Method and apparatus of manufacturing a semiconductor device by forming a film on a substrate

Selective inhibition in atomic layer deposition of silicon-containing films

THIN FILM DEPOSITION APPARATUS

System for manufacturing graphene on a substrate

ETCH ENHANCEMENT VIA CONTROLLED INTRODUCTION OF CHAMBER CONTAMINANTS

Deposition apparatus

Method for forming cobalt containing films

Method for making pet containers with enhanced silicon dioxide barrier coating

Plasma processing apparatus

Atomic Layer Deposition (ALD) Apparatus

Protective coating system for plastic substrate

CARBON-COATED MEMBER AND PRODUCTION METHOD THEREFOR

Method for depositing a multi-layer moisture barrier on electronic devices and electronic devices protected by a multi-layer moisture barrier

Photovoltaic device having layer with varying crystallinity

METHOD AND APPARATUS FOR CHARACTERIZING METAL OXIDE REDUCTION

Retainer, Method For Producing Same And Use Thereof

Gas supply delivery arrangement including a gas splitter for tunable gas flow control

ELECTROSPRAYING SYSTEMS AND ASSOCIATED METHODS

Systems and methods for internal surface conditioning assessment in plasma processing equipment

Method and apparatus for diagnosing status of parts in real time in plasma processing equipment

Coating system including alternating layers of amorphous silica and amorphous silicon nitride

Methods of forming a hard mask layer and of fabricating a semiconductor device using the same

Material deposition for high aspect ratio structures

Apparatus and method of manufacturing display apparatus

Feature fill with nucleation inhibition

High throughput vacuum deposition sources and system

DURABLE 3D GEOMETRY CONFORMAL ANTI-REFLECTION COATING

Guard aperture to control ion angular distribution in plasma processing

CURRENT SENSOR

Method to obtain SiC class of films of desired composition and film properties

Substrate processing method and substrate processing apparatus

Fabrication of nanofiber ribbons and sheets

Alkoxyaminosilane compounds and applications thereof

METHOD OF MAKING INORGANIC OR INORGANIC/ORGANIC HYBRID FILMS

RESIN PRODUCT AND METHOD OF PRODUCING THE SAME

TANTALUM- OR VANADIUM-CONTAINING FILM FORMING COMPOSITIONS AND VAPOR DEPOSITION OF TANTALUM- OR VANADIUM-CONTAINING FILMS

Protective film, reflective member, and method for producing protective film

Optical film including an infrared absorption layer

Method for producing graphene

Liquid-impregnated coatings and devices containing the same

Electroluminescent device including a plurality of sealing films

Enhancing electrical property and UV compatibility of ultrathin blok barrier film

Ball joint and method for manufacturing same

Alignment systems employing actuators providing relative displacement between lid assemblies of process chambers and substrates, and related methods

Amorphous silicon oxide, amorphous silicon oxynitride, and amorphous silicon nitride thin films and uses thereof

SEMICONDUCTOR MANUFACTURING APPARATUS, SEMICONDUCTOR MANUFACTURING SYSTEM, AND SEMICONDUCTOR MANUFACTURING METHOD

METHOD FOR MANUFACTURING A CARBON-CONTAINING PROTECTIVE FILM

Method of depositing thin film

Infrared surface light source generating device and method of manufacturing same

Method for void-free cobalt gap fill

Plasma uniformity control by arrays of unit cell plasmas

High power impulse magnetron sputtering process to achieve a high density high SP3 containing layer

Method and system for in situ formation of gas-phase compounds

INWARDLY HYDROPHILICALLY COATED MEDICINAL-TECHNICAL DEVICE

METHOD FOR MANUFACTURING GAS BARRIER FILM, GAS BARRIER FILM AND ELECTRONIC DEVICE

Differentially pumped reactive gas injector

Nozzle for uniform plasma processing

FILM FORMATION METHOD

PLASMA PROCESSING APPARATUS AND FOCUS RING

POST-CHAMBER ABATEMENT USING UPSTREAM PLASMA SOURCES

Gas barrier film, method for producing gas barrier film, and organic electroluminescent element

