ClassID:

120170

C23C16/34 - CPC Classification

Classification description:

Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material; Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides Nitrides

Sub-classes:
Recent Application in this class:
#1
20260145247
2026-05-28

COATED CUTTING TOOL

#2
20260139372
2026-05-21

IN-SITU SOLID CHEMICAL VAPOR DEPOSITION PRECURSOR DELIVERY

#3
20260125790
2026-05-07

CONTROLLING ARCING WITH SEASON

#4
20260117416
2026-04-30

Process for Depositing Scandium Nitride by Atomic Layer Deposition Techniques

#5
20260107745
2026-04-16

METHOD OF FORMING A THIN FILM USING HYDROGEN TREATMENT

#6
20260103795
2026-04-16

METHOD OF FORMING VANADIUM NITRIDE-CONTAINING LAYER AND STRUCTURE COMPRISING THE SAME

#7
20260092364
2026-04-02

METHODS FOR DEPOSITING METAL NITRIDE LAYERS ON A SUBSTRATE BY CYCLICAL DEPOSITION PROCESSES INCLUDING CYCLIC COMPOUNDS

#8
20260085419
2026-03-26

MOLYBDENUM PRECURSOR COMPOUND, METHOD FOR PRODUCING SAME, AND METHOD FOR DEPOSITING MOLYBDENUM-CONTAINING THIN FILM USING SAME

#9
20260071319
2026-03-12

FORMING TOOLS COATED WITH KAPPA-ALUMINA

#10
20260068558
2026-03-05

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM

#11
20260047168
2026-02-12

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM AND SUBSTRATE PROCESSING APPARATUS

#12
20260033256
2026-01-29

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM

#13
20260009125
2026-01-08

Heteroleptic Triazenide Metal Complexes

#14
20250382708
2025-12-18

METHODS FOR USING NON-PLASMA MICROWAVE IN HYDROGEN AMBIENT TO MITIGATE MO NITRIDATION

#15
20250377499
2025-12-11

OPTICAL DIELECTRIC PLANAR WAVEGUIDE PROCESS

#16
20250369110
2025-12-04

METHOD FOR FORMING A SEMICONDUCTOR STRUCTURE, METHOD FOR DEPOSITING A DIPOLE LAYER ON A SUBSTRATE, AND ASSOCIATED METHODS FOR FORMING A GATE STRUCTURE FOR A SEMICONDUCTOR DEVICE

#17
20250369109
2025-12-04

FILM FORMING METHOD AND FILM FORMING APPARATUS

#18
20250369104
2025-12-04

METHOD FOR FORMING BARRIER LAYER

#19
20250361610
2025-11-27

ATOMIC LAYER DEPOSITION OF SUPERCONDUCTING TRANSITION METAL NITRIDES FOR QUANTUM CIRCUITS AND DETECTORS

#20
20250361608
2025-11-27

CLEANING METHOD AND FILM-FORMING APPARATUS

#21
20250354257
2025-11-20

SURFACE COATED CUTTING TOOLS

#22
20250346993
2025-11-13

METAL-ORGANIC CHEMICAL VAPOR DEPOSITION OF SEMI-INSULATING IRON-DOPED GROUP III-NITRIDE FILMS

#23
20250340981
2025-11-06

FILM FORMING METHOD

#24
20250340979
2025-11-06

FILM FORMING METHOD AND FILM FORMING APPARATUS

#25
20250336680
2025-10-30

THIN FILM, METHOD OF FORMING THE SAME AND SEMICONDUCTOR DEVICE

#26
20250305147
2025-10-02

METAL-CONTAINING FILM AND METHOD FOR PRODUCING METAL-CONTAINING FILM

#27
20250305118
2025-10-02

METHODS AND SYSTEMS FOR FORMING HIGHLY CONFORMAL AND LOW RESISTIVITY VANADIUM NITRIDE THIN FILMS

#28
20250305115
2025-10-02

MULTI-FUNCTIONAL SHUTTER DISK FOR THIN FILM DEPOSITION CHAMBER

#29
20250297364
2025-09-25

PRECURSOR DELIVERY SYSTEM AND METHOD FOR CYCLIC DEPOSITION

#30
20250290228
2025-09-18

n-TYPE GaN CRYSTAL, GaN WAFER, AND GaN CRYSTAL, GaN WAFER AND NITRIDE SEMICONDUCTOR DEVICE PRODUCTION METHOD

#31
20250279318
2025-09-04

CONFORMAL AND SMOOTH TITANIUM NITRIDE LAYERS AND METHODS OF FORMING THE SAME

#32
20250259855
2025-08-14

IN-SITU METAL DEPOSITION FOR REDUCED CHARGING DURING DIELECTRIC ETCH

#33
20250257455
2025-08-14

REMOTE DOPING OF A SEMICONDUCTOR STRUCTURE, RELATED DEVICES, RELATED SYSTEMS, AND RELATED METHODS

#34
20250250672
2025-08-07

METHOD OF MANUFACTURING METAL NITRIDE FILM

#35
20250250666
2025-08-07

LATERAL GAP FILL

#36
20250230321
2025-07-17

SEMICONDUCTOR DEVICE PROCESSING COMPOSITION, COMPOUND, METHOD FOR PRODUCING MODIFIED SUBSTRATE, AND METHOD FOR PRODUCING SEMICONDUCTOR DEVICE

