ClassID:

120270

C23C16/483 - CPC Classification

Classification description:

Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation using coherent light, UV to IR, e.g. lasers

Recent Application in this class:
#1
20260157125
2026-06-04

LASER-ASSISTED EPITAXY AND ETCHING FOR MANUFACTURING INTEGRATED CIRCUITS

#2
20260085405
2026-03-26

METHOD OF DENSIFYING PLASMA-RESISTANT COATING LAYER

#3
20250109498
2025-04-03

Hard X-ray Compatible Chamber for High Temperature In-Situ Material Processing

#4
20250101592
2025-03-27

COATING APPARATUS, PROCESS CHAMBER, AND METHOD OF COATING A SUBSTRATE AND SUBSTRATE COATED WITH AT LEAST ONE MATERIAL LAYER

#5
20250101591
2025-03-27

CORROSION-RESISTANT MEMBER PRODUCTION METHOD AND LASER CVD DEVICE

#6
20250034702
2025-01-30

Quantum Printing Nanostructures Within Carbon Nanopores

#7
20240416458
2024-12-19

Method for Long-Term Storage of Information and Storage Medium Therefor

#8
20240368759
2024-11-07

METHODS AND SYSTEMS FOR SELECTIVE ATOMIC LAYER DEPOSITION

#9
20240301554
2024-09-12

GRAPHENE COATED NON-METALLIC SURFACES, DEVICES AND METHOD THEREOF

#10
20240295021
2024-09-05

METHOD AND SYSTEM FOR PRODUCING A METAL STRUCTURE

#11
20240254620
2024-08-01

RESTORING METHOD OF CONSUMED COMPONENT

#12
20240213041
2024-06-27

SUBSTRATE PROCESSING DEVICE

#13
20240112930
2024-04-04

CHAMBER ARRANGEMENTS WITH LASER SOURCES, SEMICONDUCTOR PROCESSING SYSTEMS, AND MATERIAL LAYER DEPOSITION METHODS

#14
20240011150
2024-01-11

METHOD AND APPARATUS FOR FORMING A PATTERNED LAYER OF CARBON, METHOD OF FORMING A PATTERNED LAYER OF MATERIAL

#15
20240006167
2024-01-04

SUBSTRATE PROCESSING MODULE AND LASER BEAM PROVIDING METHOD

#16
20230366083
2023-11-16

Quantum printing nanostructures within carbon nanopores

#17
20230332292
2023-10-19

CVD REACTOR WITH TEMPERATURE-CONTROLLABLE GAS INLET REGION

#18
20230290963
2023-09-14

MANUFACTURING METHOD OF ELECTRODE FOR ELECTROCHEMICAL REACTION, ELECTRODE FOR ELECTROCHEMICAL REACTION MANUFACTURED THEREFROM AND REVERSE ELECTRODIALYSIS ELECTRIC GENERATING DEVICE

#19
20230279544
2023-09-07

ADDITIVE CHEMICAL VAPOR DEPOSITION METHODS AND SYSTEMS

#20
20230279542
2023-09-07

Quantum printing methods

#21
20230203660
2023-06-29

LASER-ENHANCED CHEMICAL VAPOR DEPOSITION

#22
20230154747
2023-05-18

A SEED LAYER, A HETEROSTRUCTURE COMPRISING THE SEED LAYER AND A METHOD OF FORMING A LAYER OF MATERIAL USING THE SEED LAYER

#23
20230074549
2023-03-09

Quantum printing apparatus and method of using same

#24
20220380901
2022-12-01

LASER INDUCED FORWARD TRANSFER OF 2D MATERIALS

#25
20220325408
2022-10-13

Quantum printing nanostructures within carbon nanopores

#26
20220325407
2022-10-13

Quantum printing nanostructures within carbon nanopores

#27
20220290301
2022-09-15

Laser-assisted metal-organic chemical vapor deposition devices and methods of use thereof for suppressing background carbon incorporation

#28
20220228256
2022-07-21

METHOD OF REPAIRING CERAMIC COMPOSITE ARTICLES

#29
20220074051
2022-03-10

Method and apparatus for fabricating fibers and microstructures from disparate molar mass precursors

#30
20220064798
2022-03-03

Composite tape with LCVD-formed additive material in constituent layer(s)

