Patents-Review.com
ClassID:

120263 ⎘

C23C16/4588 - CPC Classification

Classification description:

Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber; Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially vertically the substrate being rotated

Recent Application in this class:
#1
20260114209
2026-04-23

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM

 #2
20260047394
2026-02-12

Methods Of Operating A Spatial Deposition Tool

 #3
20250239479
2025-07-24

METHODS OF OPERATING A SPATIAL DEPOSITION TOOL

 #4
20250043426
2025-02-06

Plasma-Enhanced Chemical Vapor Deposition Coating System

 #5
20240420914
2024-12-19

COATING METHOD

 #6
20240229236
2024-07-11

FILM-FORMING APPARATUS, FILM-FORMING METHOD, GALLIUM OXIDE FILM AND LAMINATE

 #7
20240224238
2024-07-04

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM

 #8
20240133029
2024-04-25

FILM-FORMING APPARATUS, FILM-FORMING METHOD, GALLIUM OXIDE FILM AND LAMINATE

 #9
20240023445
2024-01-18

VOLTAGE BREAKDOWN UNIFORMITY IN PIEZOELECTRIC STRUCTURE FOR PIEZOELECTRIC DEVICES

 #10
20230407474
2023-12-21

AN ATOMIC LAYER DEPOSITION APPARATUS AND A METHOD

 #11
20230243065
2023-08-03

METHODS FOR MANUFACTURING A SEMICONDUCTOR WAFER USING A PREHEAT RING IN A WAFER REACTOR

 #12
20230193465
2023-06-22

SUBSTRATE PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSING APPARATUS

 #13
20230187188
2023-06-15

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE HOLDER, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

 #14
20230175131
2023-06-08

Dynamic electrical and fluid delivery system with indexing motion for batch processing chambers

 #15
20230095537
2023-03-30

SYSTEM, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

 #16
20230049118
2023-02-16

SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD

 #17
20230042777
2023-02-09

METHODS FOR FORMING FILMS ON SUBSTRATES

 #18
20220392783
2022-12-08

Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium

 #19
20220344575
2022-10-27

Voltage breakdown uniformity in piezoelectric structure for piezoelectric devices

 #20
20220275509
2022-09-01

Plasma-enhanced chemical vapor deposition coating system

 #21
20220205134
2022-06-30

Systems and methods for a preheat ring in a semiconductor wafer reactor

 #22
20220170153
2022-06-02

Method of forming a film on a substrate by chemical vapor deposition

 #23
20220071037
2022-03-03

Dynamic electrical and fluid delivery system with indexing motion for batch processing chambers

 #24
20210305067
2021-09-30

Substrate processing apparatus and method of manufacturing semiconductor device

 #25
20210287870
2021-09-16

Coating apparatus and coating method

 #26
20210249235
2021-08-12

Substrate holding mechanism and substrate processing apparatus

 #27
20210217648
2021-07-15

SUSCEPTOR AND CHEMICAL VAPOR DEPOSITION APPARATUS

 #28
20210207268
2021-07-08

Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium

 #29
20210207263
2021-07-08

PROCEDURE FOR COATING COMPONENT SURFACES UNDER VACUUM AND THE VACUUM COATING SYSTEM USED FOR THIS PURPOSE

 #30
20210057207
2021-02-25

Film forming method and film forming apparatus

 #31
20210017646
2021-01-21

Substrate processing apparatus and substrate processing method

 #32
20200378000
2020-12-03

Methods for forming films on substrates

 #33
20200308699
2020-10-01

Fixture for coating of double-ended tools

 #34
20200283905
2020-09-10

System and method of low temperature thin film deposition and in-situ annealing

 #35
20200116528
2020-04-16

Rotation angle detection apparatus and rotation angle detection method, and substrate processing apparatus and substrate processing method using same

