Film formation device

Plasma processing chamber with dual axial gas injection and exhaust

Method of depositing a film, recording medium, and film deposition apparatus

Energy storage device assembly

Method and use of a binder for providing a metallic coat covering a surface

Film deposition method

Vapor Deposition Reactor Using Plasma and Method for Forming Thin Film Using the Same

Amorphous carbon film, process for forming amorphous carbon film, electrically conductive member and fuel cell bipolar plate having amorphous carbon film

HEATING EVAPORATION DEPOSITION APPARATUS AND EVAPORATION DEPOSITION METHOD USING THE SAME

Method of manufacturing semiconductor device using the same

Method of fabricating surface body having superhydrophobicity and hydrophilicity

SLIDING MEMBER AND MANUFACTURING METHOD THEREOF

PECVD lubricity vessel coating, coating process and apparatus providing different power levels in two phases

EXTREME ULTRAVIOLET LITHOGRAPHY MASK BLANK MANUFACTURING SYSTEM AND METHOD OF OPERATION THEREFOR

Directing plasma distribution in plasma-enhanced chemical vapor deposition

Systems and methods for remote plasma atomic layer deposition

Methods for processing a substrate using multiple substrate support positions

Trilayer coated pharmaceutical packaging

Plasma Treatment Of Substrates

INSTALLATION AND METHOD FOR THE FUNCTIONALIZATION OF PARTICULATE AND POWDERED PRODUCTS

Drill having a coating

SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SUBSTRATE PROCESSING SYSTEM

Method of manufacturing an electrode for vapor deposition

Vapor deposition apparatus, deposition method, and method of manufacturing organic light-emitting display apparatus by using the same

Plasma processing apparatus

PLASMA EVALUATION METHOD, PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS

AUTOMATED ALGORITHM FOR TUNING OF FEEDFORWARD CONTROL PARAMETERS IN PLASMA PROCESSING SYSTEM

Methods for plasma processing

SUBSTRATE PROCESSING APPARATUS AND METHOD OF DEPOSITING A FILM

Method and apparatus for purging and plasma suppression in a process chamber

Methods for plasma processing

Common deposition platform, processing station, and method of operation thereof

CASCADED PLASMA REACTOR

Lid assembly for a processing system to facilitate sequential deposition techniques

CVD apparatus and method for forming CVD film

Low friction coatings with improved abrasion and wear properties and methods of making

Apparatus And Methods For Symmetrical Gas Distribution With High Purge Efficiency

Magnetic Field Assisted Deposition

Plasma CVD apparatus and vacuum treatment apparatus

Methods and apparatus for combinatorial PECVD or PEALD

Combinatorial processing using a remote plasma source

Erosion Resistant Wellbore Screen and Associated Methods of Manufacture

Thermionic converter and manufacturing method of electrode of thermionic converter

APPARATUS AND METHOD FOR DEPOSITION

Controlling the uniformity of PECVD deposition

Small plasma chamber systems and methods

Plasma process method

Method of manufacturing multilayer body, method of processing substrate, and multilayer body

Plasma deposition apparatus and plasma deposition method

Vapor deposition apparatus

Device comprising an encapsulation unit

Plasma processing apparatus

Tungsten growth modulation by controlling surface composition

Plasma processing method and plasma processing apparatus

Deposition reactor with plasma source

Plasma deposition on a partially formed battery through a mesh screen

Controlling temperature in substrate processing systems

Deposition apparatus and method of depositing thin film using the same

POLYCRYSTALLINE DIAMOND COMPACT COATED WITH HIGH ABRASION RESISTANCE DIAMOND LAYERS

Substrate processing apparatus and method of manufacturing semiconductor device

DEPOSITION OF THIN FILMS ON ENERGY SENSITIVE SURFACES

Semiconductor processing with DC assisted RF power for improved control

VAPOR DEPOSITION APPARATUS

Method and system for ion-assisted processing

Enhanced etch and deposition profile control using plasma sheath engineering

Apparatus for dielectric deposition process

COAT AS WELL AS METHOD AND DEVICE FOR COATING

Plasma enhanced chemical vapor deposition apparatus and method for controlling the same