#31
20220033999
2022-02-03

High-Strength Refractory Fibrous Materials

#32
20210380414
2021-12-09

Quantum printing nanostructures within carbon nanopores

#33
20210366697
2021-11-25

Forming method of component and substrate processing system

#34
20210355581
2021-11-18

Laser-assisted metal-organic chemical vapor deposition devices and methods of use thereof

#35
20210301399
2021-09-30

Quantum printing methods

#36
20210300763
2021-09-30

Quantum printing nanostructures within carbon nanopores

#37
20210292896
2021-09-23

Quantum printing apparatus and method of using same

#38
20210265624
2021-08-26

Method for synthesising core-shell silicon-germanium nanoparticles by laser pyrolysis, method for producing an electrode for a lithium battery and associated electrode

#39
20210252645
2021-08-19

Method for long-term storage of information and storage medium therefor

#40
20210230743
2021-07-29

High purity fiber feedstock for loose grain production

#41
20210222332
2021-07-22

Method of making a multi-composition fiber

#42
20210087675
2021-03-25

Graphene printing

#43
20210079519
2021-03-18

METHOD AND APPARATUS FOR FORMING A PATTERNED LAYER OF MATERIAL

#44
20210046588
2021-02-18

Method for long-term storage of information and storage medium therefor

#45
20210032743
2021-02-04

Method and apparatus for forming a patterned layer of carbon, method of forming a patterned layer of material

#46
20210013036
2021-01-14

Method and system for fabricating a semiconductor device

#47
20210010136
2021-01-14

Substrate positioning for deposition machine

#48
20200392625
2020-12-17

Substrate processing apparatus, gas nozzle and method of manufacturing semiconductor device

#49
20200340115
2020-10-29

Atomic layer deposition apparatus and methods of fabricating semiconductor devices using the same

#50
20200332417
2020-10-22

Method and apparatus for fabricating fibers and microstructures from disparate molar mass precursors

#51
20200299831
2020-09-24

Manufacturing method of radio wave transmittable sensor cover having micro crack and laser hole and radio wave transmittable sensor cover manufactured using the same

#52
20200283895
2020-09-10

Atomic layer deposition systems, methods, and devices

#53
20200203028
2020-06-25

Additive manufacturing technique for placing nuclear reactor fuel within fibers

#54
20200149167
2020-05-14

Method and apparatus for fabricating fibers and microstructures from disparate molar mass precursors

#55
20200136090
2020-04-30

Method for producing organic electroluminescent device and film deposition apparatus

#56
20200106236
2020-04-02

Laser-heated cavity system

#57
20200040457
2020-02-06

WIRING CORRECTING DEVICE AND WIRING CORRECTING METHOD

#58
20190363287
2019-11-28

Method for producing organic electroluminescent device and film deposition apparatus

#59
20190317395
2019-10-17

Method and device for permanently repairing defects of absent material of a photolithographic mask

#60
20190301014
2019-10-03

Substrate processing apparatus and method

#61
20190284699
2019-09-19

System for surface modification by laser diffusion

#62
20190082540
2019-03-14

Laser carbonization of polymer coatings in an open-air environment

#63
20190080713
2019-03-14

Two dimensional amorphous carbon as overcoat for heat assisted magnetic recording media

#64
20190048461
2019-02-14

Method for forming a silver/carbon nanocomposite coating

#65
20190024236
2019-01-24

Method for synthesising a material

#66
20180370860
2018-12-27

Functional high-performance fiber structure

#67
20180370846
2018-12-27

High temperature glass-ceramic matrix with embedded reinforcement fibers

#68
20180348062
2018-12-06

Alumina diffusion barrier for sensing elements

#69
20180333802
2018-11-22

Spinning roller surface laser reinforced processing forming method

#70
20180274099
2018-09-27

Apparatus and methods for photo-excitation processes

#71
20180268947
2018-09-20

METHOD OF MANUFACTURE

#72
20180211861
2018-07-26

Method for processing a holding plate, in particular for a clamp for holding a wafer

