ClassID:

120274

C23C16/487 - CPC Classification

Classification description:

Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation using electron radiation

Recent Application in this class:
#1
20250362590
2025-11-27

METHODS OF REPAIRING EXTREME ULTRAVIOLET PHOTOMASKS

#2
20250130490
2025-04-24

METHODS OF REPAIRING EXTREME ULTRAVIOLET PHOTOMASKS

#3
20240416458
2024-12-19

Method for Long-Term Storage of Information and Storage Medium Therefor

#4
20240254620
2024-08-01

RESTORING METHOD OF CONSUMED COMPONENT

#5
20240240317
2024-07-18

ELECTRON-ENHANCED ATOMIC LAYER DEPOSITION (EE-ALD) METHODS AND DEVICES PREPARED BY SAME

#6
20220098725
2022-03-31

Method and apparatus for chemical vapour deposition

#7
20220074051
2022-03-10

Method and apparatus for fabricating fibers and microstructures from disparate molar mass precursors

#8
20210366697
2021-11-25

Forming method of component and substrate processing system

#9
20210252645
2021-08-19

Method for long-term storage of information and storage medium therefor

#10
20210087675
2021-03-25

Graphene printing

#11
20210046588
2021-02-18

Method for long-term storage of information and storage medium therefor

#12
20200332417
2020-10-22

Method and apparatus for fabricating fibers and microstructures from disparate molar mass precursors

#13
20200212286
2020-07-02

Thin film laminate, thin film device and multilayer substrate

#14
20200190669
2020-06-18

Nanofabrication using a new class of electron beam induced surface processing techniques

#15
20200149167
2020-05-14

Method and apparatus for fabricating fibers and microstructures from disparate molar mass precursors

#16
20180282870
2018-10-04

Method of burying sample trench

#17
20180274100
2018-09-27

ALTERNATING BETWEEN DEPOSITION AND TREATMENT OF DIAMOND-LIKE CARBON

#18
20180274089
2018-09-27

Deposition or treatment of diamond-like carbon in a plasma reactor

#19
20170327951
2017-11-16

Attachment of nano-objects to beam-deposited structures

#20
20170267700
2017-09-21

Precursors for Electron Beam-Induced Deposition of Gold and Silver

#21
20170170384
2017-06-15

Method for manufacturing crystal film

#22
20170073814
2017-03-16

Nanofabrication using a new class of electron beam induced surface processing techniques

#23
20170002467
2017-01-05

ADAPTIVE CONTROL FOR CHARGED PARTICLE BEAM PROCESSING

#24
20160096176
2016-04-07

Microfluidic structure

#25
20160027547
2016-01-28

Ion beam modification of noble metals for electrical contacts

#26
20160017496
2016-01-21

Method For Optimizing A Deposition Process, Method For Setting A Deposition System and Deposition System

#27
20150378261
2015-12-31

Methods and apparatus for nanofabrication using a pliable membrane mask

#28
20150364719
2015-12-17

Method of manufacturing display apparatus that includes using an energy beam to form an encapsulation layer

#29
20150348652
2015-12-03

Deposition of a protective coating including metal-containing and chromium-containing layers on zirconium alloy for nuclear power applications

#30
20150345021
2015-12-03

PULSED PLASMA DEPOSITION DEVICE

#31
20150298263
2015-10-22

COMPOSITE WELDING WIRE AND METHOD OF MANUFACTURING

#32
20150129114
2015-05-14

METHOD FOR MANUFACTURING A MULTIPLE-AXIS THERMAL CONVECTION-TYPE ACCELEROMETER

#33
20150129089
2015-05-14

Hydrogen-free amorphous dielectric insulating thin films with no tunneling states

#34
20150114294
2015-04-30

Processing System

#35
20140295105
2014-10-02

METHOD AND DEVICE FOR DEPOSITING SILICON ON A SUBSTRATE

#36
20140272169
2014-09-18

Method for fabricating multilayer environmental barrier coatings

#37
20140272168
2014-09-18

METHOD FOR FABRICATING MULTILAYER ENVIRONMENTAL BARRIER COATINGS

#38
20140141177
2014-05-22

MANUFACTURING METHOD OF DEPOSITION MATERIAL, MANUFACTURING APPARATUS OF DEPOSITION MATERIAL, ELECTRON BEAM IRRADIATION DEPOSITION METHOD AND DEPOSITION MATERIAL FOR ELECTRON BEAM IRRADIATION DEPOSITION

#39
20140093654
2014-04-03

Irradiation assisted nucleation of quantum confinements by atomic layer deposition

#40
20130251998
2013-09-26

Graphene-coated steel sheet, and method for manufacturing same

#41
20130236720
2013-09-12

RARE-EARTH-FREE OR NOBLE METAL-FREE LARGE MAGNETIC COERCIVITY NANOSTRUCTURED FILMS

#42
20130224889
2013-08-29

Charged particle beam apparatus, thin film forming method, defect correction method and device forming method

#43
20130209780
2013-08-15

Tunable nanoporous films on polymer substrates, and method for their manufacture

#44
20130209706
2013-08-15

APPARATUS AND METHOD FOR COATING SUBSTRATES USING THE EB/PVD PROCESS

#45
20130133425
2013-05-30

Thermal convection-type accelerometer

#46
20130098292
2013-04-25

Processing system

#47
20130029061
2013-01-31

Electron beam plasma chamber

#48
20120137974
2012-06-07

Method and apparatus for application of metallic alloy coatings

#49
20110269298
2011-11-03

Irradiation assisted nucleation of quantum confinements by atomic layer deposition

#50
20110183517
2011-07-28

Method for electron beam induced deposition of conductive material

#51
20110126762
2011-06-02

Vapor deposition system

#52
20100316811
2010-12-16

Au-containing layer for charged particle beam processing

#53
20100166981
2010-07-01

Surface charge enhanced atomic layer deposition of pure metallic films

#54
20100068408
2010-03-18

METHODS FOR ELECTRON-BEAM INDUCED DEPOSITION OF MATERIAL INSIDE ENERGETIC-BEAM MICROSCOPES

#55
20100024730
2010-02-04

Processing system

#56
20090178934
2009-07-16

MICROFLUIDIC STRUCTURE

#57
20070134816
2007-06-14

Atomic layer deposition using electron bombardment

#58
20070119375
2007-05-31

Dual large area plasma processing system

#59
20070093044
2007-04-26

Method of depositing a metal layer onto a substrate and a method for measuring in three dimensions the topographical features of a substrate

#60
20060260750
2006-11-23

Plasma processing apparatuses and methods

#61
20060042752
2006-03-02

Plasma processing apparatuses and methods

#62
20050284360
2005-12-29

Atomic layer deposition using electron bombardment

#63
20050227020
2005-10-13

Method for carrying out homogeneous and heterogeneous chemical reactions using plasma

#64
20050072360
2005-04-07

Submicron size metal deposit apparatus

#65
20050000444
2005-01-06

Method and apparatus application of metallic alloy coatings

#66
16015772
2020-03-31

Patterned atomic layer etching and deposition using miniature-column charged particle beam arrays

#67
14809985
2017-01-31

Precision deposition using miniature-column charged particle beam arrays

#68
14745463
2016-09-27

Precision deposition using miniature-column charged particle beam arrays