#37
20250215565
2025-07-03

VANADIUM CONTAINING LAYERS AND METHODS AND SYSTEMS FOR DEPOSITING SAID LAYERS

#38
20250215563
2025-07-03

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM

#39
20250215555
2025-07-03

METHODS AND ASSEMBLIES FOR SELECTIVE DEPOSITION OF METAL-CONTAINING MATERIAL

#40
20250212594
2025-06-26

COMPOSITE FILM, PREPARATION METHOD THEREOF AND LIGHT-EMITTING DEVICE

#41
20250188608
2025-06-12

SELECTIVE NON-PLASMA DEPOSITION OF MASK PROTECTION MATERIAL

#42
20250188599
2025-06-12

SHIELDING COMPOUND, METHOD OF FORMING THIN FILM USING SHIELDING COMPOUND, SEMICONDUCTOR SUBSTRATE FABRICATED USING METHOD, AND SEMICONDUCTOR DEVICE INCLUDING SEMICONDUCTOR SUBSTRATE

#43
20250187080
2025-06-12

SURFACE-COATED CUTTING TOOL

#44
20250176248
2025-05-29

TITANIUM ALUMINUM AND TANTALUM ALUMINUM THIN FILMS

#45
20250167044
2025-05-22

DIFFUSION BARRIER INCLUDING METAL SILICIDE AND TITANIUM SILICON NITRIDE

#46
20250163573
2025-05-22

METHODS FOR FORMING MOLYBDENUM SURFACES WITH INCREASED DIFFUSION BARRIER

#47
20250154648
2025-05-15

PRECURSOR FOR FORMING METAL THIN FILM, MANUFACTURING METHOD USING THE SAME, AND METAL THIN FILM MANUFACTURED THEREBY

#48
20250140549
2025-05-01

PROCESSING SOLUTION, METHOD FOR PROCESSING SUBSTRATE, AND METHOD FOR MANUFACTURING SEMICONDUCTOR SUBSTRATE

#49
20250140548
2025-05-01

PROCESSING SOLUTION, METHOD FOR PROCESSING SUBSTRATE, AND METHOD FOR MANUFACTURING SEMICONDUCTOR SUBSTRATE

#50
20250137127
2025-05-01

METHOD FOR FORMING A RARE-EARTH-CONTAINING LAYER, APPARATUS, AND STRUCTURE

#51
20250116001
2025-04-10

ARC REDUCTION AND RF CONTROL FOR ELECTROSTATIC CHUCKS IN SEMICONDUCTOR PROCESSING

#52
20250109490
2025-04-03

SELECTIVE DEPOSITION

#53
20250092513
2025-03-20

METHODS FOR DEPOSITING A MOLYBDENUM NITRIDE FILM ON A SURFACE OF A SUBSTRATE BY A CYCLICAL DEPOSITION PROCESS AND RELATED SEMICONDUCTOR DEVICE STRUCTURES INCLUDING A MOLYBDENUM NITRIDE FILM

#54
20250087534
2025-03-13

MULTI-REGION DIFFUSION BARRIER CONTAINING TITANIUM, SILICON AND NITROGEN

#55
20250087498
2025-03-13

TIN OXIDE MANDRELS IN PATTERNING

#56
20250081588
2025-03-06

METHODS FOR FORMING A SEMICONDUCTOR DEVICE STRUCTURE AND RELATED SEMICONDUCTOR DEVICE STRUCTURES

#57
20250079156
2025-03-06

NITROGEN-BASED OXYGEN-FREE DIPOLES, RELATED DEVICES, RELATED SYSTEMS, AND RELATED METHODS

#58
20250069891
2025-02-27

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM

#59
20250066920
2025-02-27

SUBSTRATE PROCESSING APPARATUS

#60
20250066907
2025-02-27

REDUCING LINE BENDING DURING METAL FILL PROCESS

#61
20250046600
2025-02-06

TITANIUM NITRIDE GAPFILL PROCESSES FOR SEMICONDUCTOR DEVICES

#62
20250029835
2025-01-23

INTEGRATED PLASMA CLEAN AND DIELECTRIC PASSIVATION DEPOSITION PROCESSES

#63
20250029829
2025-01-23

SUBSTRATE PROCESSING METHOD

#64
20250011929
2025-01-09

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM

#65
20250003067
2025-01-02

FILM QUALITY IMPROVER, METHOD OF FORMING THIN FILM USING FILM QUALITY IMPROVER, AND SEMICONDUCTOR SUBSTRATE FABRICATED USING METHOD

