120286 ⎘
Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using a combination of discharges covered by two or more of groups -
PROCESS AND DEVICE FOR DIAMOND SYNTHESIS BY CVD
#2METHODS AND ASSEMBLIES FOR DEPOSITING MATERIAL IN A GAP
#3DEPOSITING A CARBON HARDMASK BY HIGH POWER PULSED LOW FREQUENCY RF
#4ALKOXYSILACYCLIC OR ACYLOXYSILACYCLIC COMPOUNDS AND METHODS FOR DEPOSITING FILMS USING SAME
#5DEPOSITING A CARBON HARDMASK BY HIGH POWER PULSED LOW FREQUENCY RF
#6METHODS AND SYSTEMS FOR DEPOSITING A LAYER
#7PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
#8ETCHING APPARATUS
#9DLC PREPARATION APPARATUS AND PREPARATION METHOD
#10PROCESSING TOOL CAPABLE FOR FORMING CARBON LAYERS ON SUBSTRATES
#11Methods for forming a layer comprising a condensing and a curing step
#12Depositing a carbon hardmask by high power pulsed low frequency RF
#13SUBSTRATE PROCESSING TOOL CAPABLE OF MODULATING ONE OR MORE PLASMA TEMPORALLY AND/OR SPATIALLY
#14Methods for depositing dielectric material
#15Coating apparatus and coating method
#16Process and device for diamond synthesis by CVD
#17Alkoxysilacyclic or acyloxysilacyclic compounds and methods for depositing films using same
#18Substrate processing system with tandem source activation for CVD
#19Methods for depositing dielectric material
#20ETCHING APPARATUS
#21Method for manufacturing semiconductor device
#22Plasma processing apparatus
#23Apparatus and method for depositing a coating on a substrate at atmospheric pressure
#24Method for forming metal oxide layer, and plasma-enhanced chemical vapor deposition device
#25Electrode assembly
#26APPLYING EQUALIZED PLASMA COUPLING DESIGN FOR MURA FREE SUSCEPTOR
#27A METHOD AND A DEVICE FOR COATING AN ENDOPROSTHESIS HAVING A BASE BODY
#28Treating Particles
#29Tandem source activation for CVD of films
#30Plasma processing apparatus
#31DIAMOND PRODUCING METHOD AND DC PLASMA ENHANCED CVD APPARATUS
#32Hybrid layers for use in coatings on electronic devices or other articles
#33Energetic negative ion impact ionization plasma
#34Plasma processing apparatus with shower plate having protrusion for suppressing film formation in gas holes of shower plate
#35Tandem source activation for CVD of films
#36Apparatus and method for depositing a coating on a substrate at atmospheric pressure
#37RPS assisted RF plasma source for semiconductor processing
#38Plasma-assisted chemical gas separation method having increased plasma density and device for implementing the method
#39Treating particles
#40Method for forming Ti-containing film by PEALD using TDMAT or TDEAT
#41Microwave plasma reactors
#42Structure including thin primer film and method of producing said structure
#43Systems and methods for plasma doping microfeature workpieces
#44Hybrid layers for use in coatings on electronic devices or other articles
#45Diamond producing method and DC plasma enhanced CVD apparatus
#46SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
#47PLASMA PROCESSING METHOD
#48Projected plasma source
#49DUAL PLASMA SOURCE, LAMP HEATED PLASMA CHAMBER
#50Method and apparatus for multizone plasma generation
#51PLASMA TREATMENT APPARATUS
#52SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME
#53Deposition apparatus and methods to reduce deposition asymmetry
#54Hybrid layers for use in coatings on electronic devices or other articles
#55Film deposition method
#56DIAMOND-LIKE CARBON FILM FORMING APPARATUS AND METHOD OF FORMING DIAMOND-LIKE CARBON FILM
#57Plasma Reactor, and Method for the Production of Monocrystalline Diamond Layers
#58Plasma deposition of a thin film
#59PLASMA AND ELECTRON BEAM ETCHING DEVICE AND METHOD
#60Plasma discharge treatment apparatus, and method of manufacturing gas barrier film
#61THIN-FILM MULTILAYER STRUCTURE, COMPONENT COMPRISING SAID STRUCTURE AND ITS METHOD OF DEPOSITION
#62SYSTEM AND METHOD FOR CONTROL OF ELECTROMAGNETIC RADIATION IN PECVD DISCHARGE PROCESSES
#63Methods and apparatus for making integrated-circuit wiring from copper, silver, gold, and other metals
#64Plasma and electron beam etching device and method
#65Plasma processing apparatus
#66Systems and methods for plasma doping microfeature workpieces
#67High throughput deposition apparatus with magnetic support
#68Apparatus and system for manufacturing a semiconductor
#69Chemical vapor deposition plasma process using plural ion shower grids
#70Chemical vapor deposition plasma process using an ion shower grid
#71Apparatus and method for applying diamond-like carbon coatings
#72Method for depositing inorganic/organic films
#73Method of manufacturing water-repelling film
#74Apparatus for processing a substrate using plasma