Methods and apparatuses for showerhead backside parasitic plasma suppression in a secondary purge enabled ALD system

Helmholtz coil assisted PECVD carbon source

Plasma processing apparatus

Plasmonic structure with enhanced bandwidth

Azimuthal mixer

Atomic Layer Deposition Method Using Source Precursor Transformed by Hydrogen Radical Exposure

Superhydrophobic coating material and method for manufacturing the same

Single platform, multiple cycle spacer deposition and etch

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

PLASMA CVD DEVICE AND PLASMA CVD METHOD

Plasma Source For Rotating Platen ALD Chambers

Placing bed structure, treating apparatus using the structure, and method for using the apparatus

Apparatus and method for reducing substrate sliding in process chambers

Apparatus and methods for wafer chucking on a susceptor for ALD

Plasma reactor with conductive member in reaction chamber for shielding substrate from undesirable irradiation

Polycrystalline diamond compact cutting elements and earth-boring tools including polycrystalline diamond cutting elements

PECVD process

Systems and methods for improving deposition rate uniformity and reducing defects in substrate processing systems

COATING METHOD

INTEGRATED PRE-CLEAN AND DEPOSITION OF LOW-DAMAGE LAYERS

DLC coating with run-in layer

COATED PACKAGING

Display apparatus and method of manufacturing the same

SYSTEMS AND METHODS FOR PRODUCING ENERGETIC NEUTRALS

PROCESS FOR OBTAINING A SUBSTRATE EQUIPPED WITH A COATING

Method for selectively depositing a layer on a three dimensional structure

Ultra-conformal carbon film deposition

High efficiency apparatus and method for depositing a layer on a three dimensional structure

Plasma source

BIS(ALKYLIMIDO)-BIS(ALKYLAMIDO)MOLYBDENUM MOLECULES FOR DEPOSITION OF MOLYBDENUM-CONTAINING FILMS

Multi-zone pedestal for plasma processing

Process and apparatus for producing profiles from metal

Chamber design for semiconductor processing

Methods and apparatus for nanofabrication using a pliable membrane mask

SUBSTRATE FOR ELECTRO-OPTICAL DEVICE, ELECTRO-OPTICAL DEVICE, ELECTRONIC EQUIPMENT, AND METHOD FOR MANUFACTURING SUBSTRATE FOR ELECTRO-OPTICAL DEVICE

ATMOSPHERIC PLASMA APPARATUS FOR SEMICONDUCTOR PROCESSING

Method for making microstructure on substrate

Si-containing film forming precursors and methods of using the same

Methods for the production of aligned carbon nanotubes and nanostructured material containing the same

Method of manufacturing semiconductor device and substrate processing apparatus

PLASMA PROCESSING APPARATUS

Method and System of Creating a Symmetrical FIB Deposition

Method of preparing corrosion resistant coatings

UV CURING PROCESS TO IMPROVE MECHANICAL STRENGTH AND THROUGHPUT ON LOW-K DIELECTRIC FILMS

Film forming method and film forming apparatus

Plasma process chambers employing distribution grids having focusing surfaces thereon enabling angled fluxes to reach a substrate, and related methods

Cobalt-containing compounds, their synthesis, and use in cobalt-containing film deposition

SILICON CONTAINING CONFINEMENT RING FOR PLASMA PROCESSING APPARATUS AND METHOD OF FORMING THEREOF

SLUDGE-REDUCTION STEAM GENERATOR AND METHOD FOR MANUFACTURING TUBE PLATE OF SLUDGE-REDUCTION STEAM GENERATOR

PROTECTIVE COATINGS FOR ELECTRONIC DEVICES AND ATOMIC LAYER DEPOSITION PROCESSES FOR FORMING THE PROTECTIVE COATINGS

METHOD AND APPARATUS FOR CLEANING CHEMICAL VAPOR DEPOSITION CHAMBER

Fluid ejection chip including hydrophilic and hydrophopic surfaces and methods of forming the same

Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium

Coating apparatus for resin container, and resin container manufacturing system

Hollow cathode discharge (HCD) suppressing capacitively coupled plasma electrode and gas distribution faceplate