#66
20250003061
2025-01-02

INTERFACE TUNING FOR EROSION AND CORROSION RESISTANT COATINGS FOR SEMICONDUCTOR COMPONENTS

#67
20240429043
2024-12-26

METHOD OF FORMING INSULATING FILM BY USING ATOMIC LAYER DEPOSITION

#68
20240425978
2024-12-26

MODERATE TEMPERATURE CVD ALPHA ALUMINA COATING

#69
20240420958
2024-12-19

METHOD, SYSTEM, AND APPARATUS FOR DEPOSITION OF TRANSITION METAL FILM

#70
20240410077
2024-12-12

METHOD AND APPARATUS FOR PRODUCING NITROGEN COMPOUND

#71
20240401189
2024-12-05

FORMATION OF MEMORY DEVICE CHANNEL HOLES USING DOPED FILM LAYER

#72
20240396053
2024-11-28

TUNGSTEN METAL/TUNGSTEN NITRIDE ENHANCED PLATINUM-BASED ORR CATALYST AND METHOD FOR MAKING THE SAME

#73
20240395615
2024-11-28

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME

#74
20240395555
2024-11-28

METHOD OF FORMING CHROMIUM NITRIDE LAYER AND STRUCTURE INCLUDING THE CHROMIUM NITRIDE LAYER

#75
20240392432
2024-11-28

METHOD FOR FORMING CARBON-CONTAINING FILM, AND METHOD FOR FORMING HARD MASK USING THE CARBON-CONTAINING FILM

#76
20240387612
2024-11-21

CAPACITOR AND SEMICONDUCTOR DEVICE INCLUDING THE SAME

#77
20240384417
2024-11-21

THIN FILM DEPOSITION WITH IMPROVED CONTROL OF PRECURSOR

#78
20240384415
2024-11-21

NITRIDE-BASED WAFER CHEMICAL VAPOR DEPOSITION DEVICE AND DEPOSITION METHOD OF THE SAME

#79
20240379368
2024-11-14

BOTTOM-UP METAL NITRIDE FORMATION

#80
20240360549
2024-10-31

LOW-TEMPERATURE DEPOSITION PROCESSES TO FORM MOLYBDENUM-BASED MATERIALS WITH IMPROVED RESISTIVITY

#81
20240329310
2024-10-03

OPTICAL DIELECTRIC PLANAR WAVEGUIDE PROCESS

#82
20240318310
2024-09-26

CONTAINER FOR VOLATILE RAW MATERIALS, AND SOLID GASIFICATION AND SUPPLY SYSTEM

#83
20240297209
2024-09-05

FILM FORMING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND PROCESSING SYSTEM

#84
20240297080
2024-09-05

Adjusting Work Function Through Adjusting Deposition Temperature

#85
20240297069
2024-09-05

COMPOSITE SUBSTRATE AND PREPARATION METHOD THEREOF, AND SEMICONDUCTOR DEVICE STRUCTURE

#86
20240287680
2024-08-29

COATED CUTTING TOOL

#87
20240287678
2024-08-29

METHODS FOR FORMING IMPURITY FREE METAL ALLOY FILMS

#88
20240279844
2024-08-22

n-TYPE GaN CRYSTAL, GaN WAFER, AND GaN CRYSTAL, GaN WAFER AND NITRIDE SEMICONDUCTOR DEVICE PRODUCTION METHOD

#89
20240271281
2024-08-15

DEPOSITION OF METAL FILMS

#90
20240266168
2024-08-08

METHOD OF MANUFACTURING GROUP III-NITRIDE SEMICONDUCTOR

#91
20240258109
2024-08-01

METHOD OF DEPOSITING A TUNGSTEN CONTAINING LAYER

#92
20240240317
2024-07-18

ELECTRON-ENHANCED ATOMIC LAYER DEPOSITION (EE-ALD) METHODS AND DEVICES PREPARED BY SAME

#93
20240238875
2024-07-18

COATED CUTTING TOOL

#94
20240227028
2024-07-11

CUTTING TOOL

#95
20240218504
2024-07-04

Cutting tool

#96
20240217001
2024-07-04

COATED CUTTING TOOL

#97
20240216998
2024-07-04

CUTTING TOOL

#98
20240216997
2024-07-04

Cutting tool

#99
20240191349
2024-06-13

PRECOAT METHOD FOR SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING APPARATUS

