Patents-Review.com
ClassID:

120170 ⎘

C23C16/34 - page 2 - CPC Classification

Classification description:

Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material; Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides Nitrides

Recent Application in this class:
#301
20210292901
2021-09-23

Methods of protecting metallic components against corrosion using chromium-containing thin films

 #302
20210291279
2021-09-23

Hard-film-coated drill

 #303
20210277517
2021-09-09

Reagents to remove oxygen from metal oxyhalide precursors in thin film deposition processes

 #304
20210269916
2021-09-02

Conditioning treatment for ALD productivity

 #305
20210265173
2021-08-26

Tin oxide mandrels in patterning

 #306
20210263195
2021-08-26

Optical article having directional micro- or nanostructured thin film coating, and its process

 #307
20210246023
2021-08-12

Vanadium nitride film, and member coated with vanadium nitride film and method for manufacturing the same

 #308
20210245261
2021-08-12

Cutting tool

 #309
20210245259
2021-08-12

Cutting tool

 #310
20210242023
2021-08-05

Method of manufacturing semiconductor device, non-transitory computer-readable recording medium and substrate processing apparatus

 #311
20210237165
2021-08-05

Cutting tool

 #312
20210233817
2021-07-29

Adjusting work function through adjusting deposition temperature

 #313
20210233787
2021-07-29

WARP MEASUREMENT DEVICE, VAPOR DEPOSITION APPARATUS, AND WARP MEASUREMENT METHOD

 #314
20210222294
2021-07-22

Metal triamine compound, method for preparing the same, and composition for depositing metal-containing thin film including the same

 #315
20210207273
2021-07-08

Coating and coated cutting tool comprising the coating

 #316
20210207268
2021-07-08

Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium

 #317
20210202314
2021-07-01

Method for producing an interconnection comprising a via extending through a substrate

 #318
20210193515
2021-06-24

Systems and methods for cobalt metalization

 #319
20210189564
2021-06-24

Ceramic showerheads with conductive electrodes

 #320
20210184003
2021-06-17

Nitride semiconductor substrate, laminate, substrate selection program, substrate data output program, off-angle coordinate map, and methods thereof

 #321
20210180211
2021-06-17

GROUP III NITRIDE SEMICONDUCTOR SUBSTRATE AND METHOD FOR MANUFACTURING GROUP III NITRIDE SEMICONDUCTOR SUBSTRATE

 #322
20210180184
2021-06-17

Method of forming vanadium nitride layer and structure including the vanadium nitride layer

 #323
20210172061
2021-06-10

Method for producing GaN crystal

 #324
20210166948
2021-06-03

Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium

 #325
20210166940
2021-06-03

Substrate processing apparatus having electrostatic chuck and substrate processing method

 #326
20210164127
2021-06-03

N-type GaN crystal, GaN wafer, and GaN crystal, GaN wafer and nitride semiconductor device production method

 #327
20210135330
2021-05-06

Method of growing titanium nitride on silicon substrate free from silicon nitride interface by using a titanium seed layer

 #328
20210125820
2021-04-29

RF power source operation in plasma enhanced processes

 #329
20210123140
2021-04-29

Coated cutting tool

 #330
20210123136
2021-04-29

Methods To Grow Low Resistivity Metal Containing Films

 #331
20210115567
2021-04-22

Layer of hard material on a metal substrate

 #332
20210115560
2021-04-22

FILM FORMING METHOD, FILM FORMING SYSTEM, AND FILM FORMING APPARATUS

 #333
20210115554
2021-04-22

Shutter disk having lamp, power, and/or gas modules arranged at the first side of the shutter disk of thin film deposition chamber

