Patents-Review.com
ClassID:

120262 ⎘

C23C16/4587 - CPC Classification

Classification description:

Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber; Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially vertically

Sub-classes:
Recent Application in this class:
#1
20260130168
2026-05-07

WAFER BOAT DEVICE AND PLASMA DISSOCIATION FURNACE TUBE SYSTEM

 #2
20240360589
2024-10-31

Batch Mode Silicon Carbide Epitaxial Reactor

 #3
20240360554
2024-10-31

SOLID SOURCE CHEMICAL VAPORIZER

 #4
20240352588
2024-10-24

ENABLE CVD CHAMBER PROCESS WAFERS AT DIFFERENT TEMPERATURES

 #5
20240249923
2024-07-25

PLASMA GENERATING DEVICE, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

 #6
20240222081
2024-07-04

ELECTROSTATIC CHUCK WITH MULTIPLE RADIO FREQUENCY MESHES TO CONTROL PLASMA UNIFORMITY

 #7
20240141479
2024-05-02

ACOUSTIC WAVE ASSISTED CHEMICAL VAPOR IINFILTRATION

 #8
20240102167
2024-03-28

NOVEL COATING METHOD OF COMPLEX 3D STRUCTURES USING LOW PRESSURE CHEMICAL VAPOR DEPOSITION

 #9
20240087929
2024-03-14

Method of Manufacturing Semiconductor Device and Non-transitory Computer-readable Recording Medium

 #10
20240026543
2024-01-25

LARGE CAPACITY DEPOSITION SYSTEM

 #11
20240026535
2024-01-25

Vacuum chamber and arrangement for atomic layer deposition

 #12
20230374698
2023-11-23

FABRICATING APPARATUS OF SIC EPITAXIAL WAFER AND FABRICATION METHOD OF THE SIC EPITAXIAL WAFER

 #13
20230357930
2023-11-09

SUPPORT FOR SEMICONDUCTOR SUBSTRATES FOR PECVD TREATMENT WITH HIGH SUBSTRATE LOADING CAPACITY

 #14
20230238222
2023-07-27

Plasma generating device, substrate processing apparatus, and method of manufacturing semiconductor device

 #15
20230111229
2023-04-13

GAS INJECTOR FOR A VERTICAL FURNACE

 #16
20230072594
2023-03-09

High power electrostatic chuck design with radio frequency coupling

 #17
20230040661
2023-02-09

SUBSTRATE RECEIVING AREA FOR PROCESS CHAMBERS

 #18
20230026860
2023-01-26

Holding system for holding substrates during a processing of the surfaces of the substrates

 #19
20230020318
2023-01-19

Plasma generating device, substrate processing apparatus, and method of manufacturing semiconductor device

 #20
20220411933
2022-12-29

FILM FORMING APPARATUS

 #21
20220316053
2022-10-06

Coating method for continuous preparation of diamond thin film with HFCVD device

 #22
20220208426
2022-06-30

Magnetic levitation system, base and carrier of a magnetic levitation system, and method of levitating a carrier

 #23
20220195594
2022-06-23

SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

 #24
20220186368
2022-06-16

Vaporizer, substrate processing apparatus and method for manufacturing semiconductor device

 #25
20220157628
2022-05-19

Substrate processing apparatus, substrate suppport and method of manufacturing semiconductor device

 #26
20220139745
2022-05-05

Method of manufacturing semiconductor device and non-transitory computer-readable recording medium

 #27
20220064819
2022-03-03

CVD REACTOR CHAMBER WITH RESISTIVE HEATING FOR SILICON CARBIDE DEPOSITION

 #28
20210363636
2021-11-25

Plasma boat for receiving wafers with regulated plasma deposition

 #29
20210292898
2021-09-23

Pedestal Geometry for Fast Gas Exchange

 #30
20210233751
2021-07-29

PLASMA TREATMENT APPARATUS

 #31
20210202216
2021-07-01

PLASMA GENERATING DEVICE, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

 #32
20210202215
2021-07-01

Plasma generating device, substrate processing apparatus, and method of manufacturing semiconductor device

 #33
20210166915
2021-06-03

Electrostatic chuck with multiple radio frequency meshes to control plasma uniformity

 #34
20210164099
2021-06-03

High throughput vacuum deposition sources and system

 #35
20210147978
2021-05-20

Substrate processing apparatus

 #36
20210143027
2021-05-13

Wafer rack and vertical wafer boat having the same

 #37
20210134634
2021-05-06

Substrate accommodating unit and maintenance method for vacuum transfer unit in substrate transfer apparatus

 #38
20210005474
2021-01-07

Inline thin film processing device

 #39
20200392625
2020-12-17

Substrate processing apparatus, gas nozzle and method of manufacturing semiconductor device