#100
20240186146
2024-06-06

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM

#101
20240186139
2024-06-06

SUBSTRATE PROCESSING METHOD

#102
20240183033
2024-06-06

MULTI-PULSE DEPOSITION PROCESSES

#103
20240167166
2024-05-23

METHODS FOR MAKING CUTTING TOOL INSERTS USING PROTECTIVE COATINGS

#104
20240167149
2024-05-23

MULTI-FUNCTIONAL SHUTTER DISK FOR THIN FILM DEPOSITION CHAMBER

#105
20240150892
2024-05-09

METHOD OF FORMING VANADIUM NITRIDE-CONTAINING LAYER AND STRUCTURE COMPRISING THE SAME

#106
20240145301
2024-05-02

METAL THIN-FILM PRECURSOR COMPOSITION, METHOD OF FORMING THIN FILM USING METAL THIN-FILM PRECURSOR COMPOSITION, AND SEMICONDUCTOR SUBSTRATE FABRICATED USING METHOD

#107
20240145232
2024-05-02

BENZYL COMPOUND PASSIVATION FOR SELECTIVE DEPOSITION AND SELECTIVE ETCH PROTECTION

#108
20240139825
2024-05-02

CUTTING TOOL

#109
20240128307
2024-04-18

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

#110
20240117498
2024-04-11

COATED CUTTING TOOL

#111
20240110277
2024-04-04

TRANSITION METAL NITRIDE DEPOSITION METHOD

#112
20240105446
2024-03-28

SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM AND SUBSTRATE PROCESSING APPARATUS

#113
20240093357
2024-03-21

Semiconductor Device, Method and Machine of Manufacture

#114
20240084446
2024-03-14

REACTION CHAMBER COMPONENT, DEPOSITION APPARATUS PROVIDED WITH SUCH COMPONENT AND METHOD OF PROTECTING SUCH COMPONENT

#115
20240068092
2024-02-29

Methods for depositing a molybdenum nitride film on a surface of a substrate by a cyclical deposition process and related semiconductor device structures including a molybdenum nitride film

#116
20240060178
2024-02-22

IN-SITU SOLID CHEMICAL VAPOR DEPOSITION PRECURSOR DELIVERY

#117
20240055259
2024-02-15

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM AND SUBSTRATE PROCESSING APPARATUS

#118
20240051033
2024-02-15

Cutting tool with a TiAlN coating having rake and relief surfaces with different residual stresses

#119
20240033829
2024-02-01

COATED CUTTING TOOL

#120
20240030062
2024-01-25

INTEGRATION OF FULLY ALIGNED VIA THROUGH SELECTIVE DEPOSITION AND RESISTIVITY REDUCTION

#121
20240030035
2024-01-25

METHODS FOR FORMING A TRANSITION METAL NIOBIUM NITRIDE FILM ON A SUBSTRATE BY ATOMIC LAYER DEPOSITION AND RELATED SEMICONDUCTOR DEVICE STRUCTURES

#122
20240026500
2024-01-25

COATED CUTTING TOOL

#123
20240018650
2024-01-18

METHOD FOR PRODUCING X-RAY PHASE GRATINGS AND X-RAY GRATINGS PRODUCED BY THE METHOD

#124
20240011160
2024-01-11

THIN FILM DEPOSITION WITH IMPROVED CONTROL OF PRECURSOR

#125
20230416916
2023-12-28

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM

#126
20230407521
2023-12-21

GROUP III NITRIDE SINGLE CRYSTAL SUBSTRATE

#127
20230399743
2023-12-14

Cyclic Film Deposition Using Reductant Gas

#128
20230395369
2023-12-07

SMOOTH TITANIUM NITRIDE LAYERS AND METHODS OF FORMING THE SAME

#129
20230386831
2023-11-30

SELECTIVE DEPOSITION OF METAL OXIDES USING SILANES AS AN INHIBITOR

#130
20230352556
2023-11-02

Methods for forming a semiconductor device structure and related semiconductor device structures

#131
20230304148
2023-09-28

HEAT-RESISTANT COAT MEMBER PACKAGED BODY, AND METHOD FOR PACKAGING HEAT-RESISTANT COAT MEMBER

#132
20230295804
2023-09-21

METHOD OF FORMING INTERCONNECT STRUCTURE

#133
20230295801
2023-09-21

FILM FORMING METHOD AND APPARATUS

#134
20230295800
2023-09-21

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, RECORDING MEDIUM AND SUBSTRATE PROCESSING APPARATUS

#135
20230290639
2023-09-14

LOW RESISTANCE GATE OXIDE METALLIZATION LINER

#136
20230286056
2023-09-14

COATED CUTTING TOOL AND METHOD FOR MAKING COATING LAYER

#137
20230260834
2023-08-17

METAL OXIDE DIFFUSION BARRIERS

#138
20230257881
2023-08-17

GROWTH INHIBITOR FOR FORMING THIN FILM, METHOD OF FORMING THIN FILM USING GROWTH INHIBITOR, AND SEMICONDUCTOR SUBSTRATE FABRICATED BY METHOD