DEVICE FOR PROVIDING A FLOW OF PLASMA

Multi-layered ventilation apparatus and methods of manufacturing thereof

COATING METHOD FOR DECREASING DAMAGE OF BARRIER LAYER

Method for producing a tribologically distressed laminate, a laminate and use of an organometallic compound for producing a functional layer of the laminate

METHOD FOR PRODUCING TRANSPARENT GAS BARRIER FILM, APPARATUS FOR PRODUCING TRANSPARENT GAS BARRIER FILM, AND ORGANIC ELECTROLUMINESCENCE DEVICE

Method for reducing particle generation at bevel portion of substrate

Plasma processing apparatus

IGNITION PROCESS AND DEVICE FOR PAIRS OF DBD ELECTRODES

Surface Treatment Apparatus

FIREPROOF POLYAMIDE ARTICLE INCLUDING A COATING FORMED BY PLASMA TREATMENT

Timepiece escapement mechanism without lubrication

SUBSTRATE PROCESSING APPARATUS

Implant region definition

Perovskite material layer processing

Plasma source

SYSTEM AND METHOD FOR TREATING SUBSTRATE

Film forming method and film forming apparatus

Plasma erosion resistant thin film coating for high temperature application

Substrate processing apparatus

DEPOSITION DEVICE WITH AUXILIARY INJECTORS FOR INJECTING NUCLEOPHILE GAS AND SEPARATION GAS

Cooking device comprising a cooking surface that is easy to clean and resistant to scratching

Substrate holder and a device and a method for treating substrates

Method for supplying source gas for producing polycrystalline silicon and polycrystalline silicon

Coating inspection method

Substrate Processing Apparatus and Substrate Processing Method

Laminate, gas barrier film, and manufacturing method therefor

APPARATUS AND METHODS FOR PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION OF POLYMER COATINGS

Gas barrier film and method for manufacturing gas barrier film

Inorganic paint composition and method for forming inorganic paint film by using the same

Method and an apparatus for depositing a layer onto a workpiece using plasma

LOW-K FILMS WITH ENHANCED CROSSLINKING BY UV CURING

Plasma atomic layer deposition

Substrate Tray and Substrate Processing Apparatus Including Same

Generation of compact alumina passivation layers on aluminum plasma equipment components

Fatigue-resistant coating for metal forming members

Cyclic Spike Anneal Chemical Exposure For Low Thermal Budget Processing

Conditioned semiconductor system parts

Substrate Processing Apparatus

Method of growing carbon nanotube using reactor

Oxide semiconductor depositing apparatus and method of manufacturing oxide semiconductor using the same

Methods for plasma processing

Method of forming thin film using a heterostructured nickel compound

Vacuum trap

Diamond-like carbon coating on chain guides and tensioning arms for internal combustion engines

Substrate processing apparatus

Method of Forming Titanium Carbonitride Film and Film Formation Apparatus Therefor

Coating system including diffusion barrier layer including iridium and oxide layer

CERAMIC COMPONENT HAVING PROTECTIVE LAYER AND METHOD OF PRODUCTION THEREOF

Cost-efficient high power PECVD deposition apparatus for solar cells

Method for the plasma coating of a substrate, in particular a press platen

Electrically- and chemically-active adlayers for plasma electrodes

IN-SITU CARBON AND OXIDE DOPING OF ATOMIC LAYER DEPOSITION SILICON NITRIDE FILMS

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM

PLASMA FORELINE THERMAL REACTOR SYSTEM

Capped ALD films for doping fin-shaped channel regions of 3-D IC transistors

METHOD FOR PRODUCING GAS BARRIER FILM, GAS BARRIER FILM, AND ELECTRONIC DEVICE

Edge hump reduction faceplate by plasma modulation

Plasma assisted atomic layer deposition titanium oxide for conformal encapsulation and gapfill applications

Plasma Source

Super-hydrophobic thin film and method for preparing the same

Compact substrate processing tool with multi-station processing and pre-processing and/or post-processing stations

