ClassID:

120273

C23C16/486 - CPC Classification

Classification description:

Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation using ion beam radiation

Recent Application in this class:
#1
20260068553
2026-03-05

Ion Beam-Induced Epitaxial Crystallization on an Integrated Processing Architecture

#2
20250283222
2025-09-11

FILM FORMING DEVICE AND METHOD FOR FORMING CARBON FILM

#3
20250263836
2025-08-21

PROCESSES FOR PRODUCING ORTHOPEDIC IMPLANTS HAVING A SUBSURFACE LEVEL SILICON NITRIDE LAYER APPLIED VIA BOMBARDMENT

#4
20250087441
2025-03-13

ADJUSTABLE MULTIPLE FILAMENT ION BEAM DEPOSITION SYSTEM

#5
20240416458
2024-12-19

Method for Long-Term Storage of Information and Storage Medium Therefor

#6
20240062990
2024-02-22

Enhanced deposition rate by thermal isolation cover for GIS manipulator

#7
20240035163
2024-02-01

METHOD AND APPARATUS FOR DEPOSITION OF AT LEAST ONE LAYER, OPTICAL ELEMENT AND OPTICAL ARRANGEMENT

#8
20230250531
2023-08-10

Method of forming structures using a neutral beam

#9
20230023396
2023-01-26

Temperature-controlled surface with a cryo-nanomanipulator for improved deposition rate

#10
20220301809
2022-09-22

Method of manufacturing semiconductor device and ion beam irradiation apparatus

#11
20220228259
2022-07-21

PROCESSES FOR PRODUCING ORTHOPEDIC IMPLANTS HAVING A SUBSURFACE LEVEL CERAMIC LAYER APPLIED VIA BOMBARDMENT

#12
20220228258
2022-07-21

ORTHOPEDIC IMPLANTS HAVING A SUBSURFACE LEVEL CERAMIC LAYER APPLIED VIA BOMBARDMENT

#13
20220102284
2022-03-31

Depositive shielding for fiducial protection from redeposition

#14
20220074051
2022-03-10

Method and apparatus for fabricating fibers and microstructures from disparate molar mass precursors

#15
20210252645
2021-08-19

Method for long-term storage of information and storage medium therefor

#16
20210074595
2021-03-11

Post-production substrate modification with FIB deposition

#17
20210046588
2021-02-18

Method for long-term storage of information and storage medium therefor

#18
20210017648
2021-01-21

Method of forming structures using a neutral beam

#19
20200350139
2020-11-05

High power wafer cooling

#20
20200332417
2020-10-22

Method and apparatus for fabricating fibers and microstructures from disparate molar mass precursors

#21
20200286515
2020-09-10

Magnetic recording medium having non-magnetic layer and characterized vertical squareness ratio, and magnetic recording and reproducing device

#22
20200149167
2020-05-14

Method and apparatus for fabricating fibers and microstructures from disparate molar mass precursors

#23
20200094364
2020-03-26

Use of a diamond layer doped with foreign atoms to detect the degree of wear of an undoped diamond function layer of a tool

#24
20200080196
2020-03-12

PROCESSES FOR PRODUCING ORTHOPEDIC IMPLANTS HAVING A SUBSURFACE LEVEL SILICON NITRIDE LAYER APPLIED VIA BOMBARDMENT

#25
20190317395
2019-10-17

Method and device for permanently repairing defects of absent material of a photolithographic mask

#26
20190161856
2019-05-30

Processes for producing orthopedic implants having a subsurface level silicon nitride layer applied via bombardment

#27
20180187298
2018-07-05

Method for manufacturing graphene and apparatus for manufacturing graphene

#28
20180182627
2018-06-28

Method and apparatus for depositing a monolayer on a three dimensional structure

#29
20170248842
2017-08-31

Method and device for permanently repairing defects of absent material of a photolithographic mask

#30
20170029950
2017-02-02

Apparatus and method for carbon film deposition profile control

#31
20170002455
2017-01-05

Adaptive beam current for high throughput patterning

#32
20160379827
2016-12-29

Method for selectively depositing a layer on a three dimensional structure

#33
20160369400
2016-12-22

Method and apparatus for fabricating fibers and microstructures from disparate molar mass precursors

#34
20160266280
2016-09-15

Anti-reflective lenses and methods for manufacturing the same

#35
20160163507
2016-06-09

Deposition method and focused ion beam system

#36
20160017496
2016-01-21

Method For Optimizing A Deposition Process, Method For Setting A Deposition System and Deposition System

