPOSITION

METHOD AND APPARATUS FOR FORMING A PATTERNED LAYER OF CARBON, METHOD OF FORMING A PATTERNED LAYER OF MATERIAL

GAS SENSOR WITH SUPERLATTICE STRUCTURE

FABRICATING EQUIPMENT FOR SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICE

FILM FORMATION METHOD AND FILM FORMATION APPARATUS

Method of manufacturing semiconductor device and ion beam irradiation apparatus

METHOD OF REPAIRING CERAMIC COMPOSITE ARTICLES

Apparatus for processing a substrate

Techniques and device structure based upon directional seeding and selective deposition

Underlayer for photoresist adhesion and dose reduction

Underlayer for photoresist adhesion and dose reduction

Method for selectively depositing a metallic film on a substrate

METHODS FOR CONTINUOUS MONITORING, SYNTHESIS, AND DETECTION OF BIOCHEMISTRY

Substrate processing method and substrate processing system

METHOD AND SYSTEM FOR THE LOCALIZED DEPOSIT OF METAL ON A SURFACE

Graphene printing

METHOD AND APPARATUS FOR FORMING A PATTERNED LAYER OF MATERIAL

Post-production substrate modification with FIB deposition

Method and apparatus for forming a patterned layer of carbon, method of forming a patterned layer of material

Nanofabrication using a new class of electron beam induced surface processing techniques

Thermal metal chemical vapor deposition process

Deposition apparatus and deposition method using the same

FILLING A CAVITY IN A SUBSTRATE USING SPUTTERING AND DEPOSITION

Method for selectively depositing a metallic film on a substrate

SELECTIVE VAPOR DEPOSITION PROCESS FOR ADDITIVE MANUFACTURING

Graphene fabrication method

Method and device for permanently repairing defects of absent material of a photolithographic mask

Programmable charge storage arrays and associated manufacturing devices and systems

Method for selectively depositing a metallic film on a substrate

System and method for temperature control in plasma processing system

Functional high-performance fiber structure

High temperature glass-ceramic matrix with embedded reinforcement fibers

SEED LAYER LASER-INDUCED DEPOSITION

Method of burying sample trench

Charged-particle-beam patterning without resist

Method for processing a holding plate, in particular for a clamp for holding a wafer

Focused radiation beam induced deposition

AREA-SELECTIVE ATOMIC LAYER DEPOSITION APPARATUS

Filling a cavity in a substrate using sputtering and deposition

Method and device for permanently repairing defects of absent material of a photolithographic mask

Method and system for the localized deposit of metal on a surface

Nanofabrication using a new class of electron beam induced surface processing techniques

Method and apparatus for controlled dopant incorporation and activation in a chemical vapor deposition system

Adaptive beam current for high throughput patterning

Focused radiation beam induced thin film deposition

Deposition method and focused ion beam system

Method for structuring an object with the aid of a particle beam apparatus

SYSTEM FOR FABRICATING AN ELECTRICAL STORAGE CELL

SCALABLE PROCESSING OF NANOCOMPOSITES USING PHOTON-BASED METHODS

Depositing material into high aspect ratio structures

Method and system for controlling coating in non-line-of-sight locations

METHODS FOR DEPOSITING MATERIAL ONTO MICROFEATURE WORKPIECES IN REACTION CHAMBERS AND SYSTEMS FOR DEPOSITING MATERIALS ONTO MICROFEATURE WORKPIECES

Charged-particle-beam patterning without resist

Liquid crystal display panel repairing method and repairing system

Combinatorial Plasma Enhanced Deposition Techniques

Localized atmospheric laser chemical vapor deposition

Thermal processing by scanning a laser line beam

DEPOSITION APPARATUS

Seed layer laser-induced deposition

Sample preparation method

Method for plasma-treating workpieces

Combinatorial plasma enhanced deposition techniques

Method and device for layer deposition

Beam-induced deposition of low-resistivity material

Prototyping station for atomic force microscope-assisted deposition of nanostructures

Encapsulated integrated-circuit device with thin-film battery

FABRICATION AND SELECTIVE PATTERNING OF THIN FILMS USING ION BEAM-ENHANCED ATOMIC AND MOLECULAR LAYER DEPOSITION

Scanned laser light source

Methods for depositing material onto microfeature workpieces in reaction chambers and systems for depositing materials onto microfeature workpieces