PLASMA PROCESSING SYSTEM WITH MOVABLE CHAMBER HOUSING PARTS

Remote plasma based deposition of SiOC class of films

Plasma chamber having an upper electrode having controllable valves and a method of using the same

Method for producing gas barrier film, gas barrier film, and electronic device

Device and method for vacuum coating

ATMOSPHERIC PRESSURE PLASMA TREATMENT APPARATUS AND ATMOSPHERIC PRESSURE PLASMA TREATMENT METHOD

Cost-efficient high power PECVD deposition for solar cells

Method Of Making A Golf Ball With A Superhydrophobic Surface

METHOD FOR PRODUCING A PYROLYSIS COMPATIBLE COMPONENT FOR A COOKING APPLIANCE AND PYROLYSIS COMPATIBLE COMPONENT FOR A COOKING APPLIANCE

Processing a sacrificial material during manufacture of a microfabricated product

CVD APPARATUS AND CVD METHOD

STATIC DEPOSITION PROFILE MODULATION FOR LINEAR PLASMA SOURCE

Method to Determine the Thickness of a Thin Film During Plasma Deposition

PLASMA CVD APPARATUS

PLASMA CVD APPARATUS

Plasma process, film deposition method and system using rotary chuck

Metamaterial thin films

SUCTION VALVE IN A PLASMA COATING APPARATUS

Vacuum trap

Method and system for modifying photoresist using electromagnetic radiation and ion implantation

Method for producing metal complex quantum crystals

Hollow cathode device and method for using the device to control the uniformity of a plasma process

METHOD OF FORMING NITROGEN-FREE DIELECTRIC ANTI-REFLECTION LAYER

Method for forming DLC film on spline shaft and hot cathode PIG plasma CVD device

CONTROL OF DIFFERENTIAL PRESSURE IN PECVD SYSTEMS

Tunable nanoporous films on polymer substrates, and method for their manufacture

Coated article of martensitic steel and a method of forming a coated article of steel

LUBRICITY VESSEL COATING, COATING PROCESS AND APPARATUS

Current insulated bearing components and bearings

Plasma processing apparatus

System and method for tissue construction using an electric field applicator

Plasma processing apparatus and plasma processing method

Substrate processing device equipped with semicircle shaped antenna

Coatings for electrowetting and electrofluidic devices

METHODS AND APPARATUSES FOR CONTROLLING PLASMA PROPERTIES BY CONTROLLING CONDUCTANCE BETWEEN SUB-CHAMBERS OF A PLASMA PROCESSING CHAMBER

Plasma Processing Devices With Corrosion Resistant Components

COMBINATORIAL PROCESSING USING A REMOTE PLASMA SOURCE

Semiconductor Processing System

Plasma CVD apparatus

Apparatus for growth of dilute-nitride materials using an isotope for enhancing the sensitivity of resonant nuclear reaction analysis

Vapor deposition apparatus and method of manufacturing organic light-emitting display apparatus

Substrate processing method and substrate processing apparatus

PLASMA-ENHANCED DEPOSITION OF RUTHENIUM-CONTAINING FILMS FOR VARIOUS APPLICATIONS USING AMIDINATE RUTHENIUM PRECURSORS

PLASMA-ENHANCED DEPOSITION OF MANGANESE-CONTAINING FILMS FOR VARIOUS APPLICATIONS USING AMIDINATE MANGANESE PRECURSORS

PLASMA-ENHANCED DEPOSITION OF NICKEL-CONTAINING FILMS FOR VARIOUS APPLICATIONS USING AMIDINATE NICKEL PRECURSORS

Method for diffusing metal particles within a composite layer

VACUUM PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

PLASMA-ENHANCED DEPOSITION OF COPPER-CONTAINING FILMS FOR VARIOUS APPLICATIONS USING AMIDINATE COPPER PRECURSORS

Activated silicon precursors for low temperature deposition

Methods of attaching a polycrystalline diamond compact to a substrate

Apparatus for changing area ratio in a plasma processing system

METHOD AND APPARATUS FOR GAS DISTRIBUTION AND PLASMA APPLICATION IN A LINEAR DEPOSITION CHAMBER

Microcrystalline silicon film, manufacturing method thereof, semiconductor device, and manufacturing method thereof