ABRASION RESISTANT, HYDROPHOBIC AND OLEOPHOBIC COATED FILM AND METHOD OF PRODUCTION THEREOF

High electric field fabrication of oriented nanostructures

Plasma source for a plasma CVD apparatus and a manufacturing method of an article using the plasma source

Plasma processing device and operation method

Substrate processing device and substrate processing method

Forming a low-k dielectric layer with reduced dielectric constant and strengthened mechanical properties

TRANSCEIVING SURFACE-TREATED METALLIC MEMBER WITHIN TRANSMISSION PATH OF RADAR, AND METHOD OF MANUFACTURING THE SAME

PECVD apparatus and process

SUBSTRATE TREATMENT APPARATUS AND SUBSTRATE TREATMENT METHOD

Apparatus and method of forming an indium gallium zinc oxide layer

Method of manufacturing semiconductor device by forming a film on a substrate

CHAMBER COMPONENT WITH PROTECTIVE COATING SUITABLE FOR PROTECTION AGAINST FLOURINE PLASMA

Inline DPS chamber hardware are design to enable axis symmetry for improved flow conductance and uniformity

Diffusion resistant electrostatic clamp

Method of manufacturing semiconductor device by forming a film on a substrate

Method of manufacturing semiconductor device by forming a film on a substrate

Method of manufacturing semiconductor device by forming a film on a substrate

Method of manufacturing a semiconductor device by forming a film on a substrate

Method of manufacturing semiconductor device and substrate processing apparatus

Showerhead-cooler system of a semiconductor-processing chamber for semiconductor wafers of large area

Gas confiner assembly for eliminating shadow frame

Solar cell production method, and solar cell produced by same production method

Method of manufacturing a semiconductor device by forming a film on a substrate

Method of manufacturing a semiconductor device by forming a film on a substrate

Metal capping process and processing platform thereof

Mask passivation using plasma

Method for manufacturing semiconductor device, method for processing substrate and substrate processing apparatus

SUBSTRATE PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS AND PLASMA-UNIFORMITY CONTROL METHOD

THIN FILM COATING ON UNDERCARRIAGE TRACK PINS

Wrinkled surfaces with tunable hierarchy and methods for the preparation thereof

METHOD FOR FORMING SILICON NITRIDE FILM, AND APPARATUS FOR FORMING SILICON NITRIDE FILM

VAPOR DEPOSITION APPARATUS, VAPOR DEPOSITION METHOD AND METHOD FOR MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY APPARATUS

Vapor deposition apparatus and method of manufacturing organic light-emitting display apparatus

SYSTEM AND METHOD FOR FORMING GAN-BASED DEVICE

METHODS AND COMPOSITIONS FOR SEPARATING OR ENRICHING BLOOD CELLS

FILM DEPOSITION APPARATUS, FILM DEPOSITION METHOD, AND COMPUTER-READABLE STORAGE MEDIUM

Fluorine Passivation During Deposition of Dielectrics for Superconducting Electronics

Plasma monitoring method and plasma monitoring system

Method for manufacturing board device

Stents, packaging, and substances used with stents

Topographical structure and method of producing it

Systems and methods for forming semiconductor devices

Plasma-assisted chemical gas separation method having increased plasma density and device for implementing the method

Plasma processing apparatus and plasma processing method

STRAIN GAUGE ARRANGEMENT

Substrate treating apparatus and blocker plate assembly

Gradient thin films

APPARATUS AND METHOD FOR ATOMIC LAYER DEPOSITION

Solar cell emitter region fabrication using self-aligned implant and cap

Plasma processing apparatus

Plasma processing apparatus

METHOD AND DEVICE FOR CONTROLLING PATTERN AND STRUCTURE FORMATION BY AN ELECTRIC FIELD

PROCESS MODULE

PLASMA ENHANCED VAPOR PHASE DEPOSITION

METHOD AND APPARATUS FOR FORMING ORGANIC MONOLAYER

Method for controlling ion energy distribution

Combinatorial Plasma Enhanced Deposition Techniques

SUBSTRATE PROCESSING APPARATUS

Apparatus and method for producing group III nitride semiconductor device and method for producing semiconductor wafer

SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD

Device and method for manufacturing nanostructures consisting of carbon

Methods for preferential growth of cobalt within substrate features

Coil Arrangement with Metal Filling

Plasma processing device and plasma processing method

RESIN CONTAINER COATING DEVICE

LIQUID DISCHARGE HEAD

Process for Applying a Friction Reducing Coating

Method for forming conformal carbon films, structures conformal carbon film, and system of forming same

SYSTEMS TO IMPROVE FRONT-SIDE PROCESS UNIFORMITY BY BACK-SIDE METALLIZATION

Substrate processing apparatus and substrate processing method

METHOD OF DEPOSITING THIN FILM

Radical reactor with inverted orientation

METHODS AND APPARATUS FOR FORMING FLOWABLE DIELECTRIC FILMS HAVING LOW POROSITY

Treatment for flowable dielectric deposition on substrate surfaces

PLASMA PROCESSING APPARATUS AND METHOD OF PERFORMING PLASMA PROCESS

DEPOSITION APPARATUS

Filament temperature derivation in hotwire semiconductor process

Substrate treating apparatus and method

Preparing method of reduced graphene oxide film using a chemical reduction method and a pressure-assisted thermal reduction method, reduced graphene oxide film prepared by the same, and graphene electrode including the reduced graphene oxide film

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

Rotating vacuum chamber coupling assembly

Hollow cathode system, device and method for the plasma-assisted treatment of substrates

VAPOR DEPOSITION APPARATUS

Method and apparatus of forming silicon nitride film

Carbon based coatings and methods of producing the same

LOW-COST PLASMA REACTOR

Thin film forming method

Polysilicon manufacturing device

INSPECTION METHODS FOR PECVD COATINGS

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM

CHIROPTICAL SWITCHES

Surface treatment to improve CCTBA based CVD co nucleation on dielectric substrate

In situ system and method of manufacturing nanoparticles having core-shell structure

COATING OF CONTAINERS USING PLASMA NOZZLES

Coating System Using Spray Nozzle

Method for producing an electronic component and electronic component

TITANIUM BIS DIAZADIENYL PRECURSOR FOR VAPOR DEPOSITION OF TITANIUM OXIDE FILMS

Deposition System And Method Of Forming A Metalloid-Containing Material Therewith

Fixed and portable coating apparatuses and methods

Methods for shielding electronic components from moisture

Method for the deposition of a ruthenium containing film using arene diazadiene ruthenium(0) precursors

Process for making high multiplex arrays

Plasma processing apparatus

GAS BARRIER FILM AND MANUFACTURING METHOD OF GAS BARRIER FILM

Method of depositing a ruthenium metal thin film or ruthenium oxide thin film

Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus, and program

Method and material for protecting magnetic information storage media

Laminated film, organic electroluminescence device, photoelectric converter, and liquid crystal display

Self-sustained non-ambipolar direct current (DC) plasma at low power

Apparatus and method for treating a substrate

POLYCRYSTALLINE SILICON ROD MANUFACTURING METHOD

Method and a device for depositing a film of material or otherwise processing or inspecting, a substrate as it passes through a vacuum environment guided by a plurality of opposing and balanced air bearing lands and sealed by differentially pumped grooves and sealing lands in a non-contact manner

FLEXIBLE COMPOSITE, PRODUCTION THEREOF AND USE THEREOF

VAPOR DEPOSITION APPARATUS

Apparatus for treating a gas stream

SCREEN PRINTING FILM AND SURFACE MODIFICATION METHOD OF THE SAME

REMOTE FLUORINATION OF FIBROUS FILTER WEBS

MAGNETIC RECORDING MEDIUM AND METHOD FOR PRODUCING PROTECTIVE FILM THEREOF

Method for manufacturing semiconductor device for forming metal element-containing layer on insulating layer in which concave portion is formed, semiconductor device including insulating layer in which concave portion is formed, and semiconductor layer on insulating layer in which concave portion is formed

POLYCRYSTALLINE SILICON ROD MANUFACTURING METHOD

PECVD apparatus for in-situ deposition of film stacks

Methods and apparatus for depositing and/or etching material on a substrate