SUBSTRATE PROCESSING METHOD

Mold Master Fabrication for Injection Molding Using Physical Vapor Deposition, Electroforming, and Die-Sink Discharge Machining

DC BIAS DUAL CROSS FEED MANIFOLD AND A REACTOR USING THE SAME

DECORATIVELY COATED POLYMER SUBSTRATES AND PROCESS FOR OBTAINING THE SAME

TRANSPARENT OPTICAL ELEMENT FOR A VEHICLE

PLASMA-CREATED BARRIERS FOR PACKAGING

PROCESS AND DEVICE FOR DIAMOND SYNTHESIS BY CVD

EUV DOSE REDUCING LAYERS, RELATED STRUCTURES, AND METHODS AND SYSTEMS FOR THEIR MANUFACTURE

METHOD OF PRODUCING A WATER REPELLENT COATING ONTO TEXTILE SUBSTRATES USING A PLASMA GENERATED BY HOLLOW CATHODES

FILM FORMATION METHOD AND FILM FORMATION APPARATUS

Method of coating onto fabric substrates by means of plasma

DEPOSITION METHOD AND DEPOSITION APPARATUS

PULSED PLASMA (DC/RF) DEPOSITION OF HIGH QUALITY C FILMS FOR PATTERNING

Antimicrobial and/or antiviral polymer surfaces and methods for the preparation thereof

Method for plasma deposition of anti-fog coatings

Wafer support and thin-film deposition apparatus using the same

Apparatus and methods for controlling ion energy distribution

METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE

MONOPOLE ANTENNA ARRAY SOURCE FOR SEMICONDUCTOR PROCESS EQUIPMENT

BATCH TYPE SUBSTRATE PROCESSING APPARATUS

METHOD FOR COATING METAL

MATERIAL DEPOSITION SYSTEMS, AND RELATED METHODS AND MICROELECTRONIC DEVICES

Artificial blood vessel

Substrate processing apparatus, material layer deposition apparatus, and atmospheric pressure chemical vapor deposition apparatus

Process and device for diamond synthesis by CVD

EDGE UNIFORMITY TUNABILITY ON BIPOLAR ELECTROSTATIC CHUCK

Multi-function equipment implementing fabrication of high-k dielectric layer

Pulsed plasma (DC/RF) deposition of high quality C films for patterning

High voltage, low pressure plasma enhanced atomic layer deposition

Wafer chuck and processing arrangement

Processing method and plasma processing apparatus

Method of forming conformal silicon carbide film by cyclic CVD

Systems and methods for coating surfaces

LINEAR PLASMA SOURCE WITH SEGMENTED HOLLOW CATHODE

Method of site-specific deposition onto a free-standing carbon article

Method of forming nitride film

METHOD FOR CONTROLLING THE DEPOSITION RATE OF THIN FILMS IN A VACUUM MULTI-NOZZLE PLASMA SYSTEM AND A DEVICE FOR PERFORMING OF THE METHOD

Post-discharge plasma coating device for wired substrates

PLASMA DEPOSITION METHOD

High-k dielectric layer, fabricating method thereof and multi-function equipment implementing such fabricating method

PLASMA POWER TOOL MATCHING USING DC VOLTAGE FEEDBACK

Monopole antenna array source with gas supply or grid filter for semiconductor process equipment

Monopole antenna array source for semiconductor process equipment

Electrode assembly

GAS PHASE PARTICLE REDUCTION IN PECVD CHAMBER

SHOWER PLATE, SUBSTRATE PROCESSING APPARATUS AND METHOD FOR PROCESSING SUBSTRATE

Method for producing a thin film, method for producing a magnetic disk, method for producing a nanoimprint mold, and apparatus for producing a thin film

Wafer chuck and processing arrangement

Method to improve film quality for PVD carbon with reactive gas and bias power

Plasma device

Process for coating of articles

Substrate treatment apparatus

METHOD OF GROWING NANOSTRUCTURES

Cutting tool

Methods for processing substrates using small plasma chambers

Dual-channel showerhead with improved profile

Dual-channel showerhead with improved profile

REMOTE PLASMA GENERATOR OF REMOTE PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION (PECVD) SYSTEM

TUNABLE GROUND PLANES IN PLASMA CHAMBERS

Method for manufacturing electrode for hydrogen production using tungsten carbide nanoflake and electrode for hydrogen production manufactured thereby

COATINGS FORMED FROM THE DEPOSITION OF PLASMA-ACTIVATED ADDUCTS

Gas jetting apparatus for film formation apparatus

Plasma processing apparatus

Electric discharge generator and power supply device of electric discharge generator

Particle generation suppresor by DC bias modulation

Plasma CVD device and method of manufacturing magnetic recording medium

Apparatus, device and process for coating of articles

Method for processing photoresist materials and structures

Semiconductor processing with DC assisted RF power for improved control

Compositions of matter and methods of producing a carbonized cloth for growth of graphene nano-petals

Laminate film, organic electroluminescence device, photoelectric conversion device, and liquid crystal display

Tunable ground planes in plasma chambers

Systems, Devices, and/or Methods for Managing Coatings

Method for generating plasma uniformly on dielectric material

SYSTEMS AND METHODS FOR PRODUCING ENERGETIC NEUTRALS

Plasma processing apparatus and cleaning method

Defect control in RF plasma substrate processing systems using DC bias voltage during movement of substrates

Defect control and stability of DC bias in RF plasma-based substrate processing systems using molecular reactive purge gas