Method for manufacturing semiconductor device, method for processing substrate and substrate processing apparatus

Combinatorial plasma enhanced deposition techniques

Plasma booster for plasma treatment installation

Thin Film Deposition Method

Inorganic nanocoating primed organic film

High multiplex arrays and systems

Variable resistance element, semiconductor device including variable resistance element, and methods for manufacturing variable resistance element and semiconductor device

Projected plasma source

INTER-LOW-PERMITTIVITY LAYER INSULATING FILM, AND METHOD FOR FORMING INTER-LOW-PERMITTIVITY LAYER INSULATING FILM

Apparatus for depositing a polymer coating containing nanomaterial on a substrate

Group 11 mono-metallic precursor compounds and use thereof in metal deposition

SLIDING DEVICE AND SLIDING SYSTEM USING THE SAME

High-throughput semiconductor-processing apparatus equipped with multiple dual-chamber modules

Method for forming thin film using radicals generated by plasma

Coated electronic devices and associated methods

Machine and method for atmospheric plasma treatment of continuous substrates

RF coupled plasma abatement system comprising an integrated power oscillator

Atomic layer deposition of metal phosphates and lithium silicates

Thin Film Deposition via a Spatially-Coordinated and Time-Synchronized Process

PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION APPARATUS AND METHOD FOR CONTROLLING THE SAME

Method and device for polarizing a DBD electrode

Large Area Atmospheric Pressure Plasma Enhanced Chemical Vapor Deposition Apparatus

Magnetic field assisted deposition

Methods for the production of aligned carbon nanotubes and nanostructured material containing the same

Electrode having gas discharge function and plasma processing apparatus

Plasma enhanced chemical vapor deposition apparatus and method for controlling the same

CONFORMABLE BARRIER SHEET, METHODS, AND DEVICE

System, method and apparatus for controlling ion energy distribution of a projected plasma

Sleep aid composition and method

Apparatus and method for atomic layer deposition

Plasma CVD apparatus

Mask

Formation of Photoconductive and Photovoltaic Films

PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION APPARATUS

Deposition of hydrogenated thin film

Method and apparatus to help promote contact of gas with vaporized material

Intelligent call transfer between call centers

Product having functional layer and method for fabricating the same

Method for preparing an oriented-porosity dielectric material on a substrate by means of electromagnetic and photonic treatment

PLASMA PROCESSING APPARATUS

Carbon film forming method, magnetic-recording-medium manufacturing method, and carbon film forming apparatus

Plasma processing apparatus and plasma processing method

Plasma processing apparatus, plasma processing method, method for cleaning plasma processing apparatus and pressure control valve for plasma processing apparatus

PLASMA PROCESSING CHAMBER HAVING ENHANCED DEPOSITION UNIFORMITY

VIEW PORT DEVICE FOR PLASMA PROCESS AND PROCESS OBSERVATION DEVICE OF PLASMA APPARATUS

Use of nitrogen-containing ligands in atomic layer deposition methods

Combinatorial plasma enhanced deposition techniques

Combinatorial plasma enhanced deposition techniques

Shower plate having different aperture dimensions and/or distributions

Combinatorial plasma enhanced deposition techniques

Combinatorial plasma enhanced deposition techniques

Deposition apparatus and methods to reduce deposition asymmetry

Method and system for modifying photoresist using electromagnetic radiation and ion implantation

Combinatorial plasma enhanced deposition techniques

DEPOSITION APPARATUS, APPARATUS FOR SUCCESSIVE DEPOSITION, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

Galvanic package for fruits and vegetables and preservation method

Wafer chucking system for advanced plasma ion energy processing systems

Plasma processing chamber with dual axial gas injection and exhaust

Formation method of coating

CHEMICAL VAPOR DEPOSITION DEVICE

Wheels Having Oxide Coating And Method of Making The Same

Mixing Energized and Non-Energized Gases for Silicon Nitride Deposition

Methods for coating articles

Power supplying means having shielding means for feeding line and substrate processing apparatus including the same