#73
20180171476
2018-06-21

METHODS AND APPARATUS FOR SELECTIVE REMOVAL OF SELF-ASSEMBLED MONOLAYERS USING LASER ANNEALING

#74
20180157067
2018-06-07

Detecting method and detecting equipment therefor

#75
20180151350
2018-05-31

Reducing EUV-induced material property changes

#76
20180148864
2018-05-31

Fiber with elemental additive(s) and method of making

#77
20180135181
2018-05-17

LARGE-AREA LASER HEATING SYSTEM

#78
20180127877
2018-05-10

AREA-SELECTIVE ATOMIC LAYER DEPOSITION APPARATUS

#79
20180087214
2018-03-29

REFRACTORY OXIDE COATED FIBER AND METHOD OF MAKING

#80
20180087157
2018-03-29

MULTI-COMPOSITION FIBER WITH REFRACTORY ADDITIVE(S) AND METHOD OF MAKING

#81
20180043473
2018-02-15

Systems and methods for modifying acoustic waves based on selective heating

#82
20170369998
2017-12-28

NANOFIBER-COATED FIBER AND METHODS OF MAKING

#83
20170348466
2017-12-07

LASER TEXTURING SURFACE PREPARATION FOR PARYLENE COATING ADHESION

#84
20170342560
2017-11-30

ALD method and apparatus

#85
20170331022
2017-11-16

Multilayer functional fiber and method of making

#86
20170326838
2017-11-16

FIBER DELIVERY ASSEMBLY AND METHOD OF MAKING

#87
20170248842
2017-08-31

Method and device for permanently repairing defects of absent material of a photolithographic mask

#88
20170233862
2017-08-17

Method for open-air pulsed laser deposition

#89
20170213604
2017-07-27

Additive manufacturing technique for placing nuclear reactor fuel within fibers

#90
20170104184
2017-04-13

Deposition apparatus and method of manufacturing organic light-emitting diode display apparatus using the same

#91
20170093121
2017-03-30

Coating process for laser heat sinks

#92
20170073812
2017-03-16

Laser-assisted atomic layer deposition of 2D metal chalcogenide films

#93
20170032815
2017-02-02

Method of protecting a magnetic layer of a magnetic recording medium

#94
20170011917
2017-01-12

ATOMIC LAYER EPITAXY FOR SEMICONDUCTOR GATE STACK LAYER FOR ADVANCED CHANNEL DEVICES

#95
20160369402
2016-12-22

Cobalt precursors

#96
20160369400
2016-12-22

Method and apparatus for fabricating fibers and microstructures from disparate molar mass precursors

#97
20160369394
2016-12-22

Method for synthesizing multilayer graphene

#98
20160341044
2016-11-24

Additive layer repair of a metallic component

#99
20160340797
2016-11-24

Method of pulsed laser-based large area graphene synthesis on metallic and crystalline substrates

#100
20160340783
2016-11-24

Growth of nitride films

#101
20160329437
2016-11-10

Semiconductor device and manufacturing method thereof

#102
20160301036
2016-10-13

Deposition device including laser mask and deposition method using the same

#103
20160250389
2016-09-01

Method for depositing coloured markers made from titanium oxides on medical technology products and coating system for producing coated materials

#104
20160244879
2016-08-25

Cyclic sequential processes for forming high quality thin films

#105
20160222502
2016-08-04

Method for the preparation of Ag/C nanocomposite films by laser-induced carbonization of alkane

#106
20160208383
2016-07-21

Systems and methods for enhancing mobility of atomic or molecular species on a substrate at reduced bulk temperature using acoustic waves, and structures formed using same

#107
20160068447
2016-03-10

CERAMIC JOINED BODY, HEAT-RESISTANT COMPONENT AND METHOD FOR MANUFACTURING CERAMIC JOINED BODY

#108
20160053370
2016-02-25

SCALABLE PROCESSING OF NANOCOMPOSITES USING PHOTON-BASED METHODS

#109
20160010212
2016-01-14

PROCESS FOR OBTAINING A SUBSTRATE EQUIPPED WITH A COATING

#110
20150378261
2015-12-31

Methods and apparatus for nanofabrication using a pliable membrane mask

#111
20150368800
2015-12-24

Apparatus and methods for pulsed photo-excited deposition and etch

#112
20150364719
2015-12-17

Method of manufacturing display apparatus that includes using an energy beam to form an encapsulation layer

#113
20150337536
2015-11-26

Multi-layered ventilation apparatus and methods of manufacturing thereof

#114
20150307990
2015-10-29

Method and system for controlling coating in non-line-of-sight locations

#115
20150299861
2015-10-22

Device for synthesising core-shell nanoparticles by laser pyrolysis and associated method