#139
20230257870
2023-08-17

COATED ITEMS AND MANUFACTURING THEREOF

#140
20230257404
2023-08-17

TITANIUM COMPLEX, METHOD FOR PRODUCING SAME, AND METHOD FOR PRODUCING TITANIUM-CONTAINING THIN FILM

#141
20230253186
2023-08-10

PEALD TITANIUM NITRIDE WITH DIRECT MICROWAVE PLASMA

#142
20230235460
2023-07-27

IGNITION CONTROL METHOD, FILM FORMING METHOD, AND FILM FORMING APPARATUS

#143
20230234142
2023-07-27

Coated tool and cutting tool

#144
20230230830
2023-07-20

PEALD nitride films

#145
20230227969
2023-07-20

Stress reducing method

#146
20230215763
2023-07-06

SYSTEMS AND METHODS FOR CLEANING AND TREATING A SURFACE OF A SUBSTRATE

#147
20230215725
2023-07-06

Conformal and smooth titanium nitride layers and methods of forming the same

#148
20230212748
2023-07-06

SHOWER PLATE AND FILM DEPOSITION APPARATUS

#149
20230212738
2023-07-06

METHOD AND DEVICE FOR FORMING TUNGSTEN FILM, AND DEVICE FOR FORMING INTERMEDIATE FILM BEFORE FORMING TUNGSTEN FILM

#150
20230203657
2023-06-29

Ceramic showerheads with conductive electrodes

#151
20230187389
2023-06-15

METHOD OF MANUFACTURING A REDISTRIBUTION LAYER, REDISTRIBUTION LAYER, INTEGRATED CIRCUIT AND METHODS FOR ELECTRICALLY TESTING AND PROTECTING THE INTEGRATED CIRCUIT

#152
20230184533
2023-06-15

In-situ deposition thickness monitoring

#153
20230184119
2023-06-15

METHODS OF PROTECTING METALLIC COMPONENTS AGAINST CORROSION USING CHROMIUM-CONTAINING THIN FILMS

#154
20230183857
2023-06-15

CHEMICAL VACUUM DEPOSITION OF A THIN TUNGSTEN AND/OR MOLYBDENUM SULFIDE FILM METHOD

#155
20230175129
2023-06-08

METHODS FOR IMPROVING THIN FILM QUALITY

#156
20230175119
2023-06-08

PRECURSOR FOR FORMING THIN FILM, METHOD OF PREPARING THE SAME, AND METHOD OF MANUFACTURING THIN FILM INCLUDING THE SAME

#157
20230175118
2023-06-08

Methods of forming low resistivity titanium nitride thin film in horizontal vias and related devices

#158
20230175115
2023-06-08

SELECTIVE FILM FORMATION METHOD

#159
20230170210
2023-06-01

Methods and precursors for selective deposition of metal films

#160
20230152519
2023-05-18

Optical dielectric planar waveguide process

#161
20230151488
2023-05-18

TISIN COATING METHOD

#162
20230151483
2023-05-18

COATING SYSTEM HAVING SYNTHETIC OXIDE LAYERS

#163
20230151038
2023-05-18

Arene molybdenum (0) precursors for deposition of molybdenum films

#164
20230139267
2023-05-04

Conditioning treatment for ALD productivity

#165
20230137865
2023-05-04

FILM FORMING METHOD AND FILM FORMING APPARATUS

#166
20230135342
2023-05-04

Film forming method and film forming apparatus

#167
20230134230
2023-05-04

METHODS AND APPARATUS FOR TUNGSTEN GAP FILL

#168
20230131197
2023-04-27

Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium

#169
20230129073
2023-04-27

CYCLOHEPTATRIENE MOLYBDENUM (0) PRECURSORS FOR DEPOSITION OF MOLYBDENUM FILMS

#170
20230088349
2023-03-23

Method for applying a functional compound on sulfur particles

#171
20230085443
2023-03-16

Fluorine-containing conductive films

#172
20230085248
2023-03-16

SURFACE COATED CUTTING TOOLS

#173
20230081219
2023-03-16

Substrate Processing Apparatus, Substrate Processing Method, Method of Manufacturing Semiconductor Device and Non-transitory Computer-readable Recording Medium

