121233 ⎘
Single-crystal growth by pulling from a melt, e.g. Czochralski method Heating of the melt or the crystallised materials
Heater assembly for crystal growth apparatus
#302Feed tool for shielding a portion of a crystal puller
#303Method and apparatus for producing single crystals composed of semiconductor material
#304Resistance heated sapphire single crystal ingot grower, method of manufacturing resistance heated sapphire single crystal ingot, sapphire single crystal ingot, and sapphire wafer
#305METHODS FOR PRODUCING SINGLE CRYSTAL SILICON INGOTS WITH REDUCED INCIDENCE OF DISLOCATIONS
#306INSULATION DEVICE OF SINGLE CRYSTAL GROWTH DEVICE AND SINGLE CRYSTAL GROWTH DEVICE INCLUDING THE SAME
#307Method and apparatus for the production of crystalline silicon substrates
#308METHOD FOR FORMING BULK CRYSTALS, IN PARTICULAR MONOCRYSTALS OF FLUORIDES DOPED WITH RARE-EARTH IONS
#309Single crystal silicon pulling device, method for preventing contamination of silicon melt, and device for preventing contamination of silicon melt
#310Crystal manufacturing
#311METHODS FOR CONTROLLING MELT TEMPERATURE IN A CZOCHRALSKI GROWER
#312Single crystal manufacturing apparatus
#313Single-crystal manufacturing apparatus and single-crystal manufacturing method
#314SAPPHIRE INGOT GROWER
#315Method of production of sic single crystal
#316Method and apparatus for producing semiconductor crystal, and semiconductor crystal
#317SINGLE CRYSTAL COOLING APPARATUS AND SINGLE CRYSTAL GROWER INCLUDING THE SAME
#318METHOD AND APPARATUS FOR MANUFACTURING SILICON SUBSTRATE WITH EXCELLENT SURFACE QUALITY USING INERT GAS BLOWING
#319Methods for casting by a float process and associated apparatuses
#320Single-crystal manufacturing method
#321Upper heater, single crystal production apparatus, and method for producing single crystal
#322METHOD OF MANUFACTURING SILICON SINGLE CRYSTAL
#323SINGLE CRYSTAL COOLER AND SINGLE CRYSTAL GROWER INCLUDING THE SAME
#324Method for pulling a single crystal composed of silicon from a melt contained in a crucible, and single crystal produced thereby
#325Method for producing semiconductor wafers composed of silicon having a diameter of at least 450 mm, and semiconductor wafer composed of silicon having a diameter of 450 mm
#326Apparatus and Method for Continuous Casting of Monocrystalline Silicon Ribbon
#327Silicon wafer and method for producing the same
#328Controlling the Temperature Profile in a Sheet Wafer
#329Processes for production of silicon ingot, silicon wafer and epitaxial wafer, and silicon ingot
#330Silicon single crystal pull-up apparatus having a sliding sample tube
#331METHOD AND APPARATUS FOR MAKING A HIGHLY UNIFORM LOW-STRESS SINGLE CRYSTAL BY DRAWING FROM A MELT AND USES OF SAID CRYSTAL
#332Floating sheet production apparatus and method
#333Method for measuring liquid level in single crystal pulling apparatus employing CZ method
#334Single-crystal manufacturing apparatus and single-crystal manufacturing method
#335Single-crystal manufacturing apparatus
#336Single-crystal manufacturing apparatus and method for manufacturing single crystal
#337(110) DISLOCATION-FREE MONOCRYSTALLINE SILICON AND ITS PREPARATION AND THE GRAPHITE HEAT SYSTEM USED
#338Method and an apparatus for growing a silicon single crystal from a melt
#339Apparatus for producing single crystal
#340Position measuring device and position measuring method in semiconductor single crystal manufacturing device
#341System for continuous growing of monocrystalline silicon
#342SILICON SINGLE CRYSTAL AND METHOD FOR GROWING THEREOF, AND SILICON WAFER AND METHOD FOR MANUFACTURING THEREOF
#343Crystal grower with integrated litz coil
#344Deposition of high-purity silicon via high-surface area gas-solid interfaces and recovery via liquid phase
#345Method for measuring distance between lower end surface of heat insulating member and surface of raw material melt and method for controlling thereof
#346Method and Apparatus of Growing Silicon Single Crystal and Silicon Wafer Fabricated Thereby
#347Method and apparatus for the production of crystalline silicon substrates
#348Method of producing single crystal
#349Controlling transport of gas borne contaminants across a ribbon surface
#350Single crystal manufacturing apparatus and method
#351High Quality Single Crystal and Method of Growing the Same
#352Single crystal pulling apparatus
#353Apparatus and method for producing single crystals
#354Floating sheet production apparatus and method
#355Single crystal silicon pulling apparatus, method for preventing contamination of silicon melt, and device for preventing contamination of silicon melt
#356Method and apparatus for making a highly uniform low-stress single crystal by drawing from a melt and uses of said crystal
#357Supporting table having heaters inside crystal-growing furnace
#358Apparatus for pulling single crystal by CZ method
#359Single crystal semiconductor manufacturing apparatus and manufacturing method
