120275 ⎘
Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation Protection of windows for introduction of radiation into the coating chamber
RADIATION SHIELD
#2ILLUMINATION DEVICE FOR FILM GROWTH PROCESS AND FILM GROWTH PROCESS EQUIPMENT
#3MULTI-SUBSTRATE PROCESSING SYSTEM
#4WINDOW FOR CHEMICAL VAPOR DEPOSITION SYSTEMS AND RELATED METHODS
#5RADIATION SHIELD
#6SHIELDING MECHANISM AND SUBSTRATE-PROCESSING DEVICE WITH THE SAME
#7Window for chemical vapor deposition systems and related methods
#8Radiation shield
#9Window member for an x-ray device
#10FILM COATING APPARATUS
#11Radiation shield
#12Clean resistant windows for ultraviolet thermal processing
#13Thermal processing chamber
#14PREPARING METHOD OF GRAPHENE BY USING NEAR-INFRARED AND APPARATUS THEREFOR
#15SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
#16ULTRAVIOLET-RESISTANT MATERIALS AND DEVICES AND SYSTEMS INCLUDING SAME
#17Method for forming silicon-containing materials during a photoexcitation deposition process
#18Deposition systems and susceptor assemblies for depositing a film on a substrate
#19Method for treating substrates and films with photoexcitation
#20Method for forming silicon-containing materials during a photoexcitation deposition process
#21Method for forming silicon-containing materials during a photoexcitation deposition process
#22METHOD FOR FORMING SILICON-CONTAINING MATERIALS DURING A PHOTOEXCITATION DEPOSITION PROCESS
#23Methods for controlling formation of deposits in a deposition system and deposition methods including the same