 #36
20200090978
2020-03-19

Methods Of Operating A Spatial Deposition Tool

 #37
20200083085
2020-03-12

SUSCEPTOR AND CHEMICAL VAPOR DEPOSITION APPARATUS

 #38
20200066572
2020-02-27

Methods Of Operating A Spatial Deposition Tool

 #39
20190376177
2019-12-12

VERTICAL SUBSTRATE HOLDER

 #40
20190360094
2019-11-28

CHEMICAL VAPOR DEPOSITION APPARATUS AND METHOD OF FORMING FILM

 #41
20190338413
2019-11-07

In-line coater for vacuum deposition of thin film coatings

 #42
20190301018
2019-10-03

Wafer boat cooldown device

 #43
20190169740
2019-06-06

Swirled flow chemical vapor deposition

 #44
20180174803
2018-06-21

Plasma polymerization coating apparatus

 #45
20180057931
2018-03-01

Swirled flow chemical vapor deposition

 #46
20170253967
2017-09-07

Periphery purge shutter and flow control systems and methods

 #47
20170241021
2017-08-24

Electric discharge generator and power supply device of electric discharge generator

 #48
20170175256
2017-06-22

System and method for deposition of integrated computational elements (ICE) using a translation stage

 #49
20170040206
2017-02-09

Variable gap hard stop design

 #50
20160024652
2016-01-28

Film forming apparatus, susceptor, and film forming method

 #51
20150275360
2015-10-01

Vacuum Processing Apparatus

 #52
20150274528
2015-10-01

Method of growing carbon nanotube using reactor

 #53
20150086715
2015-03-26

Method and apparatus for depositing atomic layers on a substrate

 #54
20150037499
2015-02-05

Apparatus for dual speed spin chuck

 #55
20150013909
2015-01-15

Substrate processing apparatus including auxiliary gas supply port

 #56
20140230734
2014-08-21

Deposition apparatus

 #57
20140186546
2014-07-03

Reactor and method for growing carbon nanotube using the same

 #58
20130239894
2013-09-19

CHEMICAL VAPOR DEPOSITION APPARATUS

 #59
20120220108
2012-08-30

Substrate processing apparatus

 #60
20120103256
2012-05-03

Vertical heat treatment apparatus

 #61
20120042824
2012-02-23

Coating device

 #62
20110308459
2011-12-22

CVD APPARATUS

 #63
20110308456
2011-12-22

COATING APPARATUS

 #64
20110283944
2011-11-24

CVD APPARATUS

 #65
20110283941
2011-11-24

Stable wafer-carrier system

 #66
20110259270
2011-10-27

Carbon component and method for manufacturing the same

 #67
20110247558
2011-10-13

Coating holder and coating device having same

 #68
20110206485
2011-08-25

Conveyor assembly and method for conveying a substrate carrier

 #69
20110107968
2011-05-12

SEMICONDUCTOR MANUFACTURING APPARATUS

 #70
20100319620
2010-12-23

VAPOR DEPOSITION APPARATUS

 #71
20090235867
2009-09-24

Susceptor for vapor phase epitaxial growth device

 #72
20090165719
2009-07-02

Epitaxial barrel susceptor having improved thickness uniformity

 #73
20090127672
2009-05-21

SUSCEPTOR FOR EPITAXIAL LAYER FORMING APPARATUS, EPITAXIAL LAYER FORMING APPARATUS, EPITAXIAL WAFER, AND METHOD OF MANUFACTURING EPITAXIAL WAFER

 #74
20080305277
2008-12-11

METHOD AND APPARATUS FOR MAKING DIAMOND-LIKE CARBON FILMS

 #75
20080268170
2008-10-30

Method and apparatus for making diamond-like carbon films

 #76
20080026598
2008-01-31

Semiconductor manufacturing device and method

 #77
20070186858
2007-08-16

Susceptor

 #78
20060231035
2006-10-19

Modified susceptor for barrel reactor

 #79
20050172900
2005-08-11

Coating apparatuses and jigs thereof

 #80
20050160991
2005-07-28

Barrel type susceptor

 #81
20050126497
2005-06-16

Platform assembly and method

 #82
20050005858
2005-01-13

Susceptor with epitaxial growth control devices and epitaxial reactor using the same

 #83
15681602
2020-10-20

System and method for vapor deposition of substrates with circular substrate frame that rotates in a planetary motion and curved lens support arms

 #84
15647183
2020-02-18

Wafer chuck with aerodynamic design for turbulence reduction

 #85
11737045
2017-08-15

Wafer chuck with aerodynamic design for turbulence reduction