 #334
20210104397
2021-04-08

Smooth titanium nitride layers and methods of forming the same

 #335
20210104396
2021-04-08

Conformal and smooth titanium nitride layers and methods of forming the same

 #336
20210102297
2021-04-08

Hard material layer on metal substrate

 #337
20210102287
2021-04-08

THIN FILM DEPOSITION APPARATUS AND THIN FILM DEPOSITION METHOD

 #338
20210098258
2021-04-01

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM

 #339
20210090892
2021-03-25

Method for forming thin film

 #340
20210090877
2021-03-25

PEALD nitride films

 #341
20210087690
2021-03-25

METHOD FOR PRODUCING GRAIN-ORIENTED ELECTRICAL SHEET AND CONTINUOUS FILM-FORMING DEVICE

 #342
20210087683
2021-03-25

Method for forming thin film

 #343
20210085468
2021-03-25

Method of manufacturing an implant and an implant with two coatings

 #344
20210069795
2021-03-11

Cutting tool

 #345
20210062334
2021-03-04

Coated cutting tool

 #346
20210061833
2021-03-04

Lanthanoid compound, lanthanoid-containing thin film and formation of lanthanoid-containing thin film using the lanthanoid compound

 #347
20210057223
2021-02-25

Methods for depositing a molybdenum nitride film on a surface of a substrate by a cyclical deposition process and related semiconductor device structures including a molybdenum nitride film

 #348
20210054500
2021-02-25

Methods for forming a polycrystalline molybdenum film over a surface of a substrate and related structures including a polycrystalline molybdenum film

 #349
20210050211
2021-02-18

Deposition of rhenium-containing thin films

 #350
20210050186
2021-02-18

PEALD titanium nitride with direct microwave plasma

 #351
20210047728
2021-02-18

Self-aligned structures from sub-oxides

 #352
20210040606
2021-02-11

EQUIPMENT FOR MANUFACTURING GRAIN-ORIENTED ELECTROMAGNETIC STEEL SHEET

 #353
20210032275
2021-02-04

CYCLIC GERMANIUM SILYLAMIDO PRECURSORS FOR GE-CONTAINING FILM DEPOSITIONS AND METHODS OF USING THE SAME

 #354
20210028273
2021-01-28

Modifying ferroelectric properties of hafnium oxide with hafnium nitride layers

 #355
20210023616
2021-01-28

Energy storage devices having coated passive components

 #356
20210017645
2021-01-21

RESOLVING SPONTANEOUS ARCING DURING THICK FILM DEPOSITION OF HIGH TEMPERATURE AMORPHOUS CARBON DEPOSITION

 #357
20210017632
2021-01-21

Cemented carbide, coated tool, and cutting tool

 #358
20210016362
2021-01-21

Cemented carbide, coated tool using same, and cutting tool

 #359
20210013366
2021-01-14

GROUP 13 ELEMENT NITRIDE LAYER, FREE-STANDING SUBSTRATE, FUNCTIONAL ELEMENT, AND METHOD OF PRODUCING GROUP 13 ELEMENT NITRIDE LAYER

 #360
20210010134
2021-01-14

SEMICONDUCTOR MANUFACTURING APPARATUS AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE

 #361
20200411330
2020-12-31

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM

 #362
20200399753
2020-12-24

Metal component and method for producing same

 #363
20200392624
2020-12-17

METHODS AND APPARATUS FOR DEPOSITING YTTRIUM-CONTAINING FILMS

 #364
20200385858
2020-12-10

Coating of fluid-permeable materials

 #365
20200385857
2020-12-10

Manufacturing of coated items

 #366
20200378004
2020-12-03

Method of applying a flow field plate coating

 #367
20200376566
2020-12-03

Surface-coated cutting tool and method for manufacturing same

 #368
20200365401
2020-11-19

Boron-containing compounds, compositions, and methods for the deposition of a boron containing films

 #369
20200365396
2020-11-19

Methods for forming graded wurtzite III-nitride alloy layers

 #370
20200354838
2020-11-12

Surface-coated cutting tool in which hard coating layer exhibits exceptional adhesion resistance and anomalous damage resistance