 #40
20200308701
2020-10-01

Film-forming device

 #41
20200291516
2020-09-17

Substrate processing apparatus

 #42
20200216958
2020-07-09

Substrate processing apparatus and heater device

 #43
20200168491
2020-05-28

Method of manufacturing semiconductor device and non-transitory computer-readable recording medium

 #44
20200105516
2020-04-02

METHOD AND DEVICE FOR FORMING A LAYER ON A SEMICONDUCTOR SUBSTRATE, AND SEMICONDUCTOR SUBSTRATE

 #45
20200075372
2020-03-05

Method for forming films on wafers separated by different distances

 #46
20200035852
2020-01-30

Chemical vapor deposition equipment for solar cell and deposition method thereof

 #47
20190338413
2019-11-07

In-line coater for vacuum deposition of thin film coatings

 #48
20190301002
2019-10-03

Mask arrangement for masking a substrate in a processing chamber, apparatus for depositing a layer on a substrate, and method for aligning a mask arrangement for masking a substrate in a processing chamber

 #49
20190214302
2019-07-11

Method for arranging a plurality of seed substrates on a carrier element and carrier element having seed substrates

 #50
20190157049
2019-05-23

Plasma generating device, substrate processing apparatus, and method of manufacturing semiconductor device

 #51
20190108985
2019-04-11

Batch type plasma substrate processing apparatus

 #52
20190093222
2019-03-28

Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium

 #53
20190024232
2019-01-24

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE RETAINER

 #54
20180374723
2018-12-27

Apparatus and method for etching one side of a semiconductor substrate

 #55
20180347047
2018-12-06

Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium

 #56
20180337079
2018-11-22

WAFER BOAT AND PLASMA TREATMENT DEVICE FOR WAFERS

 #57
20180327902
2018-11-15

Device and method for vacuum coating

 #58
20180286725
2018-10-04

SUBSTRATE RETRAINER AND SUBSTRATE PROCESSING APPARATUS

 #59
20180274092
2018-09-27

SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

 #60
20180245217
2018-08-30

High throughput vacuum deposition sources and system

 #61
20180135176
2018-05-17

Substrate processing apparatus, method for manufacturing semiconductor device and vaporizer

 #62
20180119278
2018-05-03

PECVD BOAT

 #63
20180076071
2018-03-15

Wafer boat and treatment apparatus for wafers

 #64
20180030596
2018-02-01

Holding arrangement for supporting a substrate carrier and a mask carrier during layer deposition in a processing chamber, apparatus for depositing a layer on a substrate, and method for aligning a substrate carrier supporting a substrate and a mask carrier

 #65
20170362712
2017-12-21

Substrate temperature monitoring

 #66
20170352567
2017-12-07

High power electrostatic chuck design with radio frequency coupling

 #67
20170352565
2017-12-07

WORKPIECE CARRIER WITH GAS PRESSURE IN INNER CAVITIES

 #68
20170287696
2017-10-05

Method of manufacturing semiconductor device by forming a film on a substrate, substrate processing apparatus, and recording medium

 #69
20170275759
2017-09-28

Substrate support assembly with non-uniform gas flow clearance

 #70
20170244006
2017-08-24

PARALLEL PLATE INLINE SUBSTRATE PROCESSING TOOL

 #71
20170218507
2017-08-03

Heating apparatus and substrate processing apparatus having the same

 #72
20170107613
2017-04-20

Device for depositing nanotubes

 #73
20170067158
2017-03-09

Substrate Carrier System for Moving Substrates in a Vertical Oven and Method for Processing Substrates

 #74
20170037514
2017-02-09

CVD reactor chamber with resistive heating and substrate holder

 #75
20160225933
2016-08-04

Metal organic chemical vapor deposition apparatus for solar cell

 #76
20160211162
2016-07-21

Substrate carrier with integrated electrostatic chuck

 #77
20160196997
2016-07-07

Substrate carrier with integrated electrostatic chuck

 #78
20160115592
2016-04-28

GAS DISTRIBUTION SYSTEM FOR A REACTION CHAMBER

 #79
20160053361
2016-02-25

CARRIER FOR A SUBSTRATE AND METHOD FOR CARRYING A SUBSTRATE

 #80
20160002780
2016-01-07

CARRIER FOR SUBSTRATES

 #81
20150376793
2015-12-31

Indexed gas jet injector for substrate processing system

 #82
20150354057
2015-12-10

Coating apparatus for resin container, and resin container manufacturing system

 #83
20150274528
2015-10-01

Method of growing carbon nanotube using reactor

 #84
20140345801
2014-11-27

Apparatus for processing substrate for supplying reaction gas having phase difference

