C23C16/48 - CPC Classification Index

ClassID:

120267 ⎘

C23C16/48 - CPC Classification

Classification description:

Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation

Sub-classes:

C23C16/481 » {by radiant heating of the substrate} 234
C23C16/482 » {using incoherent light, UV to IR, e.g. lamps} 190
C23C16/483 » {using coherent light, UV to IR, e.g. lasers} 186
C23C16/484 » {using X-ray radiation} 16
C23C16/485 » {using synchrotron radiation} 0
C23C16/486 » {using ion beam radiation} 75
C23C16/487 » {using electron radiation} 63
C23C16/488 » {Protection of windows for introduction of radiation into the coating chamber} 21

Recent Application in this class:

20260125796

2026-05-07

Processing Device and Processing Method

20260110092

2026-04-23

SUBSTRATE PROCESSING METHOD

20250372352

2025-12-04

REACTION CHAMBER WITH TEMPERATURE CONTROL CAPABILITIES AND SUBSTRATE PROCESSING SYSTEM EQUIPPED WITH THE SAME

20250361647

2025-11-27

UV ENERGY SOURCES FOR PROCESSING CHAMBERS, AND RELATED APPARATUS AND METHODS

20250305182

2025-10-02

IN-SITU PYROMETER FOR SILICON CARBIDE WAFER

20250188605

2025-06-12

Compositions and Methods Using Same for Deposition of Silicon-Containing Film

20250003073

2025-01-02

METHODS AND APPARATUS FOR A VALVE ASSEMBLY

20240416458

2024-12-19

Method for Long-Term Storage of Information and Storage Medium Therefor

20240327979

2024-10-03

METHOD OF COATING A COATING REGION ON A FRONT SURFACE OF A SUBSTRATE AND APPARATUS FOR A THERMAL EVAPORATION SYSTEM

#10

20240234096

2024-07-11

PLASMA PROCESSING APPARATUS AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICE USING THE SAME

#11

20240117487

2024-04-11

2D Layered Thin Film Structure

#12

20230175136

2023-06-08

SUBSTRATE PROCESSING APPARATUS AND METHOD FOR PROCESSING SUBSTRATES

#13

20230070274

2023-03-09

Film forming system and film forming method

#14

20220404212

2022-12-22

Fiber structures with embedded sensors

#15

20220213593

2022-07-07

METHOD AND APPARATUS FOR FORMING A PATTERNED LAYER OF MATERIAL

#16

20220102114

2022-03-31

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

#17

20220037577

2022-02-03

MULTI-SHOWERHEAD CHEMICAL VAPOR DEPOSITION REACTOR, PROCESS AND PRODUCTS

#18

20210252645

2021-08-19

Method for long-term storage of information and storage medium therefor

#19

20210071302

2021-03-11

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

#20

20210046588

2021-02-18

Method for long-term storage of information and storage medium therefor

#21

20210015004

2021-01-14

Heat shield assembly for an epitaxy chamber

#22

20200361124

2020-11-19

Methods for depositing anti-coking protective coatings on aerospace components

#23

20200340118

2020-10-29

Nano imprinting with reusable polymer template with metallic or oxide coating

#24

20200299840

2020-09-24

Substrate processing method and substrate processing apparatus

#25

20200270752

2020-08-27

Substrate processing apparatus and method for processing substrates

#26

20200234949

2020-07-23

Forming high carbon content flowable dielectric film with low processing damage

#27

20200173021

2020-06-04

Chemical vapor deposition of thick inorganic coating on a polarizer

#28

20200010955

2020-01-09

Vapor phase deposition system

#29

20190276946

2019-09-12

METHOD OF PRODUCING HIGH RESOLUTION MULTICOLORED LINE ART IMAGES VIA ANODIZATION OF REFRACTORY METALS

#30

20190271075

2019-09-05

Compositions and Methods Using Same for Deposition of Silicon-Containing Films

#31

20190184413

2019-06-20

Deposition of particles at desired locations using plasmonic enhancement

#32

20190164775

2019-05-30

ETCHING METHOD AND ETCHING APPARATUS

#33

20190017167

2019-01-17

Compositions and methods using same for deposition of silicon-containing film

#34

20180257105

2018-09-13

Method for producing a thin film, method for producing a magnetic disk, method for producing a nanoimprint mold, and apparatus for producing a thin film

#35

20180148832

2018-05-31

METHODS FOR DEPOSITING FLOWABLE CARBON FILMS USING HOT WIRE CHEMICAL VAPOR DEPOSITION

#36

20180122632

2018-05-03

Use of silyl bridged alkyl compounds for dense OSG films

#37

20180122631

2018-05-03

Precursors and flowable CVD methods for making low-k films to fill surface features