 #371
20200354833
2020-11-12

Method for forming a protective coating film for halide plasma resistance

 #372
20200350204
2020-11-05

Selective deposition on non-metallic surfaces

 #373
20200350179
2020-11-05

High voltage, low pressure plasma enhanced atomic layer deposition

 #374
20200348468
2020-11-05

Optical dielectric planar waveguide process

 #375
20200347514
2020-11-05

Laminate of aluminum nitride single-crystal substrate

 #376
20200343358
2020-10-29

Methods for forming a semiconductor device structure and related semiconductor device structures

 #377
20200340114
2020-10-29

Atomic layer deposition of rhenium containing thin films

 #378
20200340106
2020-10-29

Surface-coated cutting tool and method for manufacturing same

 #379
20200338646
2020-10-29

Surface-coated cutting tool and method for manufacturing same

 #380
20200335328
2020-10-22

Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium

 #381
20200328285
2020-10-15

Titanium aluminum and tantalum aluminum thin films

 #382
20200312653
2020-10-01

Methods and precursors for selective deposition of metal films

 #383
20200306837
2020-10-01

CVD coated cutting tool

 #384
20200306410
2020-10-01

COATING FOR JOINT IMPLANTS

 #385
20200303222
2020-09-24

Heat treatment apparatus and film deposition method

 #386
20200303196
2020-09-24

Methods for forming a transition metal niobium nitride film on a substrate by atomic layer deposition and related semiconductor device structures

 #387
20200299862
2020-09-24

Group III nitride single crystal substrate

 #388
20200282465
2020-09-10

Coated cutting tool

 #389
20200277315
2020-09-03

Titanium-containing film forming compositions for vapor deposition of titanium-containing films

 #390
20200270750
2020-08-27

PRECURSOR SOLUTION FOR THIN FILM DEPOSITION AND THIN FILM FORMING METHOD USING SAME

 #391
20200266096
2020-08-20

Selective deposition of aluminum and nitrogen containing material

 #392
20200263297
2020-08-20

DEPOSITION OF OXIDES AND NITRIDES

 #393
20200261982
2020-08-20

Coated cutting tool

 #394
20200258748
2020-08-13

Substrate processing method and substrate processing apparatus

 #395
20200246876
2020-08-06

Coated tool and cutting tool

 #396
20200240018
2020-07-30

Methods for depositing coatings on aerospace components

 #397
20200240017
2020-07-30

Homoleptic lanthanide deposition precursors

 #398
20200238390
2020-07-30

Nanostructured metallic layer on carbide for improved coating adhesion

 #399
20200235037
2020-07-23

Fluorine-containing conductive films

 #400
20200232094
2020-07-23

Nuclear component with metastable Cr coating, DLI-MOCVD method for producing same, and uses for controlling oxidation/hydridation

 #401
20200230707
2020-07-23

Coated cutting tool

 #402
20200224313
2020-07-16

Ceramic showerheads with conductive electrodes

 #403
20200203143
2020-06-25

METHOD FOR PREPARING MULTILAYER STRUCTURE

 #404
20200198967
2020-06-25

Vanadium nitride film, and member coated with vanadium nitride film and method for manufacturing the same

 #405
20200194269
2020-06-18

Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium

 #406
20200181769
2020-06-11

Process for passivating dielectric films

 #407
20200176677
2020-06-04

FABRICATION OF CORRELATED ELECTRON MATERIAL DEVICES WITH REDUCED INTERFACIAL LAYER IMPEDANCE

 #408
20200149187
2020-05-14

Vapor phase growth apparatus comprising n reactors, a primary gas supply path, a main secondary gas supply path, (n−1) auxiliary secondary gas supply paths, a first control circuit, and a second control circuit

 #409
20200148712
2020-05-14

Ruthenium precursors for ALD and CVD thin film deposition and uses thereof

 #410
20200144082
2020-05-07

Substrate processing apparatus, method of manufacturing semiconductor device, method of loading substrate and non-transitory computer-readable recording medium