Focus ring and manufacturing method therefor

SUSCEPTOR FOR PLASMA PROCESSING CHAMBER

Atomic layer deposition apparatus and thin film forming method

APPARATUS AND METHOD FOR TREATING AN OBJECT

GAN-BASED LEDS ON SILICON SUBSTRATES WITH MONOLITHICALLY INTEGRATED ZENER DIODES

System, method and apparatus for controlling ion energy distribution

Method for patterning a substrate using ion assisted selective depostion

Vessel inspection apparatus and methods

Atomic layer deposition methods

In-situ deposition of film stacks

PLASMA FILM-COATING APPARATUS

Sealing structure and fuel cell having the sealing structure

GAS DISTRIBUTING MEANS AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME

Automatic matching method, computer-readable storage medium, automatic matching unit, and plasma processing apparatus

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

Multi-region processing system

IN-SITU ACCEPTOR ACTIVATION WITH NITROGEN AND/OR OXYGEN PLASMA TREATMENT

Titanium Nitride Film Deposition by Vapor Deposition Using Cyclopentadienyl Alkylamino Titanium Precursors

Surface preparation for thin film growth by enhanced nucleation

Plasma film forming apparatus

REMOTE FLUORINATION OF FIBROUS FILTER WEBS

FILM DEPOSITION APPARATUS, FILM DEPOSITION METHOD, AND COMPUTER-READABLE STORAGE MEDIUM

Small plasma chamber systems and methods

Method for growth of dilute-nitride materials using an isotope for enhancing the sensitivity of resonant nuclear reation analysis

Vapor deposition system

Method for producing an electronic component and electronic component

Method for producing an electronic component and electronic component

LID ASSEMBLY FOR A PROCESSING SYSTEM TO FACILITATE SEQUENTIAL DEPOSITION TECHNIQUES

Plasma processing apparatus and plasma processing method

THIN-FILM SOLAR CELL MANUFACTURING APPARATUS

Showerhead assembly for plasma processing chamber

Method of depositing metallic film by plasma CVD and storage medium

Fluorine compounds for doping conductive oxide thin films

Film deposition method

DEVICE FOR THERMOHYDRAULIC APPLICATIONS WITH IMPROVED WATER SOFTENING PROPERTIES, LOWER RELEASE OF HEAVY METALS, AND RELATIVE METHOD OF MANUFACTURING

Method and apparatus to help promote contact of gas with vaporized material

Device comprising an encapsulation unit

SUBSTRATE TREATMENT APPARATUS

Method of Manufacturing Solar Cell Device and Solar Cell Device

APPARATUS AND PROCESS FOR CARBON NANOTUBE GROWTH

Plasma system

DEPOSITION APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME

Methods for plasma processing

Apparatus for Plasma Processing

Plasma generating units for processing a substrate

Process for depositing a thin layer and product obtained thereby

Plasma booster for plasma treatment installation

SUBSTRATE PROCESSING APPARATUS AND PRODUCING METHOD OF DEVICE

Film deposition apparatus and film deposition method

Vehicular brake rotors

Continuous film forming apparatus

Substrate processing apparatus

Vessel, coating, inspection and processing apparatus

TOP PLATE AND PLASMA PROCESS APPARATUS EMPLOYING THE SAME

Method and apparatus for in-line processing and immediately sequential or simultaneous processing of flat and flexible substrates through viscous shear in thin cross section gaps for the manufacture of micro-electronic circuits or displays

System and method for applying abrasion-resistant coatings

Plasma process apparatus and plasma process method

Thin film deposition via charged particle-depleted plasma achieved by magnetic confinement

Placing bed structure, treating apparatus using the structure, and method for using the apparatus

SUBSTRATE PROCESSING APPARATUS AND PRODUCING METHOD OF DEVICE

METHOD FOR PRODUCING POLYCRYSTALLINE SILICON GERMANIUM SUITABLE FOR MICROMACHINING

PROCESS AND APPARATUS FOR ATMOSPHERIC PRESSURE PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION COATING OF A SUBSTRATE