#174
20230071461
2023-03-09

METHOD OF MANUFACTURING AN IMPLANT AND AN IMPLANT WITH TWO COATINGS

#175
20230070336
2023-03-09

Method for structuring an anti-counterfeit marking in an at least partially transparent object and at least partially transparent object comprising an anti-counterfeit marking

#176
20230058739
2023-02-23

COATED TOOL

#177
20230049464
2023-02-16

Ruthenium-Containing Films Deposited On Ruthenium-Titanium Nitride Films And Methods Of Forming The Same

#178
20230037960
2023-02-09

FILM FORMING METHOD, FILM FORMING DEVICE, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

#179
20230034561
2023-02-02

AMMONIA ABATEMENT FOR IMPROVED ROUGHING PUMP PERFORMANCE

#180
20230030762
2023-02-02

METHOD FOR FORMING TITANIUM NITRIDE FILM AND APPARATUS FOR FORMING TITANIUM NITRIDE FILM

#181
20230027560
2023-01-26

Homoleptic lanthanide deposition precursors

#182
20230018136
2023-01-19

METHOD FOR MANUFACTURING GROUP III NITRIDE SUBSTRATE, AND GROUP III NITRIDE SUBSTRATE

#183
20230008048
2023-01-12

Structure and manufacturing method of surface acoustic wave filter with back electrode of piezoelectric layer

#184
20230002882
2023-01-05

METHOD FOR THE SURFACE TREATMENT OF A JEWEL, IN PARTICULAR FOR THE WATCHMAKING INDUSTRY

#185
20220415711
2022-12-29

BACKSIDE REACTIVE INHIBITION GAS

#186
20220411919
2022-12-29

Transition metal nitride deposition method

#187
20220403529
2022-12-22

Manufacturing Method of Nitride Semiconductor Photoelectrode

#188
20220402027
2022-12-22

Energy storage devices having coated passive particles

#189
20220396590
2022-12-15

Compound, thin-film forming raw material, and method of producing thin-film

#190
20220372053
2022-11-24

STABLE BIS(ALKYL-ARENE) TRANSITION METAL COMPLEXES AND METHODS OF FILM DEPOSITION USING THE SAME

#191
20220364636
2022-11-17

COATING FOR A TRIBOLOGICAL SURFACE OF A COMPONENT

#192
20220364230
2022-11-17

Pulsing plasma treatment for film densification

#193
20220362860
2022-11-17

Coated cutting tool

#194
20220356579
2022-11-10

DEPOSITION OF METAL FILMS

#195
20220356565
2022-11-10

TITANIUM NITRIDE FILM FORMING METHOD AND TITANIUM NITRIDE FILM FORMING APPARATUS

#196
20220356562
2022-11-10

Providing multifunctional shutter disk above the workpiece in the multifunctional chamber during degassing or pre-cleaning of the workpiece, and storing the multifunctional shutter disc during deposition process in the same multifunctional chamber

#197
20220349048
2022-11-03

Reducing line bending during metal fill process

#198
20220336227
2022-10-20

METHODS FOR CONTROLLING CONTACT RESISTANCE IN COBALT-TITANIUM STRUCTURES

#199
20220333243
2022-10-20

METHOD FOR FORMING METAL NITRIDE THIN FILM

#200
20220328348
2022-10-13

Impurity removal in doped ALD tantalum nitride

#201
20220325411
2022-10-13

YTTRIUM/LANTHANIDE METAL PRECURSOR COMPOUND, COMPOSITION FOR FORMING FILM INCLUDING THE SAME, AND METHOD OF FORMING YTTRIUM/LANTHANIDE METAL CONTAINING FILM USING THE SAME