 #85
20140335281
2014-11-13

Film-forming method of an osmium film

 #86
20140212583
2014-07-31

Method and device for continuously coating substrates

 #87
20140099778
2014-04-10

Indexed inline substrate processing tool

 #88
20130302973
2013-11-14

Horizontal epitaxy furnace for channel SiGe formation

 #89
20130276700
2013-10-24

Apparatus for producing polycrystalline silicon

 #90
20130068161
2013-03-21

GAS DELIVERY AND DISTRIBUTION FOR UNIFORM PROCESS IN LINEAR-TYPE LARGE-AREA PLASMA REACTOR

 #91
20130065352
2013-03-14

Method for processing solar cell substrates

 #92
20130017633
2013-01-17

Vapor deposition apparatus and method, and method of manufacturing organic light emitting display apparatus

 #93
20130017343
2013-01-17

Vapor deposition apparatus, vapor deposition method, and method of manufacturing organic light-emitting display apparatus

 #94
20130017318
2013-01-17

Vapor deposition method

 #95
20120260856
2012-10-18

PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION APPARATUS AND METHOD FOR CONTROLLING THE SAME

 #96
20120220108
2012-08-30

Substrate processing apparatus

 #97
20120192789
2012-08-02

DEPOSITION SYSTEMS AND PROCESSES

 #98
20120171375
2012-07-05

Method of densifying thin porous substrates by chemical vapor infiltration, and a loading device for such substrates

 #99
20120139416
2012-06-07

Clamping unit for depositing thin film solar cell and signal feed-in method

 #100
20120090543
2012-04-19

Thin film depositing apparatus

 #101
20120031335
2012-02-09

Vertical inline CVD system

 #102
20120031333
2012-02-09

Vertical inline CVD system

 #103
20110306159
2011-12-15

Method for processing solar cell substrates

 #104
20110283944
2011-11-24

CVD APPARATUS

 #105
20110268983
2011-11-03

FILM-FORMING TREATMENT JIG, PLASMA CVD APPARATUS, METAL PLATE AND OSMIUM FILM FORMING METHOD

 #106
20110209663
2011-09-01

Multi-region processing system

 #107
20110155061
2011-06-30

REACTOR, CHEMICAL VAPOR DEPOSITION REACTOR, AND METALORGANIC CHEMICAL VAPOR DEPOSITION REACTOR

 #108
20110155055
2011-06-30

CVD device

 #109
20110120370
2011-05-26

THIN-FILM SOLAR CELL MANUFACTURING APPARATUS

 #110
20110107969
2011-05-12

APPARATUS FOR MANUFACTURING THIN-FILM SOLAR CELL

 #111
20110100297
2011-05-05

THIN-FILM SOLAR CELL MANUFACTURING APPARATUS

 #112
20110100296
2011-05-05

FILM FORMATION APPARATUS

 #113
20110097878
2011-04-28

CHAMBER FOR PECVD

 #114
20110097518
2011-04-28

VERTICALLY INTEGRATED PROCESSING CHAMBER

 #115
20110094445
2011-04-28

APPARATUS FOR MANUFACTURING THIN-FILM SOLAR CELL

 #116
20110067632
2011-03-24

Stackable multi-port gas nozzles

 #117
20110052914
2011-03-03

Method for producing polycrystalline silicon

 #118
20110033612
2011-02-10

Disc vapor lubrication

 #119
20100255196
2010-10-07

TREATMENT SYSTEM FOR FLAT SUBSTRATES

 #120
20100248397
2010-09-30

High temperature susceptor having improved processing uniformity

 #121
20100221422
2010-09-02

Vertical-offset coater and methods of use

 #122
20100092698
2010-04-15

Scalable, high-throughput, multi-chamber epitaxial reactor for silicon deposition

 #123
20100092697
2010-04-15

Scalable, high-throughput, multi-chamber epitaxial reactor for silicon deposition

 #124
20090246409
2009-10-01

Method and apparatus for mass-producing DLC films

 #125
20090230019
2009-09-17

Substrate cassette having electrode array

 #126
20090169341
2009-07-02

Method and system for handling objects in chambers

 #127
20090165714
2009-07-02

Method and system for processing substrates in chambers

 #128
20090165710
2009-07-02

MODULE FOR SUPPORTING A SUBSTRATE AND DEPOSITION APPARATUS HAVING THE SAME

 #129
20090114159
2009-05-07

Transporting means and vacuum coating installation for substrates of different sizes

 #130
20090068849
2009-03-12

Multi-region processing system and heads

 #131
20080317976
2008-12-25

Amorphous carbon film forming method and device

 #132
20080233301
2008-09-25

STACKED-FILM-FORMING SYSTEM, SPUTTERING APPARATUS, AND METHOD FOR FORMING STACKED FILM

 #133
20080152803
2008-06-26

Method of densifying thin porous substrates by chemical vapor infiltration, and a loading device for such substrates

 #134
20060035021
2006-02-16

Vertical-offset coater

 #135
20050229857
2005-10-20

Support fixture for semiconductor wafers and associated fabrication method

 #136
20050120956
2005-06-09

Plasma processing apparatus

 #137
20050039687
2005-02-24

In-line, pass-by system and method for disc vapor lubrication