121238 ⎘
Single-crystal growth by pulling from a melt, e.g. Czochralski method; Controlling or regulating the thermal history of growing the ingot
INGOT PULLER APPARATUS INCLUDING COOLING JACKET WITH VARYING SURFACE EMISSIVITY FOR CONTROLLED INGOT COOLING PROFILES
#2INGOT PULLER APPARATUS INCLUDING MOVEABLE COOLING JACKET FOR CONTROLLED INGOT COOLING PROFILES
#3METHODS AND SYSTEMS FOR CONTROLLING CRYSTAL GROWTH
#4DUAL REFRIGERATION SYSTEMS FOR A MONO-CRYSTAL FURNACE AND METHODS FOR PULLING A MONO-CRYSTAL
#5METHODS OF PREPARING SILICON-ON-INSULATOR STRUCTURES USING EPITAXIAL WAFERS
#6AUTOMATIC DECISION-MAKING FOR PULLING
#7ASYMMETRIC THERMAL FIELDS FOR EXCLUDING IMPURITIES IN SINGLE CRYSTAL MANUFACTURING DEVICE
#8SINGLE-CRYSTAL SILICON CARBIDE WAFER, SINGLE-CRYSTAL SILICON CARBIDE INGOT, AND METHOD FOR PRODUCING SINGLE-CRYSTAL SILICON CARBIDE
#9METHOD, APPARATUS, SYSTEM AND COMPUTER STORAGE MEDIUM OF CONTROLLING CRYSTAL GROWTH
#10SYSTEMS AND METHODS FOR COOLING A CHUNK POLYCRYSTALLINE FEEDER
#11VACANCY-RICH SILICON FOR USE WITH A GALLIUM NITRIDE EPITAXIAL LAYER
#12SEMI-INSULATING GALLIUM ARSENIDE SINGLE CRYSTAL, PREPARATION METHOD AND GROWTH DEVICE THEREFOR
#13Indium phosphide substrate, semiconductor epitaxial wafer, method for producing indium phosphide single-crystal ingot and method for producing indium phosphide substrate
#14NITROGEN DOPED AND VACANCY DOMINATED SILICON INGOT AND THERMALLY TREATED WAFER FORMED THEREFROM HAVING RADIALLY UNIFORMLY DISTRIBUTED OXYGEN PRECIPITATION DENSITY AND SIZE
#15INGOT GROWING APPARATUS AND METHOD THEREOF
#16Radio frequency silicon on insulator structure with superior performance, stability, and manufacturability
#17Method and System for Controlling Temperature during Crystal Growth
#18Radio frequency silicon on insulator wafer platform with superior performance, stability, and manufacturability
#19Semiconductor wafer of monocrystalline silicon and method of producing the semiconductor wafer
#20CRYSTAL GROWTH METHOD AND CRYSTAL GROWTH APPARATUS
#21CRYSTAL PULLING SYSTEM AND METHODS FOR PRODUCING MONOCRYSTALLINE INGOTS WITH REDUCED EDGE BAND DEFECTS
#22Nitrogen doped and vacancy dominated silicon ingot and thermally treated wafer formed therefrom having radially uniformly distributed oxygen precipitation density and size
#23Method for manufacturing ingot block, method for manufacturing semiconductor wafer, and device for manufacturing ingot block
#24Method for validating the thermal history of a semiconductor ingot
#25Method for controlling convection pattern of silicon melt, method for producing silicon single crystals, and device for pulling silicon single crystals
#26Single crystal of silicon with <100> orientation, which is doped with n-type dopant, and method for producing such a single crystal
#27N-type silicon single crystal production method, n-type silicon single crystal ingot, silicon wafer, and epitaxial silicon wafer
#28Semiconductor wafer of monocrystalline silicon and method of producing the semiconductor wafer
#29Method and apparatus for manufacturing silicon single crystal
#30Temperature control device for single crystal ingot growth and temperature control method applied thereto
#31Single crystal silicon plate-shaped body
#32Crystal pulling systems and methods for producing monocrystalline ingots with reduced edge band defects
#33Nitrogen doped and vacancy dominated silicon ingot and thermally treated wafer formed therefrom having radially uniformly distributed oxygen precipitation density and size
#34Epitaxial silicon wafer
#35Method for producing a silicon single crystal doped with red phosphorous with reduced number of stacking faults and method for producing a silicon wafer using the same
#36SYSTEM FOR MEASURING MATERIAL THICKNESSES AT HIGH TEMPERATURES
#37C-PLANE SAPPHIRE METHOD AND APPARATUS
#38Crystal pulling system and method for inhibiting precipitate build-up in exhaust flow path
#39Crystal pulling systems and methods for producing monocrystalline ingots with reduced edge band defects
#40Method for growing a silicon single crystal while suppressing a generation of slip dislocations in a tail portion
#41Method for growing a silicon crystal substrate from a melt by directing a flow of molten silicon around a baffle structure
#42Manufacturing method of silicon monocrystal
#43Method for manufacturing silicon single crystal
#44Silicon single crystal pulling apparatus comprising a vertically movable supporting member holding the heater and shield
#45Silicon single crystal growing device and method of growing the same
#46Method for producing single crystal, and method for producing silicon wafer