#116
20150267300
2015-09-24

Thermal processing chamber

#117
20150259800
2015-09-17

PREPARING METHOD OF GRAPHENE BY USING NEAR-INFRARED AND APPARATUS THEREFOR

#118
20150247236
2015-09-03

METHODS FOR DEPOSITING MATERIAL ONTO MICROFEATURE WORKPIECES IN REACTION CHAMBERS AND SYSTEMS FOR DEPOSITING MATERIALS ONTO MICROFEATURE WORKPIECES

#119
20150184299
2015-07-02

Liquid crystal display panel repairing method and repairing system

#120
20150171258
2015-06-18

METHOD AND SYSTEM OF PROVIDING DOPANT CONCENTRATION CONTROL IN DIFFERENT LAYERS OF A SEMICONDUCTOR DEVICE

#121
20150170902
2015-06-18

Plasma-assisted chemical gas separation method having increased plasma density and device for implementing the method

#122
20150153622
2015-06-04

METHODS FOR PRODUCING LOWER ELECTRICAL ISOLATION IN ELECTROCHROMIC FILMS

#123
20150132539
2015-05-14

Process for Applying a Friction Reducing Coating

#124
20150129089
2015-05-14

Hydrogen-free amorphous dielectric insulating thin films with no tunneling states

#125
20150064363
2015-03-05

Localized atmospheric laser chemical vapor deposition

#126
20140299056
2014-10-09

Low temperature migration enhanced Si-Ge epitaxy with plasma assisted surface activation

#127
20140273416
2014-09-18

Methods for photo-excitation of precursors in epitaxial processes using a rotary scanning unit

#128
20140199550
2014-07-17

Systems and methods for enhancing mobility of atomic or molecular species on a substrate at reduced bulk temperature using acoustic waves, and structures formed using same

#129
20140178637
2014-06-26

Low friction coatings with improved abrasion and wear properties and methods of making

#130
20140106088
2014-04-17

Method for obtaining a substrate provided with a coating

#131
20140093654
2014-04-03

Irradiation assisted nucleation of quantum confinements by atomic layer deposition

#132
20140050861
2014-02-20

System and method for surface modification by laser diffusion

#133
20130266472
2013-10-10

Method of Coating Metal Powder with Chemical Vapor Deposition for Making Permanent Magnets

#134
20130243971
2013-09-19

Apparatus and Process for Atomic Layer Deposition with Horizontal Laser

#135
20130236710
2013-09-12

GAS-BARRIER FILM, METHOD FOR PRODUCING GAS-BARRIER FILM, AND ELECTRONIC DEVICE

#136
20130187169
2013-07-25

Systems and methods for depositing materials on either side of a freestanding film using selective thermally-assisted chemical vapor deposition (STA-CVD), and structures formed using same

#137
20130047922
2013-02-28

Thermal bridge for chemical vapor deposition reactors

#138
20130045587
2013-02-21

Low temperature migration enhanced Si-Ge epitaxy with plasma assisted surface activation

#139
20120248460
2012-10-04

Systems and methods for depositing materials on either side of a freestanding film using laser-assisted chemical vapor deposition (LA-CVD), and structures formed using same

#140
20120171389
2012-07-05

Methods for depositing material onto microfeature workpieces in reaction chambers and systems for depositing materials onto microfeature workpieces

#141
20120132631
2012-05-31

Additive layer fabrication method

#142
20120098101
2012-04-26

Photo-patterned carbon electronics

#143
20120040519
2012-02-16

METHOD FOR FORMING SILICON FILM HAVING MICROCRYSTAL STRUCTURE

#144
20110269298
2011-11-03

Irradiation assisted nucleation of quantum confinements by atomic layer deposition

#145
20110186537
2011-08-04

Systems, Apparatus and Methods for Coating the Interior of a Container Using a Photolysis and/or Thermal Chemical Vapor Deposition Process

#146
20110174213
2011-07-21

Vapor Phase Epitaxy System

#147
20110033638
2011-02-10

METHOD AND APPARATUS FOR DEPOSITION ON LARGE AREA SUBSTRATES HAVING REDUCED GAS USAGE

#148
20110017139
2011-01-27

System for Depositing a Film by Modulated Ion-Induced Atomic Layer Deposition (MII-ALD)