 #411
20200144073
2020-05-07

Methods and apparatus for controlling contact resistance in cobalt-titanium structures

 #412
20200141000
2020-05-07

Substrate processing methods

 #413
20200135506
2020-04-30

Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device, and Non-Transitory Computer-readable Recording Medium

 #414
20200127163
2020-04-23

Nitride semiconductor template, method for manufacturing nitride semiconductor template, and method for manufacturing nitride semiconductor free-standing substrate

 #415
20200115822
2020-04-16

VAPOR PHASE GROWTH APPARATUS AND VAPOR PHASE GROWTH METHOD

 #416
20200115794
2020-04-16

Coated cutting tool

 #417
20200102645
2020-04-02

Semiconductor device, method and machine of manufacture

 #418
20200091016
2020-03-19

MANUFACTURING METHOD AND INSPECTION METHOD OF GROUP-III NITRIDE LAMINATE, AND GROUP-III NITRIDE LAMINATE

 #419
20200090986
2020-03-19

Aluminum-containing layers and methods of forming the same

 #420
20200083056
2020-03-12

Metal and metal-derived films

 #421
20200071848
2020-03-05

Vapor-liquid reaction device, reaction tube, film forming apparatus

 #422
20200071829
2020-03-05

Film forming method and film forming system

 #423
20200066987
2020-02-27

Conformal damage-free encapsulation of chalcogenide materials

 #424
20200063268
2020-02-27

Grain-oriented electromagnetic steel sheet and method of producing grain-oriented electromagnetic steel sheet

 #425
20200061718
2020-02-27

Surface-coated cutting tool and method for manufacturing the same

 #426
20200061717
2020-02-27

Surface-coated cutting tool and method for manufacturing the same

 #427
20200056287
2020-02-20

Film-Forming Method and Film-Forming Apparatus

 #428
20200048765
2020-02-13

Gas processing apparatus and gas processing method

 #429
20200040462
2020-02-06

Surface coated member and method for manufacturing same

 #430
20200035482
2020-01-30

Buffer layer for Gallium Nitride-on-Silicon epitaxy

 #431
20200035481
2020-01-30

Method of forming titanium nitride films with (200) crystallographic texture

 #432
20200030887
2020-01-30

HARD COATING, CUTTING TOOL, AND METHOD FOR PRODUCING HARD COATING

 #433
20200024770
2020-01-23

Method of manufacturing group III nitride semiconductor substrate, group III nitride semiconductor substrate, and bulk crystal

 #434
20200024738
2020-01-23

ALD of metal-containing films using cyclopentadienyl compounds

 #435
20200019750
2020-01-16

Thermally conductive and protective coating for electronic device

 #436
20200013955
2020-01-09

Methods of forming resistive memory elements

 #437
20200013589
2020-01-09

Protection of aluminum process chamber components

 #438
20200012017
2020-01-09

OPTICAL PART, METHOD FOR PRODUCING OPTICAL PART, AND IMAGE DISPLAY APPARATUS

 #439
20200010952
2020-01-09

Coating system having synthetic oxide layers

 #440
20200002819
2020-01-02

Coated cutting tool

 #441
20190390350
2019-12-26

Grain-oriented electrical steel sheet and production method for grain-oriented electrical steel sheet

 #442
20190382894
2019-12-19

Substrate processing apparatus

 #443
20190378723
2019-12-12

Semiconductor film forming method using hydrazine-based compound gas

 #444
20190368045
2019-12-05

Microwave plasma and ultraviolet assisted deposition apparatus and method for material deposition using the same

 #445
20190368044
2019-12-05

Microwave plasma and ultraviolet assisted deposition apparatus and method for material deposition using the same

 #446
20190358711
2019-11-28

Surface-coated cutting tool having hard coating layer exhibiting excellent chipping resistance and wear resistance