#37
20160010211
2016-01-14

Beam-induced deposition of low-resistivity material

#38
20160005607
2016-01-07

Method for selectively depositing a layer on a three dimensional structure

#39
20160005594
2016-01-07

High efficiency apparatus and method for depositing a layer on a three dimensional structure

#40
20160002784
2016-01-07

METHOD AND APPARATUS FOR DEPOSITING A MONOLAYER ON A THREE DIMENSIONAL STRUCTURE

#41
20150378261
2015-12-31

Methods and apparatus for nanofabrication using a pliable membrane mask

#42
20150376791
2015-12-31

GAS CLUSTER REACTOR FOR ANISOTROPIC FILM GROWTH

#43
20150369710
2015-12-24

Method and System of Creating a Symmetrical FIB Deposition

#44
20150364719
2015-12-17

Method of manufacturing display apparatus that includes using an energy beam to form an encapsulation layer

#45
20150299847
2015-10-22

ION BOMBARDMENT DEVICE AND METHOD FOR USING THE SAME TO CLEAN SUBSTRATE SURFACE

#46
20150212237
2015-07-30

Anti-reflective lenses and methods for manufacturing the same

#47
20150114294
2015-04-30

Processing System

#48
20150099071
2015-04-09

Method of depositing material

#49
20140287161
2014-09-25

METHODS FOR COATING TUBULAR DEVICES USED IN OIL AND GAS DRILLING, COMPLETIONS AND PRODUCTION OPERATIONS

#50
20140093654
2014-04-03

Irradiation assisted nucleation of quantum confinements by atomic layer deposition

#51
20140007813
2014-01-09

Ion control for a plasma source

#52
20130251914
2013-09-26

Sample preparation method

#53
20130236720
2013-09-12

RARE-EARTH-FREE OR NOBLE METAL-FREE LARGE MAGNETIC COERCIVITY NANOSTRUCTURED FILMS

#54
20130224889
2013-08-29

Charged particle beam apparatus, thin film forming method, defect correction method and device forming method

#55
20130224400
2013-08-29

APPARATUS FOR TREATING AN OBJECT, MORE PARTICULARLY THE SURFACE OF AN OBJECT MADE OF POLYMER

#56
20130209701
2013-08-15

METHOD OF PREPARING SAMPLE FOR TEM OBSERVATION

#57
20130209700
2013-08-15

TEM sample preparation method

#58
20130098292
2013-04-25

Processing system

#59
20130033753
2013-02-07

Anti-reflective lenses and methods for manufacturing the same

#60
20120308740
2012-12-06

Beam-induced deposition of low-resistivity material

#61
20120196440
2012-08-02

Method of depositing material

#62
20120190212
2012-07-26

Low dielectric constant insulating film and method for forming the same

#63
20120003394
2012-01-05

Beam-induced deposition at cryogenic temperatures

#64
20110269298
2011-11-03

Irradiation assisted nucleation of quantum confinements by atomic layer deposition

#65
20110007255
2011-01-13

Alignment film for liquid crystals obtainable by direct particle beam deposition

#66
20100323121
2010-12-23

Method of preparing a diaphragm of high purity polysilicon with multi-gas microwave source

#67
20100316811
2010-12-16

Au-containing layer for charged particle beam processing

#68
20100024730
2010-02-04

Processing system

#69
20100022060
2010-01-28

Bi-axial texturing of high-K dielectric films to reduce leakage currents

#70
20090162572
2009-06-25

Systems and methods for the production of highly tetrahedral amorphous carbon coatings

#71
20070098980
2007-05-03

Highly tetrahedral amorphous carbon coatings and systems and methods for their production

#72
20070098979
2007-05-03

Highly tetrahedral amorphous carbon coatings and systems and methods for their production

#73
20060288938
2006-12-28

Systems and methods for the production of highly tetrahedral amorphous carbon coatings

#74
20060252255
2006-11-09

Focused ion beam deposition

#75
20060118919
2006-06-08

Bi-axial texturing of high-K dielectric films to reduce leakage currents

#76
20060051950
2006-03-09

Apparatus and a method for forming an alloy layer over a substrate

#77
20060051508
2006-03-09

Focused ion beam deposition

#78
20050276932
2005-12-15

Electron beam processing method

#79
20050252453
2005-11-17

Apparatus and a method for forming an alloy layer over a substrate

#80
16015772
2020-03-31

Patterned atomic layer etching and deposition using miniature-column charged particle beam arrays

#81
14809985
2017-01-31

Precision deposition using miniature-column charged particle beam arrays

#82
14745463
2016-09-27

Precision deposition using miniature-column charged particle beam arrays