Patterning of nanostructures

Combinatorial plasma enhanced deposition techniques

Combinatorial plasma enhanced deposition techniques

Combinatorial plasma enhanced deposition techniques

Combinatorial plasma enhanced deposition techniques

Combinatorial plasma enhanced deposition techniques

Method for fabricating semiconductor thin film using substrate irradiated with focused light, apparatus for fabricating semiconductor thin film using substrate irradiated with focused light, method for selectively growing semiconductor thin film using substrate irradiated with focused light, and semiconductor element using substrate irradiated with focused light

Methods for forming selectively deposited thin films

Battery-operated wireless-communication apparatus and method

Method for electron beam induced deposition of conductive material

Localized plasma processing

Gas delivery for beam processing systems

Method and apparatus for integrated-circuit battery devices

Thermal flux processing by scanning a focused line beam

Laser-assisted nanomaterial deposition, nanomanufacturing, in situ monitoring and associated apparatus

Au-containing layer for charged particle beam processing

METHOD FOR PROCESSING AN OBJECT WITH MINIATURIZED STRUCTURES

LITHOGRAPHIC MACHINE PLATFORM AND APPLICATIONS THEREOF

Radiation-assisted selective deposition of metal-containing cap layers

Cross section processing method and method of manufacturing cross section observation sample

Method for forming microscopic structures on a substrate

Rapid patterning of nanostructures

Scanning probe assisted localized CNT growth

Combinatorial plasma enhanced deposition techniques

Device and method for patterning structures on a substrate

Field-aided preferential deposition of precursors

Prototyping station for atomic force microscope-assisted deposition of nanostructures

SAM oxidative removal for controlled nanofabrication

Patterning During Film Growth

Light-induced directed self-assembly of periodic sub-wavelength nanostructures

Method for the fabrication of a transistor gate using at least one electron beam

Method for depositing a film using a charged particle beam, method for performing selective etching using the same, and charged particle beam equipment therefor

Battery-operated wireless-communication apparatus and method

Method and system for increasing throughput during location specific processing of a plurality of substrates

Working method by focused ion beam and focused ion beam working apparatus

Apparatus and method for reactive atom plasma processing for material deposition

Charged beam processing apparatus

Thermal flux processing by scanning a focused line beam

Method for depositing a film using a charged particle beam, method for performing selective etching using the same, and charged particle beam equipment therefor

Method and apparatus for thin-film battery having ultra-thin electrolyte

Rapid patterning of nanostructures

Scanning laser light source

Thermal flux processing by scanning a focused line beam

Method of depositing a metal layer onto a substrate and a method for measuring in three dimensions the topographical features of a substrate

Method and apparatus for integrated-circuit battery devices

Production method for antenna and production device for antenna

Method for fabricatiing three-dimensional microstructure by fib-cvd and drawing system for three-dimensional microstruture

Method and apparatus for field-emission high-pressure-discharge laser chemical vapor deposition of free-standing structures

Electrochemical method for the direct nanostructured deposition of material onto a substrate, and semiconductor component produced according to said method

Focused ion beam deposition

Surface manipulation and selective deposition processes using adsorbed halogen atoms

Apparatus for treating thin film and method of treating thin film

Method for manufacturing a thin film transistor

Thin-film battery having ultra-thin electrolyte

Apparatus for treating thin film and method of treating thin film

Apparatus and a method for forming an alloy layer over a substrate

Localized plasma processing

Methods for making device enclosures and devices with an integrated battery

Thin-film battery devices and apparatus for making the same

Method for producing poly(methyl methacrylate)-metal cluster composite

Apparatus and a method for forming an alloy layer over a substrate

Methods for depositing material onto microfeature workpieces in reaction chambers and systems for depositing materials onto microfeature workpieces

Method and system for forming a film of material using plasmon assisted chemical reactions

Method of forming metallic wiring layer, method of selective metallization, apparatus for selective metallization and substrate apparatus

Thermal flux processing by scanning a focused line beam

Method and device for correcting pattern film on a semiconductor substrate

Method to locally protect extreme ultraviolet multilayer blanks used for lithography

Submicron size metal deposit apparatus

Method for depositing a film using a charged particle beam, method for performing selective etching using the same, and charged particle beam equipment therefor

Method for forming ultra-high strength elastic diamond like carbon structure

Wiring repair apparatus

Integrated capacitor-like battery and associated method

Apparatus for atmospheric pressure reactive atom plasma processing for surface modification

Apparatus and method for fabrication of nanostructures using decoupled heating of constituents

Patterned atomic layer etching and deposition using miniature-column charged particle beam arrays