 #447
20190355576
2019-11-21

Thin film formation method

 #448
20190344357
2019-11-14

Coated cutting tool

 #449
20190344356
2019-11-14

CUTTING INSERT AND CUTTING TOOL

 #450
20190341304
2019-11-07

Barrier for copper metallization and methods of forming

 #451
20190330737
2019-10-31

Method and corresponding reactor for preparing metal nitrides with adjustable metal contents

 #452
20190329324
2019-10-31

VIRTUAL EXERCISER DEVICE

 #453
20190316253
2019-10-17

Forming iron nitride hard magnetic materials using chemical vapor deposition or liquid phase epitaxy

 #454
20190304835
2019-10-03

Organometallic precursors, methods of forming a layer using the same and methods of manufacturing semiconductor devices using the same

 #455
20190304791
2019-10-03

Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus and Non-transitory Computer-readable Recording Medium

 #456
20190301016
2019-10-03

Layer deposition method and layer deposition apparatus

 #457
20190296136
2019-09-26

Semiconductor wafer

 #458
20190292656
2019-09-26

Method of forming tungsten film and controller

 #459
20190288158
2019-09-19

SEED WAFER FOR GaN THICKENING USING GAS- OR LIQUID-PHASE EPITAXY

 #460
20190287799
2019-09-19

Apparatus for manufacturing group III nitride single crystal, method for manufacturing group III nitride single crystal using the apparatus, and aluminum nitride single crystal

 #461
20190284694
2019-09-19

Methods of protecting metallic components against corrosion using chromium-containing thin films

 #462
20190284686
2019-09-19

Methods for depositing coatings on aerospace components

 #463
20190280156
2019-09-12

Nitride semiconductor substrate, manufacturing method therefor, and semiconductor device

 #464
20190279864
2019-09-12

Compound semiconductor substrate comprising a SiC layer

 #465
20190271947
2019-09-05

Process for treating a surface of a timepiece component, and timepiece component obtained from such a process

 #466
20190271810
2019-09-05

Optical dielectric planar waveguide process

 #467
20190271083
2019-09-05

FILM FORMATION APPARATUS

 #468
20190262906
2019-08-29

Coated cutting tool

 #469
20190256985
2019-08-22

Oriented electromagnetic steel sheet and method for manufacturing oriented electromagnetic steel sheet

 #470
20190249297
2019-08-15

Semiconductor device and method of forming the same

 #471
20190245142
2019-08-08

Memory device and method of fabricating the same

 #472
20190245112
2019-08-08

Metal organic chemical vapor depostion (MOCVD) tunnel junction growth in III-nitride devices

 #473
20190237341
2019-08-01

Tin oxide mandrels in patterning

 #474
20190229237
2019-07-25

Group III nitride stacked body, and semiconductor device having the stacked body

 #475
20190221434
2019-07-18

Tungsten film forming method, film forming system and film forming apparatus

 #476
20190218664
2019-07-18

SUBSTRATE PROCESSING APPARATUS

 #477
20190218662
2019-07-18

Pre-coating method and film forming method

 #478
20190214627
2019-07-11

Apparatus and Method of Treating a Lithium-Ion-Battery Part

 #479
20190210116
2019-07-11

Surface-coated cutting tool and method for manufacturing the same

 #480
20190202847
2019-07-04

Group 5 metal compound, method for preparing the same, precursor composition for depositing layer containing the same, and method for depositing layer using the same

 #481
20190194077
2019-06-27

Cemented carbide and coated cemented carbide

 #482
20190189808
2019-06-20

Semiconductor device and method for manufacturing the same

 #483
20190189454
2019-06-20

Method for manufacturing semiconductor device

 #484
20190189422
2019-06-20

Method for manufacturing semiconductor device, substrate-processing apparatus, and recording medium