Enhanced etch and deposition profile control using plasma sheath engineering

REMOTE FLUORINATION OF FIBROUS FILTER WEBS

Method of coating a surface of an article against aquatic bio fouling

FILM FORMATION METHOD AND APPARATUS UTILIZING PLASMA CVD

Method of producing gas barrier layer, gas barrier film for solar batteries and gas barrier film for displays

PLASMA FILM FORMING APPARATUS

Surface coating method for hydrophobic and superhydrophobic treatment in atmospheric pressure plasma

Method for continuous atmospheric pressure plasma treatment of workpieces

Method for forming thin film using radicals generated by plasma

VOLTAGE VARIABLE TYPE THINFILM DEPOSITION METHOD AND APPARATUS THEREOF

Machine for the plasma treatment of containers, comprising offset depressurization/pressurization circuits

Biodegradable resin container with a vacuum-evaporated film and method of forming a vacuum-evaporated film

Method for stable hydrophilicity enhancement of a substrate by atmospheric pressure plasma disposition

Thin film forming apparatus and thin film forming method

Thin film deposition via a spatially-coordinated and time-synchronized process

Hybrid chemical vapor deposition process combining hot-wire cvd and plasma-enhanced cvd

Method of manufacturing semiconductor device, method of processing substrate and substrate processing apparatus for forming thin film containing at least two different elements

Method for manufacturing thin film transistor

Substrate temperature control by using liquid controlled multizone substrate support

METHOD FOR TREATING PLASMA UNDER CONTINUOUS ATMOSPHERIC PRESSURE OF WORK PIECES, IN PARTICULAR, MATERIAL PLATES OR STRIPS

Ultra-high multiplex analytical systems and methods

Method for forming a semiconductor film including a film forming gas and decomposing gas while emitting a laser sheet

SYSTEM AND METHOD FOR APPLYING A CONFORMAL BARRIER COATING

Localized linear microwave source array pumping to control localized partial pressure in flat and 3 dimensional PECVD coatings

METHOD OF MAKING INORGANIC OR INORGANIC/ORGANIC HYBRID FILMS

Vapor deposition reactor using plasma and method for forming thin film using the same

Electrode for generating plasma and plasma generator

Activated gas injector, film deposition apparatus, and film deposition method

Surface preparation for thin film growth by enhanced nucleation

Method for manufacturing ultra-hydrophilic thin film coated metal product, and ultra-hydrophilic thin film coated metal product

Method of forming non-conformal layers

METHOD OF FORMING A GAS BARRIER LAYER, A GAS BARRIER LAYER FORMED BY THE METHOD, AND A GAS BARRIER FILM

Method for making a graded barrier coating

Atomic layer deposition methods

Combinatorial plasma enhanced deposition techniques

SELECTIVE COBALT DEPOSITION ON COPPER SURFACES

METHOD FOR MANUFACTURING ULTRA-HYDROPHILIC THIN FILM COATED METAL PRODUCT, AND ULTRA-HYDROPHILIC THIN FILM COATED METAL PRODUCT

Substrate processing apparatus

Hollow cathode device and method for using the device to control the uniformity of a plasma process

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

Methods and apparatus for changing area ratio in a plasma processing system

Plasma processing apparatus

Method for producing diamond-like carbon coatings using PECVD and diamondoid precursors on internal surfaces of a hollow component

Substrate processing method and substrate processing apparatus

Multi-Pass Vacuum Coating Systems

Method for preparing an oriented-porosity dielectric material on a substrate by means of electromagnetic and/or photonic treatment

Method and apparatus to help promote contact of gas with vaporized material

Quick-change precursor manifold for large-area CVD and PECVD

Formation of photoconductive and photovoltaic films

SYSTEM AND METHOD FOR MAKING A GRADED BARRIER COATING

SYSTEM AND METHOD FOR PLASMA ENHANCED THIN FILM DEPOSITION

Plasma enhanced chemical vapor deposition apparatus

Multi-region processing system and heads