#360Method and apparatus for manufacturing an ultra low defect semiconductor single crystalline ingot
#361Device and process for growing Ga-doped single silicon crystals suitable for making solar cells
#362Apparatus for pulling single crystal by CZ method
#363Apparatus for pulling single crystal by CZ method
#364Removable thermal control for ribbon crystal pulling furnaces
#365Ribbon crystal pulling furnace afterheater with at least one opening
#366Method and apparatus for growing a ribbon crystal with localized cooling
#367Method of growing single crystals from melt
#368Cooling system for chamber of ingot growth arrangement
#369Single crystal pulling apparatus
#370Method for producing single crystal and a method for producing annealed wafer
#371System for continuous growing of monocrystalline silicon
#372Heat shield member and single crystal pulling device
#373Apparatus and method for manufacturing semiconductor single crystal
#374Semiconductor single crystal production device and producing method therefor
#375Annular structure having excellent heat insulating and heat releasing properties
#376Silicon single crystal pulling device and graphite member used therein
#377Method and apparatus for the production of crystalline silicon substrates
#378C-plane sapphire method and apparatus
#379Crystal manufacturing
#380METHOD AND APPARATUS FOR MANUFACTURING A TUBE
#381Method and apparatus of growing silicon single crystal and silicon wafer fabricated thereby
#382Method and Apparatus of Growing Silicon Single Crystal and Silicon Wafer Fabricated Thereby
#383Apparatus for growing high quality silicon single crystal ingot and growing method using the same
#384An Apparatus for Producing a Single Crystal
#385Method for melting semiconductor wafer raw material and crystal growing method for semiconductor wafer
#386Silicon material with controlled agglomerated point defects and oxygen clusters induced by the lateral surface
#387Controlling agglomerated point defect and oxygen cluster formation induced by the lateral surface of a silicon single crystal during CZ growth
#388Apparatus for pulling single crystal by CZ method
#389Method for manufacturing a silicon single crystal
#390Semiconductor single crystal manufacturing apparatus and graphite crucible
#391A method for producing a single crystal and an apparatus for producing a single crystal
#392Single crystal semiconductor manufacturing apparatus and method
#393Method for producing high quality silicon single crystal ingot and silicon single crystal wafer made thereby
#394Silicon single crystal pulling method
#395Apparatus for preparation of silicon crystals with reduced metal content
#396Single crystal semiconductor manufacturing apparatus and manufacturing method, and single crystal ingot
#397Apparatus for growing high quality silicon single crystal ingot and growing method using the same
#398Method and apparatus for making a highly uniform low-stress single crystal by drawing from a melt and uses of said crystal
#399Method and device for the production of a silicon single crystal, silicon single crystal, and silicon semiconductor wafers with determined defect distributions
#400Method for growing silicon single crystal and method for manufacturing silicon wafer
#401Method for producing silicon single crystals and silicon single crystal produced thereby
#402Silicon single crystal, and process for producing it
#403Process for producing a silicon single crystal with controlled carbon content
#404Method and apparatus of growing silicon single crystal and silicon wafer fabricated thereby
#405Heat shielding member of silicon single crystal pulling system
#406High quality single crystal and method of growing the same
#407Heat shield and crystal growth equipment
#408Silicon wafer, its manufacturing method, and its manufacturing apparatus
#409Melter assembly and method for charging a crystal forming apparatus with molten source material
#410Apparatus for pulling single crystal by CZ method
#411Single crystal, single crystal wafer, epitaxial wafer, and method of growing single crystal
#412Apparatus for pulling a single crystal
#413Silicon single crystal wafer, an epitaxial wafer and a method for producing a silicon single crystal
#414Apparatus and method for producing single crystal
#415Graphite heater for producing single crystal, apparatus for producing single crystal, and method for producing single crystal
#416Low defect density silicon
#417Crystal grower with integrated Litz coil
#418Device for pulling monocrystals
#419Single-crystal silicon ingot and wafer having homogeneous vacancy defects, and method and apparatus for making same
#420Resistor made from carbonaceous material
#421Thermal shield
#422System for continuous growing of monocrystalline silicon
#423Crystal growing equipment
#424Heater for manufacturing a crystal
#425Asymmetric thermal fields for excluding impurities in single crystal manufacturing device
#426Gallium arsenide single crystal and preparation method thereof
#427Open Czochralski furnace for single crystal growth