 #485
20190177839
2019-06-13

Hard coating, hard-coated tool, and their production methods

 #486
20190177346
2019-06-13

Vanadium compound

 #487
20190172747
2019-06-06

Modulating the microstructure of metallic interconnect structures

 #488
20190169743
2019-06-06

Advanced coating method and materials to prevent HDP-CVD chamber arcing

 #489
20190164768
2019-05-30

Film forming method

 #490
20190164763
2019-05-30

Methods for forming a transition metal nitride film on a substrate by atomic layer deposition and related semiconductor device structures

 #491
20190161507
2019-05-30

Titanium-containing film forming compositions for vapor deposition of titanium-containing films

 #492
20190161358
2019-05-30

Titanium-containing film forming compositions for vapor deposition of titanium-containing films

 #493
20190160547
2019-05-30

Coated cutting tool

 #494
20190153617
2019-05-23

Production Method and Production Device for Nitrogen Compound

 #495
20190152996
2019-05-23

Lanthanum compound and methods of forming thin film and integrated circuit device using the lanthanum compound

 #496
20190151956
2019-05-23

Surface-coated cutting tool and method of producing the same

 #497
20190148412
2019-05-16

MULTILAYER WIRING FILM AND THIN FILM TRANSISTOR ELEMENT

 #498
20190140135
2019-05-09

Method for producing light-emitting UV column structures and the structures produced using this method

 #499
20190119988
2019-04-25

Drilling tip, drilling tool, and method of manufacturing drilling tip

 #500
20190119112
2019-04-25

Nitride crystal substrate

 #501
20190115254
2019-04-18

Integration of ALD copper with high temperature PVD copper deposition for BEOL interconnect

 #502
20190111497
2019-04-18

Coated cutting tool with h-AlN and Ti1-xAlxCyNz layers

 #503
20190106785
2019-04-11

Method of forming film

 #504
20190106294
2019-04-11

Pulley for an elevator with a friction reducing coating and method for manufacturing same

 #505
20190096663
2019-03-28

Method for manufacturing semiconductor device, non-transitory computer-readable recording medium, and substrate processing apparatus

 #506
20190093255
2019-03-28

Method for producing aluminum nitride single crystal substrate

 #507
20190093228
2019-03-28

Method for forming coating film having high heat resistance, high hardness and abrasion resistance, coating film having high heat resistance, high hardness and abrasion resistance, and cutting tool comprising same

 #508
20190088538
2019-03-21

Diffusion barriers

 #509
20190088465
2019-03-21

Method for producing silicon nitride film and silicon nitride film

 #510
20190081203
2019-03-14

Method of producing III nitride semiconductor light-emitting device

 #511
20190080915
2019-03-14

Metal and metal-derived films

 #512
20190074175
2019-03-07

Tantalum compound

 #513
20190071792
2019-03-07

Surface-coated cutting tool and method of producing the same

 #514
20190071771
2019-03-07

SEMICONDUCTOR MANUFACTURING APPARATUS AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE

 #515
20190067015
2019-02-28

Film-forming method and film-forming apparatus

 #516
20190043962
2019-02-07

Titanium aluminum and tantalum aluminum thin films

 #517
20190040546
2019-02-07

Epitaxial substrate

 #518
20190035605
2019-01-31

Method of depositing film by PEALD using negative bias

 #519
20190027573
2019-01-24

Methods for forming a semiconductor device structure and related semiconductor device structures

 #520
20190027359
2019-01-24

EPITAXIAL SUBSTRATE FOR SEMICONDUCTOR ELEMENTS, SEMICONDUCTOR ELEMENT, AND MANUFACTURING METHOD FOR EPITAXIAL SUBSTRATES FOR SEMICONDUCTOR ELEMENTS

 #521
20190023963
2019-01-24

Energy release using tunable reactive materials

 #522
20190019673
2019-01-17

Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium

 #523
20190017171
2019-01-17

Methods and apparatus for depositing yttrium-containing films

 #524
20190010606
2019-01-10

Coated tool

 #525
20190010605
2019-01-10

Method for producing GaN crystal

 #526
20190010583
2019-01-10

Cutting tool

 #527
20190009330
2019-01-10

Energy storage devices having coated passive components

 #528
20190006553
2019-01-03

Semiconductor method having annealing of epitaxially grown layers to form semiconductor structure with low dislocation density