#47Epitaxial silicon wafer and method for manufacturing same
#48Nitrogen doped and vacancy dominated silicon ingot and thermally treated wafer formed therefrom having radially uniformly distributed oxygen precipitation density and size
#49Crystal growing systems and methods including a passive heater
#50Cooling rate control apparatus and ingot growing apparatus including same
#51Method for growing silicon single crystal
#52Method for growing silicon carbide crystal
#53Method for growing silicon carbide crystal
#54Method for producing SiC single crystal
#55Silicon wafer and method for manufacturing the same
#56Silicon single crystal wafer, manufacturing method thereof and method of detecting defects
#57C-Plane Sapphire Method
#58Semiconductor structure and method
#59Method and an apparatus for growing a silicon single crystal from a melt
#60Silicon single crystal substrate and method of manufacturing the same
#61Thermal load leveling during silicon crystal growth from a melt using anisotropic materials
#62METHOD FOR FORMING BULK CRYSTALS, IN PARTICULAR MONOCRYSTALS OF FLUORIDES DOPED WITH RARE-EARTH IONS
#63METHOD OF MANUFACTURING SINGLE CRYSTAL INGOT AND WAFER MANUFACTURED BY THEREBY
#64SINGLE CRYSTAL COOLER AND SINGLE CRYSTAL GROWER INCLUDING THE SAME
#65Epitaxial wafer and production method thereof
#66Single-crystal manufacturing apparatus and single-crystal manufacturing method
#67Method and an apparatus for growing a silicon single crystal from a melt
#68SILICON SINGLE CRYSTAL AND METHOD FOR GROWING THEREOF, AND SILICON WAFER AND METHOD FOR MANUFACTURING THEREOF
#69SILICON WAFER AND METHOD FOR PRODUCING THE SAME
#70Silicon wafer and method for producing the same
#71Method for producing silicon wafer
#72Single crystal pulling apparatus
#73Method for predicting precipitation behavior of oxygen in silicon single crystal, method for determining production parameter of silicon single crystal, and storage medium for storing program for predicting precipitation behavior of oxygen in silicon single crystal
#74Apparatus for pulling single crystal by CZ method
#75Method and apparatus for manufacturing an ultra low defect semiconductor single crystalline ingot
#76Device and process for growing Ga-doped single silicon crystals suitable for making solar cells
#77Silicon single crystal producing method, annealed wafer, and method of producing annealed wafer
#78SINGLE CRYSTAL SILICON HAVING IMPROVED GATE OXIDE INTEGRITY
#79Apparatus for pulling single crystal by CZ method
#80Apparatus for pulling single crystal by CZ method
#81SILICON SINGLE CRYSTAL WAFER AND THE PRODUCTION METHOD
#82Method for manufacturing epitaxial wafer
#83Silicon wafer for semiconductor and manufacturing method thereof
#84C-plane sapphire method and apparatus
#85SILICON ON INSULATOR STRUCTURE WITH A SINGLE CRYSTAL CZ SILICON DEVICE LAYER HAVING A REGION WHICH IS FREE OF AGGLOMERATED INTRINSIC POINT DEFECTS
#86Silicon material with controlled agglomerated point defects and oxygen clusters induced by the lateral surface
#87Controlling agglomerated point defect and oxygen cluster formation induced by the lateral surface of a silicon single crystal during CZ growth
#88Apparatus for pulling single crystal by CZ method
#89Process for forming low defect density, ideal oxygen precipitating silicon
#90Nitrogen-doped silicon substantially free of oxidation induced stacking faults
#91Method and device for the production of a silicon single crystal, silicon single crystal, and silicon semiconductor wafers with determined defect distributions
#92Method for producing a single crystal
#93Silicon single crystal, and process for producing it
#94Method of simulation with respect to density distribution and size distribution of void defect within single crystal and oxygen precipitation nucleus within single crystal
#95Silicon wafer, its manufacturing method, and its manufacturing apparatus
#96Apparatus for pulling single crystal by CZ method
#97Vacancy-dominated, defect-free silicon
#98Silicon wafer for epitaxial growth, an epitaxial wafer, and a method for producing it
#99Low defect density silicon
#100Low defect density, ideal oxygen precipitating silicon
#101Process for preparing single crystal silicon having improved gate oxide integrity
#102Low defect density silicon having a vacancy-dominated core substantially free of oxidation induced stacking faults
#103Method for the production of low defect density silicon
#104Process for implementing oxygen into a silicon wafer having a region which is free of agglomerated intrinsic point defects
#105Asymmetric thermal fields for excluding impurities in single crystal manufacturing device