#202
20220324887
2022-10-13

ORGANOMETALLIC ADDUCT COMPOUND AND METHOD OF MANUFACTURING INTEGRATED CIRCUIT DEVICE BY USING THE SAME

#203
20220316055
2022-10-06

LOW TEMPERATURE DEPOSITION PROCESS

#204
20220315612
2022-10-06

NEW GROUP V AND VI TRANSITION METAL PRECURSORS FOR THIN FILM DEPOSITION

#205
20220310451
2022-09-29

Adjusting work function through adjusting deposition temperature

#206
20220301859
2022-09-22

Stimulus responsive polymer films and formulations

#207
20220298920
2022-09-22

Methods for depositing coatings on aerospace components

#208
20220298644
2022-09-22

METHOD OF TREATING A COATED CUTTING TOOL

#209
20220298624
2022-09-22

SUBSTANTIALLY CARBON-FREE MOLYBDENUM-CONTAINING AND TUNGSTEN-CONTAINING FILMS IN SEMICONDUCTOR DEVICE MANUFACTURING

#210
20220297199
2022-09-22

Cutting tools

#211
20220293423
2022-09-15

METHOD FOR FORMING THIN FILM

#212
20220290291
2022-09-15

Semiconductor device, method and machine of manufacture

#213
20220277936
2022-09-01

PROTECTIVE MULTILAYER COATING FOR PROCESSING CHAMBER COMPONENTS

#214
20220275511
2022-09-01

METHOD FOR FORMING THIN FILM

#215
20220274892
2022-09-01

Coated cutting tool

#216
20220267904
2022-08-25

METHODS FOR FORMING IMPURITY FREE METAL ALLOY FILMS

#217
20220267898
2022-08-25

PRECURSOR DELIVERY SYSTEM AND METHOD FOR HIGH SPEED CYCLIC DEPOSITION

#218
20220267897
2022-08-25

Method for producing a group III compound crystal by hydride vapor phase epitaxy on a seed substrate formed on a group III nitride base substrate

#219
20220259722
2022-08-18

SUBSTRATE SURFACE MODIFIER FOR ATOMIC LAYER DEPOSITION AND METHOD FOR MODIFYING SURFACE OF SUBSTRATE USING THE SAME

#220
20220251707
2022-08-11

METHODS OF FILLING RECESSES ON SUBSTRATE SURFACE, STRUCTURES FORMED USING THE METHODS, AND SYSTEMS FOR FORMING SAME

#221
20220251704
2022-08-11

PRECURSOR DELIVERY SYSTEM AND METHOD FOR CYCLIC DEPOSITION

#222
20220228264
2022-07-21

Methods for depositing a transition metal nitride film on a substrate by atomic layer deposition and related deposition apparatus

#223
20220220607
2022-07-14

Cycloheptatriene molybdenum (0) precursors for deposition of molybdenum films

#224
20220220140
2022-07-14

Arene molybdenum (0) precursors for deposition of molybdenum films

#225
20220216060
2022-07-07

Conformal and smooth titanium nitride layers and methods of forming the same

#226
20220205109
2022-06-30

Coated cutting tool

#227
20220195598
2022-06-23

Atomic layer deposition of metal films

#228
20220189779
2022-06-16

Substrate processing method and substrate processing apparatus

#229
20220186364
2022-06-16

Methods for depositing a molybdenum nitride film on a surface of a substrate by a cyclical deposition process and related semiconductor device structures including a molybdenum nitride film

#230
20220178029
2022-06-09

DEPOSITION APPARATUS AND DEPOSITION METHOD

#231
20220178027
2022-06-09

ALD OF METAL-CONTAINING FILMS USING CYCLOPENTADIENYL COMPOUNDS

#232
20220178024
2022-06-09

FURNACE WITH METAL FURNACE TUBE

#233
20220176301
2022-06-09

Scrubber, ALD process system including the scrubber and method for fabricating semiconductor device using the scrubber

#234
20220172988
2022-06-02

Conformal and smooth titanium nitride layers and methods of forming the same

#235
20220157600
2022-05-19

Film forming method, method for manufacturing semiconductor device, film forming device, and system for manufacturing semiconductor device

#236
20220145466
2022-05-12

Method for selectively manufacturing material layer and target pattern

#237
20220134445
2022-05-05

Insert and cutting tool including the same

#238
20220127725
2022-04-28

Method of processing substrate

#239
20220115592
2022-04-14

Conformal damage-free encapsulation of chalcogenide materials

#240
20220102163
2022-03-31

Apparatus and method for etching metal nitrides

#241
20220098731
2022-03-31

Method of reducing titanium nitride etching during tungsten film formation

#242
20220090261
2022-03-24

Vaporizable source material container and solid vaporization/supply system using the same

#243
20220090260
2022-03-24

Substrate processing apparatus, method of manufacturing semiconductor device and substrate processing method

#244
20220084831
2022-03-17

Bottom-up metal nitride formation

#245
20220064796
2022-03-03

Substrate processing method, substrate processing apparatus using the same, and semiconductor device manufacturing method

#246
20220064396
2022-03-03

Method for preparing modified polypropylene film

#247
20220056580
2022-02-24

Fabricating method of semi-polar gallium nitride

#248
20220056579
2022-02-24

System and method for vapor deposition coating of extrusion dies using impedance disks

#249
20220055118
2022-02-24

Surface-coated TiN-based cermet cutting tool in which hard coating layer exhibits excellent chipping resistance