#38

20180119285

2018-05-03

Thin film encapsulation mask preheat and substrate buffer chamber

#39

20180119275

2018-05-03

Bromine-sensitized solar photolysis of carbon dioxide

#40

20180094358

2018-04-05

Method of Preparing Corrosion Resistant Coatings

#41

20180030598

2018-02-01

Nano imprinting with reusable polymer template with metallic or oxide coating

#42

20180016686

2018-01-18

Method for fabrication of a timepiece provided with a multi-level exterior element

#43

20170342560

2017-11-30

ALD method and apparatus

#44

20170338109

2017-11-23

Compositions and methods using same for deposition of silicon-containing films

#45

20170335449

2017-11-23

Compositions and methods using same for deposition of silicon-containing film

#46

20170323784

2017-11-09

Method for depositing a planarization layer using polymerization chemical vapor deposition

#47

20170314122

2017-11-02

Method for separating a carbon structure from a seed structure

#48

20170296982

2017-10-19

HEALING OF THIN GRAPHENIC-BASED MEMBRANES VIA CHARGED PARTICLE IRRADIATION

#49

20170218536

2017-08-03

APPARATUS FOR FABRICATING TWO-DIMENSIONAL LAYERED CHALCOGENIDE FILM

#50

20170096736

2017-04-06

Vapor phase deposition system

#51

20170037509

2017-02-09

METHOD FOR COATING OR FILLING A POROUS MATERIAL

#52

20170022612

2017-01-26

Methods for depositing Group 13 metal or metalloid nitride films

#53

20160333214

2016-11-17

COATED ARTICLE MANUFACTURING METHOD, COATING AND LAMINATE

#54

20160319423

2016-11-03

Bromine-sensitized solar photolysis of carbon dioxide

#55

20160296973

2016-10-13

Methods for coating articles

#56

20160289838

2016-10-06

Apparatus and method for UV treatment, chemical treatment, and deposition

#57

20160273104

2016-09-22

POLYOLEFINS HAVING LONG LASTING HYDROPHILIC INTERFACES

#58

20160251759

2016-09-01

ATOMIC LAYER DEPOSITION DEVICE HAVING SCAN-TYPE REACTOR AND METHOD OF DEPOSITING ATOMIC LAYER USING THE SAME

#59

20160240376

2016-08-18

Method of fabricating two-dimensional layered chalcogenide film

#60

20160237565

2016-08-18

Coating substrate using bernoulli atomic-layer deposition

#61

20160237100

2016-08-18

Bisaminoalkoxysilane compounds and methods for using same to deposit silicon-containing films

#62

20160208383

2016-07-21

Systems and methods for enhancing mobility of atomic or molecular species on a substrate at reduced bulk temperature using acoustic waves, and structures formed using same

#63

20160153089

2016-06-02

GAS BARRIER FILM, METHOD FOR PRODUCING THE SAME, AND ELECTRONIC DEVICE USING THE SAME

#64

20160141177

2016-05-19

Formulations for producing indium oxide-containing layers, process for producing them and their use