#149
20100190288
2010-07-29

THIN SILICON OR GERMANIUM SHEETS AND PHOTOVOLATICS FORMED FROM THIN SHEETS

#150
20100087069
2010-04-08

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSING APPARATUS

#151
20100087050
2010-04-08

Chemical vapor deposition with energy input

#152
20100086703
2010-04-08

Vapor Phase Epitaxy System

#153
20100081260
2010-04-01

Method for forming a semiconductor film including a film forming gas and decomposing gas while emitting a laser sheet

#154
20100068408
2010-03-18

METHODS FOR ELECTRON-BEAM INDUCED DEPOSITION OF MATERIAL INSIDE ENERGETIC-BEAM MICROSCOPES

#155
20100065971
2010-03-18

Laser assisted chemical vapor deposition for backside die marking and structures formed thereby

#156
20100055352
2010-03-04

Method of fabrication of fibers, textiles and composite materials

#157
20100012032
2010-01-21

Apparatus for high-rate chemical vapor deposition

#158
20090288601
2009-11-26

Apparatus for coating formation by light reactive deposition

#159
20090277773
2009-11-12

Method of Manufacturing Particle Wire

#160
20090267189
2009-10-29

Method for the production of photo-patterned carbon electronics

#161
20090214885
2009-08-27

Light-induced directed self-assembly of periodic sub-wavelength nanostructures

#162
20090057130
2009-03-05

Method of manufacturing particle wire

#163
20080175988
2008-07-24

Method and apparatus for open-air coating by laser-induced chemical vapor deposition

#164
20080085413
2008-04-10

Laser processing apparatus, laser processing method, manufacturing method of wiring substrate, manufacturing method of display apparatus and wiring substrate

#165
20070243319
2007-10-18

Photo-patterned carbon electronics

#166
20070212510
2007-09-13

Thin silicon or germanium sheets and photovoltaics formed from thin sheets

#167
20070184189
2007-08-09

Controlling the temperature of a substrate in a film deposition apparatus

#168
20070065594
2007-03-22

System for depositing a film by modulated ion-induced atomic layer deposition (MII-ALD)

#169
20070051315
2007-03-08

Apparatus and method for producing nano-powder

#170
20070049045
2007-03-01

Atomic layer deposition method for depositing a layer

#171
20070012249
2007-01-18

FILM FORMING APPARATUS

#172
20060289969
2006-12-28

LASER ASSISTED MATERIAL DEPOSITION

#173
20060288937
2006-12-28

LASER ASSISTED MATERIAL DEPOSITION

#174
20060237404
2006-10-26

Laser annealer and laser thin-film forming apparatus

#175
20060225650
2006-10-12

Atomic layer deposition apparatus with point of use generated reactive gas species

#176
20060213880
2006-09-28

Laser surface treatment

#177
20060144687
2006-07-06

Apparatus for treating thin film and method of treating thin film

#178
20060141142
2006-06-29

Multilayered optical structures

#179
20060134347
2006-06-22

Dense coating formation by reactive deposition

#180
20050249887
2005-11-10

Methods for depositing material onto microfeature workpieces in reaction chambers and systems for depositing materials onto microfeature workpieces

#181
20050233078
2005-10-20

Method and system for forming a film of material using plasmon assisted chemical reactions

#182
20050178752
2005-08-18

Method and device for correcting pattern film on a semiconductor substrate

#183
20050078462
2005-04-14

Laser assisted material deposition

#184
20050019504
2005-01-27

High rate deposition for the formation of high quality optical coatings

#185
20050016839
2005-01-27

Reactive deposition for electrochemical cell production

#186
20050011457
2005-01-20

Controlling the temperature of a substrate in a film deposition apparatus

#187
20050000937
2005-01-06

Temperature control system in an ALD chamber

#188
20050000438
2005-01-06

Apparatus and method for fabrication of nanostructures using multiple prongs of radiating energy

#189
16786325
2020-11-24

Quantum printing methods

#190
16786321
2021-01-12

Quantum printing apparatus

#191
16156557
2019-01-08

Method of preparing core/shell nanocomposite thin films

#192
13275073
2015-12-08

Laser assisted chemical vapor deposition of silicon