 #529
20190003052
2019-01-03

Methods for depositing a transition metal nitride film on a substrate by atomic layer deposition and related deposition apparatus

 #530
20190003049
2019-01-03

Process for the generation of thin inorganic films

 #531
20180374734
2018-12-27

Substrate processing apparatus, substrate holder and mounting tool

 #532
20180371610
2018-12-27

CVD composite refractory coatings and applications thereof

 #533
20180366322
2018-12-20

In-situ formation of non-volatile lanthanide thin film precursors and use in ALD and CVD

 #534
20180361447
2018-12-20

COATED EXTRUSION TOOL

 #535
20180350897
2018-12-06

Method for manufacturing semiconductor device

 #536
20180350657
2018-12-06

Multi-region diffusion barrier containing titanium, silicon and nitrogen

 #537
20180350638
2018-12-06

Method of manufacturing semiconductor device, method of loading substrate and non-transitory computer-readable recording medium

 #538
20180347042
2018-12-06

Precursor composition containing group IV organic compound and method for forming thin film using same

 #539
20180347040
2018-12-06

TiSiN coating method

 #540
20180347039
2018-12-06

Aerosol Assisted CVD For Industrial Coatings

 #541
20180339415
2018-11-29

Surface-coated cutting tool and method of manufacturing the same

 #542
20180337306
2018-11-22

Manufacturing method for group III nitride semiconductor substrate and group III nitride semiconductor substrate

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20180333785
2018-11-22

SURFACE-COATED CUTTING TOOL AND METHOD OF PRODUCING THE SAME

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20180326501
2018-11-15

Surface-coated cutting tool

 #545
20180311745
2018-11-01

Surface-coated cutting tool and manufacturing method of the same

 #546
20180311742
2018-11-01

Surface-coated cutting tool with hard coating layer that exhibits excellent chipping resistance and manufacturing method thereof

 #547
20180311700
2018-11-01

Film forming method and film forming apparatus

 #548
20180309020
2018-10-25

Semiconductor light-emitting device and method of manufacturing semiconductor light-emitting device

 #549
20180308681
2018-10-25

Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium

 #550
20180308680
2018-10-25

Selective deposition with atomic layer etch reset

 #551
20180305823
2018-10-25

Coated cutting tool

 #552
20180305811
2018-10-25

Hard titanium aluminum nitride coating, hard-coated tool, and their production methods

 #553
20180305261
2018-10-25

Article having coating including compound of aluminum, boron and nitrogen

 #554
20180304376
2018-10-25

Coated cutting tool

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20180301716
2018-10-18

Coating method of separator for fuel cell and separator for fuel cell

 #556
20180301342
2018-10-18

Methods for manufacturing semiconductor devices

 #557
20180294094
2018-10-11

Method of fabricating a magnetic stack arrangement of a laminated magnetic inductor

 #558
20180294062
2018-10-11

CERAMIC COATING FOR CORROSION RESISTANCE OF NUCLEAR FUEL CLADDING

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20180291525
2018-10-11

Gallium nitride crystal, its manufacturing method, and crystal growth apparatus

 #560
20180291503
2018-10-11

Metal complexes containing amidoimine ligands

 #561
20180286747
2018-10-04

Semiconductor structure of interconnect and fabrication method thereof

 #562
20180277758
2018-09-27

Method of forming a layer and a method of fabricating a variable resistance memory device using the same

 #563
20180277363
2018-09-27

Compound semiconductor substrate with SiC layer

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20180274088
2018-09-27

Method for manufacturing nitride semiconductor substrate

 #565
20180265974
2018-09-20

Substrate processing method that includes step of introducing ballast gas to exhaust line while supplying processing gas