#65

20160138160

2016-05-19

REACTIVE ULTRAVIOLET THERMAL PROCESSING OF LOW DIELECTRIC CONSTANT MATERIALS

#66

20160130700

2016-05-12

Deposition apparatus

#67

20160108282

2016-04-21

GAS BARRIER FILM AND METHOD FOR PRODUCING THE SAME

#68

20160068959

2016-03-10

ATMOSPHERIC EPITAXIAL DEPOSITION CHAMBER

#69

20160053375

2016-02-25

CHEMICAL VAPOR DEPOSITION SYSTEM ARRANGEMENT

#70

20160049609

2016-02-18

METHOD FOR MANUFACTURING GAS BARRIER FILM, GAS BARRIER FILM AND ELECTRONIC DEVICE

#71

20160047044

2016-02-18

Nano imprinting with reusable polymer template with metallic or oxide coating

#72

20160035543

2016-02-04

Plasma processing apparatus

#73

20160017484

2016-01-21

CARBON FILM FORMATION METHOD, AND CARBON FILM

#74

20160009558

2016-01-14

Carbon nanotube sponge and method for making the same

#75

20160002039

2016-01-07

Low temperature atomic layer deposition of films comprising SiCN or SiCON

#76

20150368822

2015-12-24

Method of preparing corrosion resistant coatings

#77

20150364726

2015-12-17

Method and apparatus for repairing a display panel

#78

20150361551

2015-12-17

PROTECTIVE COATINGS FOR ELECTRONIC DEVICES AND ATOMIC LAYER DEPOSITION PROCESSES FOR FORMING THE PROTECTIVE COATINGS

#79

20150294893

2015-10-15

Substrate holder and a device and a method for treating substrates

#80

20150293025

2015-10-15

METAL DOT SUBSTRATE AND METHOD OF MANUFACTURING METAL DOT SUBSTRATE

#81

20150292085

2015-10-15

METHOD FOR PRODUCING A LAYER ON A SURFACE AREA OF AN ELECTRONIC COMPONENT

#82

20150284850

2015-10-08

Method and an apparatus for depositing a layer onto a workpiece using plasma

#83

20150284849

2015-10-08

LOW-K FILMS WITH ENHANCED CROSSLINKING BY UV CURING

#84

20150267300

2015-09-24

Thermal processing chamber

#85

20150232992

2015-08-20

Forming a low-k dielectric layer with reduced dielectric constant and strengthened mechanical properties

#86

20150225845

2015-08-13

METHOD FOR FORMING METAL OXIDE THIN FILM AND DEVICE FOR PRINTING METAL OXIDE THIN FILM

#87

20150221563

2015-08-06

Application of in-line glass edge-inspection and alignment check in display manufacturing

#88

20150211114

2015-07-30

BOTTOM PUMP AND PURGE AND BOTTOM OZONE CLEAN HARDWARE TO REDUCE FALL-ON PARTICLE DEFECTS

#89

20150207074

2015-07-23

Forming method and forming apparatus of carbon nanotubes

#90

20150152556

2015-06-04

METHOD AND DEVICE FOR CONTROLLING PATTERN AND STRUCTURE FORMATION BY AN ELECTRIC FIELD

#91

20150128860

2015-05-14

DEPOSITION SYSTEMS HAVING DEPOSITION CHAMBERS CONFIGURED FOR IN-SITU METROLOGY WITH RADIATION DEFLECTION AND RELATED METHODS

#92

20150114291

2015-04-30

FILM FORMATION DEVICE

#93

20150099071

2015-04-09

Method of depositing material

#94

20150064364

2015-03-05

Deposition System And Method Of Forming A Metalloid-Containing Material Therewith

#95

20150013732

2015-01-15

Substrate treatment apparatus

#96

20140374024

2014-12-25

Apparatus for removing particles from a twin chamber processing system

#97

20140272195

2014-09-18

Methods of manufacture of engineered materials and devices

#98

20140199550

2014-07-17

Systems and methods for enhancing mobility of atomic or molecular species on a substrate at reduced bulk temperature using acoustic waves, and structures formed using same

#99

20140093654

2014-04-03

Irradiation assisted nucleation of quantum confinements by atomic layer deposition

#100

20140030444

2014-01-30

HIGH PRESSURE, HIGH POWER PLASMA ACTIVATED CONFORMAL FILM DEPOSITION

#101

20140014742

2014-01-16

Gas injection system for energetic-beam instruments

#102

20130337193

2013-12-19

Modular coater separation

#103

20130270617

2013-10-17

Integration of bottom-up metal film deposition

#104

20130236732

2013-09-12

Method for producing metal structures

#105

20130236708

2013-09-12

Process for Producing Metallic Structures

#106

20130192990

2013-08-01

System and method for tissue construction using an electric field applicator

#107

20130149470

2013-06-13

Process and apparatus for the application of solid layers

#108

20130026028

2013-01-31

Bromine-sensitized solar photolysis of carbon dioxide

#109

20130025536

2013-01-31

Apparatus for precursor delivery system for irradiation beam instruments

#110

20120258259

2012-10-11

APPARATUS AND METHOD FOR UV TREATMENT, CHEMICAL TREATMENT, AND DEPOSITION

#111

20120196440

2012-08-02

Method of depositing material

#112

20120064715

2012-03-15

Integration of bottom-up metal film deposition

#113

20120003497

2012-01-05

Methods for coating articles

#114

20110315318

2011-12-29

Focus ring and manufacturing method therefor

#115

20110269298

2011-11-03

Irradiation assisted nucleation of quantum confinements by atomic layer deposition

#116

20110239940

2011-10-06

VAPOR PHASE DEPOSITION SYSTEM

#117

20110195570

2011-08-11

Integration of bottom-up metal film deposition

#118

20110186537

2011-08-04

Systems, Apparatus and Methods for Coating the Interior of a Container Using a Photolysis and/or Thermal Chemical Vapor Deposition Process

#119

20100244262

2010-09-30

DEPOSITION METHOD AND A DEPOSITION APPARATUS OF FINE PARTICLES, A FORMING METHOD AND A FORMING APPARATUS OF CARBON NANOTUBES, AND A SEMICONDUCTOR DEVICE AND A MANUFACTURING METHOD OF THE SAME

#120