IN-LINE PLASMA CVD APPARATUS

Resin container coating device

Methods for plasma processing

Method for forming carbon nanotubes and carbon nanotube film forming apparatus

PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION DEVICE

PLASMA PROCESSING APPARATUS AND PLASMA-UNIFORMITY CONTROL METHOD

Particle generation suppressor by DC bias modulation

BARRIER-FILM FORMING APPARATUS, BARRIER-FILM FORMING METHOD, AND BARRIER-FILM COATED CONTAINER

Method and Apparatus of Growing Metal-free and Low Stress Thick Film of Diamond-like Carbon

Plasma treatment and plasma enhanced chemical vapor deposition onto temperature sensitive biological materials

System and methods for processing a substrate

DEVICE FOR DEPOSITING CARBON FILM AND METHOD FOR DEPOSITING CARBON FILM

Method of cleaning the filament and reactor's interior in FACVD

Plasma source and methods for depositing thin film coatings using plasma enhanced chemical vapor deposition

Plasma source and methods for depositing thin film coatings using plasma enhanced chemical vapor deposition

Small Feature Size Fabrication Using a Shadow Mask Deposition Process

BLANK FOR NANOIMPRINT MOLD, NANOIMPRINT MOLD, AND METHODS FOR PRODUCING SAID BLANK AND SAID NANOIMPRINT MOLD

Apparatus and method for dielectric deposition

Plasma processing apparatus

Multiple anode plasma for CVD in a hollow article

Plasma source and methods for depositing thin film coatings using plasma enhanced chemical vapor deposition

Methods for plasma processing

Plasma generator, manufacturing method of rotating electrode for plasma generator, method for performing plasma treatment of substrate, and method for forming thin film having mixed structure by using plasma

Plasma source and methods for depositing thin film coatings using plasma enhanced chemical vapor deposition

Methods for plasma processing

PLASMA GENERATOR AND CVD DEVICE

Small plasma chamber systems and methods

Plasma generation apparatus, CVD apparatus, and plasma-treated particle generation apparatus

Method for depositing layers on a glass substrate by means of low-pressure PECVD

Semiconductor processing with DC assisted RF power for improved control

PLASMA PROCESSING APPARATUS

Device and method for generating a plasma discharge for patterning the surface of a substrate

Plasma processing apparatus

Method for plasma-treating workpieces

Method for forming carbon nanotubes and carbon nanotube film forming apparatus

Method of manufacture of multilayer film

Plasma treatment and plasma enhanced chemical vapor deposition onto temperature sensitive biological materials

Electrode having gas discharge function and plasma processing apparatus

Apparatus and method for dielectric deposition

TUNABLE GROUND PLANES IN PLASMA CHAMBERS

Oriented amorphous carbon film and process for forming the same

Plasma CVD apparatus

Methods for depositing metal in high aspect ratio features

Method and apparatus for forming film

Method of producing coated member

Substrate coating and method of forming the same

METHOD OF CLEANING THE FILAMENT AND REACTOR'S INTERIOR IN FACVD

Deposition method for passivation of silicon wafers

Chemical vapor deposition for an interior of a hollow article with high aspect ratio

Small plasma chamber systems and methods

COATING METHOD AND DEVICE USING A PLASMA-ENHANCED CHEMICAL REACTION

Film deposition method

METHOD AND APPARATUS FOR DEPOSITION ON LARGE AREA SUBSTRATES HAVING REDUCED GAS USAGE

PROCESS AND APPARATUS FOR PRODUCING CARBONACEOUS FILM

Methods for plasma processing

Apparatus for Plasma Processing

Plasma generating units for processing a substrate

Plasma Reactor, and Method for the Production of Monocrystalline Diamond Layers

Plasma processing apparatus

Direct-current plasma CVD apparatus and method for producing diamond using the same

Methods and apparatus for forming diamond-like coatings

Method of forming surface coatings on cutting elements

Barrier-film forming apparatus, barrier-film forming method, and barrier-film coated container

Method of forming carbon film, method of manufacturing magnetic recording medium, and apparatus for forming carbon film

Plasma source and methods for depositing thin film coatings using plasma enhanced chemical vapor deposition

Synthesis of Carbon Nanotubes by Selectively Heating Catalyst

Method of coating inner and outer surfaces of pipes for thermal solar and other applications

METHOD FOR MANUFACTURING CARBON FILM

Method for manufacturing semiconductor device and substrate processing apparatus

Method of controlling plasma distribution uniformity by time-weighted superposition of different solenoid fields

Method and apparatus for mass-producing DLC films

TUNABLE GROUND PLANES IN PLASMA CHAMBERS

Deposition and selective removal of conducting helplayer for nanostructure processing

Plasma processing apparatus

Method for producing diamond-like carbon coatings using PECVD and diamondoid precursors on internal surfaces of a hollow component

Deposition apparatus and deposition method

System, method and apparatus for filament and support used in plasma-enhanced chemical vapor deposition for reducing carbon voids on media disks in disk drives

Deposited Film Forming Method, Deposited Film Forming Device, Deposited Film, and Photosensitive Member Provided with the Deposited Film

HYBRID PHOTOVOLTAICALLY ACTIVE LAYER AND METHOD FOR FORMING SUCH A LAYER

Vacuum treatment installation and vacuum treatment method

Method for DC plasma assisted chemical vapor deposition in the absence of a positive column

Plasma CVD apparatus and film deposition method

Synthesis of carbon nanotubes by selectively heating catalyst

Plasma processing apparatus

Method and system for coating internal surfaces using reverse-flow cycling

Method and system for coating sections of internal surfaces

Method and arrangement for generating an atmospheric pressure glow discharge plasma (APG)

Method for producing coated workpieces, uses and installation for the method

Plasma processing apparatus

Method and system for coating internal surfaces of prefabricated process piping in the field

Plasma generating apparatus and method of forming alignment film of liquid crystal display using the same

Dielectric barrier discharge method for depositing film on substrates

Plasma polymerization enhancement of surface of metal for use in refrigerating and air conditioning