 #566
20180265973
2018-09-20

Plasma resistant coating of porous body by atomic layer deposition

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20180265972
2018-09-20

Plasma resistant coating of porous body by atomic layer deposition

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20180265966
2018-09-20

Cutting plate and manufacturing method

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20180261476
2018-09-13

Etching method

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20180258550
2018-09-13

Growth Method of Aluminum Nitride

 #571
20180257147
2018-09-13

Surface-coated cutting tool in which hard coating layer exhibits excellent chipping resistance

 #572
20180247866
2018-08-30

Modulating the microstructure of metallic interconnect structures

 #573
20180247817
2018-08-30

Epitaxial substrate for semiconductor elements, semiconductor element, and manufacturing method for epitaxial substrates for semiconductor elements

 #574
20180247810
2018-08-30

Epitaxial substrate for semiconductor elements, semiconductor element, and manufacturing method for epitaxial substrates for semiconductor elements

 #575
20180247809
2018-08-30

Epitaxial substrate for semiconductor elements, semiconductor element, and manufacturing method for epitaxial substrates for semiconductor elements

 #576
20180245240
2018-08-30

METHOD FOR PRODUCING SEMICONDUCTOR EPITAXIAL WAFER AND SEMICONDUCTOR EPITAXIAL WAFER

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20180245202
2018-08-30

Wear resistant vapor deposited coating, method of coating deposition and applications therefor

 #578
20180240755
2018-08-23

Cobalt manganese vapor phase deposition

 #579
20180236564
2018-08-23

Coated cutting tool

 #580
20180233351
2018-08-16

Method for manufacturing semiconductor device, substrate-processing apparatus, and recording medium

 #581
20180216226
2018-08-02

Method of manufacturing lithography template

 #582
20180216224
2018-08-02

Tool with TiAIN coating

 #583
20180204768
2018-07-19

Method of manufacturing semiconductor device

 #584
20180204721
2018-07-19

Precursors of manganese and manganese-based compounds for copper diffusion barrier layers and methods of use

 #585
20180195172
2018-07-12

CHEMICAL VAPOR DEPOSITION APPARATUS AND CHEMICAL VAPOR DEPOSITION METHOD

 #586
20180190496
2018-07-05

Method of manufacturing semiconductor device, substrate processing apparatus, recording medium, and supply system

 #587
20180178294
2018-06-28

Surface-coated cutting tool and method of producing the same

 #588
20180166604
2018-06-14

Method of producing III nitride semiconductor light-emitting device

 #589
20180164702
2018-06-14

Substrate processing apparatus

 #590
20180157162
2018-06-07

TRANSPARENT AND ELECTRICALLY CONDUCTIVE COATINGS CONTAINING NON-STOICHIOMETRIC METALLIC NITRIDES

 #591
20180155832
2018-06-07

Atomic layer deposition of rhenium containing thin films

 #592
20180155827
2018-06-07

Synthesis of metal nitride thin films materials using hydrazine derivatives

 #593
20180155379
2018-06-07

Ruthenium precursors for ALD and CVD thin film deposition and uses thereof

 #594
20180151801
2018-05-31

Semiconductor random access memory and manufacturing method thereof

 #595
20180151623
2018-05-31

Memory device and method of fabricating the same

 #596
20180151354
2018-05-31

Method of forming dielectric films, new precursors and their use in semiconductor manufacturing

 #597
20180145254
2018-05-24

Methods of forming resistive memory elements

 #598
20180142356
2018-05-24

THICKNESS UNIFORMITY CONTROL FOR EPITAXIALLY-GROWN STRUCTURES IN A CHEMICAL VAPOR DEPOSITION SYSTEM

 #599
20180135174
2018-05-17

COBALT COMPOUNDS, METHOD OF MAKING AND METHOD OF USE THEREOF

 #600
20180135169
2018-05-17

TiN-based film and TiN-based film forming method