#250
20220049353
2022-02-17

Methods for forming impurity free metal alloy films

#251
20220044830
2022-02-10

Coated fuel pellets, methods of making and using same

#252
20220044000
2022-02-10

Thermally conductive and protective coating for electronic device

#253
20220043210
2022-02-10

Optical dielectric planar waveguide process

#254
20220040767
2022-02-10

Cutting tool

#255
20220037136
2022-02-03

Deposition system with multi-cathode and method of manufacture thereof

#256
20220032380
2022-02-03

Cutting tool

#257
20220029049
2022-01-27

METAL ORGANIC CHEMICAL VAPOR DEPOSTION (MOCVD) TUNNEL JUNCTION GROWTH IN III-NITRIDE DEVICES

#258
20220025515
2022-01-27

Plasma-enhanced chemical vapor deposition method of forming lithium-based film by using the same

#259
20220018025
2022-01-20

Method for forming structures including transition metal layers

#260
20220009002
2022-01-13

Coated cutting tool

#261
20220005738
2022-01-06

Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Non-transitory Computer-readable Recording Medium

#262
20220002886
2022-01-06

Method for producing nitride semiconductor photoelectrode

#263
20220002883
2022-01-06

Methods for refurbishing aerospace components

#264
20220002868
2022-01-06

Atomic layer deposition of rhenium containing thin films

#265
20220002865
2022-01-06

NUCLEAR COMPONENT WITH METASTABLE CR COATING, DLI-MOCVD METHOD FOR PRODUCING SAME, AND USES FOR CONTROLLING OXIDATION/HYDRIDATION

#266
20220002864
2022-01-06

Cleaning apparatus for component for semiconductor production apparatus, cleaning method for component of semiconductor production apparatus, and cleaning system for component of semiconductor production apparatus

#267
20220001457
2022-01-06

Surface-coated cutting tool

#268
20210407853
2021-12-30

Impurity removal in doped ALD tantalum nitride

#269
20210407774
2021-12-30

Method of manufacturing semiconductor device, substrate processing method, substrate processing apparatus, and recording medium

#270
20210402486
2021-12-30

Surface coated cutting tool having hard coating layer exhibiting excellent chipping resistance

#271
20210399313
2021-12-23

Fuel cell components protected with nitride materials

#272
20210399310
2021-12-23

Tungsten metal/tungsten nitride enhanced platinum-based ORR catalyst and method for making the same

#273
20210399111
2021-12-23

Titanium aluminum and tantalum aluminum thin films

#274
20210395882
2021-12-23

Method for nucleation of conductive nitride films

#275
20210391440
2021-12-16

Methods for forming a semiconductor device structure and related semiconductor device structures

#276
20210388010
2021-12-16

ORGANOMETALLIC COMPOUND AND METHOD OF MANUFACTURING INTEGRATED CIRCUIT USING THE SAME

#277
20210387855
2021-12-16

Barrier film

#278
20210381109
2021-12-09

Barrier film

#279
20210379671
2021-12-09

Cutting tool

#280
20210371978
2021-12-02

SYSTEM AND METHODS FOR DIRECT LIQUID INJECTION OF VANADIUM PRECURSORS

#281
20210371974
2021-12-02

Cutting tool

#282
20210371973
2021-12-02

Cutting tool

#283
20210370410
2021-12-02

Cutting tool

#284
20210362245
2021-11-25

Coated cutting tool

#285
20210358919
2021-11-18

METHODS OF FORMING ELECTRONIC APPARATUS WITH TITANIUM NITRIDE CONDUCTIVE STRUCTURES, AND RELATED ELECTRONIC APPARATUS AND SYSTEMS

#286
20210355581
2021-11-18

Laser-assisted metal-organic chemical vapor deposition devices and methods of use thereof

#287
20210354204
2021-11-18

Coated cutting tool, and method and system for manufacturing the same by chemical vapor deposition

#288
20210335615
2021-10-28

Methods and systems for depositing a layer comprising vanadium, nitrogen, and a further element

#289
20210332476
2021-10-28

Method of forming vanadium nitride-containing layer

#290
20210327715
2021-10-21

Method of forming chromium nitride layer and structure including the chromium nitride layer

#291
20210324516
2021-10-21

Process for the generation of metal- or semimetal-containing films

#292
20210317575
2021-10-14

SUBSTRATE PROCESSING APPARATUS

#293
20210317574
2021-10-14

SUBSTRATE PROCESSING APPARATUS

#294
20210317570
2021-10-14

Selective deposition of titanium films

#295
20210310154
2021-10-07

Vapor phase epitaxial growth device

#296
20210305029
2021-09-30

Substrate processing system, substrate processing method, and controller

#297
20210301401
2021-09-30

PRECURSOR SOLUTION FOR THIN FILM DEPOSITION AND THIN FILM FORMING METHOD USING SAME

#298
20210300955
2021-09-30

Molybdenum compound and method of manufacturing integrated circuit device using the same

#299
20210299758
2021-09-30

Coated cutting tool

#300
20210292901
2021-09-23

Methods of protecting metallic components against corrosion using chromium-containing thin films